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1. 发明授权

US06942733B2 Fluid sealing system for a crystal puller 有权
标题翻译：晶体拉拔器的流体密封系统
公开(公告)号：US06942733B2
公开(公告)日：2005-09-13
申请号：US10465528
申请日：2003-06-19
申请人： Carl F. Cherko , Robert D. Cook
发明人： Carl F. Cherko , Robert D. Cook
IPC分类号： C30B15/00 , C30B35/00 , C30B15/20
CPC分类号： C30B15/00 , C30B35/00 , Y10T117/1032 , Y10T117/106 , Y10T117/1068 , Y10T117/1072 , Y10T117/1088
摘要： A fluid sealing system is provided for use in a crystal puller for growing a monocrystalline ingot. The crystal puller has a housing, a fluid flow path contained in the housing, and a fluid passage through a wall of the housing for passage of fluid. The fluid sealing system includes a fluid connector head adapted for connection to the fluid passage and to the fluid flow path to establish fluid communication between the fluid flow path and the outside of the housing. The head has a port adapted for fluid communication with the fluid passage through the wall of the housing. First and second seals around the port are adapted for sealing engagement with the head. A space is defined generally between the first and second seals, and a leak detector is arranged to monitor the space for detecting fluid leakage past at least one of the seals.
摘要翻译：提供流体密封系统用于晶体拉出器中用于生长单晶锭。晶体拉出器具有壳体，容纳在壳体中的流体流路，以及通过壳体的壁的流体通道，用于流体流通。流体密封系统包括适于连接到流体通道和流体流动路径的流体连接头，以在流体流动路径和壳体的外部之间建立流体连通。头部具有适于与通过壳体的壁的流体通道流体连通的端口。端口周围的第一和第二密封件适于与头部密封接合。通常在第一和第二密封件之间限定空间，并且设置泄漏检测器以监测用于检测通过至少一个密封件的流体泄漏的空间。

2. 发明授权

US06285011B1 Electrical resistance heater for crystal growing apparatus 失效
标题翻译：用于晶体生长装置的电阻加热器
公开(公告)号：US06285011B1
公开(公告)日：2001-09-04
申请号：US09416432
申请日：1999-10-12
申请人： Carl F. Cherko
发明人： Carl F. Cherko
IPC分类号： C30B1516
CPC分类号： C30B15/14 , Y10T117/1068
摘要： An electrical resistance heater for use in a crystal puller used for growing monocrystalline ingots according to the Czochralski method comprises a heating element sized and shaped for placement in the housing of the crystal puller for radiating heat within the housing. The heating element has heating segments arranged in a generally side-by-side relationship and electrically connected together. Each heating segment comprises a web and a flange projecting outwardly from the web in non-coplanar relationship therewith. This reduces the cross-sectional area of the heating segment for increasing the electrical resistance and power output of the heater while providing desired structural rigidity.
摘要翻译：用于根据切克劳斯基法生长单晶锭的晶体拉拔器中使用的电阻加热器包括加热元件，其尺寸和形状适于放置在用于在壳体内辐射热量的晶体拉出器的壳体中。加热元件具有以大体上并排的关系布置的电热段并电连接在一起。每个加热段包括幅材和从该幅材向外以非共面关系向外突出的凸缘。这降低了加热段的横截面面积，以增加加热器的电阻和功率输出，同时提供期望的结构刚度。

3. 发明授权

US06287382B1 Electrode assembly for electrical resistance heater used in crystal growing apparatus 失效
标题翻译：用于晶体生长设备的电阻加热器用电极组件
公开(公告)号：US06287382B1
公开(公告)日：2001-09-11
申请号：US09170789
申请日：1998-10-13
申请人： Carl F. Cherko
发明人： Carl F. Cherko
IPC分类号： C30B1510
CPC分类号： C30B15/14 , Y10T117/1032 , Y10T117/106 , Y10T117/1068
摘要： An electrode assembly for use with an electrical resistance heater mounted in a housing of a crystal puller used for growing monocrystalline silicon ingots according to the Czochralski method comprises an electrode having a first end in electrical connection with the heater within the housing and an outer end. The electrode extends through the crystal puller housing such that the outer end of the electrode is generally external of the housing. The portion of the electrode within the housing is generally solid in cross-section along the entire length of said portion and free of any internal cooling passages. An electrical conductor is electrically connected to a portion of the electrode extending externally of the housing for supplying electrical current to the electrode from a source of electrical current for conduction inward along the electrode to the heater located in the housing. The electrical conductor is also in thermally conductive engagement with the external portion of the electrode and has an internal passage extending therethrough for receiving cooling media in the conductor for use in extracting heat from the external portion of the electrode.
摘要翻译：用于安装在用于根据切克劳斯基法生长单晶硅锭的晶体拉出器壳体中的电阻加热器的电极组件包括电极，其具有与外壳内的加热器电连接的第一端和外端。电极延伸穿过晶体拉出器壳体，使得电极的外端通常在壳体的外部。壳体内的电极部分沿着所述部分的整个长度的横截面通常是固体的，并且没有任何内部冷却通道。电导体电连接到在壳体的外部延伸的电极的一部分，用于从电流源向电极提供电流，用于沿着电极向内传导到位于壳体中的加热器。电导体也与电极的外部部分导热接合，并且具有延伸通过其的内部通道，用于接收用于从电极的外部部分提取热量的导体中的冷却介质。

4. 发明授权

US5935328A Apparatus for use in crystal pulling 失效
标题翻译：用于晶体拉制的装置
公开(公告)号：US5935328A
公开(公告)日：1999-08-10
申请号：US978334
申请日：1997-11-25
申请人： Carl F. Cherko , Harold Korb , Richard G. Schrenker , Dick S. Williams
发明人： Carl F. Cherko , Harold Korb , Richard G. Schrenker , Dick S. Williams
IPC分类号： C30B15/30 , C30B29/06 , C30B35/00
CPC分类号： C30B15/30 , Y10S117/911 , Y10T117/1032 , Y10T117/1072
摘要： An apparatus for pulling a monocrystalline ingot from a semiconductor source material located within a growth chamber as the ingot is grown on a seed crystal according to the Czochralski method. The apparatus comprises a drum, a chuck constructed for holding the seed crystal and the ingot, and a cable having a first end connected to the drum, a second end connected to the chuck and a portion wound around the drum. The portion of the cable wound around the drum exerts a normal force on a circumferential surface of the drum corresponding to the tension in the cable. The drum and cable interact to produce a friction force resisting sliding movement of the cable relative to the drum in a direction lengthwise of the cable. The drum is capable of unwinding cable from the drum thereby to let out the cable and lower the chuck, and capable of winding the cable around the drum thereby to reel in the cable and draw the chuck upwardly. The chuck has a mass selected to exert a pre-tension on the cable prior to growing the ingot such that the increase in the friction on the portion of the cable wound around the drum as the cable is reeled in to pull the ingot from the source material is at least equal to the increase of the weight of the ingot as it grows on the seed crystal from the molten source material.
摘要翻译：根据Czochralski方法，在晶种上生长晶锭时，从位于生长室内的半导体源材料拉出单晶锭的装置。该装置包括一个滚筒，一个用于保持晶种和锭块的卡盘，以及一个连接到滚筒的第一端的电缆，连接到卡盘的第二端和缠绕在滚筒上的部分。卷绕在滚筒周围的电缆的部分对应于电缆中的张力在鼓的圆周表面上施加法向力。鼓和电缆相互作用以产生抵抗电缆相对于滚筒在电缆纵向方向上的滑动运动的摩擦力。滚筒能够从滚筒中退绕电缆，从而排出电缆并降低卡盘，并且能够将电缆卷绕在滚筒周围，从而卷绕在电缆中并向上拉动卡盘。卡盘具有选择的质量，以在生长锭之前在电缆上施加预张力，使得当电缆被卷入时绕线缠绕在电缆上的电缆的部分上的摩擦增加，以从源拉出锭材料至少等于锭从熔融源材料在晶种上生长时其重量的增加。

5. 发明授权

US4875693A Arbor assembly 失效
标题翻译：刀杆总成
公开(公告)号：US4875693A
公开(公告)日：1989-10-24
申请号：US238578
申请日：1988-08-31
申请人： Ronald R. Nowak , Carl F. Cherko
发明人： Ronald R. Nowak , Carl F. Cherko
IPC分类号： B23B31/02
CPC分类号： B23B31/02 , Y10T279/1045 , Y10T279/26 , Y10T279/33 , Y10T279/3493
摘要： Arbor assembly includes a fixed arbor section and a removable arbor section each including a pair of longitudinally spaced apart cylindrical pilot surfaces of different diameters spaced the same distance apart. Between the pilot surfaces on each arbor section is a guiding taper to aid in aligning the pilot surfaces so that such pilot surfaces freely engage each other during assembly. Longitudinally spaced locating tapers on the arbor sections are engageable by longitudinally spaced bearing surfaces on the workpiece for concentrically locating the workpiece between the arbor sections. A floating collet transmits a clamping force to the removable arbor section to urge the removable arbor section toward the fixed arbor section to clamp the workpiece between such arbor sections while the collet is in a free state without any flexing of the collet fingers. Upon release of the clamping force, the collet fingers are free to flex to permit the removable arbor section and workpiece to be assembled onto and removed from the fixed arbor section. A lost motion connection between the collet and fixed arbor section prevents removal of the collet during removal of the removable arbor section and workpiece from the fixed arbor section.
摘要翻译：刀轴组件包括固定心轴部分和可移除的心轴部分，每个心轴部分包括一对间隔开相同距离的不同直径的纵向间隔开的圆柱形导向表面。在每个心轴部分的引导表面之间是引导锥形，以有助于对齐引导表面，使得这样的引导表面在组装期间彼此自由接合。心轴部分上的纵向间隔的定位锥体可通过工件上的纵向间隔开的轴承表面接合，以将工件同心地定位在心轴部分之间。浮动夹头将夹紧力传递到可移除的心轴部分，以将可移除的心轴部分朝着固定心轴部分推动，以在夹头处于自由状态而将工件夹紧在这种心轴部分之间，而没有夹头的任何弯曲。在释放夹紧力时，夹头可自由弯曲以允许可移除的心轴部分和工件组装到固定心轴部分上并从其移除。在夹头和固定心轴部分之间的空动连接防止在从固定心轴部分移除可移除的心轴部分和工件时去除夹头。

6. 发明授权

US06238483B1 Apparatus for supporting a semiconductor ingot during growth 失效
标题翻译：用于在生长期间支撑半导体锭的装置
公开(公告)号：US06238483B1
公开(公告)日：2001-05-29
申请号：US09386979
申请日：1999-08-31
申请人： Carl F. Cherko
发明人： Carl F. Cherko
IPC分类号： C30B1532
CPC分类号： C30B15/36 , C30B15/32 , Y10S117/911 , Y10T117/1072
摘要： A device for supporting a semiconductor ingot during growth of the ingot. The device includes a chuck in which is mounted a seed. The seed includes an elongate rod having one end projecting from the chuck for growth of the ingot thereon. A latch pin secures the seed in the chuck in a removable manner. The chuck is suspended in a semiconductor furnace. The chuck, seed and latch pin and interengaged in a manner to reduce forming flaws in the ingot.
摘要翻译：一种用于在锭生长期间支撑半导体锭的装置。该装置包括卡盘，其中安装有种子。种子包括细长杆，其具有从夹头突出的一端，用于在其上生长锭。闩锁销以可拆卸的方式将种子固定在卡盘中。卡盘悬挂在半导体炉中。卡盘，种子和闩锁销，并以减少铸锭中的成形缺陷的方式相互接合。

7. 发明授权

US06203614B1 Cable assembly for crystal puller 失效
标题翻译：晶体拉杆电缆组件
公开(公告)号：US06203614B1
公开(公告)日：2001-03-20
申请号：US09322824
申请日：1999-05-28
申请人： Carl F. Cherko
发明人： Carl F. Cherko
IPC分类号： C30B1532
CPC分类号： C30B15/32 , C30B15/30 , Y10S117/911 , Y10T117/1032 , Y10T117/1072
摘要： A cable assembly for supporting a seed chuck in a crystal puller to grow monocrystalline ingots according to the Czochralski method comprises a cable adapted for generally vertical movement within the crystal puller relative to a source of molten material. A chuck support is connected to an end of the cable within the crystal puller and is configured for supporting the seed chuck. The chuck support is constructed of a refractory material having a high creep rupture strength and comprises an elongate shank having an upper end and a lower end and an enlarged end member at the lower end of the shank. A coupling is constructed of a malleable material and is deformable into engagement with the end of the cable and the upper end of the shank to join the chuck support to the cable. The elongate shank spaces the coupling from the enlarged end member of the chuck support so that during operation of the crystal puller the coupling is substantially further above the molten source material than the chuck support as the cable assembly pulls the growing ingot upward within the crystal puller.
摘要翻译：用于在晶体拉拔器中支撑种子卡盘以根据切克劳斯基法生长单晶锭的电缆组件包括适于在晶体拉出器内相对于熔融材料源大致垂直运动的电缆。卡盘支撑件连接到晶体拉出器内的电缆的端部并且被配置为支撑种子卡盘。卡盘支撑件由具有高蠕变断裂强度的耐火材料构成，并且包括具有上端和下端的细长柄和在柄的下端处的扩大的端部构件。联接器由可延展材料构成并且可变形成与电缆的端部和柄的上端接合以将卡盘支撑件连接到电缆。细长柄将联接器从卡盘支撑件的扩大的端部部件放置，使得在晶体拉出器的操作期间，当电缆组件在晶体拉拔器内向上拉动生长的锭子时，联接器比夹头支撑件基本上进一步高于熔融源材料的上方。

8. 发明授权

US06663709B2 Crystal puller and method for growing monocrystalline silicon ingots 有权
公开(公告)号：US06663709B2
公开(公告)日：2003-12-16
申请号：US09892002
申请日：2001-06-26
申请人： Zheng Lu , Mohsen Banan , Ying Tao , Lee Ferry , Carl F. Cherko
发明人： Zheng Lu , Mohsen Banan , Ying Tao , Lee Ferry , Carl F. Cherko
IPC分类号： C30B1514
CPC分类号： C30B29/06 , C30B15/14 , C30B15/203 , C30B15/206 , Y10T117/10 , Y10T117/1016 , Y10T117/1032 , Y10T117/1052 , Y10T117/1068 , Y10T117/1072
摘要： A crystal puller and method for growing monocrystalline silicon ingots includes first and second electrical resistance heaters in the crystal puller in longitudinal, closely spaced relationship with each other to radiate heat toward the ingot as the ingot is pulled upward within the housing. In one embodiment, the first heater is powered when the ingot is pulled upward to a first axial position above the surface of the molten silicon and the second heater is powered when the ingot is pulled upward to a second axial position above the first axial position. In another embodiment the first and second heaters are powered until the ingot is separated from the molten silicon and then the heating power output of the first and second heaters is reduced to substantially increase the cooling rate at which the ingot is cooled. An adapter mounting the heaters may also be provided for adapting existing crystal pullers to incorporate the heaters.

9. 发明授权

US06554898B2 Crystal puller for growing monocrystalline silicon ingots 有权
标题翻译：用于生长单晶硅锭的晶体拉拔器
公开(公告)号：US06554898B2
公开(公告)日：2003-04-29
申请号：US10254945
申请日：2002-09-25
申请人： Zheng Lu , Mohsen Banan , Ying Tao , Lee Ferry , Carl F. Cherko
发明人： Zheng Lu , Mohsen Banan , Ying Tao , Lee Ferry , Carl F. Cherko
IPC分类号： C30B3500
CPC分类号： C30B29/06 , C30B15/14 , C30B15/203 , C30B15/206 , Y10T117/10 , Y10T117/1016 , Y10T117/1032 , Y10T117/1052 , Y10T117/1068 , Y10T117/1072
摘要： A crystal puller for growing monocrystalline silicon ingots includes first and second electrical resistance heaters in the crystal puller in longitudinal, closely spaced relationship with each other to radiate heat toward the ingot as the ingot is pulled upward within the housing. An adapter mounting the heaters may also be provided for adapting existing crystal pullers to incorporate the heaters.
摘要翻译：用于生长的单晶硅锭的晶体拉拔器包括晶体拉拔器中的第一和第二电阻加热器，当晶锭在壳体内向上拉动时，它们彼此以纵向，紧密间隔的关系朝向锭辐射热量。还可以提供安装加热器的适配器，以适应现有的结晶器以并入加热器。

10. 发明授权

US4915569A Combination machine tool apparatus and pallet changing system 失效
标题翻译：组合机床设备和托盘更换系统
公开(公告)号：US4915569A
公开(公告)日：1990-04-10
申请号：US198517
申请日：1988-05-25
申请人： Carl F. Cherko
发明人： Carl F. Cherko
IPC分类号： B23Q3/155 , B23Q3/157 , B23Q7/14
CPC分类号： B23Q3/15526 , B23Q3/15706 , B23Q7/1431 , B23Q7/1442
摘要： Combination machine tool appartaus and pallet changing system includes a single pallet changer for changing both work pieces at a work piece machining station on the machine tool and tools at a tool storage station on the machine tool. The work piece machining station and tool storage station are offset approximately 45.degree. from each other as measured from the rotational axis of the pallet changer, which is provided with additional retractable rotational stops for locating the pallet changer at these additional 45.degree. indexing positions. Also, the tool storage station is located forwardly of the work piece machining station, thus allowing the pallet changer to be positioned closer to the front of the machine tool in the region of the work piece machining station without interfering with the indexing movement of the pallet changer between stations. A docking assembly used to support pallets for transfer onto and off the pallet changer includes a pair of parallel spaced-apart side wall structures having locating cones thereon for locating transport fixtures for the pallets thereon. Lift cylinders on the side wall structures lift the transport fixtures up to bring the pallets into coaxial alignment with an adjacent end of the pallet changer. A flow dividing and control circuit is used to control the flow of hydraulic fluid to the lift cylinders so that the pallets are maintained level during raising and lowering of the pallets regardless of the load distribution on the pallets. A lift table assembly including counterbalance springs to reduce the drive motor peak current draw when lifting a load is used to lift transport fixtures with pallets thereon onto and off the docking assembly.
摘要翻译：组合机床附件和托盘更换系统包括单个托盘交换器，用于在机床上的工件加工站和机床上的工具存储站上更换工件。从托盘更换器的旋转轴测量，工件加工台和刀具存储站彼此偏离约45°，托盘更换器的转动轴设有附加的可伸缩旋转挡块，用于在托盘更换器附近定位托盘更换器。此外，工具存储站位于工件加工站的前方，从而允许托盘更换器在工件加工站的区域内更靠近机床的前部定位，而不会干扰托盘的分度运动车站之间换车。用于支撑用于转移到托盘交换器和托板交换器上的托盘的对接组件包括一对平行间隔开的侧壁结构，其在其上具有定位锥，用于定位其上的托盘的运输固定装置。在侧壁结构上提升气缸提升运输工具，以使托盘与托盘交换器的相邻端同轴对齐。流量分配和控制电路用于控制到提升缸的液压流体的流动，使得在托盘升高和降低期间托盘保持水平，而不管托盘上的载荷分布如何。升降台组件包括平衡弹簧，用于减小驱动电机在提升负载时的峰值电流消耗，用于将其托盘上的托盘提升到对接组件上和离开对接组件的运输夹具。

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