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1. 发明申请

WO2010056057A3 DEPOSITION MATERIAL SUPPLY APPARATUS AND SUBSTRATE TREATMENT APPARATUS HAVING THE SAME 审中-公开
标题翻译：沉积物料供应装置及其基材处理装置
公开(公告)号：WO2010056057A3
公开(公告)日：2010-07-08
申请号：PCT/KR2009006671
申请日：2009-11-13
申请人： SNU PRECISION CO LTD , YOON HYUNG SEOK , CHOI SANG HWA , SON SUNG KWAN , KANG CHANG HO , KWON HYUN GOO , NAMGOONG SUNG TAE , HAN KYUNG ROK
发明人： YOON HYUNG SEOK , CHOI SANG HWA , SON SUNG KWAN , KANG CHANG HO , KWON HYUN GOO , NAMGOONG SUNG TAE , HAN KYUNG ROK
IPC分类号： C23C14/24 , H05B33/10
CPC分类号： C23C14/243 , C23C14/12 , C23C14/544
摘要： Provided are a deposition material supplying device and a substrate processing apparatus including the deposition material supplying device, which store a large amount of organic material without deteriorating the organic material and vaporize a desired amount of the organic material to a substrate. The deposition material supplying device includes: a pot in which a storage space filled with raw material communicates with a vaporization space where the raw material is vaporized; a transporting unit configured to continuously or periodically transport the raw material filling the storage space to the vaporization space; a heating unit disposed on an outside of the vaporization space of the pot to supply heat vaporizing the raw material; and a cooling unit disposed on an outside of the storage space to prevent the raw material stored in the storage space from being thermally deteriorated.
摘要翻译：提供了一种沉积材料供给装置和包括沉积材料供给装置的基板处理装置，其存储大量的有机材料而不使有机材料恶化并将所需量的有机材料蒸发到基板。沉积材料供给装置包括：容纳有原料的储存空间与原料蒸发的蒸发空间连通的罐; 传送单元，被配置为将填充所述存储空间的原料连续地或周期地运送到所述蒸发空间; 加热单元，设置在所述锅的蒸发空间的外侧，以供应蒸发所述原料的热量; 以及设置在所述存储空间的外侧的冷却单元，以防止存储在所述存储空间中的原料热劣化。

2. 发明申请

WO2010056057A2 DEPOSITION MATERIAL SUPPLY APPARATUS AND SUBSTRATE TREATMENT APPARATUS HAVING THE SAME 审中-公开
标题翻译：具有相同材料的沉积材料供应装置和基板处理装置
公开(公告)号：WO2010056057A2
公开(公告)日：2010-05-20
申请号：PCT/KR2009/006671
申请日：2009-11-13
申请人： SNU PRECISION CO., LTD. , YOON, Hyung Seok , CHOI, Sang Hwa , SON, Sung Kwan , KANG, Chang Ho , KWON, Hyun Goo , NAMGOONG, Sung Tae , HAN, Kyung Rok
发明人： YOON, Hyung Seok , CHOI, Sang Hwa , SON, Sung Kwan , KANG, Chang Ho , KWON, Hyun Goo , NAMGOONG, Sung Tae , HAN, Kyung Rok
IPC分类号： C23C14/24 , H05B33/10
CPC分类号： C23C14/243 , C23C14/12 , C23C14/544
摘要： Provided are a deposition material supplying device and a substrate processing apparatus including the deposition material supplying device, which store a large amount of organic material without deteriorating the organic material and vaporize a desired amount of the organic material to a substrate. The deposition material supplying device includes: a pot in which a storage space filled with raw material communicates with a vaporization space where the raw material is vaporized; a transporting unit configured to continuously or periodically transport the raw material filling the storage space to the vaporization space; a heating unit disposed on an outside of the vaporization space of the pot to supply heat vaporizing the raw material; and a cooling unit disposed on an outside of the storage space to prevent the raw material stored in the storage space from being thermally deteriorated.
摘要翻译：提供了一种沉积材料供应装置和包括沉积材料供应装置的基板处理装置，所述沉积材料供应装置存储大量有机材料而不使有机材料劣化并且将期望量的有机材料气化成衬底。所述沉积材料供应装置包括：罐，其中填充有原料的贮存空间与所述原料汽化的汽化空间连通; 运送单元，用于连续地或周期性地将填充所述储存空间的所述原料运送至所述蒸发空间; 加热单元，所述加热单元设置在所述罐的所述汽化空间的外部以供应使所述原料汽化的热量; 以及设置在储存空间外侧的冷却单元，以防止储存在储存空间中的原材料热劣化。

3. 发明公开

KR20120063700A An air adjustment valve for a pillow 审中-公开
标题翻译：用于枕头的空气调节阀
公开(公告)号：KR20120063700A
公开(公告)日：2012-06-18
申请号：KR20100124785
申请日：2010-12-08
申请人： CHOI SANG HWA
发明人： CHOI SANG HWA
IPC分类号： A47G9/10 , A47G9/00 , B30B15/00
CPC分类号： A47G9/10 , B28B11/008
摘要： PURPOSE: An air balance valve for a pillow is provided to facilitate air injection into the pillow or discharge air from the pillow. CONSTITUTION: An air balance valve for a pillow a valve body(46), a pin(48) for preventing air discharge, an O-ring(47), a spring(45), a pin(44) for air discharge, another O-ring(43), a push-button case(42), and a push-button(41). One side of the valve body is connected by inserting an air hose into a projected part, and the other side is connected by inserting an air pump into the projected part. The pin for preventing air discharge prevents air from discharging to outside the valve body. The O-ring inserted into the pin for preventing air discharge is combined in one side of the valve body with the pin for preventing air discharge in order to prevent air leaking. The spring gives elasticity to the push-button. The pin for air discharge has a protrusion in which a screw thread is formed.
摘要翻译：目的：提供一种用于枕头的空气平衡阀，以便于将空气注入枕头或从枕头排出空气。构成：用于枕头的空气平衡阀，阀体（46），用于防止空气排放的销（48），O形环（47），弹簧（45），用于排气的销（44），另一个 O形圈（43），按钮壳体（42）和按钮（41）。阀体的一侧通过将空气软管插入突出部分而连接，另一侧通过将空气泵插入突出部分而连接。用于防止空气排放的销防止空气排放到阀体外部。插入销中以防止空气排出的O形环在阀体的一侧与用于防止空气排放的销组合在一起以防止空气泄漏。弹簧给按钮弹性。用于排气的销具有形成螺纹的突起。

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