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    • 8. 发明申请
    • SAMPLE IMAGING WITH CHARGED PARTICLES
    • 带充电颗粒的样品成像
    • WO2009155275A1
    • 2009-12-23
    • PCT/US2009/047478
    • 2009-06-16
    • CARL ZEISS SMT. INC.MORGAN, JohnSCIPIONI, LawrenceADERHOLD, DirkRIEDESEL, ChristophKNIPPELMEYER, RainerMANTZ, UlrichSINGER, Wolfgang
    • MORGAN, JohnSCIPIONI, LawrenceADERHOLD, DirkRIEDESEL, ChristophKNIPPELMEYER, RainerMANTZ, UlrichSINGER, Wolfgang
    • G01N23/22H01J37/28H01J37/304
    • H01J37/28H01J37/3056H01J2237/31745
    • Disclosed herein are methods that include: (a) exposing a cross-sectional surface (5010) of a channel (5020) formed in a sample (5000) to particles from a charged particle source (5005) to cause a first plurality of particles (5035) to leave the cross-sectional surface (5010), and determining a position of a reference mark on the cross-sectional surface (5010) based on the first plurality of particles (5035); (b) registering a coordinate system of the charged particle source (5005) relative to the position of the reference mark; and (c) exposing the cross-sectional surface (5010) to additional particles from the charged particle source (5005) to cause a second plurality of particles to leave the cross-sectional surface, and forming multiple images of the cross-sectional surface (5010) based on the second plurality of particles. After formation of at least one of the multiple images, the coordinate system of the charged particle source (5005) is registered again relative to the position of the reference mark prior to forming the next one of the multiple images.
    • 本文公开的方法包括:(a)将形成在样品(5000)中的通道(5020)的横截面(5010)暴露于来自带电粒子源(5005)的颗粒以引起第一多个颗粒( 5035)以离开所述横截面(5010),并且基于所述第一多个颗粒(5035)确定所述横截面(5010)上的参考标记的位置; (b)相对于参考标记的位置登记带电粒子源(5005)的坐标系; 和(c)将所述横截面(5010)从所述带电粒子源(5005)暴露于另外的颗粒,以使第二多个颗粒离开所述横截面,并且形成所述横截面的多个图像( 5010)基于第二多个颗粒。 在形成多个图像中的至少一个图像之后,在形成多个图像中的下一个图像之前,相对于参考标记的位置再次登记带电粒子源(5005)的坐标系。