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1. 发明申请

US20210404977A1 SAMPLE HOLDER, SYSTEM AND METHOD 有权
公开(公告)号：US20210404977A1
公开(公告)日：2021-12-30
申请号：US17470661
申请日：2021-09-09
申请人： Carl Zeiss SMT Inc.
发明人： Thomas Anthony Case , Susan Candell , Naomi Kotwal , Allen Gu , Zheren Wu , Wayne Broderick
IPC分类号： G01N23/083 , G01N23/04
摘要： A sample holder for holding a sample during an X-ray imaging process includes a sample placement surface on which the sample is placed for positioning the sample in a depth direction of the sample holder. The sample holder also includes a first alignment portion for aligning the sample in a width direction of the sample holder, and a second alignment portion for aligning the sample in a height direction of the sample holder.

2. 发明授权

US12056894B2 Method for imaging a region of interest of a sample using a tomographic X-ray microscope, microscope, system and computer program 有权
公开(公告)号：US12056894B2
公开(公告)日：2024-08-06
申请号：US17470695
申请日：2021-09-09
申请人： Carl Zeiss SMT Inc.
发明人： Thomas Anthony Case , Susan Candell , Naomi Kotwal , Allen Gu , Lorenz Lechner , Wayne Broderick
IPC分类号： G06T7/73 , G21K7/00
CPC分类号： G06T7/74 , G21K7/00 , G06T2207/10056 , G06T2207/10116
摘要： A method images a region of interest of a sample using a tomographic X-ray microscope. The method includes registering a position of the sample. Registering includes: imaging a portion of the sample containing a feature using the microscope, identifying the feature by matching the feature to a pre-recorded feature, and determining a relative position of the feature in relation to the pre-recorded feature. The method also includes navigating a field of view of the microscope over the region of interest based on the registered position of the sample, and imaging the region of interest using the microscope.

3. 发明授权

US12007339B2 Sample holder, system and method 有权
公开(公告)号：US12007339B2
公开(公告)日：2024-06-11
申请号：US17470661
申请日：2021-09-09
申请人： Carl Zeiss SMT Inc.
发明人： Thomas Anthony Case , Susan Candell , Naomi Kotwal , Allen Gu , Zheren Wu , Wayne Broderick
IPC分类号： G01N23/04 , G01N23/083
CPC分类号： G01N23/04 , G01N23/083 , G01N2223/307 , G01N2223/309 , G01N2223/6113 , G01N2223/6462
摘要： A sample holder for holding a sample during an X-ray imaging process includes a sample placement surface on which the sample is placed for positioning the sample in a depth direction of the sample holder. The sample holder also includes a first alignment portion for aligning the sample in a width direction of the sample holder, and a second alignment portion for aligning the sample in a height direction of the sample holder.

4. 发明申请

US20200285976A1 METHOD AND DEVICES FOR DETERMINING METROLOGY SITES 审中-公开
公开(公告)号：US20200285976A1
公开(公告)日：2020-09-10
申请号：US16807581
申请日：2020-03-03
申请人： Carl Zeiss SMT GmbH , Carl Zeiss SMT Inc.
发明人： Abhilash Srikantha , Christian Wojek , Keumsil Lee , Thomas Korb , Jens Timo Neumann , Eugen Foca
IPC分类号： G06N5/04 , G06N20/00 , G06K9/00
摘要： Methods for determining metrology sites for products includes detecting corresponding objects in measurement data of one or more product samples, and aligning the detected objects are aligned. The methods also include analyzing the aligned objects, and determining metrology sites based on the analysis. Devices use such methods to determine metrology sites for products.

5. 发明授权

US11436506B2 Method and devices for determining metrology sites 有权
公开(公告)号：US11436506B2
公开(公告)日：2022-09-06
申请号：US16807581
申请日：2020-03-03
申请人： Carl Zeiss SMT GmbH , Carl Zeiss SMT Inc.
发明人： Abhilash Srikantha , Christian Wojek , Keumsil Lee , Thomas Korb , Jens Timo Neumann , Eugen Foca
IPC分类号： G06N20/00 , G06N5/04 , G06K9/00 , G06V10/82 , G06K9/62 , G01N23/06 , G01N23/046 , G01N23/22 , G01N21/65 , G06N3/04 , G06N3/08
摘要： Methods for determining metrology sites for products includes detecting corresponding objects in measurement data of one or more product samples, and aligning the detected objects are aligned. The methods also include analyzing the aligned objects, and determining metrology sites based on the analysis. Devices use such methods to determine metrology sites for products.

6. 发明申请

US20210407127A1 METHOD FOR IMAGING A REGION OF INTEREST OF A SAMPLE USING A TOMOGRAPHIC X-RAY MICROSCOPE, MICROSCOPE, SYSTEM AND COMPUTER PROGRAM 有权
公开(公告)号：US20210407127A1
公开(公告)日：2021-12-30
申请号：US17470695
申请日：2021-09-09
申请人： Carl Zeiss SMT Inc.
发明人： Thomas Anthony Case , Susan Candell , Naomi Kotwal , Allen Gu , Lorenz Lechner , Wayne Broderick
IPC分类号： G06T7/73 , G21K7/00
摘要： A method images a region of interest of a sample using a tomographic X-ray microscope. The method includes registering a position of the sample. Registering includes: imaging a portion of the sample containing a feature using the microscope, identifying the feature by matching the feature to a pre-recorded feature, and determining a relative position of the feature in relation to the pre-recorded feature. The method also includes navigating a field of view of the microscope over the region of interest based on the registered position of the sample, and imaging the region of interest using the microscope.

7. 发明申请

WO2009155272A2 CROSS-SECTION SYSTEMS AND METHODS 审中-公开
标题翻译：交叉系统和方法
公开(公告)号：WO2009155272A2
公开(公告)日：2009-12-23
申请号：PCT/US2009/047474
申请日：2009-06-16
申请人： CARL ZEISS SMT. INC. , SCIPIONI, Lawrence , KNIPPELMEYER, Rainer , RIEDESEL, Christoph , MORGAN, John , MANTZ, Ulrich , WAGEMANN, Ulrich
发明人： SCIPIONI, Lawrence , KNIPPELMEYER, Rainer , RIEDESEL, Christoph , MORGAN, John , MANTZ, Ulrich , WAGEMANN, Ulrich
IPC分类号： H01J37/30
CPC分类号： G01N1/286 , H01J2237/0807 , H01J2237/304 , H01J2237/31745 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： Cross-section systems and methods are disclosed. Methods can include imaging a cross-section of a first sample, and simultaneously preparing a cross-section of a second sample so that the cross-section of the second sample can be imaged. The first and second samples can be, for example, first and second semiconductor articles, respectively.
摘要翻译：公开了截面系统和方法。方法可以包括对第一样品的横截面进行成像，并且同时制备第二样品的横截面，使得可以对第二样品的横截面进行成像。第一和第二样品可以分别为例如第一和第二半导体制品。

8. 发明申请

WO2009155275A1 SAMPLE IMAGING WITH CHARGED PARTICLES 审中-公开
标题翻译：带充电颗粒的样品成像
公开(公告)号：WO2009155275A1
公开(公告)日：2009-12-23
申请号：PCT/US2009/047478
申请日：2009-06-16
申请人： CARL ZEISS SMT. INC. , MORGAN, John , SCIPIONI, Lawrence , ADERHOLD, Dirk , RIEDESEL, Christoph , KNIPPELMEYER, Rainer , MANTZ, Ulrich , SINGER, Wolfgang
发明人： MORGAN, John , SCIPIONI, Lawrence , ADERHOLD, Dirk , RIEDESEL, Christoph , KNIPPELMEYER, Rainer , MANTZ, Ulrich , SINGER, Wolfgang
IPC分类号： G01N23/22 , H01J37/28 , H01J37/304
CPC分类号： H01J37/28 , H01J37/3056 , H01J2237/31745
摘要： Disclosed herein are methods that include: (a) exposing a cross-sectional surface (5010) of a channel (5020) formed in a sample (5000) to particles from a charged particle source (5005) to cause a first plurality of particles (5035) to leave the cross-sectional surface (5010), and determining a position of a reference mark on the cross-sectional surface (5010) based on the first plurality of particles (5035); (b) registering a coordinate system of the charged particle source (5005) relative to the position of the reference mark; and (c) exposing the cross-sectional surface (5010) to additional particles from the charged particle source (5005) to cause a second plurality of particles to leave the cross-sectional surface, and forming multiple images of the cross-sectional surface (5010) based on the second plurality of particles. After formation of at least one of the multiple images, the coordinate system of the charged particle source (5005) is registered again relative to the position of the reference mark prior to forming the next one of the multiple images.
摘要翻译：本文公开的方法包括：（a）将形成在样品（5000）中的通道（5020）的横截面（5010）暴露于来自带电粒子源（5005）的颗粒以引起第一多个颗粒（ 5035）以离开所述横截面（5010），并且基于所述第一多个颗粒（5035）确定所述横截面（5010）上的参考标记的位置; （b）相对于参考标记的位置登记带电粒子源（5005）的坐标系; 和（c）将所述横截面（5010）从所述带电粒子源（5005）暴露于另外的颗粒，以使第二多个颗粒离开所述横截面，并且形成所述横截面的多个图像（ 5010）基于第二多个颗粒。在形成多个图像中的至少一个图像之后，在形成多个图像中的下一个图像之前，相对于参考标记的位置再次登记带电粒子源（5005）的坐标系。

9. 发明公开

EP3980970A1 CROSS SECTION IMAGING WITH IMPROVED 3D VOLUME IMAGE RECONSTRUCTION ACCURACY 审中-公开
公开(公告)号：EP3980970A1
公开(公告)日：2022-04-13
申请号：EP20732101.9
申请日：2020-05-25
申请人： Carl Zeiss SMT GmbH , Carl Zeiss SMT, Inc.
发明人： KORB, Thomas , NEUMANN, Jens Timo , FOCA, Eugen , BUXBAUM, Alex , AVISHAI, Amir , LEE, Keumsil , SCHULMEYER, Ingo , KLOCHKOV, Dmitry
IPC分类号： G06T7/33 , G06T7/00 , G01N23/2251 , H01J37/28

10. 发明公开

EP2263248A1 GAS FIELD ION SOURCE WITH COATED TIP 有权转让
标题翻译：用涂TIP气体场离子源
公开(公告)号：EP2263248A1
公开(公告)日：2010-12-22
申请号：EP09716494.1
申请日：2009-02-13
申请人： Carl Zeiss SMT, Inc.
发明人： NOTTE IV, John V.
IPC分类号： H01J37/08 , H01J27/26 , H01J37/065 , H01J37/26 , H01J37/30
CPC分类号： H01J49/168 , H01J27/26 , H01J37/065 , H01J37/08 , H01J37/28 , H01J2237/06341 , H01J2237/0807 , H01J2237/28
摘要： Coated tips, as well as related articles, systems and methods are disclosed.

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