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1. 发明授权

US07178397B2 Apparatus and method for driving MEMS structure and detecting motion of the driven MEMS structure using a single electrode 失效
标题翻译：用于驱动MEMS结构并使用单个电极检测所驱动的MEMS结构的运动的装置和方法
公开(公告)号：US07178397B2
公开(公告)日：2007-02-20
申请号：US11018830
申请日：2004-12-22
申请人： Sang-woo Lee , Jong-pal Kim , Byeung-leul Lee
发明人： Sang-woo Lee , Jong-pal Kim , Byeung-leul Lee
IPC分类号： G01P9/04 , G01P15/125
CPC分类号： G01C19/5776
摘要： Apparatus and a method for driving and detecting a motion of MEMS structure using single electrode. Apparatus includes a driving signal generation part driving MEMS structure; a motion detection part detecting motion of MEMS structure and outputting a motion current signal; an amplification part amplifying motion current signal and outputting a motion voltage signal; a gain adjustment part amplifying driving signal and outputting an amplified driving signal; a differential circuit part adding and subtracting with respect to signals output from the amplifying part and the gain adjustment part and outputting a motion signal without the driving signal; and a motion signal detection part selecting and outputting a motion signal of a predetermined frequency from the motion signal output from the differential circuit part. The variable capacitor is configured by a movable electrode plate integrally formed with MEMS structure and a fixed electrode plate disposed opposite to the movable electrode plate.
摘要翻译：使用单个电极驱动和检测MEMS结构的运动的装置和方法。装置包括驱动MEMS结构的驱动信号产生部分; 检测MEMS结构的运动并输出运动电流信号的运动检测部件; 放大部分放大运动电流信号并输出运动电压信号; 增益调整部分，放大驱动信号并输出放大的驱动信号; 差分电路部分相对于从放大部分和增益调整部分输出的信号相加和减去，并输出没有驱动信号的运动信号; 以及运动信号检测部分，从从差分电路部分输出的运动信号中选择并输出预定频率的运动信号。可变电容器由与MEMS结构一体形成的可动电极板和与可动电极板相对设置的固定电极板构成。

2. 发明授权

US08966977B2 Apparatus for driving gyroscope sensor and method thereof 有权
标题翻译：驱动陀螺传感器的装置及其方法
公开(公告)号：US08966977B2
公开(公告)日：2015-03-03
申请号：US13438504
申请日：2012-04-03
申请人： Chang Hyun Kim , Byeung Leul Lee
发明人： Chang Hyun Kim , Byeung Leul Lee
IPC分类号： G01C19/56 , G01C19/5776
CPC分类号： G01C19/5705 , G01C19/5776
摘要： Disclosed herein are an apparatus and a method for driving a gyroscope sensor. The apparatus for driving a gyroscope sensor includes: a detection module; a phase conversion module; an inversion module; a switch module selecting and outputting any one of the driving voltage and the inversion voltage for each axis; a driving module supplying driving voltage of a driving axis at the time of the driving and supplying inversion voltage at the time of stopping the driving; and a control unit passing the driving voltage of the driving axis by controlling the switch module according to a switching control signal at the time of the driving and passing the inversion voltage of each axis by controlling the switch module according to the switching control signal at the time of stopping the driving.
摘要翻译：这里公开了用于驱动陀螺仪传感器的装置和方法。用于驱动陀螺仪传感器的装置包括：检测模块; 相变模块; 反演模块; 开关模块选择并输出每个轴的驱动电压和反转电压中的任一个; 驱动模块，其在驱动时提供驱动轴的驱动电压，并在停止驱动时提供反转电压; 以及控制单元，通过根据驱动时的切换控制信号控制开关模块，并通过根据切换控制信号控制开关模块，使每个轴的反转电压通过驱动轴的驱动电压停车时间

3. 发明授权

US07714421B2 Small structure and method for fabricating the same 失效
标题翻译：小结构及其制造方法
公开(公告)号：US07714421B2
公开(公告)日：2010-05-11
申请号：US11192358
申请日：2005-07-29
申请人： Jong-pal Kim , Yong-chul Cho , Byeung-leul Lee , Sang-woo Lee , Joon-hyock Choi
发明人： Jong-pal Kim , Yong-chul Cho , Byeung-leul Lee , Sang-woo Lee , Joon-hyock Choi
IPC分类号： H01L23/02
CPC分类号： G01C19/5663 , G01P1/023 , G01P15/0802 , G02B26/0841 , H01L2224/48091 , H01L2224/48227 , H01L2924/01079 , H01L2924/00014
摘要： A small structure which uses bonding wires to prevent disturbance and provide support and a method of fabricating the same are provided. The small structure includes a floating body having a plurality of first contact pads, a base having a plurality of second contact pads, and a plurality of bonding wires electrically connecting the first and second contact pads and elastically supporting the floating body. The method of fabricating the small structure includes preparing a base, forming a sacrificial layer on the base, disposing a floating body on the sacrificial layer, connecting the base and the floating body with bonding wires, and removing the sacrificial layer. Thereby, fabrication costs of the small structure are reduced.
摘要翻译：提供了使用接合线来防止干扰并提供支撑的小结构及其制造方法。小结构包括具有多个第一接触焊盘的浮体，具有多个第二接触焊盘的基座，以及电连接第一和第二接触焊盘并弹性地支撑浮体的多个接合线。制造小结构的方法包括制备基底，在基底上形成牺牲层，在牺牲层上设置浮体，用接合线连接基底和浮体，以及去除牺牲层。因此，小结构的制造成本降低。

4. 发明申请

US20090167807A1 PRINT HEAD ERROR CHECKING APPARATUS AND METHOD 有权
标题翻译：打印头错误检查装置和方法
公开(公告)号：US20090167807A1
公开(公告)日：2009-07-02
申请号：US12060564
申请日：2008-04-01
申请人： Sang-il KIM , Byeung-leul Lee , Seog-soon Baek
发明人： Sang-il KIM , Byeung-leul Lee , Seog-soon Baek
IPC分类号： B41J29/393
CPC分类号： B41J29/393 , B41J2/0451 , B41J2/04581 , B41J2002/14354
摘要： Provided are a print head error checking apparatus and method in which the residual oscillation of a piezoelectric element corresponding to each nozzle of a print head is sensed, the sensed residual oscillation of each piezoelectric element and a predetermined residual oscillation of the piezoelectric element are compared to each other, and whether a print head normally operates is checked in consideration of the results of the comparisons.
摘要翻译：提供了一种打印头错误检查装置和方法，其中感测与打印头的每个喷嘴相对应的压电元件的残余振荡，将感测到的每个压电元件的残余振荡和压电元件的预定的残余振荡与考虑到比较的结果，检查打印头是否正常工作。

5. 发明申请

US20060023995A1 Vertical offset structure and method for fabricating the same 失效
标题翻译：垂直偏移结构及其制造方法
公开(公告)号：US20060023995A1
公开(公告)日：2006-02-02
申请号：US11183863
申请日：2005-07-19
申请人： Sang-woo Lee , Byeung-leul Lee , Jong-pal Kim , Joon-hyock Choi
发明人： Sang-woo Lee , Byeung-leul Lee , Jong-pal Kim , Joon-hyock Choi
IPC分类号： G02B6/26 , H01L21/30
CPC分类号： B81C1/00182 , B81B2201/0235 , B81C2203/0118 , G01P15/0802 , G01P15/125
摘要： A vertical offset structure and a method for fabricating the same. The vertical offset structure includes a substrate; a fixed electrode fixing portion formed on the substrate; a fixed electrode moving portion formed at a position away from an upper portion of the substrate by a predetermined distance; a spring portion for connecting the fixed electrode fixing portion and the fixed electrode moving portion to each other so that the fixed electrode moving portion moves into a direction substantially perpendicular to a plate surface of the substrate; a movable electrode located away from the upper portion of the substrate by a predetermined distance to have a predetermined interval horizontal to the fixed electrode moving portion; and a cap wafer bonded to a predetermined area of one of the fixed electrode moving portion and the movable electrode.
摘要翻译：垂直偏移结构及其制造方法。垂直偏移结构包括基板; 形成在所述基板上的固定电极固定部; 固定电极移动部，形成在远离所述基板上部预定距离的位置; 弹簧部分，用于将固定电极固定部分和固定电极移动部分彼此连接，使得固定电极移动部分移动到基本上垂直于基板的板表面的方向; 远离所述基板的上部预定距离的可动电极，以与所述固定电极移动部分水平的预定间隔; 以及将晶片接合到固定电极移动部和可动电极中的一个的规定区域。

6. 发明申请

US20060022322A1 Small structure and method for fabricating the same 失效
标题翻译：小结构及其制造方法
公开(公告)号：US20060022322A1
公开(公告)日：2006-02-02
申请号：US11192358
申请日：2005-07-29
申请人： Jong-pal Kim , Yong-chul Cho , Byeung-leul Lee , Sang-woo Lee , Joon-hyock Choi
发明人： Jong-pal Kim , Yong-chul Cho , Byeung-leul Lee , Sang-woo Lee , Joon-hyock Choi
IPC分类号： H01L23/02
CPC分类号： G01C19/5663 , G01P1/023 , G01P15/0802 , G02B26/0841 , H01L2224/48091 , H01L2224/48227 , H01L2924/01079 , H01L2924/00014
摘要： A small structure which uses bonding wires to prevent disturbance and provide support and a method of fabricating the same are provided. The small structure includes a floating body having a plurality of first contact pads, a base having a plurality of second contact pads, and a plurality of bonding wires electrically connecting the first and second contact pads and elastically supporting the floating body. The method of fabricating the small structure includes preparing a base, forming a sacrificial layer on the base, disposing a floating body on the sacrificial layer, connecting the base and the floating body with bonding wires, and removing the sacrificial layer. Thereby, fabrication costs of the small structure are reduced.
摘要翻译：提供了使用接合线来防止干扰并提供支撑的小结构及其制造方法。小结构包括具有多个第一接触焊盘的浮体，具有多个第二接触焊盘的基座，以及电连接第一和第二接触焊盘并弹性地支撑浮体的多个接合线。制造小结构的方法包括制备基底，在基底上形成牺牲层，在牺牲层上设置浮体，用接合线连接基底和浮体，以及去除牺牲层。因此，小结构的制造成本降低。

7. 发明授权

US06739189B2 Micro structure for vertical displacement detection and fabricating method thereof 失效
标题翻译：用于垂直位移检测的微结构及其制造方法
公开(公告)号：US06739189B2
公开(公告)日：2004-05-25
申请号：US10121666
申请日：2002-04-15
申请人： Byeung-leul Lee , Kyu-dong Jung , Sang-woo Lee , Yong-chul Cho
发明人： Byeung-leul Lee , Kyu-dong Jung , Sang-woo Lee , Yong-chul Cho
IPC分类号： G01P1500
CPC分类号： G01P15/18 , B81B2203/0136 , B81C1/0015 , B81C2201/0132 , G01C19/5755 , G01P15/125 , G01P2015/0814 , G01P2015/0831
摘要： Provided are a structure for detecting a vertical displacement and its manufacturing method. The structure for detecting a vertical displacement includes a body, an inertial mass floated over the body, a plurality of support beams extending from the inertial mass so as to suspend the inertial mass over the body, movable electrodes integrally formed with the inertial mass, and fixed electrodes floated over the body, each being positioned between the neighboring movable electrodes, wherein a vertical length of the movable electrode is different from a vertical length of the fixed electrode. Therefore, the structure and the electrodes can be simultaneously manufactured, thereby making the fabrication process simple. Also, it is possible to manufacture a three-axis accelerometer and a three-axis gyroscope on a single wafer by the same process, to be integrated as a six-axis inertial sensor.
摘要翻译：提供了用于检测垂直位移的结构及其制造方法。用于检测垂直位移的结构包括主体，悬挂在主体上的惯性质量，从惯性块延伸的多个支撑梁，以将惯性块悬挂在主体上，与惯性块一体形成的可动电极，以及固定电极浮在身体上，每个固定电极位于相邻的可移动电极之间，其中可移动电极的垂直长度不同于固定电极的垂直长度。因此，可以同时制造结构和电极，从而使制造工艺简单。另外，可以通过相同的工艺在单个晶片上制造三轴加速度计和三轴陀螺仪，作为六轴惯性传感器集成。

8. 发明授权

US07828406B2 Print head error checking apparatus and method 有权
标题翻译：打印头错误检查装置和方法
公开(公告)号：US07828406B2
公开(公告)日：2010-11-09
申请号：US12060564
申请日：2008-04-01
申请人： Sang-il Kim , Byeung-leul Lee , Seog-soon Baek
发明人： Sang-il Kim , Byeung-leul Lee , Seog-soon Baek
IPC分类号： B41J29/393
CPC分类号： B41J29/393 , B41J2/0451 , B41J2/04581 , B41J2002/14354
摘要： Provided are a print head error checking apparatus and method in which the residual oscillation of a piezoelectric element corresponding to each nozzle of a print head is sensed, the sensed residual oscillation of each piezoelectric element and a predetermined residual oscillation of the piezoelectric element are compared to each other, and whether a print head normally operates is checked in consideration of the results of the comparisons.
摘要翻译：提供了一种打印头错误检查装置和方法，其中感测与打印头的每个喷嘴相对应的压电元件的残余振荡，将感测到的每个压电元件的残余振荡和压电元件的预定的残余振荡与考虑到比较的结果，检查打印头是否正常工作。

9. 发明申请

US20080012449A1 Apparatus for driving actuator 审中-公开
标题翻译：驱动执行机构的装置
公开(公告)号：US20080012449A1
公开(公告)日：2008-01-17
申请号：US11717060
申请日：2007-03-13
申请人： Byeung-leul Lee
发明人： Byeung-leul Lee
IPC分类号： H02N1/00 , G01P15/125 , G01P1/04
CPC分类号： H02N1/008 , G01P15/097
摘要： An apparatus for driving an actuator includes a power unit, a sensing unit, and a first outer capacitor. The power unit provides first and second power in mutually reverse phases to first and second activating vibration plate, respectively. The sensing unit senses a displacement of a suspended vibration plate according to a result of sensing by a sensing plate. The first outer capacitor is disposed between a first power terminal connecting the power unit to the actuator and a sensing terminal connecting the sensing plate to the sensing unit.
摘要翻译：用于驱动致动器的装置包括动力单元，感测单元和第一外部电容器。功率单元分别以第一和第二激活振动板的相反相位提供第一和第二功率。感测单元根据感测板的感测结果来感测悬挂的振动板的位移。第一外部电容器设置在将功率单元连接到致动器的第一电源端子和将感测板连接到感测单元的感测端子之间。

10. 发明申请

US20080007811A1 Scanning apparatus and method 审中-公开
标题翻译：扫描仪和方法
公开(公告)号：US20080007811A1
公开(公告)日：2008-01-10
申请号：US11698079
申请日：2007-01-26
申请人： Byeung-leul Lee
发明人： Byeung-leul Lee
IPC分类号： G02B26/08
CPC分类号： G02B26/101 , G02B26/0841 , H04N9/3129
摘要： A scanning apparatus and a scanning method are provided. The scanning apparatus includes: a mirror unit for reflecting an incident light while rotating around a first direction of the scanning apparatus, as well as around a second direction of the scanning apparatus, and a driving unit for driving the mirror unit so that the mirror unit can rotate around the first and the second directions of the scanning apparatus
摘要翻译：提供扫描装置和扫描方法。扫描装置包括：反射镜单元，用于在围绕扫描装置的第一方向以及围绕扫描装置的第二方向旋转的同时反射入射光;以及驱动单元，用于驱动反射镜单元，使得反射镜单元可绕扫描装置的第一和第二方向旋转

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