会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 1. 发明公开
    • An apparatus, process and an array of nozzles for extruding cellulose fibers
    • Apparatur,Verfahren undDüsenanordnungzur Extrusion von Cellulosefasern
    • EP2108719A1
    • 2009-10-14
    • EP09005315.8
    • 2009-04-14
    • Brown, Douglas B.
    • Brown, Douglas B.Stark, Jeffrey D.Granato, Carmen A.Zacharias, Duane K.
    • D01D4/02D01D5/06D01D5/12D04H3/00
    • D01D4/025D01D5/14D01F2/00
    • An apparatus is disclosed for extruding cellulose fibers. The apparatus includes a first member, a second member and a third member all secured together. Multiple nozzles extend outward from the first member and each is designed to direct an aqueous cellulose solution therethrough. As the aqueous solution is extruded, it is accentuated and accelerated by pressurized gas flowing through the first member and the second member and out through first openings formed in the third member. The pressurized gas at least partially surrounds each nozzle and shelters the molten filaments extruded therefrom. The third member also has multiple second openings formed therethrough which are also connected to a source of pressurized gas. The pressurized gas streams exiting each of the second openings function to keep each of the molten filaments from contacting an adjacent molten filament.
    • 公开了用于挤出纤维素纤维的装置。 该装置包括一个固定在一起的第一构件,第二构件和第三构件。 多个喷嘴从第一构件向外延伸,并且每个喷嘴被设计成引导纤维素水溶液通过其中。 当水溶液挤出时,通过流过第一构件和第二构件的加压气体并且通过形成在第三构件中的第一开口从外部挤压出来。 加压气体至少部分地围绕每个喷嘴并遮住从其挤出的熔融长丝。 第三构件还具有穿过其形成的多个第二开口,其也连接到加压气体源。 离开每个第二开口的加压气流用于保持每个熔融长丝不接触相邻的熔融长丝。
    • 8. 发明申请
    • MEMS BASED CONTACT CONDUCTIVITY ELECTROSTATIC CHUCK
    • 基于MEMS的接触电导率静电卡盘
    • WO2005036637A1
    • 2005-04-21
    • PCT/US2004/033247
    • 2004-10-08
    • AXCELIS TECHNOLOGIES INC.KELLERMAN, PeterQIN, ShuALLEN, ErnieBROWN, Douglas
    • KELLERMAN, PeterQIN, ShuALLEN, ErnieBROWN, Douglas
    • H01L21/68
    • H01L21/6831Y10S438/964
    • The present invention is directed to a method for clamping and processing a semiconductor substrate using a semiconductor processing apparatus. According to one aspect of the present invention, a multi-polar electrostatic chuck and associated method is disclosed which provides heating or cooling of a substrate by thermal contact conduction between the electrostatic chuck and the substrate. The multi-polar electrostatic chuck comprises a semiconductor platform having a plurality of protrusions that define gaps therebetween, a surface roughness of the plurality of protrusions is less than 100 Angstroms. The electrostatic chuck further comprises a voltage control system operable to control a voltage applied to the electrostatic chuck to thus control a contact heat transfer coefficient of the electrostatic chuck, wherein the heat transfer coefficient of the electrostatic chuck is primarily a function of a contact pressure between the substrate and the plurality of protrusions.
    • 本发明涉及使用半导体处理装置夹持和处理半导体衬底的方法。 根据本发明的一个方面,公开了一种多极静电卡盘和相关方法,其通过静电卡盘和基板之间的热接触传导来提供加热或冷却基板。 多极静电卡盘包括具有限定间隙的多个突起的半导体平台,多个突起的表面粗糙度小于100埃。 静电卡盘还包括电压控制系统,其可操作以控制施加到静电卡盘的电压,从而控制静电卡盘的接触热传递系数,其中静电卡盘的传热系数主要是介于静电卡盘之间的接触压力的函数 基板和多个突起。