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    • 4. 发明申请
    • Strained Semiconductor Device and Method of Making the Same
    • 应变半导体器件及其制造方法
    • US20110278680A1
    • 2011-11-17
    • US13193692
    • 2011-07-29
    • Helmut Horst TewsAndre Schenk
    • Helmut Horst TewsAndre Schenk
    • H01L27/088H01L21/8234
    • H01L29/7848H01L21/823807H01L21/823814H01L21/823864H01L27/088H01L27/1203H01L29/66477H01L29/6653H01L29/66636H01L29/7834
    • In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.
    • 在形成半导体器件的方法中,在半导体本体(例如体硅衬底或SOI层)上形成栅电极。 栅电极与半导体本体电绝缘。 沿着栅电极的侧壁形成第一侧壁间隔物。 邻近第一侧壁间隔件形成牺牲侧壁间隔物。 牺牲侧壁间隔件和覆盖半导体本体的第一侧壁间隔件。 平坦化层形成在半导体本体上,使得平坦化层的一部分与牺牲侧壁间隔物相邻。 然后可以去除牺牲侧壁间隔物并在半导体本体中蚀刻凹陷。 所述凹部基本上在所述第一侧壁间隔物和所述平坦化层的所述部分之间对准。 然后可以在凹部中形成半导体材料(例如,SiGe或SiC)。
    • 5. 发明申请
    • Strained semiconductor device and method of making the same
    • 应变半导体器件及其制造方法
    • US20070057324A1
    • 2007-03-15
    • US11224825
    • 2005-09-13
    • Helmut TewsAndre Schenk
    • Helmut TewsAndre Schenk
    • H01L29/76H01L21/336
    • H01L29/7848H01L21/823807H01L21/823814H01L21/823864H01L27/088H01L27/1203H01L29/66477H01L29/6653H01L29/66636H01L29/7834
    • In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.
    • 在形成半导体器件的方法中,在半导体本体(例如体硅衬底或SOI层)上形成栅电极。 栅电极与半导体本体电绝缘。 沿着栅电极的侧壁形成第一侧壁间隔物。 邻近第一侧壁间隔件形成牺牲侧壁间隔物。 牺牲侧壁间隔件和覆盖半导体本体的第一侧壁间隔件。 平坦化层形成在半导体本体上,使得平坦化层的一部分与牺牲侧壁间隔物相邻。 然后可以去除牺牲侧壁间隔物并在半导体本体中蚀刻凹陷。 所述凹部基本上在所述第一侧壁间隔物和所述平坦化层的所述部分之间对准。 然后可以在凹部中形成半导体材料(例如,SiGe或SiC)。
    • 6. 发明授权
    • Strained semiconductor device and method of making the same
    • 应变半导体器件及其制造方法
    • US08003470B2
    • 2011-08-23
    • US11224825
    • 2005-09-13
    • Helmut Horst TewsAndre Schenk
    • Helmut Horst TewsAndre Schenk
    • H01L21/336
    • H01L29/7848H01L21/823807H01L21/823814H01L21/823864H01L27/088H01L27/1203H01L29/66477H01L29/6653H01L29/66636H01L29/7834
    • In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.
    • 在形成半导体器件的方法中,在半导体本体(例如体硅衬底或SOI层)上形成栅电极。 栅电极与半导体本体电绝缘。 沿着栅电极的侧壁形成第一侧壁间隔物。 邻近第一侧壁间隔件形成牺牲侧壁间隔物。 牺牲侧壁间隔件和覆盖半导体本体的第一侧壁间隔件。 平坦化层形成在半导体本体上,使得平坦化层的一部分与牺牲侧壁间隔物相邻。 然后可以去除牺牲侧壁间隔物并在半导体本体中蚀刻凹陷。 所述凹部基本上在所述第一侧壁间隔物和所述平坦化层的所述部分之间对准。 然后可以在凹部中形成半导体材料(例如,SiGe或SiC)。
    • 8. 发明授权
    • Strained semiconductor device and method of making the same
    • 应变半导体器件及其制造方法
    • US08624334B2
    • 2014-01-07
    • US13193692
    • 2011-07-29
    • Helmut Horst TewsAndre Schenk
    • Helmut Horst TewsAndre Schenk
    • H01L27/088
    • H01L29/7848H01L21/823807H01L21/823814H01L21/823864H01L27/088H01L27/1203H01L29/66477H01L29/6653H01L29/66636H01L29/7834
    • In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.
    • 在形成半导体器件的方法中,在半导体本体(例如体硅衬底或SOI层)上形成栅电极。 栅电极与半导体本体电绝缘。 沿着栅电极的侧壁形成第一侧壁间隔物。 邻近第一侧壁间隔件形成牺牲侧壁间隔物。 牺牲侧壁间隔件和覆盖半导体本体的第一侧壁间隔件。 平坦化层形成在半导体本体上,使得平坦化层的一部分与牺牲侧壁间隔物相邻。 然后可以去除牺牲侧壁间隔物并在半导体本体中蚀刻凹陷。 所述凹部基本上在所述第一侧壁间隔物和所述平坦化层的所述部分之间对准。 然后可以在凹部中形成半导体材料(例如,SiGe或SiC)。