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    • 1. 发明授权
    • Nitride semiconductor device
    • 氮化物半导体器件
    • US09082691B2
    • 2015-07-14
    • US13619560
    • 2012-09-14
    • Akira YoshiokaYasunobu SaitoHidetoshi FujimotoTetsuya OhnoWataru Saito
    • Akira YoshiokaYasunobu SaitoHidetoshi FujimotoTetsuya OhnoWataru Saito
    • H01L29/66H01L29/20H01L29/423H01L29/778
    • H01L29/2003H01L29/0619H01L29/1066H01L29/4236H01L29/42364H01L29/7787
    • A nitride semiconductor device includes a substrate, a first Inx1Ga1-x1-y1Aly1N layer, a second Inx2Ga1-x2-y2Aly2N layer, an interlayer insulating film, a source electrode, a drain electrode, a first gate electrode, a Schottky electrode, a second gate electrode, an interconnection layer. The second Inx2Ga1-x2-y2Aly2N layer is provided on a surface of the first Inx1Ga1-x1-y1Aly1N layer. The second Inx2Ga1-x2-y2Aly2N layer has a wider band gap than the first Inx1Ga1-x1-y1Aly1N layer. The first gate electrode is provided between the source electrode and the drain electrode on a surface of the second Inx2Ga1-x2-y2Aly2N layer. The Schottky electrode is provided on the second Inx2Ga1-x2-y2Aly2N layer between the first gate electrode and the drain electrode. The second gate electrode is provided on the second Inx2Ga1-x2-y2Aly2N layer between the Schottky electrode and the drain electrode. The interconnection layer electrically connects the source electrode, the Schottky electrode, and the second gate electrode.
    • 氮化物半导体器件包括衬底,第一In x1Ga1-x1-y1Aly1N层,第二Inx2Ga1-x2-y2Aly2N层,层间绝缘膜,源电极,漏电极,第一栅电极,肖特基电极,第二 栅电极,互连层。 第二Inx2Ga1-x2-y2Aly2N层设置在第一Inx1Ga1-x1-y1Aly1N层的表面上。 第二Inx2Ga1-x2-y2Aly2N层具有比第一Inx1Ga1-x1-y1Aly1N层更宽的带隙。 第一栅电极设置在第二Inx2Ga1-x2-y2Aly2N层的表面上的源电极和漏电极之间。 肖特基电极设置在第一栅电极和漏电极之间的第二Inx2Ga1-x2-y2Aly2N层上。 第二栅电极设置在肖特基电极和漏电极之间的第二Inx2Ga1-x2-y2Aly2N层上。 互连层电连接源电极,肖特基电极和第二栅电极。
    • 2. 发明授权
    • Nitride semiconductor device
    • 氮化物半导体器件
    • US08860090B2
    • 2014-10-14
    • US13420559
    • 2012-03-14
    • Wataru SaitoYasunobu SaitoHidetoshi FujimotoAkira YoshiokaTetsuya Ohno
    • Wataru SaitoYasunobu SaitoHidetoshi FujimotoAkira YoshiokaTetsuya Ohno
    • H01L29/778H01L29/10H01L29/423
    • H01L29/7786H01L29/1066H01L29/1075H01L29/1087H01L29/2003H01L29/4236H01L29/7783
    • A nitride semiconductor device includes a first semiconductor layer, a second semiconductor layer, a conductive substrate, a first electrode, a second electrode, and a control electrode. The second semiconductor layer is directly bonded to the first semiconductor layer. The conductive substrate is provided on and electrically connected to the first semiconductor layer. The first electrode and the second electrode are provided on and electrically connected to a surface of the second semiconductor layer on a side opposite to the first semiconductor layer. The control electrode is provided on the surface of the second semiconductor layer between the first electrode and the second electrode. The first electrode is electrically connected to a drain electrode of a MOSFET formed of Si. The control electrode is electrically connected to a source electrode of the MOSFET. The conductive substrate is electrically connected to a gate electrode of the MOSFET.
    • 氮化物半导体器件包括第一半导体层,第二半导体层,导电衬底,第一电极,第二电极和控制电极。 第二半导体层直接接合到第一半导体层。 导电基板设置在电连接到第一半导体层上。 第一电极和第二电极设置在与第一半导体层相对的一侧上与第二半导体层的表面电连接。 控制电极设置在第一电极和第二电极之间的第二半导体层的表面上。 第一电极电连接到由Si形成的MOSFET的漏电极。 控制电极与MOSFET的源电极电连接。 导电基板电连接到MOSFET的栅电极。
    • 3. 发明申请
    • NITRIDE SEMICONDUCTOR DEVICE
    • 氮化物半导体器件
    • US20130069117A1
    • 2013-03-21
    • US13619560
    • 2012-09-14
    • Akira YOSHIOKAYasunobu SaitoHidetoshi FujimotoTetsuya OhnoWataru Saito
    • Akira YOSHIOKAYasunobu SaitoHidetoshi FujimotoTetsuya OhnoWataru Saito
    • H01L29/778
    • H01L29/2003H01L29/0619H01L29/1066H01L29/4236H01L29/42364H01L29/7787
    • A nitride semiconductor device includes a substrate, a first Inx1Ga1-x1-y1Aly1N layer, a second Inx2Ga1-x2-y2Aly2N layer, an interlayer insulating film, a source electrode, a drain electrode, a first gate electrode, a Schottky electrode, a second gate electrode, an interconnection layer. The second Inx2Ga1-x2-y2Aly2N layer is provided on a surface of the first Inx1Ga1-x1-y1Aly1N layer. The second Inx2Ga1-x2-y2Aly2N layer has a wider band gap than the first Inx1Ga1-x1-y1Aly1N layer. The first gate electrode is provided between the source electrode and the drain electrode on a surface of the second Inx2Ga1-x2-y2Aly2N layer. The Schottky electrode is provided on the second Inx2Ga1-x2-y2Aly2N layer between the first gate electrode and the drain electrode. The second gate electrode is provided on the second Inx2Ga1-x2-y2Aly2N layer between the Schottky electrode and the drain electrode. The interconnection layer electrically connects the source electrode, the Schottky electrode, and the second gate electrode.
    • 氮化物半导体器件包括衬底,第一In x1Ga1-x1-y1Aly1N层,第二Inx2Ga1-x2-y2Aly2N层,层间绝缘膜,源电极,漏电极,第一栅电极,肖特基电极,第二 栅电极,互连层。 第二Inx2Ga1-x2-y2Aly2N层设置在第一Inx1Ga1-x1-y1Aly1N层的表面上。 第二Inx2Ga1-x2-y2Aly2N层具有比第一Inx1Ga1-x1-y1Aly1N层更宽的带隙。 第一栅电极设置在第二Inx2Ga1-x2-y2Aly2N层的表面上的源电极和漏电极之间。 肖特基电极设置在第一栅电极和漏电极之间的第二Inx2Ga1-x2-y2Aly2N层上。 第二栅电极设置在肖特基电极和漏电极之间的第二Inx2Ga1-x2-y2Aly2N层上。 互连层电连接源电极,肖特基电极和第二栅电极。
    • 7. 发明授权
    • Bipolar transistor with a GaAs substrate and a SiGe base or collector
    • 具有GaAs衬底和SiGe基极或集电极的双极晶体管
    • US07157749B2
    • 2007-01-02
    • US11053548
    • 2005-02-09
    • Hidetoshi FujimotoTetsuro NozuYoshitomo SagaeAkira Yoshioka
    • Hidetoshi FujimotoTetsuro NozuYoshitomo SagaeAkira Yoshioka
    • H01L31/0328H01L31/0336H01L31/072H01L31/109
    • H01L29/267H01L29/1004H01L29/7371
    • A bipolar transistor is provided which includes a GaAs substrate, an n-type collector region formed on the GaAs substrate, a p-type base region formed on the n-type collector region and having a p-type base layer of SiGe having a composition lattice-matched with the GaAs substrate, and an n-type emitter region formed on the p-type base region. A bipolar transistor may include a GaAs substrate, a collector region of a first conductivity type formed on the GaAs substrate and including a collector contact layer of the first conductivity type SiGe, which has a composition lattice-matched with the GaAs substrate, a base region of a second conductivity type formed on the collector region of the first conductivity type, and an emitter region of the first conductivity type formed on the base region of the second conductivity type.
    • 提供一种双极晶体管,其包括GaAs衬底,形成在GaAs衬底上的n型集电极区域,形成在n型集电极区域上并具有具有组成的SiGe的p型基极层的p型基极区域 与GaAs衬底晶格匹配,以及形成在p型基极区上的n型发射极区。 双极晶体管可以包括GaAs衬底,在GaAs衬底上形成的第一导电类型的集电极区域,并且包括具有与GaAs衬底晶格匹配的组成的第一导电类型SiGe的集电极接触层, 形成在第一导电类型的集电极区域上的第二导电类型的第一导电类型的发射极区域和形成在第二导电类型的基极区域上的第一导电类型的发射极区域。