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1. 发明授权

US06717227B2 MEMS devices and methods of manufacture 失效
公开(公告)号：US06717227B2
公开(公告)日：2004-04-06
申请号：US10079985
申请日：2002-02-21
申请人： Hirokazu Tamura , Matthew J. Neal , Akira Mugino , Alan L. Sidman
发明人： Hirokazu Tamura , Matthew J. Neal , Akira Mugino , Alan L. Sidman
IPC分类号： H01L2982
CPC分类号： H02K33/16 , B81B3/0051 , F04B19/006 , F04B43/043 , G02B6/3564 , G02B6/3566 , G02B6/3572 , G02B6/3584 , H01F7/06 , H01F7/08 , H01F2007/068 , H02N1/006
摘要： Microelectromechanical (MEMS) devices that use MEMS electromagnetic actuators to selectively generate displacement forces are disclosed herein. According to one exemplary embodiment disclosed herein, a MEMS device may include a substrate having a surface, an actuable element at least partially formed from the substrate, and an electromagnetic actuator disposed on the substrate for selectively applying a first force to the actuable element to displace the actuable element along a path. The actuable element may have a base and an arm coupled to the base. The base may include a portion comprised of a magnetic material. The electromagnetic actuator may comprise an electrically conductive coil, and the path of the actuable element may pass through a coil gap in the coil. The electromagnetic actuator may also comprise a magnetic core about which the electrically conductive coil may be wound.

2. 发明授权

US5321782A Directional coupler type optical function element 失效
标题翻译：定向耦合器型光功能元件
公开(公告)号：US5321782A
公开(公告)日：1994-06-14
申请号：US82055
申请日：1993-06-22
申请人： Akira Mugino , Hisaharu Yanagawa
发明人： Akira Mugino , Hisaharu Yanagawa
IPC分类号： G02F1/313 , G02B6/26
CPC分类号： G02F1/3132 , G02F2201/125
摘要： A directional coupler type optical function element with a high extinction ratio, in which a junction of a 2-input/2-output directional coupler or 1-input/2-output directional coupler, formed of a semiconductor or dielectric, is formed by successively optically connecting, from the input side to the output side, a front-stage partial junction, front-stage partial junction with electrode, central partial junction, rear-stage partial junction with electrode, and rear-stage partial junction, each having a predetermined length. The connection state at the front-stage partial junction and an incidence-side lead section optically connected thereto and the connection state at the rear-stage partial junction and an emergence-side lead section optically connected thereto cancel each other, thereby equivalently providing a symmetrical connection state and preventing the extinction ratio for a cross mode from lowering. Moreover, by forming the central partial junction with a proper length, the extinction ratio for a through mode can be kept high enough. Thus, high extinction ratio characteristics can be enjoyed for both of the cross and through modes.
摘要翻译：具有高消光比的定向耦合器型光功能元件，其中由半导体或电介质形成的2输入/ 2输出定向耦合器或1输入/ 2输出定向耦合器的接点依次形成从输入侧到输出侧，将前级部分结，与电极的前级部分结，中心部分结，与电极的后级部分结以及后级部分结光学地连接，每个具有预定的长度。前级部分接点处的连接状态和与其光学连接的入射侧引线部分和后级部分接合处的连接状态和与其光学连接的出射侧引线部分相互抵消，从而等效地提供对称连接状态，防止交叉模式的消光比降低。此外，通过形成具有适当长度的中心部分结，通过模式的消光比可以保持足够高。因此，对于交叉模式和通过模式都可以享受高消光比特性。

3. 发明授权

US06529535B2 Laser diode module 有权
公开(公告)号：US06529535B2
公开(公告)日：2003-03-04
申请号：US09772874
申请日：2001-01-31
申请人： Etsuji Katayama , Yuichiro Irie , Jun Miyokawa , Akira Mugino
发明人： Etsuji Katayama , Yuichiro Irie , Jun Miyokawa , Akira Mugino
IPC分类号： H01S500
CPC分类号： G02B6/4237 , G02B6/4203 , G02B6/424 , G02B6/4245 , G02B6/4269 , G02B6/4271 , G02B6/4286
摘要： There is provided a semiconductor laser device capable of increasing the optical output. The semiconductor laser module comprises a semiconductor laser device (1), an optical fiber (2) that receives light emitted from the semiconductor laser device (1) and a photo diode (3) that monitors optical output of the semiconductor laser device (1). The optical fiber (2) is a lensed fiber having a wedge-shaped lens on its tip and the photo diode (3) placed in the vicinity of the laser light receiving end (2a) of the semiconductor laser device (1) receives reflected light from a reflection surface (2a1) and monitors the optical output of the semiconductor laser device (1).

4. 发明授权

US06335944B1 Semiconductor laser module 有权
标题翻译：半导体激光模块
公开(公告)号：US06335944B1
公开(公告)日：2002-01-01
申请号：US09671445
申请日：2000-09-27
申请人： Akira Mugino , Takeo Shimizu
发明人： Akira Mugino , Takeo Shimizu
IPC分类号： H01S310
CPC分类号： H01S5/146
摘要： A semiconductor laser module of an external-cavity type in which a GaAs/AlGaAs-based semiconductor laser having ripples in the gain-wavelength characteristic thereof and an optical transmission medium including a Bragg grating are optically coupled by an optical coupling member. A gain peak wavelength (&lgr;(Ith)) for the case where the modularized semiconductor laser is driven with a threshold current (Ith) is set on the shorter-wavelength side of the reflection center wavelength (&lgr;BG) of the Bragg grating, a gain peak wavelength (&lgr;(Iop)) of the semiconductor laser for a maximum operating current (Iop) is set on the longer-wavelength side of the gain peak wavelength (&lgr;(Ith)), a pulling wavelength width (&lgr;PULL) and a de-tuning width (&lgr;detun) of the semiconductor laser module are set so that the de-tuning width (&lgr;detun) is smaller than the pulling wavelength width (&lgr;PULL), the resulting difference (=&lgr;PULL−&lgr;detun) is greater than the full width at half maximum of the reflection spectrum of the Bragg grating, and the gain peak wavelength (&lgr;(Ith)) is on the longer-wavelength side of a limit value (&lgr;LIMIT).
摘要翻译：其中具有其增益波长特性中具有波纹的GaAs / AlGaAs基半导体激光器和包括布拉格光栅的光传输介质的外腔型的半导体激光器模块通过光耦合部件光耦合。在模块化半导体激光器以阈值电流（Ith）驱动的情况下，增益峰值波长（lambd（Ith））设置在布拉格光栅的反射中心波长（lambdBG）的较短波长侧，增益最大工作电流（Iop）的半导体激光器的峰值波长（lambd（Iop））设置在增益峰值波长（lambd（Ith））的较长波长侧，拉伸波长宽度（lambdPULL）和de 半导体激光器模块的调谐宽度（lambddetun）被设置为使得去调谐宽度（兰普丁顿）小于拉伸波长宽度（lambdPULL），所得到的差异（= lambdPULL-lambddetun）大于布拉格光栅的反射光谱的最大值和增益峰值波长（lambd（Ith））在极限值（lambdLIMIT）的较长波长侧。

5. 发明授权

US06812055B2 MEMS devices and methods of manufacture 失效
标题翻译： MEMS器件和制造方法
公开(公告)号：US06812055B2
公开(公告)日：2004-11-02
申请号：US10739711
申请日：2003-12-18
申请人： Hirokazu Tamura , Matthew J. Neal , Akira Mugino , Alan L. Sidman
发明人： Hirokazu Tamura , Matthew J. Neal , Akira Mugino , Alan L. Sidman
IPC分类号： H01L2100
CPC分类号： H02K33/16 , B81B3/0051 , F04B19/006 , F04B43/043 , G02B6/3564 , G02B6/3566 , G02B6/3572 , G02B6/3584 , H01F7/06 , H01F7/08 , H01F2007/068 , H02N1/006
摘要： Microelectromechanical (MEMS) devices that use MEMS electromagnetic actuators to selectively generate displacement forces are disclosed herein. According to one exemplary embodiment disclosed herein, a MEMS device may include a substrate having a surface, an actuable element at least partially formed from the substrate, and an electromagnetic actuator disposed on the substrate for selectively applying a first force to the actuable element to displace the actuable element along a path. The actuable element may have a base and an arm coupled to the base. The base may include a portion comprised of a magnetic material. The electromagnetic actuator may comprise an electrically conductive coil, and the path of the actuable element may pass through a coil gap in the coil. The electromagnetic actuator may also comprise a magnetic core about which the electrically conductive coil may be wound.
摘要翻译：本文公开了使用MEMS电磁致动器来选择性地产生位移力的微机电（MEMS）装置。根据本文公开的一个示例性实施例，MEMS器件可以包括具有表面的基板，至少部分地由基板形成的可致动元件，以及设置在基板上的电磁致动器，用于选择性地向可致动元件施加第一力以移位沿着路径的可致动元件。致动元件可以具有联接到基座的基部和臂。底座可以包括由磁性材料构成的部分。电磁致动器可以包括导电线圈，并且可致动元件的路径可以通过线圈中的线圈间隙。电磁致动器还可以包括磁芯，导电线圈可围绕其缠绕。

6. 发明授权

US06343088B1 Semiconductor laser module 有权
标题翻译：半导体激光模块
公开(公告)号：US06343088B1
公开(公告)日：2002-01-29
申请号：US09381120
申请日：1999-09-15
申请人： Akira Mugino , Satoshi Koyanagi , Takeo Shimizu
发明人： Akira Mugino , Satoshi Koyanagi , Takeo Shimizu
IPC分类号： H01S500
CPC分类号： H01S5/028 , H01S5/0281 , H01S5/0287 , H01S5/141 , H01S5/146
摘要： A semiconductor laser module 1 comprising a semiconductor laser device 2 having an emitting surface 2a from which excited light is emitted and a reflecting surface 2b opposite to the emitting surface, and an optical feedback medium 3 for feeding most of optical power emitted from the emitting surface 2a of the semiconductor laser device 2 back to the semiconductor laser device 2 by coupling means 4 and emitting part of the optical power. The semiconductor laser device 2 has a low reflectance multilayer coating 2c formed on the emitting surface 2a and having a reflectance of 10−4 to 10%. The low reflectance multilayer coating 2c has a reflection spectrum in the form of a curve having a maximum value at the central wavelength of reflection and minimum values on both sides of the central wavelength of reflection.
摘要翻译：一种半导体激光器模块1，包括具有发射激发光的发射表面2a和与发射表面相对的反射表面2b的半导体激光器件2和用于馈送从发射表面发射的大部分光功率的光反馈介质3 半导体激光装置2的2a通过耦合装置4返回到半导体激光装置2并发射光功率的一部分。半导体激光装置2具有形成在发光面2a上的反射率为10 -4〜10％的低反射率多层膜2c。低反射率多层涂层2c具有在反射的中心波长处具有最大值的曲线形式的反射光谱，并且在中心反射波长的两侧具有最小值。

7. 发明授权

US5764825A Optical wavelength division multiplexer device 失效
标题翻译：光波分复用器
公开(公告)号：US5764825A
公开(公告)日：1998-06-09
申请号：US643294
申请日：1996-05-08
申请人： Akira Mugino , Shuichi Tamura , Takeo Shimizu
发明人： Akira Mugino , Shuichi Tamura , Takeo Shimizu
IPC分类号： G02B6/12 , G02B6/28 , H04J14/00
CPC分类号： G02B6/12007
摘要： The present invention proposes an optical wavelength division multiplexer device which has low through loss and low reflection loss, and also has high isolation. A filter member is made up from a filter base board upon which is formed a wavelength division filter 5, and is disposed so as to intersect an input and output optical waveguide 3 of rectilinear form part-way along it at an intersection angle .alpha.. When light which includes light of two different wavelengths .lambda..sub.1 and .lambda..sub.2 is incident through an incident light side of the input and output optical waveguide 3, the light of wavelength .lambda..sub.2 passes through the wavelength division filter 5 and is emitted through an emitted light side, while the light of wavelength .lambda..sub.1 is reflected by the wavelength division filter 5 in a direction separated from the input and output optical waveguide 3. A reflected light reception waveguide 1 is formed as rectilinear and is arranged in this reflection direction so as to receive the reflected light, with a gap being left between this reflected light reception waveguide 1 and the input and output optical waveguide 3, and the reflected light of wavelength .lambda..sub.1 is received into a reflected light reception end thereof and is emitted from a received light after end portion thereof. By providing this gap between the input and output optical waveguide 3 and the reflected light reception waveguide 1, increase of loss due to mutual action between the incident light and the reflected light is restrained.
摘要翻译：本发明提出了具有低通损耗和低反射损耗的光波分复用器装置，并且还具有高隔离度。滤波器构件由滤波器基板构成，在滤波器基板上形成波长分离滤波器5，并且以与交叉角α成一直线的直线形式的输入和输出光波导3相交。当包括两个不同波长λ1和λ2的光的光通过入射和输出光波导3的入射光侧入射时，波长λ2的光通过波长分割滤光器5并通过发射光发射而波长λ1的光在与输入和输出光波导3分离的方向上被波分复用滤光器5反射。反射光接收波导1形成为直线形并沿该反射方向布置，以便接收反射光，在反射光接收波导1和输入和输出光波导3之间留有间隙，波长λ1的反射光被接收到其反射光接收端并从接收光发射后端部分。通过在输入和输出光波导3和反射光接收波导1之间提供这种间隙，可以抑制由入射光和反射光之间的相互作用引起的损耗的增加。

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