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    • 8. 发明申请
    • Metal Evaporation Heating Element and Method for Evaporating Metal
    • 金属蒸发加热元件和蒸发金属的方法
    • US20080245305A1
    • 2008-10-09
    • US10579717
    • 2004-11-16
    • Kouki IkarashiAkira MiyaiShoujiro WatanabeJunichi SusakiKentaro Iwamoto
    • Kouki IkarashiAkira MiyaiShoujiro WatanabeJunichi SusakiKentaro Iwamoto
    • C23C16/00H05B3/02
    • C23C14/243H05B3/141
    • A metal evaporation boat having improved wettability to a molten metal and having a prolonged life, and a method for evaporating a metal employing it.A metal evaporation heating element characterized by having one or more grooves in a direction not in parallel with a current direction, on an upper surface of a ceramic sintered body comprising titanium diboride (TiB2) and/or zirconium diboride (ZrB2), and boron nitride (BN). It is preferred that the direction not in parallel with the current collection is from 20 to 160° C. to the current direction, that the ceramic sintered body has a cavity and the groove is formed on the bottom surface thereof, and that a predetermined pattern is drawn by a plurality of grooves on the upper surface of the ceramic sintered body and/or on the upper surface of the cavity. In addition, a method for evaporating a metal characterized by using the metal evaporation heating element and heating a metal in vacuum in a state where part or whole of the groove is in contact with the metal.
    • 一种具有改善的对熔融金属的润湿性并具有延长使用寿命的金属蒸发舟,以及一种使用该金属的蒸发金属的方法。 一种金属蒸发加热元件,其特征在于在与电流方向不平行的方向上具有一个或多个槽,在包含二硼化钛(TiB 2 N 2)和/或锆的陶瓷烧结体的上表面上 二硼化物(ZrB 2 N 2)和氮化硼(BN)。 优选的是,与电流收集不平行的方向为20至160℃至当前方向,陶瓷烧结体具有空腔并且在其底表面上形成凹槽,并且预定图案 由陶瓷烧结体的上表面上和/或在空腔的上表面上的多个凹槽拉出。 此外,一种蒸发金属的方法,其特征在于,在所述槽的一部分或整体与所述金属接触的状态下,使用所述金属蒸发加热元件并在真空中加热金属。