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1. 发明申请

WO2009093757A1 EXPOSURE APPARATUS, AND MANUFACTURING METHOD AND SUPPORTING METHOD THEREOF 审中-公开
标题翻译：曝光装置及其制造方法及其支持方法
公开(公告)号：WO2009093757A1
公开(公告)日：2009-07-30
申请号：PCT/JP2009/051513
申请日：2009-01-23
申请人： NIKON CORPORATION , ONO, Kazuya , SHIMODA, Toshimasa , ARAI, Yoichi , NISHIKAWA, Jin
发明人： ONO, Kazuya , SHIMODA, Toshimasa , ARAI, Yoichi , NISHIKAWA, Jin
IPC分类号： G03F7/20
CPC分类号： G03F7/709 , G03F7/70833
摘要： An exposure apparatus includes an illumination optical system (IL) that guides illumination light to a mask (M); a projection optical system (PL) that projects the pattern irradiated with the illumination light, onto a substrate (P); and a supporting device (32) that integrally suspendingly supports at least part of the illumination optical system (IL) and the projection optical system (PL), with a supporting member (30) having a flexible structure.
摘要翻译：曝光装置包括将照明光引导到掩模（M）的照明光学系统（IL）; 将照射光照射的图案投影到基板（P）上的投影光学系统（PL）; 以及支撑装置（32），其与具有柔性结构的支撑构件（30）一体地悬挂地支撑所述照明光学系统（IL）和所述投影光学系统（PL）的至少一部分。

2. 发明申请

WO2009075384A1 EXPOSURE APPARATUS, MANUFACTURING METHOD THEREOF, AND MAINTENANCE METHOD OF EXPOSURE APPARATUS 审中-公开
标题翻译：曝光装置及其制造方法和维护方法
公开(公告)号：WO2009075384A1
公开(公告)日：2009-06-18
申请号：PCT/JP2008/073022
申请日：2008-12-11
申请人： NIKON CORPORATION , ONO, Kazuya , SHIMODA, Toshimasa , ARAI, Yoichi
发明人： ONO, Kazuya , SHIMODA, Toshimasa , ARAI, Yoichi
IPC分类号： G03F7/20
CPC分类号： G03F7/70833 , G03F7/70808 , G03F7/70975
摘要： A projection optical system PL is used to project an image of a pattern. A manufacturing method of an exposure apparatus includes: a positioning step of positioning the projection optical system at a predetermined position; and a support step of supporting the positioned projection optical system. The positioning step includes a step of moving the projection optical system upward from below at the time of positioning.
摘要翻译：投影光学系统PL用于投影图案的图像。曝光装置的制造方法包括：将投影光学系统定位在预定位置的定位步骤; 以及支撑定位的投影光学系统的支撑步骤。定位步骤包括在定位时将投影光学系统从下方向上移动的步骤。

3. 发明公开

EP1089001A1 STATIC PRESSURE GAS BEARING, STAGE DEVICE USING IT, AND OPTICAL DEVICE USING IT 有权
标题翻译：静压这种轴承使用的设备和与该设备提供的光学设备
公开(公告)号：EP1089001A1
公开(公告)日：2001-04-04
申请号：EP99923978.3
申请日：1999-06-09
申请人： NIKON CORPORATION
发明人： TOKUSHIMA, Shinobu , OKUBO, Yukiharu , SHIMODA, Toshimasa
IPC分类号： F16C32/06 , H01J37/20
CPC分类号： H01L21/6838 , F16C29/025 , F16C32/06 , F16C32/0603 , F16C33/748 , F16C2300/62 , H01J37/20 , H01L21/68
摘要： A static pressure gas bearing, stage device, and optical device, in which a gas layer is provided between relatively movable two members (fixed part and movable part) and maintained at a specified distance; specifically, a static pressure gas bearing, a stage device, and an optical device capable of reducing the size of devices and easily laying out piping, wherein the static pressure gas bearing comprises a fixed part (4) and a movable part (3) installed movably along the fixed part (4) and a space between the fixed part (4) and the movable part (3) is maintained at a specified distance by the gas layer between the fixed part (4) and the movable part (3), the movable part (3) comprises bearing pads (3a) to feed gas into the gas layer between the movable part (3) and the fixed part (4) and discharge grooves (3c) to discharge gas fed by the bearing pads (3a), and the fixed part (4) comprises discharge ports (4a) provided at positions opposite to the discharge grooves (3c).
摘要翻译：静压气体轴承，载台装置，和光学器件，其中两个可相对移动部件（固定部和可动部）之间设置气体层保持在一个特定的距离; 具体地，一个静压气体轴承，载台装置，并且能够降低装置的尺寸和容易铺设管道，worin静压气体轴承的光学装置包括固定部分（4）和（3）安装的可动部沿着固定部分（4）和所述固定部分（4）和可动部件之间的空间中可移动地（3）由所述固定部件（4）和可动部件之间的气体层保持在一个规定的距离（3）可动部（3）包括轴承衬垫（3a）中，以进料气体进入可动部（3）和所述固定部分之间的气体层（4）和放电槽（3c）的排出通过轴承垫供给气体（3a）的在位置上设置相反的排出槽，并且所述固定部分（4）包括排放口（4a）中（图3c）。

4. 发明授权

EP1089001B1 STATIC PRESSURE GAS BEARING, STAGE DEVICE USING IT, AND OPTICAL DEVICE USING IT 有权
标题翻译：静压这种轴承使用的设备和与该设备提供的光学设备
公开(公告)号：EP1089001B1
公开(公告)日：2005-08-17
申请号：EP99923978.3
申请日：1999-06-09
申请人： NIKON CORPORATION
发明人： TOKUSHIMA, Shinobu , OKUBO, Yukiharu , SHIMODA, Toshimasa
IPC分类号： F16C32/06 , H01J37/20 , F16C29/02
CPC分类号： H01L21/6838 , F16C29/025 , F16C32/06 , F16C32/0603 , F16C33/748 , F16C2300/62 , H01J37/20 , H01L21/68
摘要： A static pressure gas bearing, stage device, and optical device, in which a gas layer is provided between relatively movable two members (fixed part and movable part) and maintained at a specified distance; specifically, a static pressure gas bearing, a stage device, and an optical device capable of reducing the size of devices and easily laying out piping, wherein the static pressure gas bearing comprises a fixed part (4) and a movable part (3) installed movably along the fixed part (4) and a space between the fixed part (4) and the movable part (3) is maintained at a specified distance by the gas layer between the fixed part (4) and the movable part (3), the movable part (3) comprises bearing pads (3a) to feed gas into the gas layer between the movable part (3) and the fixed part (4) and discharge grooves (3c) to discharge gas fed by the bearing pads (3a), and the fixed part (4) comprises discharge ports (4a) provided at positions opposite to the discharge grooves (3c).

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