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    • 2. 发明专利
    • PROBE CARD
    • JPH09218222A
    • 1997-08-19
    • JP2246396
    • 1996-02-08
    • ADVANTEST CORP
    • SEKINO TAKASHIMURAKAMI TORU
    • G01R1/073H01L21/66
    • PROBLEM TO BE SOLVED: To obtain a probe card exhibiting good transmission characteristics even at high frequency. SOLUTION: The probe card comprises probes 3a-3d, a printed wiring board 2, and an annular holding base 4. The holding base 4 is tapered, on the side for holding the probe, to recede from the printed wiring board 2 as approaching the inner circumference. An annular insulating protrusion 4b is formed in the vicinity of inner circumferential edge of the tapered surface 4a in order to support the probe. An earth plate 12 is formed on the tapered surface 4a. The probe 3a for high frequency signal has coaxial structure and the outer conductor 15 thereof is connected with the earth plate 12 through a conductive adhesive 16. The probe 3c for power supply and the probe 3d for ground are connected with the earth plate 12, respectively, through a microchip capacitor 21 and the conductive adhesive 16. Since the probes 3c, 3d are connected with the earth plate 12, effective length thereof is shortened and thereby the inductance thereof is decreased thus realizing a microstrip line structure.