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    • 5. 发明专利
    • Method of manufacturing semiconductor device
    • 制造半导体器件的方法
    • JP2009252820A
    • 2009-10-29
    • JP2008096028
    • 2008-04-02
    • Chubu Toshiba Engineering KkToshiba Corp中部東芝エンジニアリング株式会社株式会社東芝
    • HAYASHI HIDETOMOSONODA MASAHISAYAMAWAKI HIDEYUKI
    • H01L21/76H01L21/8247H01L27/08H01L27/115H01L29/788H01L29/792
    • PROBLEM TO BE SOLVED: To prevent an oxidant from oxidizing a part below a polysilicon film constituting a floating gate electrode as much as possible in oxidation processing after gate processing.
      SOLUTION: A method of manufacturing a semiconductor device includes the stages of: laminating and forming a gate insulating film 5, a polysilicon film 6 and a silicon nitride film 10 on a semiconductor substrate 1; forming a groove 4 for element isolation by dry etching; depositing a first oxide film 9 of high density by HDP-CVD to be buried in the groove 4 for element isolation, namely, depositing the first oxide film 9 to be buried in the groove 4 for element isolation of a memory cell portion such that an upper surface thereof is above an active region 2 of the semiconductor substrate 1 and a part over a trench 4 is not covered; burying a second oxide film 12 having lower density than the first oxide film in the groove 4 for element isolation; flattening the first and second oxide films using the silicon nitride film 10 as a stopper; and removing the second oxide film 12 buried in the groove 4 for element isolation of the memory cell portion.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:为了防止氧化剂在门处理后的氧化处理中尽可能多地氧化构成浮栅电极的多晶硅膜以下的部分。 解决方案:制造半导体器件的方法包括以下步骤:在半导体衬底1上层压和形成栅极绝缘膜5,多晶硅膜6和氮化硅膜10; 通过干蚀刻形成用于元件隔离的凹槽4; 通过HDP-CVD沉积高密度的第一氧化物膜9以埋入用于元件隔离的槽4中,即将第一氧化膜9沉积在凹槽4中以用于存储单元部分的元件隔离,使得 其上表面在半导体衬底1的有源区2之上,并且沟槽4上的部分不被覆盖; 在用于元件隔离的槽4中埋设具有比第一氧化物膜低的密度的第二氧化物膜12; 使用氮化硅膜10作为塞子来平坦化第一和第二氧化物膜; 并且去除埋在槽4中的用于存储单元部分的元件隔离的第二氧化物膜12。 版权所有(C)2010,JPO&INPIT
    • 7. 发明专利
    • Semiconductor storage device and manufacturing method thereof
    • 半导体存储器件及其制造方法
    • JP2005286155A
    • 2005-10-13
    • JP2004099062
    • 2004-03-30
    • Chubu Toshiba Engineering KkToshiba Corp中部東芝エンジニアリング株式会社株式会社東芝
    • OKAJIMA MUTSUMIHARA TORU
    • H01L21/8247H01L27/115H01L29/788H01L29/792
    • PROBLEM TO BE SOLVED: To provide a semiconductor storage device where the occurrence of erroneous writing is prevented by suppressing an interference effect between proximal cells in a columnar direction, and to provide a manufacturing method of the semiconductor storage device. SOLUTION: The semiconductor storage device includes a memory cell array in which memory cell transistors having laminated structures (2, 3, 8, 11, 12, 13 and 14) provided with a gate insulation film 2, floating gate electrodes (3 and 8) on this gate insulation film 2, an inter-electrode insulation film 11 on the floating gate electrodes (3 and 8), and control gate electrodes (12, 13, and 14) of the inter-electrode insulation film 11 are plurally arranged in the state of a matrix. The memory cell array is provided with an element separation insulation film 7 inserted between the floating gate electrodes (3 and 8) of the memory cell transistors adjacent in a row direction, and a columnar direction cell separation insulation film inserted between the floating gate electrodes (3 and 8) of the memory cell transistors adjacent in the columnar direction and having a specific inductive capacity smaller than 3.9. COPYRIGHT: (C)2006,JPO&NCIPI
    • 解决的问题:提供通过抑制柱状方向上的近端电池之间的干扰效应来防止发生错误写入的半导体存储装置,并提供半导体存储装置的制造方法。 解决方案:半导体存储装置包括存储单元阵列,其中具有层叠结构(2,3,8,11,12,13和14)的存储单元晶体管具有栅极绝缘膜2,浮栅电极(3 和8)在该栅极绝缘膜2上,浮栅电极(3和8)上的电极间绝缘膜11和电极间绝缘膜11的控制栅电极(12,13和14)是多个 排列成矩阵状态。 存储单元阵列设置有插入在与行方向相邻的存储单元晶体管的浮置栅电极(3和8)之间的元件隔离绝缘膜7和插入在浮栅电极之间的柱状方向单元隔离绝缘膜 3和8)的存储单元晶体管在柱状方向上相邻并且具有小于3.9的比容积。 版权所有(C)2006,JPO&NCIPI
    • 8. 发明专利
    • Patrol inspection data monitoring device and its monitoring method
    • PATROL检查数据监控设备及其监控方法
    • JP2004234554A
    • 2004-08-19
    • JP2003025038
    • 2003-01-31
    • Toshiba CorpToshiba Eng Co Ltd東芝エンジニアリング株式会社株式会社東芝
    • WAKABAYASHI YOSHIAKIKOTAKE HIKARI
    • G06Q50/06G05B23/02G06Q50/00H04B1/3822H04B1/40H04M11/00H04Q9/00G06F17/60
    • PROBLEM TO BE SOLVED: To provide a patrol inspection data monitoring device capable of realizing hands-free work on an inspector side and the batch management of check sheets by allowing a processor on a monitoring center side to have a function of inputting voice information on the inspector side to the check sheet provided on the monitoring center side as character string information. SOLUTION: In order to execute the inspection of equipment 11 corresponding to the inspection items of a check list by patrolling the equipment 11, transmit the inspection result to a general monitoring center 12 set at a place different from an inspection spot and manage the inspection result in the general monitoring center 12, the general monitoring center 12 and a portable terminal 41 which transmits the voice information (a) gathered to a head set 42 are connected through a communication network 45. The general monitoring center 12 is provided with a voice transmitter-receiver 21 for receiving the voice information (a), a processor 22 having a function of converting the received voice information (a) to the character string information b, and a display device 23 for displaying the character string information b. COPYRIGHT: (C)2004,JPO&NCIPI
    • 要解决的问题:提供一种巡视检查数据监视装置,其能够通过允许监视中心侧的处理器具有输入语音的功能,在检查者侧实现检查页面的免提工作和批量管理检查页面 检查员侧的信息作为字符串信息提供给监视中心侧的检查单。

      解决方案:为了通过巡视设备11对与检查单的检查项目相对应的设备11进行检查,将检查结果发送到设置在与检查点不同的地方的一般监控中心12并管理 一般监视中心12,一般监视中心12以及发送收集到头部组42的语音信息(a)的便携终端41的检查结果通过通信网络45连接。一般监视中心12设置有 用于接收语音信息(a)的语音发送器 - 接收器21,具有将接收的语音信息(a)转换为字符串信息b的功能的处理器22以及用于显示字符串信息b的显示装置23。 版权所有(C)2004,JPO&NCIPI

    • 9. 发明专利
    • Operation training equipment
    • 操作培训设备
    • JP2004219683A
    • 2004-08-05
    • JP2003006606
    • 2003-01-15
    • Toshiba CorpToshiba Eng Co Ltd東芝エンジニアリング株式会社株式会社東芝
    • NAKAJIMA KAZUTOO
    • G09B9/00G21C17/00
    • PROBLEM TO BE SOLVED: To provide an operation training equipment with which the state of an operation tool when operation training is being conducted is easily confirmed and positional state of the operation tool is easily switched into the initial state. SOLUTION: Status data of an operation tool 13 inputted from an operation tool state inputting device 14 and a prescribed initial state of the operation tool 13 are compared by an operation processor 11 to determine unequal coincidence. The operation tool 13 determined by the operation processor 11 as an unequal coincidence is informed to an informing device 17. And an operation tool switching device 19 switches, based on the direction of the operation processor 11, the operation tool 13 determined by the operation processor as an unequal coincidence into the prescribed initial state. Thus, switching into the initial state is carried out automatically instead of manually. COPYRIGHT: (C)2004,JPO&NCIPI
    • 要解决的问题:提供一种操作训练设备,其可以容易地确认操作训练时的操作工具的状态,并且操作工具的位置状态容易地切换到初始状态。

      解决方案:由操作工具状态输入装置14输入的操作工具13的状态数据和操作工具13的规定的初始状态由操作处理器11进行比较,以确定不相等的重合。 操作工具切换装置19根据操作处理器11的方向切换由操作处理器11确定的操作工具13,该操作工具13由操作处理器11确定为不相等的重合。 作为规定的初始状态的不平等的巧合。 因此,切换到初始状态是自动而不是手动执行的。 版权所有(C)2004,JPO&NCIPI