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    • 4. 发明专利
    • Inductively coupled plasma alignment apparatus and method
    • 电感耦合等离子体对准装置及方法
    • JP2007048742A
    • 2007-02-22
    • JP2006172345
    • 2006-06-22
    • Thermo Fisher Scientific Incサーモ フィッシャー サイエンティフィック インク
    • MARRIOTT PHILIPWHITECHURCH TIMOTHY ABRADFORD JONATHAN HSTRINGER JIM
    • H05H1/30G01N27/68
    • H05H1/30
    • PROBLEM TO BE SOLVED: To obtain an inductively coupled plasma (ICP) alignment apparatus that dispenses with the movement of a bulky and heavy RF electronic circuit, can suppress RF radiation, and has small adjustment width for impedance matching. SOLUTION: The ICP alignment apparatus comprises: a coil 10 for generating an ICP in a gas; a torch 20 passing at least partially through the coil 10; and an adjustment mechanism 80 for adjusting the position of the torch 20 to the coil 10 so that the arrangement of a torch axis 200 to a coil axis 100 changes. The adjustment mechanism 80 may adjust an angle and/or a distance between the axis of the coil 10 and the torch axis 200. The torch axis 200 may be held substantially parallel to the coil axis 100, while the adjustment mechanism adjusts a distance between the torch axis 200 and the coil axis 100. The coil 10 is preferably maintained substantially fixed in position with respect to a sampling aperture for sampling photons or ions originating from the inductively coupled plasma. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题为了获得省去笨重和重的RF电子电路的移动的电感耦合等离子体(ICP)对准装置,可以抑制RF辐射,并且具有小的调整宽度用于阻抗匹配。 解决方案:ICP对准装置包括:用于在气体中产生ICP的线圈10; 通过至少部分地通过线圈10的手电筒20; 以及调节机构80,用于将焊炬20的位置调整到线圈10,使得焊炬轴线200到线圈轴线100的配置发生变化。 调节机构80可以调节线圈10的轴线和割炬轴线200之间的角度和/或距离。焊枪轴线200可以被保持为基本上平行于线圈轴线100,而调节机构调节 焊枪轴线200和线圈轴线100.线圈10优选地相对于采样孔基本固定在适当位置,用于采样源自感应耦合等离子体的光子或离子。 版权所有(C)2007,JPO&INPIT