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    • 7. 发明申请
    • SEMICONDUCTOR COOLING APPARATUS
    • 半导体冷却装置
    • WO2013151606A1
    • 2013-10-10
    • PCT/US2013/021619
    • 2013-01-16
    • RAYTHEON COMPANY
    • KOONTZ, Christopher, R.CHU, CharlesFLORES, Gilbert, A.
    • H01L23/433H01L23/473
    • H01L23/4332H01L23/473H01L2224/16225H01L2224/32225H01L2224/73204H01L2924/15311H05K7/20254H05K7/20509H01L2924/00
    • In some embodiments, a semiconductor cooling apparatus includes a heat exchanger configured to thermally couple to a semiconductor element to transfer heat to coolant flowing through the heat exchanger. The apparatus also includes a flexible coolant supply manifold and a flexible coolant return manifold. The flexible coolant supply manifold and flexible coolant return manifold flex to conform to a height of the semiconductor element to apply a force to maintain the thermal coupling between the heat exchanger and the semiconductor element. The apparatus also includes a cold plate located under the semiconductor element, the cold plate configured to couple to the flexible coolant supply manifold via a first riser to provide coolant to the flexible coolant supply manifold and configured to couple to the flexible coolant return manifold via a second riser to exhaust returned coolant to the cold plate.
    • 在一些实施例中,半导体冷却装置包括被配置为热耦合到半导体元件以将热量传递到流过热交换器的冷却剂的热交换器。 该装置还包括柔性冷却剂供应歧管和柔性冷却剂回流歧管。 柔性冷却剂供应歧管和柔性冷却剂返回歧管弯曲以符合半导体元件的高度以施加力以保持热交换器和半导体元件之间的热耦合。 所述设备还包括位于所述半导体元件下方的冷板,所述冷板经配置以经由第一提升管耦合到所述柔性冷却剂供应歧管,以向所述柔性冷却剂供应歧管提供冷却剂,并经配置以经由 第二提升管将返回的冷却剂排放到冷板。