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1. 发明申请

WO2022192635A1 METHOD TO MEASURE LIGHT LOSS OF OPTICAL FILMS AND OPTICAL SUBSTRATES 审中-公开
公开(公告)号：WO2022192635A1
公开(公告)日：2022-09-15
申请号：PCT/US2022/019897
申请日：2022-03-11
申请人： APPLIED MATERIALS, INC.
发明人： FU, Jinxin , LUO, Kang , HAYEE, Fariah , GODET, Ludovic
IPC分类号： G01J1/38 , G01J1/58
摘要： A method of optical device metrology is provided. The method includes introducing a first type of light into a first optical device during a first time period, the first optical device including an optical substrate and an optical film disposed on the optical substrate, the first optical device further including a first surface, a second surface, and one or more sides connecting the first surface with the second surface; and measuring, during the first time period, a quantity of the first type of light transmitted from a plurality of locations on the first surface or the second surface during the first time period, wherein the measuring is performed by a detector coupled to one or more fiber heads positioned to collect the light transmitted from the plurality of locations.

2. 发明申请

WO2021025819A1 METHODS FOR DETECTION USING OPTICAL EMISSION SPECTROSCOPY 审中-公开
公开(公告)号：WO2021025819A1
公开(公告)日：2021-02-11
申请号：PCT/US2020/041172
申请日：2020-07-08
申请人： APPLIED MATERIALS, INC.
发明人： ZHU, Zuoming , HILKENE, Martin A. , SHERVEGAR, Avinash , SRIVASTAVA, Surendra Singh , MORADIAN, Ala , LAU, Shu-Kwan Danny , YE, Zhiyuan , CHOO, Enle , CHANG, Flora Fong-Song , MARATH SANKARATHODI, Bindusagar , LIU, Patricia M. , SANCHEZ, Errol Antonio C. , LIN, Jenny , MYO, Nyi O. , CHU, Schubert
IPC分类号： C30B25/16 , G01N15/02
摘要： One or more embodiments herein relate to methods for detection using optical emission spectroscopy. In these embodiments, an optical signal is delivered from the process chamber to an optical emission spectrometer (OES). The OES identifies emission peaks of photons, which corresponds to the optical intensity of radiation from the photons, to determine the concentrations of each of the precursor gases and reaction products. The OES sends input signals of the data results to a controller. The controller can adjust process variables within the process chamber in real time during deposition based on the comparison. In other embodiments, the controller can automatically trigger a process chamber clean based on a comparison of input signals of process chamber residues received before the deposition process and input signals of process chamber residues received after the deposition process.

3. 发明申请

WO2020106347A1 AUTOMATIC ESC BIAS COMPENSATION WHEN USING PULSED DC BIAS 审中-公开
公开(公告)号：WO2020106347A1
公开(公告)日：2020-05-28
申请号：PCT/US2019/048392
申请日：2019-08-27
申请人： APPLIED MATERIALS, INC.
发明人： ROGERS, James , CUI, Linying , DORF, Leonid
IPC分类号： H01J37/32 , H01L21/67 , H01L21/683 , H01L21/02 , C23C16/455
摘要： Embodiments of the present disclosure generally relate to a system used in semiconductor manufacturing. More specifically, embodiments of the present disclosure relate to a system for pulsed DC biasing and clamping a substrate. In one embodiment, the system includes a plasma chamber having an ESC for supporting a substrate. An electrode is embedded in the ESC and is electrically coupled to a biasing and clamping circuit. The biasing and clamping circuit includes at least a shaped DC pulse voltage source and a clamping network. The clamping network includes a DC voltage source and a diode, and a resistor. The shaped DC pulse voltage source and the clamping network are connected in parallel. The biasing and clamping network automatically maintains a substantially constant clamping voltage, which is a voltage drop across the electrode and the substrate when the substrate is biased with pulsed DC voltage, leading to improved clamping of the substrate.

4. 发明申请

WO2019152871A1 CORROSION RESISTANT SOL GEL COMPRISING A SOLUBLE THIO-LANTHANIDE SALT 审中-公开
公开(公告)号：WO2019152871A1
公开(公告)日：2019-08-08
申请号：PCT/US2019/016396
申请日：2019-02-01
申请人： THE BOEING COMPANY , COMMONWEALTH SCIENTIFIC AND INDUSTRIAL RESEARCH ORGANISATION
发明人： SCHUETTE, Waynie M. , KINLEN, Patrick J. , WHITE, Paul Andrew
IPC分类号： C09D5/08 , C09D7/60 , C09D183/06 , C08K5/00
CPC分类号： C09D5/086 , C08G77/16 , C08G77/18 , C08G77/58 , C08G2150/90 , C08K5/0091 , C08K5/057 , C08K5/09 , C08K5/378 , C09D5/024 , C09D5/082 , C09D7/60 , C09D183/06 , C09D183/14
摘要： Aspects described herein generally relate to a sol-gel that is the reaction product of an organosilane, a metal alkoxide, an acid, and a thio-lanthanide salt having a solubility of about 1 gram or greater per gram of sol-gel at 23°C. The thio-lanthanide salt includes a cation and a thio-ligand. The cation can be lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, lutetium, scandium, yttrium, cobalt, calcium, strontium, barium, and zirconium. In another aspect, a component, such as a vehicle component, includes a metal substrate and a sol-gel disposed on the metal substrate. Methods can include forming a sol-gel by mixing a metal alkoxide and an acid to form a first mixture; mixing with the first mixture an organosilane to form a second mixture; and mixing with the second mixture a lanthanide salt to form a third mixture.

5. 发明申请

WO2018017650A1 TWISTED KALEIDO 审中-公开
标题翻译：扭曲的KALEIDO
公开(公告)号：WO2018017650A1
公开(公告)日：2018-01-25
申请号：PCT/US2017/042731
申请日：2017-07-19
申请人： APPLIED MATERIALS, INC.
发明人： MARKLE, David , THOMAS, Timothy N.
IPC分类号： G03F7/20
CPC分类号： G03F7/70191 , G02B6/0005 , G02B6/04 , G02B6/102 , G03B21/008 , G03B21/208 , G03F7/70075
摘要： Implementations disclosed herein generally relate to a light pipe, or kaleido, for homogenizing light such that the light is uniform once the light exits the light pipe. By reflecting the light inside the light pipe, light uniformity is increased. In one implementation, a light pipe for an image projection apparatus is provided. The light pipe comprises an elongated rectangular body having a refractive index that provides total internal reflection within the elongated rectangular body. The elongated rectangular body has an input face for accepting light into the elongated rectangular body. The input face disposed substantially orthogonal to a longitudinal axis of the elongated rectangular body. The elongated rectangular body has an output face for releasing light from the elongated rectangular body. The output face is disposed substantially orthogonal to the longitudinal axis. The elongated rectangular body has a twist along the longitudinal axis.
摘要翻译：本文公开的实施方式总体上涉及用于使光均匀化以使得一旦光离开光导管时光均匀的光管或万花筒。通过在光管内部反射光，光均匀性增加。在一个实施方式中，提供了一种用于图像投影设备的光导管。光管包括具有在细长矩形主体内提供全内反射的折射率的细长矩形主体。细长矩形主体具有用于将光接收到细长矩形主体中的输入面。输入面基本上正交于细长矩形主体的纵向轴线设置。细长矩形主体具有用于释放细长矩形主体的光的输出面。输出面基本上垂直于纵向轴线设置。细长的矩形主体沿着纵向轴线扭曲。

6. 发明申请

WO2017095585A1 METHOD AND APPARATUS FOR SURFACE NANOPARTICLE MEASUREMENT 审中-公开
标题翻译：用于表面纳米颗粒测量的方法和设备
公开(公告)号：WO2017095585A1
公开(公告)日：2017-06-08
申请号：PCT/US2016/060238
申请日：2016-11-03
申请人： APPLIED MATERIALS, INC.
发明人： NOWAK, Thomas
IPC分类号： G01N15/00
CPC分类号： B08B5/02 , B08B15/04 , G01N1/2205 , G01N15/0618 , G01N2015/1062 , G01N2015/1486
摘要： Embodiments described herein generally relate to a particle collection apparatus and probe head for the collection of particles on process tool components. In one embodiment, a particle collection apparatus for counting particles present on a processing tool component is disclosed herein. The particle collection apparatus includes a particle collector. The particle collector is configured to scan a processing tool component and collect particles collected from the processing tool component. The particle collector includes a body and a probe head coupled to the body. The probe head has a probe body and a controlled spacing element. The controlled spacing element is coupled to the probe body and is configured to form a uniform manifold between the probe body and the processing tool component.
摘要翻译：这里描述的实施例总体上涉及用于在处理工具部件上收集颗粒的颗粒收集装置和探头。在一个实施例中，本文公开了用于计数处理工具部件上存在的颗粒的颗粒收集设备。颗粒收集装置包括颗粒收集器。粒子收集器被配置为扫描处理工具组件并收集从处理工具组件收集的粒子。颗粒收集器包括主体和耦合到主体的探头。探头具有探头体和受控间隔元件。受控的间隔元件联接到探针主体并且构造成在探针主体和处理工具部件之间形成均匀的歧管。

7. 发明申请

WO2017024221A1 DOWNHOLE COMMUNICATION VALVE AND METHOD OF USE 审中-公开
标题翻译：卧式通讯阀及其使用方法
公开(公告)号：WO2017024221A1
公开(公告)日：2017-02-09
申请号：PCT/US2016/045761
申请日：2016-08-05
申请人： COLT PETROLEUM TECHNOLOGY, LLC
发明人： NICHOLS, Mark B.
IPC分类号： E21B17/00 , E21B17/043 , E21B17/18 , E21B17/02
CPC分类号： E21B34/10
摘要： A downhole communication valve containing a piston and chamber which allows hyrdrostatic testing of a casing or tubing string multiple times before permanently opening communication ports to the exterior.
摘要翻译：一种含有活塞和腔室的井下连通阀，可在将通气口永久打开至外部之前多次进行套管或管柱串联静止试验。

8. 发明申请

WO2016209539A1 INTERCONNECT INTEGRATION FOR SIDEWALL PORE SEAL AND VIA CLEANLINESS 审中-公开
标题翻译：侧壁密封和通过清洁度的互连整合
公开(公告)号：WO2016209539A1
公开(公告)日：2016-12-29
申请号：PCT/US2016/034434
申请日：2016-05-26
申请人： APPLIED MATERIALS, INC.
发明人： REN, He , NAIK, Mehul B. , PADHI, Deenesh , DASH, Priyanka , KUMAR, Bhaskar , DEMOS, Alexandros T.
IPC分类号： H01L21/768 , H01L21/02
CPC分类号： H01L21/02126 , C23C16/045 , C23C16/36 , C23C16/482 , C23C16/56 , H01L21/02337 , H01L21/0234 , H01L21/02348 , H01L21/02359 , H01L21/3105 , H01L21/31058 , H01L21/76814 , H01L21/76825 , H01L21/76826 , H01L21/76831
摘要： A method for sealing porous low-k dielectric films is provided. The method comprises exposing a substrate to UV radiation and a first reactive gas, wherein the substrate has an open feature defined therein, the open feature defined by a porous low-k dielectric layer and a conductive material, wherein the porous low-k dielectric layer is a silicon and carbon containing material and selectively forming a pore sealing layer in the open feature on exposed surfaces of the porous low-k dielectric layer using UV assisted photochemical vapor deposition.
摘要翻译：提供了一种用于密封多孔低k电介质膜的方法。该方法包括将衬底暴露于UV辐射和第一反应气体，其中衬底具有限定在其中的开放特征，由多孔低k电介质层和导电材料限定的开放特征，其中多孔低k电介质层是含硅和碳的材料，并使用UV辅助光化学气相沉积在多孔低k电介质层的暴露表面上的开放特征中选择性地形成孔密封层。

9. 发明申请

WO2015199815A1 CONFIGURABLE PRESSURE DESIGN FOR MULTIZONE CHEMICAL MECHANICAL PLANARIZATION POLISHING HEAD 审中-公开
标题翻译：多机化学机械平面抛光头配置压力设计
公开(公告)号：WO2015199815A1
公开(公告)日：2015-12-30
申请号：PCT/US2015/029034
申请日：2015-05-04
申请人： APPLIED MATERIALS, INC.
发明人： OH, Jeonghoon , ZUNIGA, Steven, M. , NAGENGAST, Andrew , HSU, Samuel, Chu-Chiang , DANDAVATE, Gautam, Shashank
IPC分类号： H01L21/304
CPC分类号： B24B37/107 , B24B37/11 , B24B37/30
摘要： A polishing head for chemical mechanical planarization is provided. The polishing head includes a housing and a flexible membrane secured to the housing. At least a first, second, and third pressurizable chamber are disposed in the housing and each chamber contacts the flexible membrane. A first pressure delivery channel couples to the first chamber. A second pressure delivery channel couples to the third chamber. A first pressure feed line couples the first pressure delivery channel to the second chamber. A second pressure feed line couples the second pressure delivery channel to the second chamber. A first manually movable plug interfaces with the first pressure feed line to allow or block pressure from the first pressure delivery channel to the second chamber. A second manually movable plug interfaces with the second pressure feed line to allow or block pressure from the first pressure delivery channel to the second chamber.
摘要翻译：提供了用于化学机械平面化的抛光头。抛光头包括壳体和固定到壳体的柔性膜。至少第一，第二和第三可加压室设置在壳体中，并且每个室接触柔性膜。第一压力输送通道联接到第一室。第二压力输送通道连接到第三室。第一压力供给管线将第一压力输送通道连接到第二室。第二压力供给管线将第二压力输送通道连接到第二室。第一可手动插头与第一压力进料管线接合，以允许或阻止来自第一压力输送通道到第二室的压力。第二可手动插头与第二压力进料管线接合，以允许或阻止来自第一压力输送通道到第二室的压力。

10. 发明申请

WO2015069437A1 LOW TEMPERATURE RTP CONTROL USING IR CAMERA 审中-公开
标题翻译：使用红外摄像机的低温RTP控制
公开(公告)号：WO2015069437A1
公开(公告)日：2015-05-14
申请号：PCT/US2014/061095
申请日：2014-10-17
申请人： APPLIED MATERIALS, INC.
发明人： VELLORE, Kim , KANAWADE, Dinesh , TERTITSKI, Leonid M. , TAM, Norman L. , HUNTER, Aaron Muir
IPC分类号： H01L21/324 , H01L21/02
CPC分类号： G01J5/505 , G01J5/0007 , G01J5/0806 , G01J2005/0077 , G02B13/14 , H05B3/0047
摘要： Embodiments of the present invention generally relate to methods and apparatus for monitoring substrate temperature uniformity in a processing chamber, such as an RTP chamber. Substrate temperature is monitored using an infrared camera coupled to a probe having a wide-angle lens. The wide-angle lens is positioned within the probe and secured using a spring, and is capable of withstanding high temperature processing. The wide angle lens facilities viewing of substantially the entire surface of the substrate in a single image. The image of the substrate can be compared to a reference image to facilitate lamp adjustments, if necessary, to effect uniform heating of the substrate.
摘要翻译：本发明的实施例一般涉及用于监测诸如RTP室的处理室中的衬底温度均匀性的方法和装置。使用耦合到具有广角镜头的探针的红外摄像机来监测衬底温度。广角镜头位于探头内并用弹簧固定，能承受高温处理。广角镜头设备在单个图像中基本上观察基底的整个表面。如果需要，可以将衬底的图像与参考图像进行比较，以促进灯调节，以实现衬底的均匀加热。

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