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    • 3. 发明专利
    • SPATIALLY-MODULATED DETECTOR FOR RADIATION
    • JPH1164100A
    • 1999-03-05
    • JP15981698
    • 1998-04-30
    • INTERUNIV MICRO ELECTRON CT VZUNIV BRUXELLES
    • KUIJK MAARTENHEREMANS PAULCOPPEE DANIELVOUNCKX ROGER
    • G01J1/02H01L27/144
    • PROBLEM TO BE SOLVED: To detect single-channel radiation input light at high speed by modulating a radiation light absorbed into a semiconductor substrate spatially to generate a plurality of signals and then detecting the output signal from a detector by comparing the temporal behavior thereof. SOLUTION: Delay detector regions 37-39, shielded with opaque elements (shadow mask) 29-31 and light-transmitting intermediate or direct detector regions 25-27, are formed on a semiconductor substrate of CMOS, or the like. An incident light to the substrate is shielded partially by the opaque elements 29-31 and the density of light-generating carriers is modulated depending on the shadow mask 20-31, such that it is maximized at a time t0 and decreased diffusing with a time t1 -t4 . Consequently, an optical pulse is maximized immediately before time t0 , and the current passing through the intermediate detector regions 25-27 is proportional to the intensity of the optical pulse. On the other hand, the current passing through the regions 37-39 responds to the optical pulse with a potentially and a lag. Consequently, the pulse width of the differential signal becomes extremely shortened, and the radiation input light can be detected at a high speed.