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1. 发明授权

US4870030A Remote plasma enhanced CVD method for growing an epitaxial semiconductor layer 失效
标题翻译：用于生长外延半导体层的远程等离子体增强CVD方法
公开(公告)号：US4870030A
公开(公告)日：1989-09-26
申请号：US100477
申请日：1987-09-24
申请人： Robert J. Markunas , Robert Hendry , Ronald A. Rudder
发明人： Robert J. Markunas , Robert Hendry , Ronald A. Rudder
IPC分类号： C23C16/22 , C23C16/452 , C30B25/10
CPC分类号： C30B25/105 , C23C16/22 , C23C16/452 , C30B29/06 , Y10S148/006 , Y10S148/025 , Y10S148/045
摘要： A remote plasma enhanced CVD apparatus and method for growing semiconductor layers on a substrate, wherein an intermediate feed gas, which does not itself contain constituent elements to be deposited, is first activated in an activation region to produce plural reactive species of the feed gas. These reactive species are then spatially filtered to remove selected of the reactive species, leaving only other, typically metastable, species which are then mixed with a carrier gas including constituent elements to be deposited on the substrate. During this mixing, the selected spatially filtered reactive species of the feed gas chemically interacts, i.e., partially dissociates and activates, in the gas phase, the carrier gas, with the process variables being selected so that there is no back-diffusion of gases or reactive species into the feed gas activation region. The dissociated and activated carrier gas along with the surviving reactive species of the feed gas then flows to the substrate. At the substrate, the surviving reactive species of the feed gas further dissociate the carrier gas and order the activated carrier gas species on the substrate whereby the desired epitaxial semiconductor layer is grown on the substrate.
摘要翻译：用于在衬底上生长半导体层的远程等离子体增强CVD装置和方法，其中首先在活化区域中激活不本身含有待沉积的构成元素的中间进料气体，以产生多种进料气体的反应性物质。然后将这些反应性物质进行空间过滤以除去所选择的反应性物质，仅留下其它通常为亚稳态的物质，然后将其与包含待沉积在基底上的构成元素的载气混合。在该混合期间，所选择的空间过滤的进料气体的反应性物质在气相中化学相互作用，即在气相中部分解离并活化载气，其中选择工艺变量，使得不存在气体的反向扩散或反应性物质进入进料气体活化区域。然后将解离和活化的载气与进料气体的存活反应性物质一起流入基材。在衬底上，进料气体的存活的反应性物质进一步离解载气并且将活化的载气物质排列在衬底上，从而在衬底上生长期望的外延半导体层。

2. 发明申请

US20140129198A1 DEVELOPMENT OF WATERSHED FLOW AND ALLOCATION MODEL 审中-公开
标题翻译：水流和分配模型的开发
公开(公告)号：US20140129198A1
公开(公告)日：2014-05-08
申请号：US14075883
申请日：2013-11-08
申请人： Research Triangle Institute, Inc.
发明人： Michele Cutrofello Eddy , James Illiad Rineer , Brandon Louis Bergenroth , Robert Madison Dykes , Fekadu Game Moreda
IPC分类号： G06F17/50
CPC分类号： G06F17/5009
摘要： Computer-implemented methods and non-transitory computer readable storage media facilitate calculating outflow of water from a selected catchment. A computer-implemented method calculates an outflow of water from a selected catchment is calculated. An identification of a selected catchment from a plurality of catchments within a geographical area is received from a user workstation. A database of multilayered data is accessed, where the data includes hydrological data, geophysical data, and meteorological data for each of the plurality of catchments within the geographical area. From the multilayered data, one or more additional catchments are automatically identified within the plurality of catchments, to identify a group of navigated catchments that drain into the selected catchment. For a given time period, a model is generated determining an outflow of water from the selected catchment and the group of navigated catchments.
摘要翻译：计算机实现的方法和非暂时的计算机可读存储介质便于计算来自所选流域的水的流出。计算机实现的方法计算从所选流域的水流出。从用户工作站接收来自地理区域内的多个集水区的选定流域的识别。访问多层数据的数据库，其中数据包括地理区域内的多个集水区中的每一个的水文数据，地球物理数据和气象数据。从多层数据中，在多个集水区内自动识别一个或多个附加集水区，以识别排入所选集水区的一组导航集水区。在给定的时间段内，产生一个模型来确定来自所选集水区和一组导航集水区的水流出。

3. 发明授权

US5180435A Remote plasma enhanced CVD method and apparatus for growing an epitaxial semiconductor layer 失效
标题翻译：用于生长外延半导体层的远程等离子体增强CVD方法和装置
公开(公告)号：US5180435A
公开(公告)日：1993-01-19
申请号：US604245
申请日：1990-10-29
申请人： Robert J. Markunas , Robert Hendry , Ronald A. Rudder
发明人： Robert J. Markunas , Robert Hendry , Ronald A. Rudder
IPC分类号： C23C16/22 , C23C16/452 , C30B25/10
CPC分类号： C30B25/105 , C23C16/22 , C23C16/452 , C30B29/06
摘要： A remote plasma enhanced CVD apparatus and method for growing semiconductor layers on a substrate, wherein a intermediate feed gas, which does not itself contain constituent elements to be deposited, is first activated in an activation region to produce plural reactive species of the feed gas. These reactive species are then spatially filtered to remove selected of the reactive species, leaving only other, typically metastable, species which are then mixed with a carrier gas including constituent elements to be deposited on the substrate. During this mixing, the selected spatially filtered reactive species of the feed gas chemically interacts, i.e., partially dissociates and activates, in the gas phase, the carrier gas, with the process variables being selected so that there is no back-diffusion of gases or reactive species into the feed gas activation region. The dissociated and activated carrier gas along with the surviving reactive species of the feed gas then flows to the substrate. At the substrate, the surviving reactive species of the feed gas further dissociate the carrier gas and order the activated carrier gas species on the substrate whereby the desired epitaxial semiconductor layer is grown on the substrate.
摘要翻译：用于在衬底上生长半导体层的远程等离子体增强CVD装置和方法，其中中间进料气体本身不含有待沉积的构成元素，首先在活化区域中活化，以产生多种反应性物质的进料气体。然后将这些反应性物质进行空间过滤以除去所选择的反应性物质，仅留下其它通常为亚稳态的物质，然后将其与包含待沉积在基底上的构成元素的载气混合。在该混合期间，所选择的空间过滤的进料气体的反应性物质在气相中化学相互作用，即在气相中部分解离并活化载气，其中选择工艺变量，使得不存在气体的反向扩散或反应性物质进入进料气体活化区域。然后将解离和活化的载气与进料气体的存活反应性物质一起流入基材。在衬底上，进料气体的存活的反应性物质进一步离解载气并且将活化的载气物质排列在衬底上，从而在衬底上生长期望的外延半导体层。

4. 发明授权

US10378042B2 Fiber sampler for recovery of bioaerosols and particles 有权
公开(公告)号：US10378042B2
公开(公告)日：2019-08-13
申请号：US14378768
申请日：2013-02-19
申请人： RESEARCH TRIANGLE INSTITUTE , AEROSOL DYNAMICS INC.
发明人： David S. Ensor , Howard Jerome Walls , Karin K. Foarde , Susanne Vera Hering , Steven Russel Spielman
IPC分类号： C12Q1/24
摘要： An aerosol collection system and method. The system includes a bio-aerosol delivery device configured to supply bioparticles in a gas stream, a moisture exchange device including a partition member coupled to the gas stream and configured to humidify or dehumidify the bioparticles in the gas stream, and an aerosol collection medium downstream from the moisture exchange device and configured to collect the bioparticles. The method includes delivering bioparticles in a gas stream, humidifying or dehumidifying the bioparticles in the gas stream by transport of water across a partition member and into a vapor phase of the gas stream, and collecting the bioparticles by a collection medium.

5. 发明授权

US4837447A Rasterization system for converting polygonal pattern data into a bit-map 失效
标题翻译：将多边形图案数据转换为位图的栅格化系统
公开(公告)号：US4837447A
公开(公告)日：1989-06-06
申请号：US860216
申请日：1986-05-06
申请人： John L. Pierce , Nick Kanopoulos
发明人： John L. Pierce , Nick Kanopoulos
IPC分类号： G03F7/20 , G06T9/20 , H01J37/302
CPC分类号： G06T9/20 , G03F7/2022 , H01J37/3026
摘要： A real-time rasterization system for converting plural polygonal pattern data into respective bits of a two-dimensional bit-map, wherein the respective bits of the bit-map and the locations thereof within the bit-map correspond to the shapes and locations of the polygons in a two-dimensional field and wherein the bit-map is divided into plural data stripes, each including plural scan lines having plural bits. The rasterization system converts the plural pattern data of a data stripe into plural linked data entries such that data entries which correspond to polygons intersecting the same scan line are sequentially linked, and includes a double buffer pattern data memory for storing the plural linked data entries; a processor for determining for each scan line the bits thereof intersected by each polygon represented by the respective linked data entries and for producing bit-map data corresponding to the determined bits; a double-buffer bit-map memory coupled to the processor for storing the bit-map data for each scan line of the data stripe; and a double-buffer output register for reading out sequentially the bit-map data stored in the bit-map memory.
摘要翻译：一种用于将多个多边形图案数据转换成二维位图的各个比特的实时光栅化系统，其中位图中的各个比特及其位置内的位置对应于二维比特图的形状和位置多边形，并且其中所述位图被划分为多个数据条纹，每条数据条带包括多个具有多个位的扫描线。光栅化系统将数据条带的多个图案数据转换为多个链接数据条目，使得与相同扫描线相交的多边形对应的数据条目顺序链接，并且包括用于存储多个链接的数据条目的双缓冲器模式数据存储器; 处理器，用于为每个扫描线确定由相应链接的数据条目表示的每个多边形相交的比特，并用于产生对应于所确定的比特的比特映射数据; 耦合到处理器的双缓冲器位图存储器，用于存储数据条带的每条扫描线的位图数据; 以及双缓冲器输出寄存器，用于顺序地读出存储在位图存储器中的位图数据。

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