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    • 7. 发明公开
    • 웨이퍼시험시스템의 시험헤드와 시험카드의 결합장치
    • 用于检查检查系统的检查头和检查卡的组合装置
    • KR1020000012098A
    • 2000-02-25
    • KR1019990031260
    • 1999-07-30
    • 인테스트 코포레이션
    • 스미스더글러스더블유사젠트손톤더블유
    • H01L21/66
    • G01R31/2886
    • PURPOSE: An examining head of a wafer examining system and a device to combine an examining card are provided to be useful in a high speed examination. CONSTITUTION: The combining device comprises: a first plate(18) having a first socket; a second plate(20) having a second socket; a cable tube(22) extended between the first plate and the second plate; an electric conducting matter arranged inside the cable tube; each conducting matter to combine an examining head and an examining card of a wafer system having a first terminal to reach by passing one of the first socket(28) and a second terminal to reach by passing one of the second socket. Thereby this device to combine the examining head and the examining card accomplishes the low impedance and the reduced crosstalk.
    • 目的:提供晶片检查系统的检查头和组合检查卡的装置,用于高速检查。 构成:组合装置包括:具有第一插座的第一板(18) 具有第二插座的第二板(20) 在所述第一板和所述第二板之间延伸的电缆管(22); 布置在电缆管内的导电材料; 每个导电材料组合具有第一端子的晶片系统的检查头和检查卡,以通过使第一插座(28)和第二端子中的一个通过第二插座中的一个来达到。 因此,组合检查头和检查卡的该装置实现了低阻抗和减少的串扰。
    • 10. 发明公开
    • 테스트 헤드 위치지정 장치
    • 测试头定位装置
    • KR1020050088277A
    • 2005-09-05
    • KR1020057003092
    • 2002-10-02
    • 인테스트 코포레이션
    • 뮬러크리스티안
    • G01R31/26H01L21/66
    • A positioning apparatus for positioning a test head for testing electronic components is provided. The positioning apparatus includes an outer cylinder and a support coupled to the outer cylinder for supporting the test head. The positioning apparatus also includes a piston arranged within said outer cylinder such that the piston and the outer cylinder define a fluid compartment within the outer cylinder. The positioning apparatus also includes a pressure regulator for maintaining a pressure within the fluid compartment such that the test head may be suspended in a substantially weightless position, the substantially weightless position being adjustable in a vertical direction. The positioning apparatus also includes a lifting device for raising and lowering the outer cylinder. The lifting device includes a threaded drive mechanism coupled to the piston. The positioning apparatus also includes a drive apparatus for operating the threaded drive mechanism to move the test head to a predetermined position.
    • 提供了一种用于定位用于测试电子部件的测试头的定位装置。 定位装置包括外筒和联接到外筒的支撑件,用于支撑测试头。 定位装置还包括设置在所述外筒内的活塞,使得活塞和外筒在外筒内限定流体隔室。 定位装置还包括用于保持流体隔室内的压力的压力调节器,使得测试头可以悬挂在基本上无重量的位置,基本上无重量的位置可在垂直方向上调节。 定位装置还包括用于升高和降低外筒的提升装置。 提升装置包括联接到活塞的螺纹驱动机构。 定位装置还包括用于操作螺纹驱动机构以将测试头移动到预定位置的驱动装置。