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    • 3. 发明公开
    • 테스트 헤드 위치지정 장치
    • 测试头定位装置
    • KR1020050088277A
    • 2005-09-05
    • KR1020057003092
    • 2002-10-02
    • 인테스트 코포레이션
    • 뮬러크리스티안
    • G01R31/26H01L21/66
    • A positioning apparatus for positioning a test head for testing electronic components is provided. The positioning apparatus includes an outer cylinder and a support coupled to the outer cylinder for supporting the test head. The positioning apparatus also includes a piston arranged within said outer cylinder such that the piston and the outer cylinder define a fluid compartment within the outer cylinder. The positioning apparatus also includes a pressure regulator for maintaining a pressure within the fluid compartment such that the test head may be suspended in a substantially weightless position, the substantially weightless position being adjustable in a vertical direction. The positioning apparatus also includes a lifting device for raising and lowering the outer cylinder. The lifting device includes a threaded drive mechanism coupled to the piston. The positioning apparatus also includes a drive apparatus for operating the threaded drive mechanism to move the test head to a predetermined position.
    • 提供了一种用于定位用于测试电子部件的测试头的定位装置。 定位装置包括外筒和联接到外筒的支撑件,用于支撑测试头。 定位装置还包括设置在所述外筒内的活塞,使得活塞和外筒在外筒内限定流体隔室。 定位装置还包括用于保持流体隔室内的压力的压力调节器,使得测试头可以悬挂在基本上无重量的位置,基本上无重量的位置可在垂直方向上调节。 定位装置还包括用于升高和降低外筒的提升装置。 提升装置包括联接到活塞的螺纹驱动机构。 定位装置还包括用于操作螺纹驱动机构以将测试头移动到预定位置的驱动装置。