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1. 发明公开

KR1020000012098A 웨이퍼시험시스템의 시험헤드와 시험카드의 결합장치 无效
标题翻译：用于检查检查系统的检查头和检查卡的组合装置
公开(公告)号：KR1020000012098A
公开(公告)日：2000-02-25
申请号：KR1019990031260
申请日：1999-07-30
申请人： 인테스트 코포레이션
发明人： 스미스더글러스더블유 , 사젠트손톤더블유
IPC分类号： H01L21/66
CPC分类号： G01R31/2886
摘要： PURPOSE: An examining head of a wafer examining system and a device to combine an examining card are provided to be useful in a high speed examination. CONSTITUTION: The combining device comprises: a first plate(18) having a first socket; a second plate(20) having a second socket; a cable tube(22) extended between the first plate and the second plate; an electric conducting matter arranged inside the cable tube; each conducting matter to combine an examining head and an examining card of a wafer system having a first terminal to reach by passing one of the first socket(28) and a second terminal to reach by passing one of the second socket. Thereby this device to combine the examining head and the examining card accomplishes the low impedance and the reduced crosstalk.
摘要翻译：目的：提供晶片检查系统的检查头和组合检查卡的装置，用于高速检查。构成：组合装置包括：具有第一插座的第一板（18）具有第二插座的第二板（20）在所述第一板和所述第二板之间延伸的电缆管（22）; 布置在电缆管内的导电材料; 每个导电材料组合具有第一端子的晶片系统的检查头和检查卡，以通过使第一插座（28）和第二端子中的一个通过第二插座中的一个来达到。因此，组合检查头和检查卡的该装置实现了低阻抗和减少的串扰。

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