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81. 发明授权

US06176122B1 Cantilever unit and scanning probe microscope utilizing the cantilever unit 有权
标题翻译：悬臂单元和扫描探针显微镜利用悬臂单元
公开(公告)号：US06176122B1
公开(公告)日：2001-01-23
申请号：US09197587
申请日：1998-11-19
申请人： Nobuhiro Shimizu , Yukihiro Sato
发明人： Nobuhiro Shimizu , Yukihiro Sato
IPC分类号： G01B528
CPC分类号： G01Q70/02 , G01Q20/04 , Y10S977/873
摘要： A cantilever unit comprises a substrate and a self-detecting type cantilever attached to the substrate. The self-detecting type cantilever has a cantilever portion extending from the substrate and a probe tip depending from the cantilever portion and detects a deflection of the cantilever portion when, for example, the probe tip is scanned over a surface of a sample. A visual identification portion of the cantilever unit permits the cantilever unit to be visually distinguished from other cantilever units.
摘要翻译：悬臂单元包括附接到基板的基板和自检型悬臂。自检型悬臂具有从基板延伸的悬臂部分和从悬臂部分悬垂的探针尖端，并且当例如在探针表面上扫描探针尖端时检测悬臂部分的偏转。悬臂单元的视觉识别部分允许悬臂单元在视觉上与其它悬臂单元区分开。

82. 发明授权

US06834537B1 Optical microcantilever 失效
标题翻译：光学微悬臂梁
公开(公告)号：US06834537B1
公开(公告)日：2004-12-28
申请号：US09700323
申请日：2001-09-27
申请人： Takashi Niwa , Kenji Kato , Susumu Ichihara , Norio Chiba , Yasuyuki Mitsuoka , Manabu Oumi , Nobuyuki Kasama
发明人： Takashi Niwa , Kenji Kato , Susumu Ichihara , Norio Chiba , Yasuyuki Mitsuoka , Manabu Oumi , Nobuyuki Kasama
IPC分类号： G01B528
CPC分类号： G01Q60/38 , G01Q60/06 , G01Q60/22
摘要： An optical microcantilever has an optical waveguide for propagating light. The optical waveguide has a first side, a second side opposite to the first side, and a tip portion formed on the first side and at a free end of the optical waveguide. The tip portion has a microscopic aperture. A light blocking film is disposed on the first side of the optical waveguide. A reflecting film is disposed on the second side of the optical waveguide. A reflecting member forms part of the reflecting film and is disposed at the free end of the optical waveguide. The reflecting member has a generally planar surface for reflecting light propagated by the optical waveguide and for guiding the reflected light towards the microscopic aperture to generate near-field light at the microscopic aperture.
摘要翻译：光学微悬臂梁具有用于传播光的光波导。光波导具有第一侧，与第一侧相对的第二侧，以及形成在光波导的第一侧和自由端上的尖端部。尖端部分具有微观孔径。遮光膜设置在光波导的第一侧上。反射膜设置在光波导的第二侧上。反射构件形成反射膜的一部分并且设置在光波导的自由端。反射构件具有用于反射由光波导传播的光的大体上平面的表面，并且用于将反射的光引导到微孔以在微小孔处产生近场光。

83. 发明授权

US06757622B2 Predicting disc drive acoustic sound power from mechanical vibration 失效
标题翻译：从机械振动预测磁盘驱动器的声音功率
公开(公告)号：US06757622B2
公开(公告)日：2004-06-29
申请号：US10176555
申请日：2002-06-20
申请人： Louis J. Fioravanti
发明人： Louis J. Fioravanti
IPC分类号： G01B528
CPC分类号： G11B5/00
摘要： A method includes selecting a subset of predictive frequencies from a set of disc drive frequencies consisting essentially of operational driving frequencies in the disc drive and system resonance frequencies in the disc drive. Correlation constants are determined that correlate sound power to mechanical vibration magnitudes at each of the frequencies in the subset of predictive frequencies. The method further includes acquiring mechanical vibration data from the disc drive while operating the disc drive and determining predictive vibration magnitudes at each of the frequencies in the subset of predictive frequencies from the mechanical vibration data. Finally, the method includes determining an estimated acoustic sound power value for the disc drive from the determined correlation constants and the predictive vibration magnitudes. A testing system determines an estimated acoustic sound power value for a subject disc drive from predetermined correlation constants and vibration magnitudes.
摘要翻译：一种方法包括从基本上由盘驱动器中的操作驱动频率和盘驱动器中的系统谐振频率组成的一组盘驱动频率中选择预测频率的子集。确定相关常数，其将声功率与预测频率子集中的每个频率处的机械振幅相关联。该方法还包括在操作盘驱动器的同时从盘驱动器获取机械振动数据，并根据机械振动数据确定预测频率子集中每个频率处的预测振幅。最后，该方法包括从所确定的相关常数和预测振幅度确定盘驱动器的估计声音功率值。测试系统根据预定的相关常数和振幅来确定对象盘驱动器的估计声音功率值。

84. 发明授权

US06748795B1 Pendulum scanner for scanning probe microscope 有权
标题翻译：用于扫描探针显微镜的摆动扫描仪
公开(公告)号：US06748795B1
公开(公告)日：2004-06-15
申请号：US10205778
申请日：2002-07-26
申请人： Tianwei Jing
发明人： Tianwei Jing
IPC分类号： G01B528
CPC分类号： G01Q20/02 , G01Q10/04 , Y10S977/872
摘要： A pendulum scanner that utilizes a rocking motion to scan across a sample surface is provided. The scanner is present as a component in a scanning probe microscope that includes a microscope base, an optical stage, and a sample stage. The optical stage includes a source of a collimated beam of light, at least one beam tracking element, and a first scanning element for generating movement of the optical stage in a first plane. The microscope also includes a cantilever probe having a light-reflective surface. A second scanning element is provided for generating movement of the optical stage in a second plane that is orthogonal to the first plane. A position sensitive detector is also provided and is adapted to receive a beam of light reflected from the surface of the cantilever probe and to produce a signal that is indicative of the angular movement of the reflected beam of light.
摘要翻译：提供了利用摇摆运动扫描样品表面的摆锤扫描器。扫描仪作为扫描探针显微镜中的组件存在，其包括显微镜底座，光学平台和样品台。光学平台包括准直光束源，至少一个光束跟踪元件和用于在第一平面中产生光学平台的运动的第一扫描元件。显微镜还包括具有光反射表面的悬臂探针。第二扫描元件被提供用于在与第一平面正交的第二平面中产生光学平台的移动。还提供了位置敏感检测器，并且适于接收从悬臂探头的表面反射的光束并产生指示反射光束的角运动的信号。

85. 发明授权

US06745618B2 Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：US06745618B2
公开(公告)日：2004-06-08
申请号：US10193237
申请日：2002-07-12
申请人： Yukari Imai , Mari Tsugami , Hitoshi Maeda , Tohru Koyama
发明人： Yukari Imai , Mari Tsugami , Hitoshi Maeda , Tohru Koyama
IPC分类号： G01B528
CPC分类号： G01Q20/02 , G01Q60/30 , Y10S977/854 , Y10S977/87
摘要： A scanning probe microscope includes a laser diode (1a) as a light source for emitting light lower in energy level than band gap of semiconductor as a sample. Laser light (2) emitted therefrom should be of wavelength larger in value than a wavelength &lgr; calculated as follows: &lgr;=h·c/Eg where h is Planck's constant, c represents speed of light and Eg represents band gap. When the semiconductor as a sample is silicon, the band gap thereof is 1.12 eV, thus calculating the wavelength &lgr; at 1.107 &mgr;m. The laser diode (1a) should be such that the laser light (2) emitted therefrom is of wavelength larger in value than &lgr;. It is therefore allowed to avoid emission of light higher in energy level than the band gap of silicon as a sample and eventually, avoid generation of photoelectric current in the sample.
摘要翻译：扫描探针显微镜包括作为光源的激光二极管（1a），用于发射能量水平低于作为样品的半导体的带隙的光。从其发射的激光（2）的波长应大于波长λ，其计算如下：其中h为普朗克常数，c表示光速，Eg表示带隙。当作为样品的半导体是硅时，其带隙为1.12eV，从而计算1.107μm的波长λ。激光二极管（1a）应该使得从其发射的激光（2）的波长比λ值波长更大。因此，允许避免发射能量水平高于硅作为样品的带隙，并且最终避免在样品中产生光电流。

86. 发明授权

US06745617B2 Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：US06745617B2
公开(公告)日：2004-06-08
申请号：US10038667
申请日：2002-01-08
申请人： Ken Murayama
发明人： Ken Murayama
IPC分类号： G01B528
CPC分类号： G01Q10/06 , Y10S977/851
摘要： This scanning probe microscope is provided with a cantilever with a probe tip facing a sample, a Z fine movement section for changing a distance between the sample and the probe tip, a XY scanning control section for providing relative displacement toward a sample surface between the sample and the probe tip, a displacement detecting means for detecting displacement arising in the cantilever, and a Z direction control section. In the configuration, when generating deformation in the cantilever due to a physical amount between the probe tip and the sample, the displacement detecting means detects the displacement of the cantilever, and the displacement of the cantilever is controlled to be a predetermined constant value. The scanning probe microscope further has a two frequency signals generating section for providing signals used to cause the probe tip to be moved in height direction by two frequencies to the Z fine movement section. According to this configuration, in the scanning probe microscope, the probe tip does not receive the force of lateral direction when scanning the sample surface, the high-speed measurement is possible and the wear of the probe tip is reduced.
摘要翻译：该扫描探针显微镜设置有具有面向样品的探针尖端的悬臂，用于改变样品与探针尖之间的距离的Z精细运动部，用于向样品表面之间的样品表面提供相对位移的XY扫描控制部探针头，用于检测在悬臂中产生的位移的位移检测装置和Z方向控制部。在该结构中，当由于探针尖端和样品之间的物理量而在悬臂中产生变形时，位移检测装置检测悬臂的位移，并且将悬臂的位移控制为预定的一定值。扫描探针显微镜还具有两个频率信号产生部分，用于提供用于使探头尖端在高度方向上移动两个频率到Z精细移动部分的信号。根据该结构，在扫描探针显微镜中，当扫描样品表面时，探针尖端不会受到横向的力，可以进行高速测量并且探针尖端的磨损降低。

87. 发明授权

US06738717B2 Crystal structure analysis method 失效
标题翻译：晶体结构分析方法
公开(公告)号：US06738717B2
公开(公告)日：2004-05-18
申请号：US09817973
申请日：2001-03-27
申请人： Keisuke Saito
发明人： Keisuke Saito
IPC分类号： G01B528
CPC分类号： G01B5/28 , G01B15/00
摘要： The invention provides a crystal structure analysis method so as to analyze crystal structures in detail. The inventive method comprises incrementing the tilting angle &psgr; of the SBT thin film 1 by one degree in a range of 0 degree ≦y≦90 degrees, for each of the increments of the tilting angle &psgr; irradiating the X-ray onto the SBT thin film with the incident angle &thgr; being incremented by 0.025 degrees in a range of 0 degree ≦&thgr;≦90 degrees and detecting the X-rays diffracted from the SBT thin film 1 by the detector 3.
摘要翻译：本发明提供了一种晶体结构分析方法，以便详细分析晶体结构。本发明的方法包括在0度<= y <= 90度的范围内将SBT薄膜1的倾斜角度psi增加1度，在0度<= 0 <= 90度的范围内，将入射角θ增加0.025度的X射线照射到SBT薄膜上的倾斜角度psi的每个增量，并且检测从 SBT薄膜1由检测器3。

88. 发明授权

US06708556B1 Atomic force microscope and driving method therefor 失效
标题翻译：原子力显微镜及其驱动方法
公开(公告)号：US06708556B1
公开(公告)日：2004-03-23
申请号：US10009063
申请日：2001-12-05
申请人： You Kwang Kim , Sang Gook Kim , Kyu Ho Hwang
发明人： You Kwang Kim , Sang Gook Kim , Kyu Ho Hwang
IPC分类号： G01B528
CPC分类号： G01Q10/065 , G01Q20/02 , G01Q70/06 , Y10S977/87
摘要： An atomic force microscope (AFM) capable of observing the topography of a sample surface at high speed with a high resolution under the atmospheric pressure and a driving method therefor is provided. The AFM comprises a light beam source unit, a light beam scanner, a scanning probe unit (or matrix), a light beam detection unit, a driving control unit and a display unit. The driving method comprises the steps of vibrating, responsive to a reference signal, a first actuator provided on each of scanning probes; detecting a deflection amount of a cantilever provided with a tip at its free end; and transmitting a servo signal to a second actuator based on the deflection amount of the cantilever.
摘要翻译：提供能够在大气压下以高分辨率高速观察样品表面的形貌的原子力显微镜（AFM）及其驱动方法。 AFM包括光束源单元，光束扫描器，扫描探针单元（或矩阵），光束检测单元，驱动控制单元和显示单元。驱动方法包括以下步骤：响应于参考信号振动，设置在每个扫描探针上的第一致动器; 检测在其自由端设置有尖端的悬臂的偏转量; 并且基于所述悬臂的偏转量将伺服信号发送到第二致动器。

89. 发明授权

US06694805B2 Cantilever for scanning probe microscopy 有权
标题翻译：悬臂扫描探针显微镜
公开(公告)号：US06694805B2
公开(公告)日：2004-02-24
申请号：US10122205
申请日：2002-04-16
申请人： Koichi Shiotani , Masashi Kitazawa , Kenji Sato , Akitoshi Toda
发明人： Koichi Shiotani , Masashi Kitazawa , Kenji Sato , Akitoshi Toda
IPC分类号： G01B528
CPC分类号： G01Q70/16 , G01Q70/10
摘要： A cantilever for Scanning Probe Microscopy including: a support portion; a lever portion extended from the support portion; and a probe portion provided at an free end of the lever portion, said probe portion being configured by two triangular thin plates each having one side respectively being one of the different two sides of a V-like notch formed on the free end of the lever, where the thin plates are caused to face each other while having the other side in common. The cantilever for Scanning Probe Microscopy is thereby achieved as having a probe portion which is light in weight and high in rigidity and is readily positioned in alignment and by which measurement at high resolution is steadily possible
摘要翻译：扫描探针显微镜的悬臂包括：支撑部分; 从所述支撑部延伸的杆部; 以及探针部，设置在所述杆部的自由端，所述探针部由两个三角形薄板构成，所述两个三角形薄板分别具有形成在所述杆的自由端上的V形切口的不同两侧之一，其中使薄板彼此面对，同时使另一侧相同。因此，扫描探针显微镜的悬臂具有重量轻且刚性高的探针部分，并且容易定位成对准，并且可以稳定地以高分辨率进行测量

90. 发明授权

US06672144B2 Dynamic activation for an atomic force microscope and method of use thereof 有权
标题翻译：原子力显微镜的动态激活及其使用方法
公开(公告)号：US06672144B2
公开(公告)日：2004-01-06
申请号：US09904913
申请日：2001-07-13
申请人： Dennis M. Adderton , Stephen C. Minne
发明人： Dennis M. Adderton , Stephen C. Minne
IPC分类号： G01B528
CPC分类号： G01Q10/065 , G01Q60/34 , Y10S977/85 , Y10S977/86 , Y10S977/863 , Y10S977/881
摘要： A scanning probe microscope method and apparatus that modifies imaging dynamics using an active drive technique to optimize the bandwidth of amplitude detection. The deflection is preferably measured by an optical detection system including a laser and a photodetector, which measures cantilever deflection by an optical beam bounce technique or another conventional technique. The detected deflection of the cantilever is subsequently demodulated to give a signal proportional to the amplitude of oscillation of the cantilever, which is thereafter used to drive the cantilever.
摘要翻译：扫描探针显微镜方法和装置，其使用主动驱动技术来修改成像动力学，以优化幅度检测的带宽。偏转优选地通过包括激光器和光电检测器的光学检测系统来测量，其通过光束反弹技术或其他常规技术来测量悬臂偏转。随后解调所检测到的悬臂的偏转，以产生与悬臂的振荡幅度成比例的信号，此后用于驱动悬臂。

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