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    • 83. 发明公开
    • Method of and apparatus for multiple channel flow ratio controller system
    • 一种用于在多个信道的控制的流量比用于系统中的方法和装置
    • EP2845921A2
    • 2015-03-11
    • EP14194712.7
    • 2012-09-28
    • MKS Instruments, Inc.
    • Ding, Junhua
    • C23C16/52C23C16/455G05D11/13H01L21/00
    • C23C16/52C23C16/45561G05D7/0664Y10T137/2524Y10T137/2529
    • A four channel gas delivery system. The system comprises an inlet channel; four outlet channels; four control valves, each valve being arranged so as to control the flow from the inlet channel through a corresponding one of the outlet channels; and a flow ratio control system. The flow ratio control system includes two dual antisymmetric optimal (DAO) control modules. The DAO control modules are configured and arranged so as to control the respective control valves so as to control the relative ratios of flow from the inlet channel through the four outlet channels. The flow ratio control system also includes a virtual DAO control module configured and arranged so as to control the ratio of flow between the two DAO control modules.
    • 四个信道气体输送系统,该系统包括入口通道。 四个出口通道; 四个控制阀,每个阀被设置以控制从入口通道通过所述出口通道中的相应一个的流量; 和流量比控制系统,该流量比率控制系统包括两个双反对称最佳(DAO)控制模块。 在DAO控制模块被配置和布置,以便控制所述respectivement控制阀,以便通过四个出口通道,以控制从入口通道流的相对比率。 因而,流比率控制系统包括虚拟DAO controlmodule配置和布置,以便控制所述两个DAO控制模块之间流动的比率。