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1. 发明授权

US10996689B2 Flow rate ratio control device with flow velocity control mode 有权
公开(公告)号：US10996689B2
公开(公告)日：2021-05-04
申请号：US16332171
申请日：2017-08-25
申请人： HORIBA STEC, Co., Ltd.
发明人： Tadahiro Yasuda , Patrick Allen Lowery , William Wylie White , Brian James Ebert , Maximilian Martin Gundlach , John Thomas Dick
IPC分类号： G05D7/06 , G01F1/48 , G01F1/00 , G05D11/13
摘要： A flow rate ratio control device is provided with a main flow path, a plurality of branch flow paths that branch off from a terminus of the main flow path, a plurality of fluid control devices that are provided respectively on each branch flow path, and that are each equipped with a valve and a pressure-based flow rate sensor that is disposed downstream of the valve, and an operation setting unit that establishes settings such that, based on the target flow rate ratio, any one fluid control device from among the plurality of fluid control devices is made to operate in a flow velocity control mode in which the flow velocity of a fluid is controlled upstream of each valve, and the remaining fluid control devices are made to operate in a flow rate control mode in which the flow rate is controlled based on the target flow rates.

2. 发明授权

US09671421B2 Micro-position gap sensor assembly 有权
公开(公告)号：US09671421B2
公开(公告)日：2017-06-06
申请号：US14696163
申请日：2015-04-24
申请人： HORIBA STEC, Co., Ltd.
发明人： Patrick Allen Lowery , John Thomas Dick , Michael Alex Kramer
IPC分类号： G01B7/14 , G01P3/487 , G01D5/14 , G01D11/24 , G01F1/00
CPC分类号： G01P3/487 , G01D5/145 , G01D11/245 , G01F1/00
摘要： A micro-position gap sensor assembly including a structural housing and a flexible diaphragm fixedly attached forming a barrier against fluid ingress. The structural housing includes a shaft orthogonally attached to the flexible diaphragm, a first retainer including one or more standoffs, a second retainer, and a parallel plate gap sensor. The parallel gap plate sensor includes a non-contact sensor plate biased against a portion of the first retainer defining a plane of the non-contact sensor plate and receiving a biasing force in opposition of the first retainer from the second retainer, a target plate comprised of a conductive paramagnetic material. The parallel plate gap sensor is configured such that displacement of one of the target plate or the non-contact sensor plate changes a distance between the target plate and the non-contact sensor plate.

3. 发明申请

US20160313141A1 MICRO-POSITION GAP SENSOR ASSEMBLY 有权
标题翻译：微位移传感器总成
公开(公告)号：US20160313141A1
公开(公告)日：2016-10-27
申请号：US14696163
申请日：2015-04-24
申请人： HORIBA STEC, Co., Ltd.
发明人： Patrick Allen Lowery , John Thomas Dick , Michael Alex Kramer
IPC分类号： G01D5/20
CPC分类号： G01P3/487 , G01D5/145 , G01D11/245 , G01F1/00
摘要： A micro-position gap sensor assembly including a structural housing and a flexible diaphragm fixedly attached forming a barrier against fluid ingress. The structural housing includes a shaft orthogonally attached to the flexible diaphragm, a first retainer including one or more standoffs, a second retainer, and a parallel plate gap sensor. The parallel gap plate sensor includes a non-contact sensor plate biased against a portion of the first retainer defining a plane of the non-contact sensor plate and receiving a biasing force in opposition of the first retainer from the second retainer, a target plate comprised of a conductive paramagnetic material. The parallel plate gap sensor is configured such that displacement of one of the target plate or the non-contact sensor plate changes a distance between the target plate and the non-contact sensor plate.
摘要翻译：微位置间隙传感器组件包括结构外壳和固定连接的柔性隔膜，形成抵抗流体入口的阻挡层。结构壳体包括正交地连接到柔性隔膜的轴，包括一个或多个支座的第一保持器，第二保持器和平行板间隙传感器。平行间隙板传感器包括非接触传感器板，该非接触传感器板偏压抵靠非接触式传感器板的平面的第一保持器的一部分，并且接收与第一保持器相对的来自第二保持器的偏压力，的导电顺磁材料。平行板间隙传感器被构造成使得目标板或非接触式传感器板中的一个的位移改变目标板和非接触式传感器板之间的距离。

4. 发明申请

US20190204857A1 FLOW RATE RATIO CONTROL DEVICE, PROGRAM FOR FLOW RATE RATIO CONTROL DEVICE, AND FLOW RATE RATIO CONTROL METHOD 审中-公开
公开(公告)号：US20190204857A1
公开(公告)日：2019-07-04
申请号：US16332171
申请日：2017-08-25
申请人： HORIBA STEC, Co., Ltd.
发明人： Tadahiro Yasuda , Patrick Allen Lowery , William Wylie White , Brian James Ebert , Maximilian Martin Gundlach , John Thomas Dick
IPC分类号： G05D7/06 , G01F1/48 , G05D11/13
CPC分类号： G05D7/0664 , G01F1/00 , G01F1/48 , G05D7/06 , G05D11/13 , G05D11/132
摘要： A flow rate ratio control device is provided with a main flow path, a plurality of branch flow paths that branch off from a terminus of the main flow path, a plurality of fluid control devices that are provided respectively on each branch flow path, and that are each equipped with a valve and a pressure-based flow rate sensor that is disposed downstream of the valve, and an operation setting unit that establishes settings such that, based on the target flow rate ratio, any one fluid control device from among the plurality of fluid control devices is made to operate in a flow velocity control mode in which the flow velocity of a fluid is controlled upstream of each valve, and the remaining fluid control devices are made to operate in a flow rate control mode in which the flow rate is controlled based on the target flow rates.

5. 发明授权

US09903507B2 Micro-position gap sensor assembly 有权
公开(公告)号：US09903507B2
公开(公告)日：2018-02-27
申请号：US15614477
申请日：2017-06-05
申请人： HORIBA STEC, Co., Ltd.
发明人： Patrick Allen Lowery , John Thomas Dick , Michael Alex Kramer
IPC分类号： G01B7/14 , F16K37/00 , G01D5/20 , G01D11/24 , G01F1/00
CPC分类号： F16K37/0041 , G01D5/20 , G01D11/245 , G01F1/00
摘要： A micro-position gap sensor assembly, including a structural housing, a flexible diaphragm fixedly attached at a first end of the structural housing, and a shaft orthogonally attached to the flexible diaphragm. The micro-position gap sensor assembly may further include a first retainer coupled to the shaft, a second retainer formed as a step of the structural housing, and a plate gap sensor. The plate gap sensor may include a non-contact sensor plate biased by a compression spring so that the non-contact sensor plate is held against a portion of the second retainer. The plate gap sensor may further include a target plate positioned adjacent the non-contact sensor plate and separated therefrom by a gap. The target plate may be biased by a return spring so that the target plate is held against a portion of the first retainer. The target plate may be coupled to the shaft.

6. 发明申请

US20170276257A1 MICRO-POSITION GAP SENSOR ASSEMBLY 有权
公开(公告)号：US20170276257A1
公开(公告)日：2017-09-28
申请号：US15614477
申请日：2017-06-05
申请人： HORIBA STEC, Co., Ltd.
发明人： Patrick Allen Lowery , John Thomas Dick , Michael Alex Kramer
IPC分类号： F16K37/00 , G01D5/20
CPC分类号： F16K37/0041 , G01D5/20 , G01D11/245 , G01F1/00
摘要： A micro-position gap sensor assembly, including a structural housing, a flexible diaphragm fixedly attached at a first end of the structural housing, and a shaft orthogonally attached to the flexible diaphragm. The micro-position gap sensor assembly may further include a first retainer coupled to the shaft, a second retainer formed as a step of the structural housing, and a plate gap sensor. The plate gap sensor may include a non-contact sensor plate biased by a compression spring so that the non-contact sensor plate is held against a portion of the second retainer. The plate gap sensor may further include a target plate positioned adjacent the non-contact sensor plate and separated therefrom by a gap. The target plate may be biased by a return spring so that the target plate is held against a portion of the first retainer. The target plate may be coupled to the shaft.

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