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    • 89. 发明申请
    • Method of manufacturing a microstructure
    • 微结构制造方法
    • US20060108327A1
    • 2006-05-25
    • US10997222
    • 2004-11-23
    • Kiong ChngWai ChiaKee TanLei Zhu
    • Kiong ChngWai ChiaKee TanLei Zhu
    • C23F1/00B44C1/22
    • H01L21/268B81C1/00492B81C2201/0143H01L21/2633
    • Disclosed is a method of manufacturing a microstructure that requires a first material and a second material attached together and a laser system for producing a laser beam. The first material should exhibit an ablation threshold that does not exceed a predetermined ablation fluence of the laser beam and the second material should exhibit a second ablation threshold that exceeds the predetermined ablation fluence. The removal process comprises removing a portion of the first material to leave a remnant thereof at an interface of the two materials and then, ablating the remnant material using the laser beam at the predetermined ablation fluence to remove the remnant material. The process of selecting the first of the two materials is based on the predetermined ablation fluence of the laser beam; and the selection a laser system is based on the respective ablation thresholds of the first and second materials.
    • 公开了一种制造需要第一材料和第二材料附着在一起的微结构的方法和用于产生激光束的激光系统。 第一材料应该呈现不超过激光束的预定消融能量密度的消融阈值,并且第二材料应该呈现超过预定消融注量的第二烧蚀阈值。 去除过程包括去除第一材料的一部分以在两种材料的界面处留下残留物,然后使用激光束以预定的消融能量密度去除剩余材料以去除残余材料。 选择两种材料中的第一种材料的过程是基于激光束的预定消融能量密度; 并且激光系统的选择基于第一和第二材料的各自的消融阈值。