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    • 83. 发明授权
    • Focused beam spectroscopic ellipsometry method and system
    • 聚焦光束椭偏仪的方法和系统
    • US5608526A
    • 1997-03-04
    • US375353
    • 1995-01-19
    • Timothy R. Piwonka-CorleKaren F. ScoffoneXing ChenLloyd J. Lacomb, Jr.Jean-Louis StehleDorian ZahorskiJean-Pierre Rey
    • Timothy R. Piwonka-CorleKaren F. ScoffoneXing ChenLloyd J. Lacomb, Jr.Jean-Louis StehleDorian ZahorskiJean-Pierre Rey
    • G01N21/21
    • G01N21/211G01N2021/213
    • A method and system for spectroscopic ellipsometry employing reflective optics to measure a small region of a sample by reflecting radiation (preferably broadband UV, visible, and near infrared radiation) from the region. The system preferably has an autofocus assembly and a processor programmed to determine from the measurements the thickness and/or complex refractive index of a thin film on the sample. Preferably, only reflective optics are employed along the optical path between the polarizer and analyzer, a sample beam reflects with low incidence angle from each component of the reflective optics, the beam is reflectively focused to a small, compact spot on the sample at a range of high incidence angles, and an incidence angle selection element is provided for selecting for measurement only radiation reflected from the sample at a single, selected angle (or narrow range of angles). The focusing mirror preferably has an elliptical shape,to reduce off-axis aberrations in the focused beam. Some embodiments include both a spectrophotometer and an ellipsometer integrated together as a single instrument. In such instrument, the spectrophotometer and ellipsometer share a radiation source, and radiation from the source can be focused by either the spectrophotometer or the ellipsometer to the same focal point on a sample. Preferred embodiments of the ellipsometer employ a rotating, minimal-length Rochon prism as a polarizer, and include a spectrometer with an intensified photodiode array to measure reflected radiation from the sample, and a reference channel (in addition to a sample channel which detects radiation reflected from the sample).
    • 使用反射光学器件的光谱椭偏仪的方法和系统通过从该区域反射辐射(优选宽带UV,可见光和近红外辐射)来测量样品的小区域。 该系统优选地具有自动对焦组件和被编程用于根据测量结果确定样品上薄膜的厚度和/或复合折射率的处理器。 优选地,沿着偏振器和分析器之间的光路仅采用反射光学元件,样品光束以反射光学器件的每个分量以低入射角反射,光束被反射聚焦到样品上的小的紧密斑点 并且提供入射角选择元件用于仅选择仅以单个选定角度(或窄范围的角度)从样品反射的辐射。 聚焦镜优选具有椭圆形状,以减少聚焦光束中的离轴像差。 一些实施例包括作为单个仪器集成在一起的分光光度计和椭偏仪。 在这种仪器中,分光光度计和椭偏仪共享一个辐射源,来自源的辐射可以通过分光光度计或椭偏仪聚焦到样品上的同一焦点。 椭偏仪的优选实施例采用旋转的,最小长度的Rochon棱镜作为偏振器,并且包括具有增强的光电二极管阵列的光谱仪,以测量来自样品的反射辐射,以及参考通道(除了检测辐射的样品通道 从样品)。
    • 84. 发明申请
    • Modular Field Game Bunker System
    • 模块化场地游戏掩体系统
    • US20160237675A1
    • 2016-08-18
    • US14622413
    • 2015-02-13
    • Xing Chen
    • Xing Chen
    • E04B1/343A63B71/02
    • A63B71/02A63H33/008
    • A modular game field bunker system comprises a plurality of interlocking frame pieces and a cover having an aesthetic feature disposed on at least an outer surface thereof. The interlocking frame pieces may be coupled together to form a structure having at least one wall. The structure preferably is fully enclosed by its walls and has an interior region defined therein for receiving a human player. The cover receives and fully covers the structure, and may partially define a doorway for entering and exiting the structure. The aesthetic feature of the cover may make the bunker appear in any of a variety of desired ways so as to customizably match a desired design scenario of the game field.
    • 模块化游戏场地掩体系统包括多个互锁框架件和具有设置在其至少外表面上的美学特征的盖。 互锁框架件可以联接在一起以形成具有至少一个壁的结构。 该结构优选地被其壁完全包围并且具有限定在其中的用于接收人类玩家的内部区域。 盖子接收并完全覆盖结构,并且可以部分地限定用于进入和离开结构的门口。 封面的美学特征可以使掩体以任何各种期望的方式出现,以便可定制地匹配游戏场的期望的设计场景。
    • 88. 发明申请
    • Toroidal plasma chamber for high gas flow rate process
    • 环形等离子体室用于高气体流量过程
    • US20100206847A1
    • 2010-08-19
    • US12738314
    • 2007-10-19
    • Xing ChenAndrew Cowe
    • Xing ChenAndrew Cowe
    • C23F1/00C23F1/08C23C16/00C23C16/455
    • H01J37/32357H01J37/3244H01J37/32449
    • A plasma chamber for activating a process gas, including at least four legs forming a toroidal plasma channel, each leg having a cross-sectional area, and an outlet formed on one leg, the outlet having a greater cross-sectional area than the cross-sectional area of the other legs. The plasma chamber further includes an inlet for receiving the process gas and a plenum for introducing the process gas over a broad area of the leg opposing the outlet to reduce localized high plasma impedance and gas flow instability, wherein the leg opposing the outlet defines a plurality of holes for providing a helical gas rotation in the plasma channel.
    • 一种用于激活处理气体的等离子体室,包括形成环形等离子体通道的至少四条腿,每条腿具有横截面积,以及形成在一条腿上的出口,该出口具有比截面积更大的横截面面积, 其他腿的截面积。 等离子体室还包括用于接收处理气体的入口和用于将处理气体引导到与出口相对的腿的宽阔区域上以减少局部高等离子体阻抗和气流不稳定性的集气室,其中与出口相对的腿限定多个 的孔用于在等离子体通道中提供螺旋形气体旋转。
    • 90. 发明申请
    • SCREEN OF LAPTOP COMPUTER AND LAPTOP COMPUTER HAVING THE SAME
    • LAPTOP计算机屏幕和具有相同功能的笔记本计算机
    • US20090067125A1
    • 2009-03-12
    • US12208627
    • 2008-09-11
    • XIAOSONG XIAHuajun DongXiufeng HeXing Chen
    • XIAOSONG XIAHuajun DongXiufeng HeXing Chen
    • G06F1/16
    • G06F1/1637G06F1/1616Y10T16/554
    • The present invention relates to a screen of a laptop computer and a laptop computer having the same. And the laptop computer comprises: a back cover; a fixing body mounted on the back cover; a liquid crystal screen mounted on the fixing body; and a cover plate received on the fixing body, wherein the cover plate covers the liquid crystal screen and the fixing unit, and the area of the cover plate corresponding to the liquid crystal screen is transparent. The fixing body comprises a fixing frame and/or supporting member. Each supporting member is connected to a side of the liquid crystal screen. The screen for a laptop computer having a configuration described above has an integral appearance, which not only protects the screen but also makes the screen appear more neat enhancing visual effect of the screen. The present invention also proposes a laptop computer having the above screen so that the computer has an excellent visual appearance in usage, which is more adapted to practical use.
    • 本发明涉及膝上型计算机的屏幕和具有该屏幕的膝上型计算机。 笔记本电脑包括:后盖; 安装在后盖上的固定体; 安装在固定体上的液晶屏; 以及容纳在固定体上的盖板,其中盖板覆盖液晶屏和定影单元,并且与液晶屏相对应的盖板的面积是透明的。 固定体包括固定框架和/或支撑构件。 每个支撑构件连接到液晶屏的一侧。 具有上述配置的膝上型计算机的屏幕具有整体外观,其不仅保护屏幕,而且使得屏幕看起来更加整洁地增强屏幕的视觉效果。 本发明还提出一种具有上述屏幕的膝上型计算机,使得计算机具有优异的使用视觉外观,更适用于实际应用。