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1. 发明授权

US5910842A Focused beam spectroscopic ellipsometry method and system 失效
标题翻译：聚焦光束椭偏仪的方法和系统
公开(公告)号：US5910842A
公开(公告)日：1999-06-08
申请号：US753696
申请日：1996-11-27
申请人： Timothy R. Piwonka-Corle , Xing Chen , Lloyd J. Lacomb, Jr. , Jean-Louis Stehle , Dorian Zahorski
发明人： Timothy R. Piwonka-Corle , Xing Chen , Lloyd J. Lacomb, Jr. , Jean-Louis Stehle , Dorian Zahorski
IPC分类号： G01N21/21
CPC分类号： G01N21/211 , G01N2021/213
摘要： A method and system for spectroscopic ellipsometry employing reflective optics to measure a small region of a sample by reflecting radiation (preferably broadband UV, visible, and near infrared radiation) from the region. The system preferably has an autofocus assembly and a processor programmed to determine from the measurements the thickness and/or complex refractive index of a thin film on the sample. Preferably, only reflective optics are employed along the optical path between the polarizer and analyzer, a sample beam reflects with low incidence angle from each component of the reflective optics, the beam is reflectively focused to a small, compact spot on the sample at a range of high incidence angles, and an incidence angle selection element is provided for selecting for measurement only radiation reflected from the sample at a single, selected angle (or narrow range of angles). The focusing mirror preferably has an elliptical shape to reduce off-axis aberrations in the focused beam. Some embodiments include both a spectrophotometer and an ellipsometer integrated together as a single instrument. In such instrument, the spectrophotometer and ellipsometer share a radiation source, and radiation from the source can be focused by either the spectrophotometer or the ellipsometer to the same focal point on a sample. Preferred embodiments of the ellipsometer employ a rotating, minimal-length Rochon prism as a polarizer, and include a spectrometer with an intensified photodiode array to measure reflected radiation from the sample, and a reference channel (in addition to a sample channel which detects radiation reflected from the sample).
摘要翻译：使用反射光学器件的光谱椭偏仪的方法和系统通过从该区域反射辐射（优选宽带UV，可见光和近红外辐射）来测量样品的小区域。该系统优选地具有自动对焦组件和被编程用于根据测量结果确定样品上薄膜的厚度和/或复合折射率的处理器。优选地，沿着偏振器和分析器之间的光路仅采用反射光学元件，样品光束以反射光学器件的每个分量以低入射角反射，光束被反射聚焦到样品上的小的紧密斑点并且提供入射角选择元件用于仅选择仅以单个选定角度（或窄范围的角度）从样品反射的辐射。聚焦镜优选具有椭圆形以减少聚焦光束中的离轴像差。一些实施例包括作为单个仪器集成在一起的分光光度计和椭偏仪。在这种仪器中，分光光度计和椭偏仪共享一个辐射源，来自源的辐射可以通过分光光度计或椭偏仪聚焦到样品上的同一焦点。椭偏仪的优选实施例采用旋转的，最小长度的Rochon棱镜作为偏振器，并且包括具有增强的光电二极管阵列的光谱仪，以测量来自样品的反射辐射，以及参考通道（除了检测辐射的样品通道从样品）。

2. 发明授权

US5991037A High spatial resolution ellipsometry device 失效
标题翻译：高空间分辨率椭圆测量装置
公开(公告)号：US5991037A
公开(公告)日：1999-11-23
申请号：US386
申请日：1998-01-27
申请人： Jean-Philippe Piel , Jean-Louis Stehle , Dorian Zahorski
发明人： Jean-Philippe Piel , Jean-Louis Stehle , Dorian Zahorski
IPC分类号： G01N21/21
CPC分类号： G01N21/211
摘要： The ellipsometry device includes a first focusing device, combined with a first optical system, for focusing the light beam from the first optical system onto the sample, a second focusing device, combined with a second optical system, for focusing the beam reflected by the sample surface onto the input of the second optical system, and an optical correction device for correcting, together with the first and second focusing devices, the position of the focused reflected beam so as to reject the interference reflections generated by the surface of the sample opposite the light beam receiving surface, and to obtain a maximum signal level at the photodetector.
摘要翻译： PCT No.PCT / FR96 / 01035 Sec。 371日期：1998年1月27日 102（e）1998年1月27日PCT PCT 1996年7月3日PCT公布。公开号WO97 / 07392 日期1997年2月27日椭圆测量装置包括与第一光学系统组合的第一聚焦装置，用于将来自第一光学系统的光束聚焦到样品上，与第二光学系统组合的第二聚焦装置，由样品表面反射的光束到第二光学系统的输入上;以及光学校正装置，用于与第一和第二聚焦装置一起校正聚焦反射光束的位置，以便抑制表面产生的干涉反射并且在光电检测器处获得最大信号电平。

3. 发明授权

US06734967B1 Focused beam spectroscopic ellipsometry method and system 有权
标题翻译：聚焦光束椭偏仪的方法和系统
公开(公告)号：US06734967B1
公开(公告)日：2004-05-11
申请号：US09248876
申请日：1999-02-11
申请人： Timothy R. Piwonka-Corle , Karen F. Scoffone , Xing Chen , Lloyd J. Lacomb, Jr. , Jean-Louis Stehle , Dorian Zahorski , John-Pierre Rey
发明人： Timothy R. Piwonka-Corle , Karen F. Scoffone , Xing Chen , Lloyd J. Lacomb, Jr. , Jean-Louis Stehle , Dorian Zahorski , John-Pierre Rey
IPC分类号： G01N2121
CPC分类号： G01N21/211
摘要： A method and system for spectroscopic ellipsometry employing reflective optics to measure a small region of a sample by reflecting radiation (preferably broadband UV, visible, and near infrared radiation) from the region. The system preferably has an autofocus assembly and a processor programmed to determine from the measurements the thickness and/or complex refractive index of a thin film on the sample. Preferably, only reflective optics are employed along the optical path between the polarizer and analyzer, a sample beam reflects with low incidence angle from each component of the reflective optics, the beam is reflectively focused to a small, compact spot on the sample at a range of high incidence angles, and an incidence angle selection element is provided for selecting for measurement only radiation reflected from the sample at a single, selected angle (or narrow range of angles). The focusing mirror preferably has an elliptical shape to reduce off-axis aberrations in the focused beam. Some embodiments include both a spectrophotometer and an ellipsometer integrated together as a single instrument. In such instrument, the spectrophotometer and ellipsometer share a radiation source, and radiation from the source can be focused by either the spectrophotometer or the ellipsometer to the same focal point on a sample. Preferred embodiments of the ellipsometer employ a rotating, minimal-length Rochon prism as a polarizer, and include a spectrometer with an intensified photodiode array to measure reflected radiation from the sample, and a reference channel (in addition to a sample channel which detects radiation reflected from the sample).
摘要翻译：使用反射光学器件的光谱椭偏仪的方法和系统通过从该区域反射辐射（优选宽带UV，可见光和近红外辐射）来测量样品的小区域。该系统优选地具有自动对焦组件和被编程用于根据测量结果确定样品上薄膜的厚度和/或复合折射率的处理器。优选地，沿着偏振器和分析器之间的光路仅采用反射光学元件，样品光束以反射光学器件的每个分量以低入射角反射，光束被反射聚焦到样品上的小的紧密斑点并且提供入射角选择元件用于仅选择仅以单个选定角度（或窄范围的角度）从样品反射的辐射。聚焦镜优选具有椭圆形以减少聚焦光束中的离轴像差。一些实施例包括作为单个仪器集成在一起的分光光度计和椭偏仪。在这种仪器中，分光光度计和椭偏仪共享一个辐射源，来自源的辐射可以通过分光光度计或椭偏仪聚焦到样品上的同一焦点。椭偏仪的优选实施例采用旋转的，最小长度的Rochon棱镜作为偏振器，并且包括具有增强的光电二极管阵列的光谱仪，以测量来自样品的反射辐射，以及参考通道（除了检测辐射的样品通道从样品）。

4. 发明申请

US20050105090A1 Focused beam spectroscopic ellipsometry method and system 审中-公开
标题翻译：聚焦光束椭偏仪的方法和系统
公开(公告)号：US20050105090A1
公开(公告)日：2005-05-19
申请号：US11007420
申请日：2004-12-07
申请人： Timothy Piwonka-Corle , Karen Scoffone , Xing Chen , Lloyd Lacomb , Jean-Louis Stehle , Dorian Zahorski , John-Pierre Rey
发明人： Timothy Piwonka-Corle , Karen Scoffone , Xing Chen , Lloyd Lacomb , Jean-Louis Stehle , Dorian Zahorski , John-Pierre Rey
IPC分类号： G01N21/21 , G01J4/00
CPC分类号： G01N21/211 , G01N2021/213
摘要： A method and system for spectroscopic ellipsometry employing reflective optics to measure a small region of a sample by reflecting radiation (preferably broadband UV, visible, and near infrared radiation) from the region. The system preferably has an autofocus assembly and a processor programmed to determine from the measurements the thickness and/or complex refractive index of a thin film on the sample. Preferably, only reflective optics are employed along the optical path between the polarizer and analyzer, a sample beam reflects with low incidence angle from each component of the reflective optics, the beam is reflectively focused to a small, compact spot on the sample at a range of high incidence angles, and an incidence angle selection element is provided for selecting for measurement only radiation reflected from the sample at a single, selected angle (or narrow range of angles). The focusing mirror preferably has an elliptical shape to reduce off-axis aberrations in the focused beam. Some embodiments include both a spectrophotometer and an ellipsometer integrated together as a single instrument. In such instrument, the spectrophotometer and ellipsometer share a radiation source, and radiation from the source can be focused by either the spectrophotometer or the ellipsometer to the same focal point on a sample. Preferred embodiments of the ellipsometer employ a rotating, minimal-length Rochon prism as a polarizer, and include a spectrometer with an intensified photodiode array to measure reflected radiation from the sample, and a reference channel (in addition to a sample channel which detects radiation reflected from the sample).
摘要翻译：使用反射光学器件的光谱椭偏仪的方法和系统通过从该区域反射辐射（优选宽带UV，可见光和近红外辐射）来测量样品的小区域。该系统优选地具有自动对焦组件和被编程用于根据测量结果确定样品上薄膜的厚度和/或复合折射率的处理器。优选地，沿着偏振器和分析器之间的光路仅采用反射光学元件，样品光束以反射光学器件的每个分量以低入射角反射，光束被反射聚焦到样品上的小的紧密斑点并且提供入射角选择元件用于仅选择仅以单个选定角度（或窄范围的角度）从样品反射的辐射。聚焦镜优选具有椭圆形以减少聚焦光束中的离轴像差。一些实施例包括作为单个仪器集成在一起的分光光度计和椭偏仪。在这种仪器中，分光光度计和椭偏仪共享一个辐射源，来自源的辐射可以通过分光光度计或椭偏仪聚焦到样品上的同一焦点。椭偏仪的优选实施例采用旋转的，最小长度的Rochon棱镜作为偏振器，并且包括具有增强的光电二极管阵列的光谱仪，以测量来自样品的反射辐射，以及参考通道（除了检测辐射的样品通道从样品）。

5. 发明授权

US5608526A Focused beam spectroscopic ellipsometry method and system 失效
标题翻译：聚焦光束椭偏仪的方法和系统
公开(公告)号：US5608526A
公开(公告)日：1997-03-04
申请号：US375353
申请日：1995-01-19
申请人： Timothy R. Piwonka-Corle , Karen F. Scoffone , Xing Chen , Lloyd J. Lacomb, Jr. , Jean-Louis Stehle , Dorian Zahorski , Jean-Pierre Rey
发明人： Timothy R. Piwonka-Corle , Karen F. Scoffone , Xing Chen , Lloyd J. Lacomb, Jr. , Jean-Louis Stehle , Dorian Zahorski , Jean-Pierre Rey
IPC分类号： G01N21/21
CPC分类号： G01N21/211 , G01N2021/213
摘要： A method and system for spectroscopic ellipsometry employing reflective optics to measure a small region of a sample by reflecting radiation (preferably broadband UV, visible, and near infrared radiation) from the region. The system preferably has an autofocus assembly and a processor programmed to determine from the measurements the thickness and/or complex refractive index of a thin film on the sample. Preferably, only reflective optics are employed along the optical path between the polarizer and analyzer, a sample beam reflects with low incidence angle from each component of the reflective optics, the beam is reflectively focused to a small, compact spot on the sample at a range of high incidence angles, and an incidence angle selection element is provided for selecting for measurement only radiation reflected from the sample at a single, selected angle (or narrow range of angles). The focusing mirror preferably has an elliptical shape,to reduce off-axis aberrations in the focused beam. Some embodiments include both a spectrophotometer and an ellipsometer integrated together as a single instrument. In such instrument, the spectrophotometer and ellipsometer share a radiation source, and radiation from the source can be focused by either the spectrophotometer or the ellipsometer to the same focal point on a sample. Preferred embodiments of the ellipsometer employ a rotating, minimal-length Rochon prism as a polarizer, and include a spectrometer with an intensified photodiode array to measure reflected radiation from the sample, and a reference channel (in addition to a sample channel which detects radiation reflected from the sample).
摘要翻译：使用反射光学器件的光谱椭偏仪的方法和系统通过从该区域反射辐射（优选宽带UV，可见光和近红外辐射）来测量样品的小区域。该系统优选地具有自动对焦组件和被编程用于根据测量结果确定样品上薄膜的厚度和/或复合折射率的处理器。优选地，沿着偏振器和分析器之间的光路仅采用反射光学元件，样品光束以反射光学器件的每个分量以低入射角反射，光束被反射聚焦到样品上的小的紧密斑点并且提供入射角选择元件用于仅选择仅以单个选定角度（或窄范围的角度）从样品反射的辐射。聚焦镜优选具有椭圆形状，以减少聚焦光束中的离轴像差。一些实施例包括作为单个仪器集成在一起的分光光度计和椭偏仪。在这种仪器中，分光光度计和椭偏仪共享一个辐射源，来自源的辐射可以通过分光光度计或椭偏仪聚焦到样品上的同一焦点。椭偏仪的优选实施例采用旋转的，最小长度的Rochon棱镜作为偏振器，并且包括具有增强的光电二极管阵列的光谱仪，以测量来自样品的反射辐射，以及参考通道（除了检测辐射的样品通道从样品）。

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