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    • 81. 发明授权
    • Method and device for plasma treatment
    • 等离子体处理的方法和装置
    • US06177646B1
    • 2001-01-23
    • US09180974
    • 1998-11-17
    • Tomohiro OkumuraIchiro NakayamaShozo WatanabeHideo Haraguchi
    • Tomohiro OkumuraIchiro NakayamaShozo WatanabeHideo Haraguchi
    • B23K900
    • H01J37/32522H01J37/321H01L21/3065
    • Plasma is generated in a vacuum chamber (1) by supplying high frequency power to a spiral antenna (5) from an antenna-use high frequency power source (4) and by supplying high frequency power to an electrode (6) by an electrode-use high frequency power source (8) in a state where evacuating a vacuum chamber (1) while introducing a specified gas into the vacuum chamber, thereby controlling the vacuum chamber at a predetermined pressure. Plasma processing such as etching is performed on a substrate (7) located on the electrode (6), the interior of the vacuum chamber is heated to 80° C. or higher, wherein a resistance-heating heater (11) constituted of a heating element shielded from electromagnetic waves by a conductive sheath and a pressure-weld type thermocouple (10) provided on a dielectric body (9) are connected to a temperature adjuster (12). A insulating material (13) is arranged between the heater (11) and the antenna (5), and an inner chamber (16) including a belt heater (22) is also arranged.
    • 通过从天线用高频电源(4)向螺旋天线(5)提供高频电力,并通过电极 - 电极(6)向电极(6)供给高频电力,在真空室(1)中产生等离子体, 在将特定气体引入真空室的同时,在真空室(1)抽真空的状态下使用高频电源(8),从而将真空室控制在规定的压力。 在位于电极(6)的基板(7)上进行蚀刻等离子体处理,将真空室的内部加热至80℃以上,由加热 通过导电护套屏蔽电磁波的元件和设置在电介质体(9)上的压焊型热电偶(10)连接到温度调节器(12)。 绝热材料(13)设置在加热器(11)和天线(5)之间,并且还布置有包括带加热器(22)的内室(16)。
    • 82. 发明授权
    • Plasma processing method and apparatus
    • 等离子体处理方法和装置
    • US5922223A
    • 1999-07-13
    • US749847
    • 1996-11-15
    • Tomohiro OkumuraHideo HaraguchiIchiro NakayamaYoshihiro Yanagi
    • Tomohiro OkumuraHideo HaraguchiIchiro NakayamaYoshihiro Yanagi
    • H01J37/32B23K10/00
    • H01J37/32522H01J37/321
    • A plasma processing method and apparatus, wherein evaluation is effected while a suitable gas is introduced into a vacuum vessel, and then a high frequency voltage is applied by a high frequency discharge coil power source to a spiral discharge coil while the interior of the vacuum vessel is kept under adequate pressure, whereby a high frequency magnetic field is generated within the vacuum vessel through a dielectric plate so that electrons are accelerated by an induction field due to the high frequency magnetic field to generate plasma within the vacuum vessel for processing a substrate, characterized in that the dielectric plate is heated by a planar heater to 80.degree. C. or more, whereby the thickness of a thin film to be deposited on the dielectric plate is substantially reduced thereby to inhibit dust generation and thus substantially reduce the frequency of maintenance required for the dielectric plate. The apparatus includes a ceramic plate formed with a discharge coil fixing groove and mounted on the dielectric plate, and the planar spiral discharge coil is mounted on the ceramic plate.
    • 一种等离子体处理方法和装置,其中在合适的气体被引入真空容器中时进行评价,然后通过高频放电线圈电源将高频电压施加到螺旋放电线圈,同时真空容器的内部 保持在足够的压力下,由此通过电介质板在真空容器内产生高频磁场,使得由于高频磁场而通过感应场加速电子,以在真空容器内产生用于处理衬底的等离子体, 其特征在于,通过平面加热器将电介质板加热至80℃以上,由此沉积在电介质板上的薄膜的厚度大大降低,从而抑制灰尘产生,从而显着降低维护频率 电介质板所需的。 该装置包括形成有放电线圈固定槽并安装在电介质板上的陶瓷板,并且平面螺旋放电线圈安装在陶瓷板上。
    • 84. 发明申请
    • GEL COMPOSITION FOR TREATING MYCOSIS
    • 用于治疗糖皮质激素的凝胶组合物
    • US20100317695A1
    • 2010-12-16
    • US12521483
    • 2007-12-28
    • Tomohiro OkumuraAkiko OchiaiKeizo SakudaYoshiyuki Tatsumi
    • Tomohiro OkumuraAkiko OchiaiKeizo SakudaYoshiyuki Tatsumi
    • A61K31/454A61P31/10
    • A61K31/454A61K9/0014A61K9/06A61K47/10A61K47/14A61K47/26A61K47/32
    • The present invention aims to provide a gel composition for mycosis treatment, which ensures good absorption and permeation of (2R,3R)-2-(2,4-difluorophenyl)-3-(4-methylenepiperidin-1-yl)-1-(1H-1,2,4-triazol-1-yl)-butan-2-ol into a target site (skin and nail). The present invention also aims to provide a gel composition for mycosis treatment, which is excellent in stability of this drug.It is a gel composition for mycosis treatment, which comprises (2R,3R)-2-(2,4-difluorophenyl)-3-(4-methylenepiperidin-1-yl)-1-(1H-1,2,4-triazol-1-yl)-butan-2-ol or an acid addition salt thereof, a lower alcohol, a polyhydric alcohol and a gel-forming polymer.The gel composition of the present invention is excellent in permeation of KP-103 into a target site and also excellent in permeation into the nail. Thus, the gel composition of the present invention allows the drug to be directly and rapidly absorbed and permeated into a target site in a constant manner, and thereby produces an excellent effect in mycosis treatment, particularly onychomycosis treatment.
    • 本发明旨在提供用于真菌病治疗的凝胶组合物,其确保(2R,3R)-2-(2,4-二氟苯基)-3-(4-亚甲基哌啶-1-基)-1- (1H-1,2,4-三唑-1-基) - 丁-2-醇转化成靶位点(皮肤和指甲)。 本发明的目的还在于提供一种用于真菌病治疗的凝胶组合物,该药物的稳定性优异。 它是用于真菌病治疗的凝胶组合物,其包含(2R,3R)-2-(2,4-二氟苯基)-3-(4-亚甲基哌啶-1-基)-1-(1H- 三唑-1-基) - 丁-2-醇或其酸加成盐,低级醇,多元醇和形成凝胶的聚合物。 本发明的凝胶组合物的KP-103在目标部位的渗透性优异,对于指甲的渗透性优异。 因此,本发明的凝胶组合物能够使药物以恒定的方式直接且快速地吸收并渗透到靶部位,从而在真菌病治疗,特别是甲真菌病治疗中产生优异的效果。
    • 85. 发明申请
    • PLASMA DISPLAY PANEL AND METHOD FOR PRODUCING THE SAME
    • 等离子显示面板及其制造方法
    • US20100289400A1
    • 2010-11-18
    • US12780073
    • 2010-05-14
    • Michiru KuromiyaTomohiro OkumuraMotoi Hatanaka
    • Michiru KuromiyaTomohiro OkumuraMotoi Hatanaka
    • H01J63/04H01J9/00
    • H01J11/12H01J9/02H01J11/38
    • A method for producing a plasma display panel comprising a front panel wherein an electrode, a dielectric layer and a protective layer are formed on a substrate of the front panel, a formation of the dielectric layer comprising: (i) preparing a dielectric material comprising a glass component, an organic solvent and silica particles; (ii) supplying the dielectric material onto the substrate having the electrode thereon, and then allowing the organic solvent contained in the supplied dielectric material to evaporate to form a dielectric precursor layer therefrom; (iii) heating the dielectric precursor layer to form a first dielectric layer therefrom; and (iv) heating the surface of the first dielectric layer as a local heat treatment to form a second dielectric layer to a limited depth from the surface of the first dielectric layer.
    • 一种用于制造等离子体显示面板的方法,其包括前面板,其中电极,电介质层和保护层形成在前面板的基板上,所述电介质层的形成包括:(i)制备介电材料,其包括: 玻璃成分,有机溶剂和二氧化硅粒子; (ii)将电介质材料供给到其上具有电极的基板上,然后允许包含在所提供的电介质材料中的有机溶剂蒸发以从其形成电介质前体层; (iii)加热所述电介质前体层以从其形成第一介电层; 和(iv)加热第一电介质层的表面作为局部热处理以形成距离第一电介质层的表面有限深度的第二电介质层。