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    • 84. 发明授权
    • Memory cell and method for manufacturing the same
    • 存储单元及其制造方法
    • US07342264B2
    • 2008-03-11
    • US11302738
    • 2005-12-13
    • Tzu-Hsuan HsuChao-I WuMing-Hsiu Lee
    • Tzu-Hsuan HsuChao-I WuMing-Hsiu Lee
    • H01L29/80H01L29/76
    • H01L21/28282H01L29/4234H01L29/66833H01L29/7851H01L29/7853H01L29/7923
    • The invention is directed to a memory cell on a substrate having a plurality of shallow trench isolations form therein, wherein top surfaces of the shallow trench isolations are lower than a top surface of the substrate and the shallow trench isolations together define a vertical fin structure of the substrate. The memory cell comprises a straddle gate, a carrier trapping structure and at least two source/drain regions. The straddle gate is located on the substrate and straddles over the vertical fin structure. The carrier trapping structure is located between the straddle gate and the substrate, wherein the carrier trapping structure comprises a trapping layer directly in contact with the straddle gate and a tunnel layer located between the trapping layer and the substrate. The source/drain regions are located in a portion of the vertical fin structure of the substrate exposed by the straddle gate.
    • 本发明涉及在其上形成有多个浅沟槽隔离物的衬底上的存储单元,其中浅沟槽隔离物的顶表面低于衬底的顶表面,并且浅沟槽隔离件一起限定垂直鳍状结构 底物。 存储单元包括跨门,载流子俘获结构和至少两个源/漏区。 跨门位于基板上,跨越垂直翅片结构。 载体捕获结构位于跨门和衬底之间,其中载流子俘获结构包括直接与跨骑门接触的捕获层和位于俘获层和基底之间的隧道层。 源极/漏极区域位于由跨门暴露的衬底的垂直鳍结构的一部分中。
    • 85. 发明授权
    • Method of operating non-volatile memory device
    • 操作非易失性存储器件的方法
    • US07266014B2
    • 2007-09-04
    • US11161359
    • 2005-08-01
    • Chao-I WuMing-Hsiu Lee
    • Chao-I WuMing-Hsiu Lee
    • G11C11/34
    • G11C16/0475G11C16/18
    • A method of operating a non-volatile memory is provided, wherein the non-volatile memory at least includes: a gate structure formed by stacking a tunneling dielectric layer, charge trapping layer, a dielectric layer and a gate conducting layer sequentially, and a source region and a drain region. When the operating method is carried out, a ultraviolet is irradiated to the non-volatile memory to inject electrons into the charge trapping layer to erase the non-volatile memory, and a negative voltage is applied to the gate conductive layer and a positive voltage is applied to the drain region to program the non-volatile memory by band-to-band induced hot hole injection.
    • 提供了一种操作非易失性存储器的方法,其中非易失性存储器至少包括:通过层叠隧穿介电层,电荷俘获层,电介质层和栅极导电层顺序地形成的栅极结构,以及源极 区域和漏极区域。 当执行操作方法时,紫外线照射到非易失性存储器以将电子注入电荷捕获层以擦除非易失性存储器,并且向栅极导电层施加负电压,并且正电压为 施加到漏极区域以通过频带带诱导的热空穴注入对非易失性存储器进行编程。
    • 86. 发明申请
    • Memory cell and method for manufacturing the same
    • 存储单元及其制造方法
    • US20070132000A1
    • 2007-06-14
    • US11302738
    • 2005-12-13
    • Tzu-Hsuan HsuChao-I WuMing-Hsiu Lee
    • Tzu-Hsuan HsuChao-I WuMing-Hsiu Lee
    • H01L29/788
    • H01L21/28282H01L29/4234H01L29/66833H01L29/7851H01L29/7853H01L29/7923
    • The invention is directed to a memory cell on a substrate having a plurality of shallow trench isolations form therein, wherein top surfaces of the shallow trench isolations are lower than a top surface of the substrate and the shallow trench isolations together define a vertical fin structure of the substrate. The memory cell comprises a straddle gate, a carrier trapping structure and at least two source/drain regions. The straddle gate is located on the substrate and straddles over the vertical fin structure. The carrier trapping structure is located between the straddle gate and the substrate, wherein the carrier trapping structure comprises a trapping layer directly in contact with the straddle gate and a tunnel layer located between the trapping layer and the substrate. The source/drain regions are located in a portion of the vertical fin structure of the substrate exposed by the straddle gate.
    • 本发明涉及在其上形成有多个浅沟槽隔离物的衬底上的存储单元,其中浅沟槽隔离物的顶表面低于衬底的顶表面,并且浅沟槽隔离件一起限定垂直鳍状结构 底物。 存储单元包括跨门,载流子俘获结构和至少两个源/漏区。 跨门位于基板上,跨越垂直翅片结构。 载体捕获结构位于跨门和衬底之间,其中载流子俘获结构包括直接与跨骑门接触的捕获层和位于俘获层和基底之间的隧道层。 源极/漏极区域位于由跨门暴露的衬底的垂直鳍结构的一部分中。