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    • 83. 发明申请
    • Non-volatile memory devices including dummy word lines and related structures and methods
    • 包括虚拟字线和相关结构和方法的非易失性存储器件
    • US20080013377A1
    • 2008-01-17
    • US11729169
    • 2007-03-28
    • Jong-Sun SelJung-Dal ChoiYoung-Woo ParkJin-Taek Park
    • Jong-Sun SelJung-Dal ChoiYoung-Woo ParkJin-Taek Park
    • G11C16/04
    • G11C16/0483G11C16/3427
    • A non-volatile memory device may include a semiconductor substrate including an active region at a surface thereof, a first memory cell string on the active region, and a second memory cell string on the active region. The first memory cell string may include a first plurality of word lines crossing the active region between a first ground select line and a first string select line, and about a same first spacing may be provided between adjacent ones of the first plurality of word lines. The second memory cell string may include a second plurality of word lines crossing the active region between a second ground select line and a second string select line, and about the same first spacing may be provided between adjacent ones of the second plurality of word lines. Moreover, the first ground select line may be between the second ground select line and the first plurality of word lines, and the second ground select line may be between the first ground select line and the second plurality of word lines. Moreover, portions of the active region between the first and second ground select lines may be free of word lines, and a second spacing between the first and second ground select lines may be at least about 3 times greater than the first spacing. Related methods are also discussed.
    • 非易失性存储器件可以包括半导体衬底,其包括其表面处的有源区,有源区上的第一存储单元串和有源区上的第二存储单元串。 第一存储单元串可以包括与第一地选择线和第一串选择线之间的有源区域交叉的第一多个字线,并且可以在第一多个字线中相邻的字线之间提供约相同的第一间隔。 第二存储单元串可以包括与第二接地选择线和第二串选择线之间的有源区域交叉的第二多个字线,并且可以在相邻的第二多个字线之间提供约相同的第一间隔。 此外,第一接地选择线可以在第二接地选择线和第一多个字线之间,并且第二接地选择线可以在第一接地选择线和第二多个字线之间。 此外,第一和第二接地选择线之间的有源区域的部分可以没有字线,并且第一和第二接地选择线之间的第二间隔可以比第一间隔大至少约3倍。 还讨论了相关方法。
    • 87. 发明申请
    • Nonvolatile memory devices and methods of forming the same
    • 非易失存储器件及其形成方法
    • US20060208338A1
    • 2006-09-21
    • US11375983
    • 2006-03-15
    • Chang-Hyun LeeJung-Dal ChoiChang-Seok KangYoo-Cheol ShinJong-Sun Sel
    • Chang-Hyun LeeJung-Dal ChoiChang-Seok KangYoo-Cheol ShinJong-Sun Sel
    • H01L29/00
    • H01L27/105B82Y10/00H01L21/823462H01L27/0629H01L27/11526H01L27/11546H01L27/11568
    • Methods of forming a memory device include forming a device isolation layer in a semiconductor substrate including a cell array region and a resistor region, the device isolation layer extending into the resistor region and defining an active region in the semiconductor substrate. A first conductive layer is formed on the device isolation layer in the resistor region. The semiconductor substrate is exposed in the cell array region. A cell insulation layer is formed on a portion of the semiconductor substrate including the exposed cell array region, the active region and the device isolation layer in the resistor region. A second conductive layer is formed on the cell insulation layer in the portion of the semiconductor substrate including the exposed cell array region, the active region and the device isolation layer in the resistor region. The second conductive layer is etched to form a cell gate electrode in the cell array region and to concurrently remove the second conductive layer from the resistor region and the first conductive layer is etched in the resistor region to form a resistor.
    • 形成存储器件的方法包括在包括单元阵列区域和电阻器区域的半导体衬底中形成器件隔离层,器件隔离层延伸到电阻器区域中并在半导体衬底中限定有源区域。 在电阻器区域中的器件隔离层上形成第一导电层。 半导体衬底暴露在电池阵列区域中。 在半导体衬底的包括电阻器区域中的暴露的电池阵列区域,有源区域和器件隔离层的部分上形成电池绝缘层。 在半导体衬底的包括电阻器区域中的暴露的电池阵列区域,有源区域和器件隔离层的部分中的单元绝缘层上形成第二导电层。 蚀刻第二导电层以在电池阵列区域中形成电池栅电极,并且同时从电阻器区域去除第二导电层,并且在电阻器区域中蚀刻第一导电层以形成电阻器。
    • 90. 发明申请
    • Semiconductor devices with sidewall conductive patterns methods of fabricating the same
    • 具有侧壁导电图案的半导体器件制造方法
    • US20060093966A1
    • 2006-05-04
    • US11241458
    • 2005-09-30
    • Jong-Sun SelJung-Dal ChoiJoon-Hee LeeHwa-Kyung Shin
    • Jong-Sun SelJung-Dal ChoiJoon-Hee LeeHwa-Kyung Shin
    • G03F7/00
    • H01L27/11526H01L21/28273H01L27/105H01L27/11529
    • A gate pattern is disclosed that includes a semiconductor substrate, a lower conductive pattern, an upper conductive pattern, and a sidewall conductive pattern. The lower conductive pattern is on the substrate. The insulating pattern is on the lower conductive pattern. The upper conductive pattern is on the insulating pattern opposite to the lower conductive pattern. The sidewall conductive pattern is on at least a portion of sidewalls of the upper conductive pattern and the lower conductive pattern. The sidewall conductive pattern electrically connects the upper conductive pattern and the lower conductive pattern. An upper edge portion of the lower conductive pattern may be recessed relative to a lower edge portion of the lower conductive pattern to define a ledge thereon. The sidewall conductive pattern may be directly on the ledge and sidewall of the recessed upper edge portion of the lower conductive pattern.
    • 公开了一种栅极图案,其包括半导体衬底,下导电图案,上导电图案和侧壁导电图案。 下导电图案在基板上。 绝缘图案位于下导电图案上。 上导电图案位于与下导电图案相对的绝缘图案上。 侧壁导电图案位于上导电图案和下导电图案的侧壁的至少一部分上。 侧壁导电图形电连接上导电图案和下导电图案。 下导电图案的上边缘部分可以相对于下导电图案的下边缘部分凹进,以在其上限定凸缘。 侧壁导电图案可以直接在下导电图案的凹陷的上边缘部分的凸缘和侧壁上。