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81. 发明授权

US08066892B2 Method for manufacturing a perpendicular magnetic write head with a wrap around shield 有权
标题翻译：用于围绕屏蔽制造垂直磁写头的方法
公开(公告)号：US08066892B2
公开(公告)日：2011-11-29
申请号：US12241751
申请日：2008-09-30
申请人： Hung-Chin Guthrie , Yimin Hsu , Ming Jiang , Sue Siyang Zhang
发明人： Hung-Chin Guthrie , Yimin Hsu , Ming Jiang , Sue Siyang Zhang
IPC分类号： B44C1/22
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315
摘要： A method for manufacturing a write pole for a perpendicular magnetic write head. The method employs a damascene process to construct the write pole with a very accurately controlled track width. The method includes depositing a layer of material that can be readily removed by reactive ion etching. This material can be referred to as a RIEable material. A mask is formed over the RIEable material and a reactive ion etching is performed to form a tapered trench in the RIEAble material. A CMP stop layer can the be deposited, and a write pole plated into the trench. A CMP can then be performed to define the trailing edge of the write pole. Another masking, etching and plating step can be performed to form a trailing, wrap-around magnetic shield.
摘要翻译：一种用于制造用于垂直磁写头的写极的方法。该方法采用镶嵌工艺构造具有非常精确控制的轨道宽度的写极点。该方法包括沉积可以通过反应离子蚀刻容易地去除的材料层。该材料可以称为可分级材料。在RIEable材料上形成掩模，并执行反应离子蚀刻以在RIEAble材料中形成锥形沟槽。可以将CMP停止层沉积，并将写入极电镀到沟槽中。然后可以执行CMP以限定写入极的后沿。可以执行另一掩模，蚀刻和电镀步骤以形成拖尾的环绕磁屏蔽。

82. 发明授权

US07881019B2 Two step corner recess for secondary stray field reduction in a perpendicular magnetic recording head 有权
标题翻译：用于垂直磁记录头中二次杂散场减少的两步拐角凹槽
公开(公告)号：US07881019B2
公开(公告)日：2011-02-01
申请号：US11391835
申请日：2006-03-28
申请人： Wen-Chien David Hsiao , Yimin Hsu , Ming Jiang , Vladimir Nikitin
发明人： Wen-Chien David Hsiao , Yimin Hsu , Ming Jiang , Vladimir Nikitin
IPC分类号： G11B5/33 , G11B5/127
CPC分类号： G11B5/1278 , G11B5/3116
摘要： A magnetic structure for use in a magnetic head for avoiding stray field writing. The magnetic structure can be for example a magnetic shield or could be a magnetic pole of a write head and is particularly advantageous for use in a perpendicular recording system, because such perpendicular recording systems are especially susceptible to stray field writing. The magnetic structure includes a forward protruding portion that extends toward the air bearing surface (ABS) of the head also includes first and second wing portions that extend laterally from the forward protruding portion. The wing portions each have includes an inner constant recess portion, and an outer tapered portion. The inner constant recess portion of each wing prevents stray field writing while also preventing magnetic saturation, the outer tapered portions, which taper away from the ABS as they extend laterally outward, further prevent stray field writing by removing the outer corners of the shield away from the ABS.
摘要翻译：用于磁头的磁结构，用于避免杂散场写入。磁性结构可以是例如磁屏蔽或者可以是写入磁头的磁极，并且对于在垂直记录系统中使用是特别有利的，因为这样的垂直记录系统特别容易受到杂散磁场写入的影响。磁性结构包括朝向头部的空气支承表面（ABS）延伸的向前突出部分还包括从前突出部分横向延伸的第一和第二翼部分。翼部各自包括内部恒定凹部和外锥形部。每个翼的内部恒定凹部防止杂散场写入，同时也防止磁饱和，当锥形横向向外延伸时，远离ABS逐渐变细的外锥形部分进一步防止杂散场写入，通过将屏蔽的外角除去 ABS。

83. 发明授权

US07764469B2 Notched shield and pole structure with slanted wing for perpendicular recording 有权
标题翻译：具有垂直记录的倾斜翼的缺口盾和杆结构
公开(公告)号：US07764469B2
公开(公告)日：2010-07-27
申请号：US10976479
申请日：2004-10-29
申请人： Kuok San Ho , Yimin Hsu , Ching Hwa Tsang
发明人： Kuok San Ho , Yimin Hsu , Ching Hwa Tsang
IPC分类号： G11B5/33
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/398
摘要： A magnetic structure for use in a magnetic head for avoiding stray field writing. The magnetic structure can be for example a magnetic shield or could be a magnetic pole of a write head and is particularly advantageous for use in a perpendicular recording system, because such perpendicular recording systems are especially susceptible to stray field writing. The magnetic structure includes a forward protruding portion that extends toward the air bearing surface (ABS) of the head also includes first and second wing portions that extend laterally from the forward protruding portion. The wing portions each have a front edge that is recessed from the ABS. The wings are tapered so that the amount of recess of the front edge of the wings increases with lateral distance from the center of the magnetic structure.
摘要翻译：用于磁头的磁结构，用于避免杂散场写入。磁性结构可以是例如磁屏蔽或者可以是写入磁头的磁极，并且对于在垂直记录系统中使用是特别有利的，因为这样的垂直记录系统特别容易受到杂散磁场写入的影响。磁性结构包括朝向头部的空气支承表面（ABS）延伸的向前突出部分还包括从前突出部分横向延伸的第一和第二翼部分。翼部各自具有从ABS凹入的前边缘。翅膀是锥形的，使得翼的前边缘的凹部的数量随着与磁性结构的中心的横向距离而增加。

84. 发明授权

US07757380B2 Methods for the manufacture of notched trailing shields 失效
标题翻译：开槽后挡板的制造方法
公开(公告)号：US07757380B2
公开(公告)日：2010-07-20
申请号：US11595654
申请日：2006-11-10
申请人： Amanda Baer , Hung-chin Guthrie , Yimin Hsu , Ming Jiang , Aron Pentek
发明人： Amanda Baer , Hung-chin Guthrie , Yimin Hsu , Ming Jiang , Aron Pentek
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/1278 , G11B5/112 , G11B5/3163 , Y10T29/49032 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： Methods for improving within wafer and wafer to wafer yields during fabrication of notched trailing shield structures are disclosed. Ta/Rh CMP stop layers are deposited prior to planarization and notch formation to ensure a planar surface for trailing shield structures. These stop layers may be blanket deposited or patterned prior to CMP. Patterned stop layers produce the highest yields.
摘要翻译：公开了在制造缺口尾部屏蔽结构期间在晶片和晶片之间改善晶片产量的方法。在平坦化和切口形成之前沉积Ta / Rh CMP停止层以确保用于尾部屏蔽结构的平坦表面。这些停止层可以在CMP之前被毯式沉积或图案化。图案化的停止层产生最高的产量。

85. 发明申请

US20100166943A1 TECHNIQUE FOR MEASURING PROCESS INDUCED MAGNETIC ANISOTROPY IN A MAGNETORESISTIVE SENSOR 有权
标题翻译：磁传感器中测量过程诱导磁性异相的技术
公开(公告)号：US20100166943A1
公开(公告)日：2010-07-01
申请号：US12345745
申请日：2008-12-30
申请人： Yimin Hsu , Arley Cleveland Marley
发明人： Yimin Hsu , Arley Cleveland Marley
IPC分类号： C23C16/52
CPC分类号： G11B5/455 , B82Y25/00 , G01R33/028 , G01R33/091 , G11B5/3173 , G11B5/3932 , H01F10/3254 , H01F10/3272
摘要： A method for determining a magnetic anisotropy of a free layer of a magnetoresistive sensor. The method includes forming a functional magnetoresistive sensor and also a test sensor on a wafer. The test sensor has a sensor stack that is identical to that of the functional sensor, however the test head does not have a magnetic bias structure for biasing the free layer. A series of tests can be performed to construct a transfer curve for the test sensor. This can then be used to determine a magnetic anisotropy of the test head, which also corresponds to a magnetic anisotropy of the functional head.
摘要翻译：用于确定磁阻传感器的自由层的磁各向异性的方法。该方法包括在晶片上形成功能磁阻传感器以及测试传感器。测试传感器具有与功能传感器相同的传感器堆叠，然而测试头不具有用于偏置自由层的磁偏置结构。可以进行一系列测试以构建测试传感器的传递曲线。这可以用于确定测试头的磁各向异性，其也对应于功能头的磁各向异性。

86. 发明申请

US20100078406A1 METHOD FOR MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD WITH A WRAP AROUND SHIELD 有权
标题翻译：用于制造具有附着力的扁平磁头写入头的方法
公开(公告)号：US20100078406A1
公开(公告)日：2010-04-01
申请号：US12241751
申请日：2008-09-30
申请人： Hung-Chin Guthrie , Yimin Hsu , Ming Jiang , Sue Siyang Zhang
发明人： Hung-Chin Guthrie , Yimin Hsu , Ming Jiang , Sue Siyang Zhang
IPC分类号： B44C1/22
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315
摘要： A method for manufacturing a write pole for a perpendicular magnetic write head. The method employs a damascene process to construct the write pole with a very accurately controlled track width. The method includes depositing a layer of material that can be readily removed by reactive ion etching. This material can be referred to as a RIEable material. A mask is formed over the RIEable material and a reactive ion etching is performed to form a tapered trench in the RIEAble material. A CMP stop layer can the be deposited, and a write pole plated into the trench. A CMP can then be performed to define the trailing edge of the write pole. Another masking, etching and plating step can be performed to form a trailing, wrap-around magnetic shield.
摘要翻译：一种用于制造用于垂直磁写头的写极的方法。该方法采用镶嵌工艺构造具有非常精确控制的轨道宽度的写极点。该方法包括沉积可以通过反应离子蚀刻容易地去除的材料层。该材料可以称为可分级材料。在RIEable材料上形成掩模，并执行反应离子蚀刻以在RIEAble材料中形成锥形沟槽。可以将CMP停止层沉积，并将写入极电镀到沟槽中。然后可以执行CMP以限定写入极的后沿。可以执行另一掩模，蚀刻和电镀步骤以形成拖尾的环绕磁屏蔽。

87. 发明授权

US07656611B2 Laminated high moment magnetic films antiferromagnetic coupling as write pole of perpendicular magnetic recording head 失效
标题翻译：层叠高力矩磁性膜反铁磁耦合作为垂直磁记录头的写极
公开(公告)号：US07656611B2
公开(公告)日：2010-02-02
申请号：US10927875
申请日：2004-08-27
申请人： Yinshi Liu , Nian-Xiang Sun , Yunxiao Gao , Yimin Hsu , Tomohiro Okada , Yasuyuki Okada
发明人： Yinshi Liu , Nian-Xiang Sun , Yunxiao Gao , Yimin Hsu , Tomohiro Okada , Yasuyuki Okada
IPC分类号： G11B5/147 , G11B5/31
CPC分类号： G11B5/1278
摘要： A perpendicular write head includes a main pole comprising high moment magnetic layers laminated with both soft magnetic layers and non-magnetic layers for antiferromagnetic coupling (AFC) between the high moment material layers. The perpendicular write head includes a return pole connected to the main pole by a back gap closure at a distal end and separated from the main pole by a gap at an air bearing surface (ABS). A write coil is positioned between the main pole and the return pole and the surface area of the return pole at the ABS is substantially larger than the surface area of the main pole at the ABS.
摘要翻译：垂直写头包括主极，其包括在高力矩材料层之间层叠有软磁层和用于反铁磁耦合（AFC）的非磁性层的高力矩磁层。垂直写头包括通过在远端处的后间隙闭合连接到主极的返回极，并且通过空气轴承表面（ABS）处的间隙与主极分离。写入线圈位于主极和返回极之间，并且ABS处的返回极的表面积基本上大于ABS处的主极的表面积。

88. 发明授权

US07551396B2 Perpendicular magnetic write head having a studded trailing shield compatible with read/write offset 失效
标题翻译：垂直磁写头，具有与读/写偏移兼容的镶嵌后盾
公开(公告)号：US07551396B2
公开(公告)日：2009-06-23
申请号：US11116796
申请日：2005-04-27
申请人： Yimin Hsu , Quang Le , Roger William Wood
发明人： Yimin Hsu , Quang Le , Roger William Wood
IPC分类号： G11B5/147
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3143 , G11B5/3163 , G11B5/3967
摘要： A studded trailing shield design and method for manufacture thereof. The studded trailing shield design maintains critical spacing between the trailing shield and the write pole and also maintains critical spacing between the studded, trailing shield connecting structure, even in a head design having read and write elements that are not aligned with one another.
摘要翻译：一种镶嵌的后盾设计及其制造方法。即使在具有不相互对准的读取和写入元件的头部设计中，镶嵌的后屏蔽设计保持了尾部屏蔽和写入极之间的关键间隔，并且还保持了镶嵌的后屏蔽连接结构之间的关键间隔。

89. 发明申请

US20090141397A1 PERPENDICULAR MAGNETIC WRITE HEAD WITH STEPPED WRITE POLE FOR REDUCED MCW DEPENDENCY ON SKEW ANGLE 有权
标题翻译：具有逐步写入功能的扁平磁头，用于减少MCW依赖于角度角
公开(公告)号：US20090141397A1
公开(公告)日：2009-06-04
申请号：US11949620
申请日：2007-12-03
申请人： Wen-Chien David Hsiao , Yimin Hsu , Quan-chiu Harry Lam , Yansheng Luo , Vladimir Nikitin , Changqing Shi
发明人： Wen-Chien David Hsiao , Yimin Hsu , Quan-chiu Harry Lam , Yansheng Luo , Vladimir Nikitin , Changqing Shi
IPC分类号： G11B5/127 , G11B5/23
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3146 , G11B5/315
摘要： A magnetic write head for perpendicular magnetic data recording having a notched write pole for reduced magnetic core width (MCW) dependence on skew. The write pole is configured with a notch that can extend to or slightly beyond the flare point of the write pole, and is formed on the leading portion of the write pole. The notch can have a notch depth, as measured from the ABS of 50-200 nm or about 120 nm. The notch can have a notch height, measured in the down track direction that is 40-90 nm or 20-90 percent of the write pole height.
摘要翻译：用于垂直磁数据记录的磁写头，具有用于减小磁芯宽度（MCW）的偏斜写入极对偏斜的依赖性。写入极配置有可以延伸到或稍微超过写入极的闪点的凹口，并且形成在写入极的引导部分上。切口可以具有从50-200nm或约120nm的ABS测量的切口深度。切口可以具有沿向下方向测量的切口高度，其为40-90nm或写入极高度的20-90％。

90. 发明授权

US07538976B2 Trailing shield design for reducing wide area track erasure (water) in a perpendicular recording system 失效
标题翻译：拖尾盾设计，用于减少垂直记录系统中的广域轨迹擦除（水）
公开(公告)号：US07538976B2
公开(公告)日：2009-05-26
申请号：US11412017
申请日：2006-04-25
申请人： Wen-Chien David Hsiao , Yimin Hsu , Vladimir Nikitin
发明人： Wen-Chien David Hsiao , Yimin Hsu , Vladimir Nikitin
IPC分类号： G11B5/127
CPC分类号： G11B5/3146 , G11B5/11 , G11B5/1278 , G11B5/3116
摘要： A magnetic structure for use in a magnetic head for avoiding wide angle track erasure and other forms of adjacent track interference. The magnetic structure includes a trailing shield having a specially configured back edge opposite the air bearing surface ABS. The magnetic shield has a shallow substantially constant throat height at a center portion. Then, the back edge of the shield tapers back away from the ABS in first and second intermediate portion located at either side of the center portion. These intermediate portions lead to first and second outer portions that have substantially constant throat heights that are larger than the throat height at the center region. The throat height at each of the laterally outer portions can be 1.5 to 5 times the throat height of the center portion. This configuration, chokes off stray fields that might be picked up by the outer portions of the shield preventing excessive magnetic flux from reaching the central portion of the shield where it might affect writing. In addition, the limited throat height of the outer portion (ie. the back edge of the outer portions does not keep tapering back away from the ABS) prevents the outer portions from picking up too much stray magnetic field, while also ensuring that sufficient magnetic material will be present to absorb desired magnetic field from the write pole during use.
摘要翻译：用于磁头的磁结构，用于避免广角跟踪擦除和其他形式的相邻轨道干扰。磁性结构包括后挡板，其具有与空气轴承表面ABS相对的特殊配置的后边缘。磁屏蔽件在中心部分具有浅实质上恒定的喉部高度。然后，屏蔽件的后边缘在位于中心部分两侧的第一和第二中间部分中从ABS逐渐变细。这些中间部分导致第一和第二外部部分具有大于喉部高度在中心区域处大致恒定的喉部高度。每个横向外部部分的喉部高度可以是中心部分的喉部高度的1.5至5倍。这种构造可以消除可能由屏蔽外部拾取的杂散场，防止过多的磁通量到达屏蔽的中心部分，从而可能影响写入。此外，外部部分的限制喉部高度（即，外部部分的后边缘不保持从ABS退回）防止外部部分拾取太多的杂散磁场，同时还确保足够的磁将存在材料以在使用期间从写入极吸收期望的磁场。

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