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81. 发明授权

US06351305B1 Exposure apparatus and exposure method for transferring pattern onto a substrate 失效
标题翻译：用于将图案转印到基板上的曝光装置和曝光方法
公开(公告)号：US06351305B1
公开(公告)日：2002-02-26
申请号：US09173530
申请日：1998-10-15
申请人： Masahi Tanaka , Masato Kumazawa , Kinya Kato , Masaki Kato , Hiroshi Chiba , Hiroshi Shirasu
发明人： Masahi Tanaka , Masato Kumazawa , Kinya Kato , Masaki Kato , Hiroshi Chiba , Hiroshi Shirasu
IPC分类号： G03B2732
CPC分类号： G02B17/0892 , G02B13/22 , G02B17/002 , G02B17/008 , G02B17/045 , G02B17/0605 , G02B17/08 , G02B17/0812 , G02B17/082 , G02B17/0828 , G02B17/086 , G02B27/144 , G02B27/145 , G03B27/32 , G03F7/70066 , G03F7/70216 , G03F7/70225 , G03F7/70241 , G03F7/70275 , G03F7/70358 , G03F7/70791
摘要： An exposure method includes first through third steps. In the first step, respective first and second illumination regions of a mask having a predetermined pattern are illuminated with an illumination light having a predetermined wavelength. In the second step, an image of the mask is formed, respectively, in first and second exposure regions (formed on a substrate) based on the illumination that passes through the first and second illumination regions. The first and second exposure regions each have a substantially polygonal shape defined by two parallel sides and two sides other than the two parallel sides. In the third step, the first and second exposure regions and the substrate are moved relatively in a first direction such that the first and second exposure regions are formed in different positions in a second direction which crosses the first direction.
摘要翻译：曝光方法包括第一至第三步骤。在第一步骤中，用具有预定波长的照明光照射具有预定图案的掩模的相应的第一和第二照明区域。在第二步骤中，基于通过第一和第二照明区域的照明，分别在第一和第二曝光区域（形成在基板上）形成掩模的图像。第一曝光区域和第二曝光区域各自具有由两个平行侧和除了两个平行侧之外的两个侧面限定的大致多边形形状。在第三步骤中，第一和第二曝光区域和衬底相对于第一方向移动，使得第一和第二曝光区域在与第一方向交叉的第二方向上形成在不同的位置。

82. 发明授权

US5625436A Scanning type exposure apparatus and exposure method 失效
标题翻译：扫描式曝光装置和曝光方法
公开(公告)号：US5625436A
公开(公告)日：1997-04-29
申请号：US689691
申请日：1996-08-13
申请人： Masamitsu Yanagihara , Susumu Mori , Tsuyoshi Naraki , Masami Seki , Seiji Miyazaki , Tsuyoshi Narabe , Hiroshi Chiba
发明人： Masamitsu Yanagihara , Susumu Mori , Tsuyoshi Naraki , Masami Seki , Seiji Miyazaki , Tsuyoshi Narabe , Hiroshi Chiba
IPC分类号： G03F7/20 , G03F9/00 , H01L21/027
CPC分类号： G03F7/70275 , G03F7/70241 , G03F7/70258 , G03F7/70358 , G03F7/70858 , G03F7/70883 , G03F9/70
摘要： In a scanning type exposure apparatus for exposing an entire surface of a pattern region on a mask to a substrate by scanning the mask and the substrate with respect to a projection optical system in a predetermined direction with a speed ratio in accordance with a magnification of the projection optical system, there are provided a plurality of illumination optical systems for illuminating respective areas of the pattern region on the mask with respective light fluxes from respective light source; a plurality of projection optical systems arranged so as to correspond to the respective illumination optical systems, the projection optical systems projecting respective images of the areas illuminated by the respective illumination optical systems onto respective projection areas on the substrate; a memory device for obtaining and storing a change of shape of the substrate; a magnification changing device for changing a magnification of at least one of the projection optical systems in accordance with the change of shape of the substrate; and an imaging position changing device for changing the position of said image projected via the at least one projection optical systems in accordance with the change in magnification.
摘要翻译：在扫描型曝光装置中，通过以与所述掩模和所述基板相对于所述投影光学系统的倍率相对于投影光学系统沿预定方向扫描所述掩模上的图案区域的整个表面，提供了多个照明光学系统，用于利用来自各个光源的各个光束照射掩模上的图案区域的各个区域; 多个投影光学系统被布置为对应于各个照明光学系统，所述投影光学系统将由各个照明光学系统照射的区域的各个图像投射到所述基板上的相应的投影区域上; 用于获取和存储基板的形状变化的存储装置; 放大率改变装置，用于根据基板的形状变化来改变至少一个投影光学系统的放大率; 以及成像位置改变装置，用于根据放大率的变化改变经由至少一个投影光学系统投影的所述图像的位置。

83. 发明授权

US08792039B2 Obstacle detection display device 有权
标题翻译：障碍物检测显示装置
公开(公告)号：US08792039B2
公开(公告)日：2014-07-29
申请号：US13140112
申请日：2010-01-19
申请人： Shinichiro Hirooka , Hiroshi Chiba
发明人： Shinichiro Hirooka , Hiroshi Chiba
IPC分类号： H04N5/222
CPC分类号： H04N5/23293 , B60R1/00 , B60R2300/307 , G06K9/00805 , G06T5/006 , H04N5/23238 , H04N5/2628 , H04N5/272
摘要： An obstacle detection display device, for enabling to display the information of a result of image recognition at high accuracy, at high speed and without position error of shift, even for an image photographed by a wide-angle camera, is constructed with: an image pickup means; an image correcting means for executing geometrical correction upon a video signal outputted from the image pickup means through image processing, and thereby outputting it; an image recognizing means for detecting object information by executing image processing on the video signal outputted from the image correcting means; a display information producing means for determining display information and display position in the video signal, to be presented to a user, being superimposed on the video signal, which is outputted by the image pickup means, upon basis of the object information detected by the image recognizing means, and thereby outputting them; and a display information superimposing means for superimposing the display information outputted by the display information producing means upon the video signal outputted from the image pickup means, upon basis of the display information outputted by the display information producing means. The display information producing means executes correction calculation upon the display position, by taking an error of positions on the video signal, between the video signal outputted by the image correcting means and the video signal outputted from the image pickup means, into the consideration thereof, when determining the display position of the display information to be superimposed on the video signal outputted by the image pickup means.
摘要翻译：一种障碍物检测显示装置，即使对于由广角摄像机拍摄的图像，也能够以高精度，高速度，无偏移位置误差显示图像识别结果的信息，具有：图像拾取手段; 图像校正装置，用于通过图像处理对从图像拾取装置输出的视频信号执行几何校正，从而将其输出; 图像识别装置，用于通过对从图像校正装置输出的视频信号执行图像处理来检测对象信息; 显示信息产生装置，用于根据由图像检测到的对象信息，确定叠加在由图像拾取装置输出的视频信号上的要呈现给用户的视频信号中的显示信息和显示位置识别装置，从而输出它们; 以及显示信息叠加装置，用于根据由显示信息产生装置输出的显示信息，将由显示信息产生装置输出的显示信息叠加在从图像拾取装置输出的视频信号上。显示信息产生装置在显示位置上执行对图像校正装置输出的视频信号和从图像拾取装置输出的视频信号之间的视频信号上的位置的误差的校正计算到其考虑中，当确定要叠加在由图像拾取装置输出的视频信号上的显示信息的显示位置时。

84. 发明授权

US07956984B2 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus 有权
标题翻译：曝光装置，光学投影装置和调整光学投影装置的方法
公开(公告)号：US07956984B2
公开(公告)日：2011-06-07
申请号：US12078863
申请日：2008-04-07
申请人： Masashi Tanaka , Kinya Kato , Masaki Kato , Hiroshi Chiba
发明人： Masashi Tanaka , Kinya Kato , Masaki Kato , Hiroshi Chiba
IPC分类号： G03B27/42 , G03B27/54
CPC分类号： G02B17/0892 , G02B13/22 , G02B17/002 , G02B17/008 , G02B17/045 , G02B17/0605 , G02B17/08 , G02B17/0812 , G02B17/082 , G02B17/0828 , G02B17/086 , G02B27/144 , G02B27/145 , G03B27/32 , G03F7/70066 , G03F7/70216 , G03F7/70225 , G03F7/70241 , G03F7/70275 , G03F7/70358 , G03F7/70791
摘要： An apparatus includes a plurality of projection optical systems, each including optical elements arranged in an optical path between a first plane and a second plane and forming a radiation pattern from the first plane onto an exposure field on the second plane via the optical elements. A movable portion is disposed in the side of the second plane with respect to the projection optical systems, which holds an object to be moved relative to the exposure field in a first direction in the second plane during scanning exposure of the object in which the radiation patterns are formed on the object as the object is moved in the first direction. The projection optical systems may include an adjustable wedge prism. The projection optical systems may include first and second optical units, optical axes of the first and second optical units being decentered from each other.
摘要翻译：一种装置包括多个投影光学系统，每个投影光学系统包括布置在第一平面和第二平面之间的光路中的光学元件，并且通过光学元件将第一平面的辐射图形形成在第二平面上的曝光场上。可移动部分相对于投影光学系统设置在第二平面的侧面，该投影光学系统在扫描曝光期间在第二平面中沿第一方向相对于曝光场移动物体，其中辐射当物体沿第一方向移动时，在物体上形成图案。投影光学系统可以包括可调楔形棱镜。投影光学系统可以包括第一和第二光学单元，第一和第二光学单元的光轴彼此偏心。

85. 发明申请

US20100190034A1 SURFACE TREATMENT, SURFACE-TREATED HEAD SLIDER OR MAGNETIC RECORDING MEDIUM, AND MAGNETIC RECORDING-REPRODUCING DEVICE 审中-公开
标题翻译：表面处理，表面处理头滑块或磁记录介质和磁记录重现装置
公开(公告)号：US20100190034A1
公开(公告)日：2010-07-29
申请号：US12565514
申请日：2009-09-23
申请人： Yoshiaki IKAI , Hiroshi Chiba , Susumu Ogata , Masayuki Takeda
发明人： Yoshiaki IKAI , Hiroshi Chiba , Susumu Ogata , Masayuki Takeda
IPC分类号： G11B5/33 , C23C16/44
CPC分类号： G11B5/8408 , G11B5/102 , G11B5/3106 , G11B5/40 , Y10T428/11
摘要： A novel technology for lowering the surface free energy is provided. A treatment surface is irradiated with ultraviolet light in a gas containing a fluorine-containing organic substance, thereby forming a coating layer on the treatment surface.
摘要翻译：提供了一种用于降低表面自由能的新技术。在含有有机物质的气体中用紫外线照射处理面，从而在处理面上形成被覆层。

86. 发明申请

US20090046388A1 HEAD SLIDER HAVING LUBRICANT LAYER ON ITS FLOATING SURFACE 审中-公开
标题翻译：在其浮动表面上具有润滑剂层的滑块
公开(公告)号：US20090046388A1
公开(公告)日：2009-02-19
申请号：US12190891
申请日：2008-08-13
申请人： Susumu Ogata , Hiroshi Chiba
发明人： Susumu Ogata , Hiroshi Chiba
IPC分类号： G11B5/60
CPC分类号： G11B5/40 , G11B5/102 , G11B5/3163 , G11B5/6082
摘要： A head slider that includes a slider body having a air bearing surface, a magnetic head provided on the slider body, and a lubricant layer disposed on the air bearing surface, the lubricant layer being composed of a fluorocarbon resin.
摘要翻译：一种头滑动器，包括具有空气轴承表面的滑块主体，设置在滑块体上的磁头和设置在空气轴承表面上的润滑剂层，润滑层由氟碳树脂构成。

87. 发明申请

US20080259497A1 Magnetic recording medium, head slider and manufacturing methods therefore 有权
标题翻译：磁记录介质，磁头滑块及制造方法
公开(公告)号：US20080259497A1
公开(公告)日：2008-10-23
申请号：US11986517
申请日：2007-11-21
申请人： Norikazu Nakamura , Hiroshi Chiba , Yoshiharu Kasamatsu , Takayuki Musashi , Yukiko Oshikubo , Tsukasa Itani
发明人： Norikazu Nakamura , Hiroshi Chiba , Yoshiharu Kasamatsu , Takayuki Musashi , Yukiko Oshikubo , Tsukasa Itani
IPC分类号： G11B5/60
CPC分类号： G11B5/725 , G11B5/82
摘要： A magnetic recording medium and head slider that can furnish excellent head flying stability, a magnetic recording device having excellent head flying stability, and a method for manufacturing, in a short time, a magnetic recording medium and head slider that can furnish such excellent head flying stability, are provided. For both of the magnetic recording medium and head slider, the protective layers are each composed of two layers, that is, a lower layer and an upper layer thereon; the ionization potential of the lower layer is made to be smaller than that of the upper layer; and the surface free energy of the upper layer is made to be 45 mN/m or less.
摘要翻译：能够提供优异的头部飞行稳定性的磁记录介质和磁头滑动器，具有优异的头部飞行稳定性的磁记录装置，以及在短时间内制造能够提供优异的头部飞行的磁记录介质和磁头滑块的方法稳定性。对于磁记录介质和磁头滑块，保护层各自由两层构成，即下层和上层; 使下层的电离电位小于上层的电离电位; 上层的表面自由能为45mN / m以下。

88. 发明申请

US20080218889A1 INFORMATION TRANSFER MASTER FOR MAGNETIC TRANSFER AND MAGNETIC TRANSFER METHOD 审中-公开
标题翻译：用于磁传输和磁传输方法的信息传输主体
公开(公告)号：US20080218889A1
公开(公告)日：2008-09-11
申请号：US12042173
申请日：2008-03-04
申请人： Sumio Kuroda , Hiroshi Chiba , Tsugito Maruyama
发明人： Sumio Kuroda , Hiroshi Chiba , Tsugito Maruyama
IPC分类号： G11B5/86
CPC分类号： G11B5/865 , B82Y10/00 , G11B5/743
摘要： An information transfer master has servo information pattern to be magnetically transferred to a magnetic recording medium having a lubrication layer thereon; and a contact surface to contact the magnetic recording medium has surface free energy that is 45 mN/m or less when the servo information pattern is magnetically transferred.
摘要翻译：信息传送主机具有磁性传递到其上具有润滑层的磁记录介质的伺服信息模式; 并且与磁记录介质接触的接触面在伺服信息图案被磁性传递时具有45mN / m以下的表面自由能。

89. 发明申请

US20080081220A1 Magnetic disk drive having a surface coating on a magnetic disk 审中-公开
公开(公告)号：US20080081220A1
公开(公告)日：2008-04-03
申请号：US11985414
申请日：2007-11-15
申请人： Keiji Watanabe , Hiroshi Chiba , Eishin Yamakawa , Tsukasa Itani , Norikazu Nakamura , Shoichi Suda , Masayuki Takeda , Kazuaki Kurihara
发明人： Keiji Watanabe , Hiroshi Chiba , Eishin Yamakawa , Tsukasa Itani , Norikazu Nakamura , Shoichi Suda , Masayuki Takeda , Kazuaki Kurihara
IPC分类号： G11B5/725
CPC分类号： C23C14/024 , C23C14/0605 , G11B5/725 , G11B5/8408 , Y10T428/1164
摘要： A magnetic disk is produced with improved yield by forming a DLC protective film by a d.c. magnetron sputtering process conducted in a sputtering atmosphere containing oxygen. The magnetic disk carries a lubricating film on the DLC film wherein a fluorocarbon resin constituting the lubricating film contains photocrosslinking groups. A lubricating film having non-polar end groups is also disclosed.

90. 发明申请

US20070225183A1 Lubricant, magnetic recording medium and head slider 审中-公开
公开(公告)号：US20070225183A1
公开(公告)日：2007-09-27
申请号：US11723962
申请日：2007-03-22
申请人： Masaaki Sasa , Hiroshi Chiba , Makoto Okada
发明人： Masaaki Sasa , Hiroshi Chiba , Makoto Okada
IPC分类号： C10M107/38 , G11B5/71
CPC分类号： G11B5/725 , C10M107/38 , C10M2213/043 , C10M2217/065 , C10M2223/083 , C10M2225/003 , C10N2230/56 , C10N2240/204
摘要： A lubricant is provided that can form a sufficiently thin one-molecule film surface even when it is highly polymerized. When used for a magnetic recording medium lubricant layer and/or a head slider lubricant layer of a magnetic recording device, it can make the film thickness of the lubricant layers very small, with the result that it can furnish an increased reliability to the magnetic recording device in a wide temperature-range environment without damaging the flying stability. This lubricant comprises a fluorine-containing polymer having a specific structure. Such a fluorine-containing polymer can be manufactured by reacting a compound having a specific structure and 1,3-butadiene diepoxide.

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