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71. 发明授权

US07040130B2 Method and apparatus for forming discrete microcavities in a filament wire using microparticles 有权
标题翻译：使用微粒在丝线中形成离散微腔的方法和装置
公开(公告)号：US07040130B2
公开(公告)日：2006-05-09
申请号：US10685262
申请日：2003-10-14
申请人： Xinbing Liu , Ming Li , Makoto Ishizuka , Daniel Hogan , Kazuaki Ohkubo , Mitsuhiko Kimoto
发明人： Xinbing Liu , Ming Li , Makoto Ishizuka , Daniel Hogan , Kazuaki Ohkubo , Mitsuhiko Kimoto
IPC分类号： B21J1/00 , B24C11/00
CPC分类号： B21F99/00 , B21C37/045 , B21F45/00 , B24C1/10 , B24C3/12
摘要： A microcavity forming device is provided for making microcavities in a tungsten wire. The microcavity forming device includes a source of particles; a housing for receiving a heated tungsten wire; and a plurality of jet nozzles disposed in the housing for spraying the particles toward the heated tungsten wire. The particles are 0.35–0.75 micron in diameter. The heated tungsten wire is received in the housing and the jet nozzles spray the particles toward the tungsten wire to form the microcavities in the tungsten wire.
摘要翻译：提供了一种用于在钨丝中制造微腔的微腔形成装置。微腔形成装置包括颗粒源; 用于接收加热的钨丝的外壳; 以及设置在壳体中的多个喷嘴，用于将颗粒喷射到加热的钨丝上。颗粒直径为0.35-0.75微米。加热的钨丝被容纳在壳体中，喷嘴将颗粒喷射到钨丝上以形成钨丝中的微腔。

72. 发明申请

US20050076689A1 Method and apparatus for forming discrete microcavities in a filament wire using microparticles 有权
标题翻译：使用微粒在丝线中形成离散微腔的方法和装置
公开(公告)号：US20050076689A1
公开(公告)日：2005-04-14
申请号：US10685262
申请日：2003-10-14
申请人： Xinbing Liu , Ming Li , Makoto Ishizuka , Daniel Hogan , Kazuaki Ohkubo , Mitsuhiko Kimoto
发明人： Xinbing Liu , Ming Li , Makoto Ishizuka , Daniel Hogan , Kazuaki Ohkubo , Mitsuhiko Kimoto
IPC分类号： H01K1/14 , B21C37/04 , B21F45/00 , B21F99/00 , B24C1/10 , B24C3/12 , H01K3/02 , H01K3/04 , B21J1/00
CPC分类号： B21F99/00 , B21C37/045 , B21F45/00 , B24C1/10 , B24C3/12
摘要： A microcavity forming device is provided for making microcavities in a tungsten wire. The microcavity forming device includes a source of particles; a housing for receiving a heated tungsten wire; and a plurality of jet nozzles disposed in the housing for spraying the particles toward the heated tungsten wire. The particles are 0.35-0.75 micron in diameter. The heated tungsten wire is received in the housing and the jet nozzles spray the particles toward the tungsten wire to form the microcavities in the tungsten wire.
摘要翻译：提供了一种用于在钨丝中制造微腔的微腔形成装置。微腔形成装置包括颗粒源; 用于接收加热的钨丝的外壳; 以及设置在壳体中的多个喷嘴，用于将颗粒喷射到加热的钨丝上。颗粒直径为0.35-0.75微米。加热的钨丝被容纳在壳体中，喷嘴将颗粒喷射到钨丝上以形成钨丝中的微腔。

73. 发明授权

US06815638B2 Method of determining a minimum pulse width for a short pulse laser system 失效
公开(公告)号：US06815638B2
公开(公告)日：2004-11-09
申请号：US10267034
申请日：2002-10-08
申请人： Xinbing Liu
发明人： Xinbing Liu
IPC分类号： B23K26067
CPC分类号： B41J2/1634 , B23K26/0608 , B23K26/0622 , B23K26/067 , B23K26/073 , B23K26/382 , B23K26/389 , B23K26/40 , B23K2103/42 , B23K2103/50 , B41J2/161 , H05K3/0026
摘要： A method is provided for determining a minimum pulse width for a pulsed laser beam in a short pulse laser system, such that the minimum pulse width accounts for dispersion associated with the pulse laser beam passing through a diffractive optical element. The method includes: determining size data for an ablation to be formed in a surface of a workpiece; determining an operating wavelength for a pulsed laser beam; determining spot size data for the beam incident on the workpiece; determining tolerance data for the spot size of the incident beam; and determining a minimum pulse width for the pulsed laser beam based on the size data for the ablation, the operating wavelength for the laser beam, the spot size data for the laser beam and the tolerance data for the spot size.

74. 发明授权

US06791060B2 Beam shaping and projection imaging with solid state UV gaussian beam to form vias 有权
标题翻译：光束成形和投影成像与固态紫外高斯光束形成通孔
公开(公告)号：US06791060B2
公开(公告)日：2004-09-14
申请号：US10325600
申请日：2002-12-19
申请人： Corey M. Dunsky , Xinbing Liu , Nicholas J. Croglio , Ho W. Lo , Bryan C. Gundrum , Hisashi Matsumoto
发明人： Corey M. Dunsky , Xinbing Liu , Nicholas J. Croglio , Ho W. Lo , Bryan C. Gundrum , Hisashi Matsumoto
IPC分类号： B23K2638
CPC分类号： B23K26/0734 , B23K26/0732 , B23K26/382 , B23K26/389 , B23K26/40 , B23K2101/35 , B23K2103/08 , B23K2103/10 , B23K2103/12 , B23K2103/14 , B23K2103/172 , B23K2103/26 , B23K2103/42 , B23K2103/50 , B23K2103/52 , H05K3/0038
摘要： A diode-pumped, solid-state laser (52) of a laser system (50) provides ultraviolet Gaussian output (54) that is converted by a diffractive optical element (90) into shaped output (94) having a uniform irradiance profile. A high percentage of the shaped output (94) is focused through an aperture of a mask (98) to provide imaged to provide imaged shaped output (118). The laser system (50) facilitates a method for increasing the throughput of a via drilling process over that available with an analogous clipped Gaussian laser system. This method is particularly advantageous for drilling blind vias (20b) that have better edge, bottom, and taper qualities than those produced by a clipped Gaussian laser system. An alternative laser system (150) employs a pair of beam diverting galvanometer mirrors (152, 154) that directs the Gaussian output around a shaped imaging system (70) that includes a diffractive optical element (90) and a mask (98). Laser system (150) provides a user with the option of using either a Gaussian output or an imaged shaped output (118).
摘要翻译：激光系统（50）的二极管泵浦的固态激光器（52）提供由衍射光学元件（90）转换成具有均匀辐照度分布的成形输出（94）的紫外高斯输出（54）。高百分比的成形输出（94）通过掩模（98）的孔聚焦以提供成像以提供成像的成形输出（118）。激光系统（50）有助于提高通孔钻孔过程的吞吐量超过类似的限幅高斯激光系统可用的方法。该方法对于具有比由高斯激光系统产生的那些具有更好的边缘，底部和锥度特性的盲孔（20b）特别有利。替代的激光系统（150）使用一对光束转向电流计反射镜（152,154），其引导围绕包括衍射光学元件（90）和掩模（98）的成形成像系统（70）的高斯输出。激光系统（150）向用户提供使用高斯输出或成像形状输出（118）的选项。

75. 发明授权

US06664502B1 Workpiece holder with multiple recesses to further support workpiece in parallel laser drilling 失效
标题翻译：具有多个凹槽的工件支架，以进一步支持平行激光钻孔中的工件
公开(公告)号：US06664502B1
公开(公告)日：2003-12-16
申请号：US10266993
申请日：2002-10-08
申请人： Xinbing Liu
发明人： Xinbing Liu
IPC分类号： B23K2600
CPC分类号： B23K26/10 , B23K26/382 , B23K26/389 , B23K26/40 , B23K2103/172 , B23K2103/42 , B23K2103/50 , H05K3/0026
摘要： An improved workpiece holder is provided for use in a laser drilling system. The workpiece holder includes: a body having at least one planar support surface adapted to support a workpiece; a plurality of recesses formed in the planar support surface; at least one groove formed in the planar support surface; and a vacuum passage extending through the body of the holder. In addition, the plurality of recesses may be configured to align with the drilling pattern of the laser drilling system.
摘要翻译：提供了一种用于激光钻孔系统的改进的工件保持器。工件保持器包括：主体，其具有适于支撑工件的至少一个平面支撑表面; 形成在所述平面支撑面中的多个凹部; 形成在所述平面支撑表面中的至少一个凹槽; 以及延伸穿过保持器主体的真空通道。另外，多个凹部可被配置为与激光钻孔系统的钻孔图案对准。

76. 发明授权

US06433305B1 Method and apparatus for drilling holes with sub-wavelength pitch with laser 失效
公开(公告)号：US06433305B1
公开(公告)日：2002-08-13
申请号：US09747682
申请日：2000-12-26
申请人： Xinbing Liu , Ming Li
发明人： Xinbing Liu , Ming Li
IPC分类号： B23K2602
CPC分类号： B23K26/0624 , B23K26/382 , B23K26/40 , B23K2103/16 , B23K2103/50 , B82Y20/00 , G02B6/1225
摘要： A method of laser machining using an ultra-fast pulse laser is presented. According to the present invention a plurality of holes with a pitch less than the wavelength of the laser are drilled into a material sample. Reliable and reproducible hole drilling is accomplished through an exemplary drilling sequence which applies a number of pulses at a first pulse energy to the surface spaced to avoid laser hardening of the surface for adjacent holes of a first set of holes. Next, the number of pulses is increased or the energy of the laser beam is increased to drill holes that are interstitial to the first set of holes. The exemplary laser machining process may used to produce both one-dimensional and two-dimensional photonic crystals, among other applications.

77. 发明授权

US06365869B1 Apparatus for laser processing foil material 有权
标题翻译：用于激光加工箔材料的设备
公开(公告)号：US06365869B1
公开(公告)日：2002-04-02
申请号：US09636784
申请日：2000-08-11
申请人： Robert Swain , Xinbing Liu , Steven Sansone
发明人： Robert Swain , Xinbing Liu , Steven Sansone
IPC分类号： B23K2600
CPC分类号： B23K26/702 , B23K26/382 , B23K26/40 , B23K2103/42 , B23K2103/50
摘要： Apparatus for laser processing a foil material workpiece held to a workpiece holder by a vacuum while being processed by a laser. The foil material workpiece spans a recess in the workpiece holder and is held flat and taut across the recess. With the open space beneath the foil material workpiece defined by the recess, the laser beam can pass completely through the foil material workpiece to form a through hole or through cut in the foil material workpiece without impinging on the workpiece holder.
摘要翻译：用于激光处理由激光处理的由真空保持在工件夹持器上的箔材料工件的激光加工装置。箔材料工件跨越工件保持器中的凹部并且保持平坦并拉紧在凹部上。在由凹槽限定的箔材料工件下面的开放空间中，激光束可以完全穿过箔材料工件以形成通孔或通过箔片材料工件中的切割而不侵蚀工件保持器。

78. 发明授权

US06303903B1 Method and apparatus for determining focus position of a laser 失效
标题翻译：用于确定激光的焦点位置的方法和装置
公开(公告)号：US06303903B1
公开(公告)日：2001-10-16
申请号：US09372121
申请日：1999-08-11
申请人： Xinbing Liu
发明人： Xinbing Liu
IPC分类号： B23K2602
CPC分类号： B23K26/04
摘要： A method and apparatus for positioning a surface of a workpiece for laser machining. A laser beam is focused to a focal point to form a plasma generating a plasma emission. An imaging system is oriented to receive the plasma emission and generate a plasma image. The imaging system is adjusted to focus the plasma image and is then fixed. The laser is then diverted away from the focal point and an illumination source is activated to illuminate the surface of the workpiece. The imaging system generates an image of the surface of the workpiece. The workpiece is adjusted in position toward the focal point until the image of the surface of the workpiece is in focus.
摘要翻译：一种用于定位用于激光加工的工件的表面的方法和装置。将激光束聚焦到焦点以形成产生等离子体发射的等离子体。成像系统被定向为接收等离子体发射并产生等离子体图像。调整成像系统以聚焦等离子体图像，然后固定。然后将激光器从焦点转移离开，并且激活照明源以照射工件的表面。成像系统产生工件表面的图像。工件被调整到朝向焦点的位置，直到工件的表面的图像被聚焦。

79. 发明授权

US08709219B2 Structured diamond tool made by focused ion beam nanomachining 有权
标题翻译：通过聚焦离子束纳米加工制成的结构化金刚石工具
公开(公告)号：US08709219B2
公开(公告)日：2014-04-29
申请号：US11884852
申请日：2006-03-06
申请人： Xinbing Liu
发明人： Xinbing Liu
IPC分类号： C23C14/34
CPC分类号： B23B27/20 , B23B27/06 , B23B2226/31 , B23D13/00 , B29D11/0074 , G02B5/1852 , G03H2001/0296 , G03H2224/02
摘要： A structured diamond tool having a predefined grayscale grating profile shape allows a corresponding grayscale grating profile to be machined into a work piece with a single pass with high accuracy. Manufacture of grayscale gratings using this technique saves time compared to the situation where the profile is machined by a single-point diamond tool with multiple passes. Also, more time-saving is realized if more than one period is machined in the diamond tool. Such a tool can be manufactured using a high precision focused ion beam (FIB), which is a true nanomachining tool that can machine features on the order of tens of nanometers. The diamond tool made by FIB therefore has extremely fine resolution and features required by the grayscale grating.
摘要翻译：具有预定灰度光栅轮廓形状的结构化金刚石工具允许相应的灰度级光栅轮廓以高精度单进行加工成工件。与通过具有多次通过的单点金刚石工具加工型材的情况相比，使用这种技术的灰度光栅的制造节省了时间。此外，如果在钻石工具中加工了多个时间段，则可以实现更节省时间。这种工具可以使用高精度聚焦离子束（FIB）来制造，该离子束是一种真正的纳米加工工具，可以加工数十纳米级的特征。因此，由FIB制造的金刚石工具具有非常精细的分辨率和灰度光栅所需的特征。

80. 发明授权

US08491353B2 Mold for optical components 有权
标题翻译：光学元件模具
公开(公告)号：US08491353B2
公开(公告)日：2013-07-23
申请号：US10567324
申请日：2004-09-30
申请人： Hidenao Kataoka , Xinbing Liu , Christian F. Greig
发明人： Hidenao Kataoka , Xinbing Liu , Christian F. Greig
IPC分类号： B24B7/24
CPC分类号： B23K26/032 , B23K26/03 , B23K26/123
摘要： A method is provided for manufacturing a high-precision mold whereby a feature matching a desired feature design is carved into a hard mold material (41) using, for example, a diamond grinding wheel and/or a diamond turning point. Inherent imprecision and errors (49) introduced by the use of the grinding wheel/turning point are measured to determine deviations from the desired feature design. An ultrafast shortpulse laser is then activated to desirably ablate the deviations, thereby correcting the errors and conforming the feature to the desired shape. Furthermore, a thin film (1602) may be formed over the feature either prior to or after the laser ablation process, where the error measurement and laser ablation processes detects and ablates errors on the surface of the thin film, respectively. Additionally, the laser ablation process may be applied directly to, for example, an optical lens (1400) formed from an imprecise mold to remove any errors and imperfections thereon.
摘要翻译：提供了一种用于制造高精度模具的方法，由此使用例如金刚石砂轮和/或钻石转折点将匹配期望特征设计的特征雕刻到硬质模具材料（41）中。测量通过使用砂轮/转向点引入的固有的不精确度和误差（49），以确定与期望特征设计的偏差。然后激活超快速短脉冲激光以期望消除偏差，从而校正误差并使特征符合期望的形状。此外，可以在激光烧蚀过程之前或之后在特征上形成薄膜（1602），其中误差测量和激光烧蚀过程分别检测并消除薄膜表面上的误差。此外，激光烧蚀过程可以直接应用于例如由不精确的模具形成的光学透镜（1400），以消除其上的任何误差和缺陷。

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