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    • 72. 发明授权
    • Method for forming self-aligned thermal isolation cell for a variable resistance memory array
    • 用于形成用于可变电阻存储器阵列的自对准热隔离单元的方法
    • US07531825B2
    • 2009-05-12
    • US11463824
    • 2006-08-10
    • Erh-Kun LaiChiahua HoKuang Yeu Hsieh
    • Erh-Kun LaiChiahua HoKuang Yeu Hsieh
    • H01L47/00G11C11/56
    • H01L45/06H01L45/1233H01L45/1293H01L45/144H01L45/1683
    • A non-volatile method with a self-aligned RRAM element. The method includes a lower electrode element, generally planar in form, having an inner contact surface. At the top of the device is a upper electrode element, spaced from the lower electrode element. A containment structure extends between the upper electrode element and the lower electrode element, and this element includes a sidewall spacer element having an inner surface defining a generally funnel-shaped central cavity, terminating at a terminal edge to define a central aperture; and a spandrel element positioned between the sidewall spacer element and the lower electrode, having an inner surface defining a thermal isolation cell, the spandrel inner walls being spaced radially outward from the sidewall spacer terminal edge, such that the sidewall spacer terminal edge projects radially inward from the spandrel element inner surface. ARRAM element extends between the lower electrode element and the upper electrode, occupying at least a portion of the sidewall spacer element central cavity and projecting from the sidewall spacer terminal edge toward and making contact with the lower electrode. In this manner, the spandrel element inner surface is spaced from the RRAM element to define a thermal isolation cell adjacent the RRAM element.
    • 具有自对准RRAM元素的非易失性方法。 该方法包括具有内部接触表面的大体平面形状的下部电极元件。 在装置的顶部是与下部电极元件间隔开的上部电极元件。 容纳结构在上电极元件和下电极元件之间延伸,并且该元件包括侧壁间隔元件,其具有限定大致漏斗形中心腔的内表面,终止于端边缘以限定中心孔; 以及位于所述侧壁间隔元件和所述下电极之间的突出元件,具有限定了热隔离单元的内表面,所述凸起内壁与所述侧壁间隔件终端边缘径向向外间隔开,使得所述侧壁间隔件末端边缘径向向内突出 从弹簧元件内表面。 ARRAM元件在下电极元件和上电极之间延伸,占据侧壁间隔元件中心空腔的至少一部分并且从侧壁间隔件终端边缘朝向和与下电极接触。 以这种方式,伞形元件内表面与RRAM元件间隔开以限定与RRAM元件相邻的热隔离单元。
    • 74. 发明申请
    • SELF-ALIGNED STRUCTURE AND METHOD FOR CONFINING A MELTING POINT IN A RESISTOR RANDOM ACCESS MEMORY
    • 自对准结构和方法,用于在电阻随机访问存储器中配置熔点
    • US20090020746A1
    • 2009-01-22
    • US12235773
    • 2008-09-23
    • Erh-Kun LaiChiaHua HoKuang Yeu HsiehShih-Hung Chen
    • Erh-Kun LaiChiaHua HoKuang Yeu HsiehShih-Hung Chen
    • H01L45/00
    • H01L45/06G11C11/5678G11C13/0004H01L27/2436H01L45/1233H01L45/1246H01L45/144H01L45/148H01L45/1666
    • A process in the manufacturing of a resistor random access memory with a confined melting area for switching a phase change in the programmable resistive memory. The process initially formed a pillar comprising a substrate body, a first conductive material overlying the substrate body, a programmable resistive memory material overlying the first conductive material, a high selective material overlying the programmable resistive memory material, and a silicon nitride material overlying the high selective material. The high selective material in the pillar is isotropically etched on both sides of the high selective material to create a void on each side of the high selective material with a reduced length. A programmable resistive memory material is deposited in a confined area previously occupied by the reduced length of the poly, and the programmable resistive memory material is deposited into an area previously occupied by the silicon nitride material.
    • 制造具有用于切换可编程电阻存储器中的相位变化的限定熔化区域的电阻器随机存取存储器的过程。 该工艺最初形成了一个支柱,该支柱包括衬底主体,覆盖衬底主体的第一导电材料,覆盖第一导电材料的可编程电阻性存储器材料,覆盖在可编程电阻性存储器材料上的高选择性材料, 选择性材料。 柱中的高选择性材料在高选择性材料的两侧进行各向同性蚀刻,以在长度较小的高选择性材料的每侧产生空隙。 可编程电阻式存储器材料沉积在先前由多晶硅长度减小的限制区域中,并且可编程电阻式存储器材料沉积到先前由氮化硅材料占据的区域中。
    • 77. 发明申请
    • Self-Aligned Structure and Method for Confining a Melting Point in a Resistor Random Access Memory
    • 用于限制电阻随机存取存储器中的熔点的自对准结构和方法
    • US20080121861A1
    • 2008-05-29
    • US11465094
    • 2006-08-16
    • Erh-Kun LaiChiaHua HoKuang Yeu HsiehShih-Hung Chen
    • Erh-Kun LaiChiaHua HoKuang Yeu HsiehShih-Hung Chen
    • H01L45/00
    • H01L45/06G11C11/5678G11C13/0004H01L27/2436H01L45/1233H01L45/1246H01L45/144H01L45/148H01L45/1666
    • A process in the manufacturing of a resistor random access memory with a confined melting area for switching a phase change in the programmable resistive memory. The process initially formed a pillar comprising a substrate body, a first conductive material overlying the substrate body, a programmable resistive memory material overlying the first conductive material, a high selective material overlying the programmable resistive memory material, and a silicon nitride material overlying the high selective material. The high selective material in the pillar is isotropically etched on both sides of the high selective material to create a void on each side of the high selective material with a reduced length. A programmable resistive memory material is deposited in a confined area previously occupied by the reduced length of the poly, and the programmable resistive memory material is deposited into an area previously occupied by the silicon nitride material.
    • 制造具有用于切换可编程电阻存储器中的相位变化的限定熔化区域的电阻器随机存取存储器的过程。 该工艺最初形成了一个支柱,该支柱包括衬底主体,覆盖衬底主体的第一导电材料,覆盖第一导电材料的可编程电阻性存储器材料,覆盖在可编程电阻性存储器材料上的高选择性材料, 选择性材料。 柱中的高选择性材料在高选择性材料的两侧进行各向同性蚀刻,以在长度较小的高选择性材料的每侧产生空隙。 可编程电阻式存储器材料沉积在先前由多晶硅长度减小的限制区域中,并且可编程电阻式存储器材料沉积到先前由氮化硅材料占据的区域中。
    • 80. 发明授权
    • Semiconductor structure with improved capacitance of bit line
    • 具有改善位线电容的半导体结构
    • US08704205B2
    • 2014-04-22
    • US13594353
    • 2012-08-24
    • Shih-Hung ChenHang-Ting LueKuang-Yeu HsiehErh-Kun LaiYen-Hao Shih
    • Shih-Hung ChenHang-Ting LueKuang-Yeu HsiehErh-Kun LaiYen-Hao Shih
    • H01L47/00
    • H01L27/11582H01L27/11548H01L27/11556H01L27/11575
    • A semiconductor structure with improved capacitance of bit lines includes a substrate, a stacked memory structure, a plurality of bit lines, a first stair contact structure, a first group of transistor structures and a first conductive line. The first stair contact structure is formed on the substrate and includes conductive planes and insulating planes stacked alternately. The conductive planes are separated from each other by the insulating planes for connecting the bit lines to the stacked memory structure by stairs. The first group of transistor structures is formed in a first bulk area where the bit lines pass through and then connect to the conductive planes. The first group of transistor structures has a first gate around the first bulk area. The first conductive line is connected to the first gate to control the voltage applied to the first gate.
    • 具有改善的位线电容的半导体结构包括衬底,堆叠存储器结构,多个位线,第一阶梯接触结构,第一组晶体管结构和第一导电线。 第一阶梯接触结构形成在基板上,并且包括交替堆叠的导电平面和绝缘面。 导电平面通过用于通过楼梯将位线连接到堆叠的存储器结构的绝缘平面彼此分离。 第一组晶体管结构形成在第一体积区域中,其中位线通过,然后连接到导电平面。 第一组晶体管结构在第一体积区域周围具有第一栅极。 第一导线连接到第一栅极以控制施加到第一栅极的电压。