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    • 77. 发明授权
    • Reticles including support frame for charged-particle-beam microlithography, and methods for making same
    • 包括用于带电粒子束微光刻的支撑框架的网状物及其制造方法
    • US06534222B1
    • 2003-03-18
    • US09556876
    • 2000-04-19
    • Yoshihiko Suzuki
    • Yoshihiko Suzuki
    • G03F900
    • G03F1/20
    • Reticles and reticle blanks are disclosed, especially for charged-particle-beam microlithography, that include a peripheral frame and a support frame bonded to each other in a manner that substantially reduces distortion at the bonds as well as membrane distortion. The peripheral frame is bonded peripherally to the support frame in any of various manners including an anodic weld of glass and silicon (the glass containing mobile ions) and a eutectic metal silicon bond wherein the metal can be, e.g., gold, aluminum, germanium, or tin. The glass-silicon and eutectic bonds in which the metal is, e.g., gold, are also resistant to chlorine gas used for routine cleaning of the reticle. In the case of the eutectic metal bond, an intervening layer of chrome or nichrome can be applied between the metal layer and the bonding surface to enhance bonding. Also, the eutectic bond can be formed by incubation at a temperature profile that favors formation, in the welds, of multiple, minute bonding points in metallic island structures on the bonding surfaces. Also disclosed are methods for making reticles and reticle blanks.
    • 公开了网状物和掩模版坯料,特别是对于带电粒子束微光刻法,其包括以大大减少接合处的变形以及膜失真的方式彼此结合的外围框架和支撑框架。 外围框架以各种方式以包括玻璃和硅的阳极焊接(含有移动离子的玻璃)和共晶金属硅键的各种方式外围地接合到支撑框架,其中金属可以是例如金,铝,锗, 或锡。 其中金属例如金的玻璃 - 硅和共晶键也对用于掩模版的常规清洁的氯气也有抗性。 在共晶金属键的情况下,可以在金属层和接合表面之间施加铬或镍铬合金的中间层以增强结合。 此外,共晶键可以通过在有利于焊接中形成粘结表面上的金属岛结构中的多个微小结合点的温度分布形成。 还公开了制作掩模版和掩模版坯料的方法。
    • 78. 发明授权
    • Electric brake including a pad clearance adjusting mechanism and a
method for adjusting the pad clearance of the same
    • 包括垫间隙调节机构的电动制动器以及用于调节其间隙的方法
    • US5957246A
    • 1999-09-28
    • US998029
    • 1997-12-24
    • Yoshihiko Suzuki
    • Yoshihiko Suzuki
    • B60T13/74B60T13/58B60T17/22F16D65/18F16D65/54
    • B60T13/741B60T7/12
    • The electric brake including a pad clearance adjusting mechanism comprises: ignition switch detecting member for detecting that an ignition key has been switched from its off position to its on position; brake instruction detecting member; a parking brake detecting member; a brake control device; a piston position sensor; and, an electric actuator. In the brake control device, if the ignition switch detecting member detects that the ignition key has been switched from its off position to its on position, then actuates the electric actuator to thereby cause the present electric brake to generate a slight brake torque, the current position of a piston is set as the initial position of the piston, a position to which the piston is moved back from the initial position by an amount corresponding to a previously set pad clearance is set as the adjusted position of the piston, after then, if a brake instruction is issued by operating a brake pedal, then the electric brake can be operated and, if the brake instruction is retracted, then the electric actuator can be driven to thereby move the piston back to the piston adjusted position, thereby being able to obtain a constant pad clearance.
    • 包括垫间隙调节机构的电动制动器包括:点火开关检测构件,用于检测点火钥匙已经从其关闭位置切换到其打开位置; 制动指令检测部件; 驻车制动器检测构件; 制动控制装置; 活塞位置传感器; 和电致动器。 在制动控制装置中,如果点火开关检测部件检测到点火钥匙已经从其关闭位置切换到其打开位置,则致动电动致动器,从而使得当前的电动制动器产生轻微的制动转矩, 将活塞的位置设定为活塞的初始位置,将活塞从初始位置返回到与先前设定的垫间隙对应的量的位置设定为活塞的调整位置,之后, 如果通过操作制动踏板发出制动指令,则可以操作电动制动器,并且如果制动指令被缩回,则可以驱动电致动器,从而将活塞移回到活塞调节位置,从而能够 以获得恒定的垫间隙。