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    • 72. 发明授权
    • Single-crystal phase change material on insulator for reduced cell variability
    • 绝缘体上的单晶相变材料可减少细胞变异性
    • US08828785B2
    • 2014-09-09
    • US13611020
    • 2012-09-12
    • Guy CohenSimone Raoux
    • Guy CohenSimone Raoux
    • H01L21/00
    • B32B37/14B32B38/10H01L27/2472H01L45/06H01L45/1233H01L45/144H01L45/148H01L45/1625H01L45/1675
    • Techniques for producing a single-crystal phase change material and the incorporation of those techniques in an electronic device fabrication process flow are provided. In one aspect, a method of fabricating an electronic device is provided which includes the following steps. A single-crystal phase change material is formed on a first substrate. At least one first electrode in contact with a first side of the single-crystal phase change material is formed. The single-crystal phase change material and the at least one first electrode in contact with the first side of the single-crystal phase change material form a transfer structure on the first substrate. The transfer structure is transferred to a second substrate. At least one second electrode in contact with a second side of the single-crystal phase change material is formed. A single-crystal phase change material-containing structure and electronic device are also provided.
    • 提供了用于生产单晶相变材料的技术以及将这些技术结合到电子器件制造工艺流程中。 一方面,提供一种制造电子设备的方法,其包括以下步骤。 在第一基板上形成单晶相变材料。 形成与单晶相变材料的第一面接触的至少一个第一电极。 与单晶相变材料的第一面接触的单晶相变材料和至少一个第一电极在第一基板上形成转印结构。 转移结构被转移到第二衬底。 形成与单晶相变材料的第二面接触的至少一个第二电极。 还提供了单晶相变材料结构和电子器件。
    • 77. 发明授权
    • Production scale fabrication method for high resolution AFM tips
    • 高分辨率AFM提示的生产规模制作方法
    • US08321961B2
    • 2012-11-27
    • US12900123
    • 2010-10-07
    • Guy CohenMark C. ReuterBrent A. WacaserMaha M. Khayyat
    • Guy CohenMark C. ReuterBrent A. WacaserMaha M. Khayyat
    • G01Q60/38B82Y99/00B82Y40/00
    • G01Q70/12G01Q60/38
    • A method of fabricating high resolution atomic force microscopy (AFM) tips including a single semiconductor nanowire grown at an apex of a semiconductor pyramid of each AFM tip is provided. The semiconductor nanowire that is grown has a controllable diameter and a high aspect ratio, without significant tapering from the tip of the semiconductor nanowire to its base. The method includes providing an AFM probe including a semiconductor cantilever having a semiconductor pyramid extending upward from a surface of said semiconductor cantilever. The semiconductor pyramid has an apex. A patterned oxide layer is formed on the AFM probe. The patterned oxide layer has an opening that exposes the apex of the semiconductor pyramid. A single semiconductor nanowire is grown on the exposed apex of the semiconductor pyramid utilizing a non-oxidized Al seed material as a catalyst for nanowire growth.
    • 提供了一种制造高分辨率原子力显微镜(AFM)尖端的方法,其包括在每个AFM尖端的半导体金字塔的顶点处生长的单个半导体纳米线。 生长的半导体纳米线具有可控直径和高纵横比,而没有从半导体纳米线的尖端到其基底的显着锥形化。 该方法包括提供包括半导体悬臂的AFM探针,该半导体悬臂具有从所述半导体悬臂的表面向上延伸的半导体金字塔。 半导体金字塔有顶点。 在AFM探针上形成图案化的氧化物层。 图案化氧化物层具有暴露半导体金字塔的顶点的开口。 使用未氧化的Al种子材料作为纳米线生长的催化剂,在半导体金字塔的暴露的顶点上生长单个半导体纳米线。