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    • 73. 发明授权
    • Continuously scalable width and height semiconductor fins
    • 连续可调的宽度和高度半导体鳍片
    • US08927432B2
    • 2015-01-06
    • US13523048
    • 2012-06-14
    • Dechao GuoYang LiuChengwen PeiYue Tan
    • Dechao GuoYang LiuChengwen PeiYue Tan
    • H01L29/772H01L21/336
    • H01L27/1211H01L21/845
    • Arbitrarily and continuously scalable on-currents can be provided for fin field effect transistors by providing two independent variables for physical dimensions for semiconductor fins that are employed for the fin field effect transistors. A recessed region is formed on a semiconductor layer over a buried insulator layer. A dielectric cap layer is formed over the semiconductor layer. Disposable mandrel structures are formed over the dielectric cap layer and spacer structures are formed around the disposable mandrel structures. Selected spacer structures can be structurally damaged during a masked ion implantation. An etch is employed to remove structurally damaged spacer structures at a greater etch rate than undamaged spacer structures. After removal of the disposable mandrel structures, the semiconductor layer is patterned into a plurality of semiconductor fins having different heights and/or different width. Fin field effect transistors having different widths and/or heights can be subsequently formed.
    • 通过为鳍式场效应晶体管所采用的半导体鳍片的物理尺寸提供两个独立的变量,可以为鳍式场效应晶体管提供任意和连续的可变电流。 在掩埋绝缘体层上的半导体层上形成凹陷区域。 在半导体层上形成电介质盖层。 在电介质盖层上形成一次性心轴结构,并且围绕一次性心轴结构形成间隔结构。 在掩蔽离子注入期间,选择的间隔结构可以在结构上受损。 使用蚀刻以比未损坏的间隔物结构更大的蚀刻速率去除结构损坏的间隔物结构。 在去除一次性心轴结构之后,将半导体层图案化成具有不同高度和/或不同宽度的多个半导体翅片。 随后可以形成具有不同宽度和/或高度的鳍场效应晶体管。