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71. 发明专利

DE69026751T2 未知
公开(公告)号：DE69026751T2
公开(公告)日：1996-11-14
申请号：DE69026751
申请日：1990-05-17
申请人： KOBE STEEL LTD
发明人： KAWATA YUTAKA , INOUE KEN-ICHI , ISHIBASHI KIYOTAKA , KOBAYASHI AKIRA , INOUE KOJI , SUZUKI NORIO , ARAI AKIO , YAMADA KANEO , TOKUSHIGE KEIZO , FUKUYAMA HIROFUMI , ADACHI SHIGETO , FURUKAWA YUKITO , TAKAHASHI SUNAO , KIMURA MAKOTO
IPC分类号： G01Q90/00 , H01J37/09 , H01J37/256 , G21K1/02
摘要： A converged ion beam apparatus wherein a very small beam spot can be formed with a high energy ion beam after passing a reduced route in which a type of the ion beam is classified. The device is incorporated in an apparatus wherein an ion beam from an accelerator is introduced in a spot to a specimen by way of an ion type classifying device, an objective collimator and a beam collector to perform reforming of a surface or an analysis of physical properties and/or composition or the like of a small area of the specimen. The objective collimator is disposed just on the downstream of the accelerator, and an analyzing component for analyzing an ion type and energy of a beam is interposed in a drift space in an object distance between the objective collimator and a quadruple pole magnetic lens. Several components of the apparatus are also improved including the quadruple pole magnetic lens, an objective slit device and a specimen chamber.

72. 发明专利

DE69026751D1 未知
公开(公告)号：DE69026751D1
公开(公告)日：1996-06-05
申请号：DE69026751
申请日：1990-05-17
申请人： KOBE STEEL LTD
发明人： KAWATA YUTAKA , INOUE KEN-ICHI , ISHIBASHI KIYOTAKA , KOBAYASHI AKIRA , INOUE KOJI , SUZUKI NORIO , ARAI AKIO , YAMADA KANEO , TOKUSHIGE KEIZO , FUKUYAMA HIROFUMI , ADACHI SHIGETO , FURUKAWA YUKITO , TAKAHASHI SUNAO , KIMURA MAKOTO
IPC分类号： G01Q90/00 , H01J37/09 , H01J37/256 , G21K1/02
摘要： A converged ion beam apparatus wherein a very small beam spot can be formed with a high energy ion beam after passing a reduced route in which a type of the ion beam is classified. The device is incorporated in an apparatus wherein an ion beam from an accelerator is introduced in a spot to a specimen by way of an ion type classifying device, an objective collimator and a beam collector to perform reforming of a surface or an analysis of physical properties and/or composition or the like of a small area of the specimen. The objective collimator is disposed just on the downstream of the accelerator, and an analyzing component for analyzing an ion type and energy of a beam is interposed in a drift space in an object distance between the objective collimator and a quadruple pole magnetic lens. Several components of the apparatus are also improved including the quadruple pole magnetic lens, an objective slit device and a specimen chamber.

73. 发明专利

DE69128880T2 未知
公开(公告)号：DE69128880T2
公开(公告)日：1998-06-25
申请号：DE69128880
申请日：1991-09-30
申请人： KOBE STEEL LTD
发明人： INOUE KEN-ICHI , KOBAYASHI AKIRA , KUSAKA TAKUYA , KAWATA YUTAKA , INOUE KOUJI , ISHIBASHI KIYOTAKA , FURUKAWA YUKITO , SUZUKI TOSHIJI , TOKUMURA TETSUO , TERADA MITSUO
IPC分类号： H05H7/18 , H05H9/00 , H05H1/46 , H01S3/0975
摘要： The object of the present invention is to offer a charged particle accelerator which is able to accelerate an arbitrary kind of charged particles to an arbitrary energy level and to resonate at a low frequency suitable for accelerating heavy ions. The charged particle accelerator comprises quadrupole electrodes being disposed in the direction of the center axis of a cylinder-shaped container and a resonant circuit provided with a capacitor and an inductor for supplying a voltage to the quadrupole electrodes in being supplied with a high frequency power. There are provided in the apparatus a plurality of metallic plates which are provided along the center axis at specified intervals in the vicinity of the quadrupole electrodes for constituting a capacitor with the plurality of metallic plates, and a plurality of conductive supports supporting the metallic plates which are directly connected to the container for forming an inductor with the supports and the container. Since the metallic plates and the quadrupole electrodes are electrically directly connected to each other an arbitrary resonant frequency can be obtained by adjusting the intervals between the plurality of metallic plates with a position adjusting mechanism. Flat electrodes are protruded from both sides of the inner wall of the container and the flat plate electrodes are disposed in parallel to the center axis and the flat electrodes opposing each other are disposed to be close to each other for constituting a capacitor, which makes it possible to have a resonant frequency in a low frequency range; further it is also made possible to obtain a constitution having a large Q value by lowering a resistance component for a surface current in covering the inner wall of the container and the surfaces of the flat plate electrodes with a superconductive material.

74. 发明专利

DE69128880D1 未知
公开(公告)号：DE69128880D1
公开(公告)日：1998-03-12
申请号：DE69128880
申请日：1991-09-30
申请人： KOBE STEEL LTD
发明人： INOUE KEN-ICHI , KOBAYASHI AKIRA , KUSAKA TAKUYA , KAWATA YUTAKA , INOUE KOUJI , ISHIBASHI KIYOTAKA , FURUKAWA YUKITO , SUZUKI TOSHIJI , TOKUMURA TETSUO , TERADA MITSUO
IPC分类号： H05H7/18 , H05H9/00 , H05H1/46 , H01S3/0975
摘要： The object of the present invention is to offer a charged particle accelerator which is able to accelerate an arbitrary kind of charged particles to an arbitrary energy level and to resonate at a low frequency suitable for accelerating heavy ions. The charged particle accelerator comprises quadrupole electrodes being disposed in the direction of the center axis of a cylinder-shaped container and a resonant circuit provided with a capacitor and an inductor for supplying a voltage to the quadrupole electrodes in being supplied with a high frequency power. There are provided in the apparatus a plurality of metallic plates which are provided along the center axis at specified intervals in the vicinity of the quadrupole electrodes for constituting a capacitor with the plurality of metallic plates, and a plurality of conductive supports supporting the metallic plates which are directly connected to the container for forming an inductor with the supports and the container. Since the metallic plates and the quadrupole electrodes are electrically directly connected to each other an arbitrary resonant frequency can be obtained by adjusting the intervals between the plurality of metallic plates with a position adjusting mechanism. Flat electrodes are protruded from both sides of the inner wall of the container and the flat plate electrodes are disposed in parallel to the center axis and the flat electrodes opposing each other are disposed to be close to each other for constituting a capacitor, which makes it possible to have a resonant frequency in a low frequency range; further it is also made possible to obtain a constitution having a large Q value by lowering a resistance component for a surface current in covering the inner wall of the container and the surfaces of the flat plate electrodes with a superconductive material.

75. 发明专利

JP2003160868A PLASMA FILM-FORMING APPARATUS OR IN-LINE PLASMA FILM- FORMING APPARATUS 审中-公开
公开(公告)号：JP2003160868A
公开(公告)日：2003-06-06
申请号：JP2001360840
申请日：2001-11-27
申请人： KOBE STEEL LTD , MORI YUZO
发明人： NAKAGAMI AKIMITSU , KOBAYASHI AKIRA , HAYASHI KAZUYUKI , GOTO YASUSHI , KUGIMIYA TOSHIHIRO , ISHIBASHI KIYOTAKA , MORI YUZO
IPC分类号： C23C16/44
摘要： PROBLEM TO BE SOLVED: To provide a plasma film-forming apparatus which can efficiently form a film on a cylindrical substrate at a high speed, and has a rotation elec trode with a cylindrical outer surface by a plasma CVD method, or to provide an in-line plasma film-forming apparatus. SOLUTION: In the plasma film-forming apparatus which is provided with the rotation electrode 103 having the cylindrical outer surface, generates plasma between the rotation electrode 103 and a substrate 101, supplies reaction gas into the plasma, and forms a film on the substrate 101 by a chemical reaction, this plasma film-forming apparatus comprises the substrate 101 of a cylindrical substrate having the cylindrical outer surface, and a mechanism for rotating the cylindrical substrate in a reverse direction to that of the rotating electrode 103 around the center axis of the substrate, while holding the substrate 101 so as to make its center axis parallel to that of the rotating electrode 103, and make both and cylindrical outer surfaces face each other at a predetermined gap. COPYRIGHT: (C)2003,JPO

76. 发明专利

JP2003129245A APPARATUS AND METHOD FOR FORMING PLASMA CVD FILM 审中-公开
公开(公告)号：JP2003129245A
公开(公告)日：2003-05-08
申请号：JP2001326200
申请日：2001-10-24
申请人： KOBE STEEL LTD , MORI YUZO
发明人： ISHIBASHI KIYOTAKA , GOTO YASUSHI , KUGIMIYA TOSHIHIRO , HAYASHI KAZUYUKI , HOSOKAWA YOSHIYUKI , HIRANO TAKAYUKI , KOBAYASHI AKIRA , MORI YUZO
IPC分类号： G03G5/08 , C23C16/509 , H01L21/205
摘要： PROBLEM TO BE SOLVED: To make it possible to perform high-speed film formation and to prolong the maintenance cycle of an apparatus in a method comprising rotating a substrate having a cylindrical outer periphery and forming a film on the cylindrical periphery by a plasma CVD process. SOLUTION: The plasma CVD film formation apparatus comprises a high-frequency electrode opposite to the substrate; a rotation means that rotates the substrate; a linear plasma generation space formed by cooperatively partitioning a reactor with the substrate and the high-frequency electrode; a partitioning member for forming a film formation region comprising a gas introduction space and a gas discharge space between which the plasma generation space is sandwiched; an atmosphere pressure adjustment means that sets and adjusts the pressure of the atmosphere in the plasma generation space within the range of 1 k to 200 kPa; and a high-frequency electric power source that supplies a high-frequency electric power to the high-frequency electrode in order to generate a linear plasma by glow discharge between the high-frequency electrode and the cylindrical outer periphery of the substrate.

77. 发明专利

JP2002028441A METHOD AND DEVICE FOR TREATING GAS 失效
公开(公告)号：JP2002028441A
公开(公告)日：2002-01-29
申请号：JP2000216341
申请日：2000-07-17
申请人： KOBE STEEL LTD , MORI YUZO
发明人： HAYASHI KAZUYUKI , KOBAYASHI AKIRA , NAKAGAMI AKIMITSU , INOUE KENICHI , OKADA KAZUTO , ISHIBASHI KIYOTAKA , MORI YUZO
IPC分类号： H05H1/24 , B01D53/34 , B01D53/56 , B01D53/62 , B01D53/68 , B01D53/70 , B01D53/72 , B01J19/08 , H01L21/205
摘要： PROBLEM TO BE SOLVED: To efficiently treat a gas to be treated such as a per-fluorinated compound(PFC) with simple equipment by using the chemical reaction with plasma. SOLUTION: A rotary electrode 18 and a flat electrode 17 or one more rotary electrode are arranged at a prescribed interval to face each other. The chemical reaction using the plasma 22 is performed by rotating the rotary electrode 18, applying voltage between both electrodes 17 and 18 to generate the plasma 22, simultaneously introducing the gas to be treated and a reaction gas into a chamber and involving the gases in the plasma 22 with the rotation of the rotary electrode 18.

78. 发明专利

JPH05302643A 失效
公开(公告)号：JPH05302643A
公开(公告)日：1993-11-16
申请号：JP9528192
申请日：1992-04-15
申请人： KOBE STEEL LTD , NAT HOUSE IND
发明人： SUGIMOTO AKIO , TANAKA TOSHIMITSU , UTSUNO HIDEO , KOBAYASHI AKIRA , FUJIWARA HARUO , OCHI SHUHEI , MURAI TATSURO , KAWADA MINORU , NAKAMURA MIYAO
IPC分类号： E04B5/43 , E04F15/18 , F16F15/02
摘要： PURPOSE:To prevent radiating noise, vibration unpleasantless, rattling and the like of furniture by joining a plurality of plate springs together in a laminate manner with viscoelastic body or viscous body, and fixing a dynamic vibration reducer with weights disposed at the ends thereof to a steel frame and/or steel bars. CONSTITUTION:A frame 1 and bars 2 are formed of a steel plate having a groove- shaped cross section. A wooden surface member 4 is fixed to a frame body which is constituted of the steel frame 1 and the plurality of steel bars 2 disposed across the frame 1. A dynamic vibration reducer 9 is attached to a flange of the bar 2. If impulsive excitation force due to jumping, running and the like of a person is exerted on the panel surface member on a floor, the frame body and the surface member are freely vibrated in an integral manner. A plate spring or the like of the dynamic vibration reducer is resonantly vibrated due to the vibration of the steel frame 1 and/or the steel bars 2, and vibration energy of the steel frame 1 and the steel bars 2 is converted into thermal energy owing to shear deformation of a viscoelastic body according to the change of the plate spring due to the resonant vibration, to be discharged to the atmosphere. Consequently, it is possible to restrain vibration of the floor panel.

79. 发明专利

JPH05182794A HIGH FREQUENCY ACCELERATION RESONATOR 失效
公开(公告)号：JPH05182794A
公开(公告)日：1993-07-23
申请号：JP34518691
申请日：1991-12-26
申请人： KOBE STEEL LTD
发明人： TERADA MITSUO , TOKUMURA TETSUO , KUSAKA TAKUYA , INOUE KENICHI , KOBAYASHI AKIRA , SUZUKI TOSHIMOTO , IMANAKA HIROBUMI
IPC分类号： H05H9/00
摘要： PURPOSE:To improve the acceleration performance of a high frequency acceleration resonator which accelerates charged particles such as electrons or ions. CONSTITUTION:Disc units 2 which are integrally formed by means of a connecting part 2e with an annular disc part 2c having in the center an opening 2d comprising a passage for charged particles and an annular outer edge part 2a sharing the diametral center of the disc part 2c are laminated by putting the units' connecting parts 2e in alternatively opposed directions and providing between the units spacers of the same inner and outer dimensions as those of the outer circumferential part 2a. This constitution eliminates resistance arising from welded or joined parts which may reduce the Q value indicating the performance of a high frequency acceleration oscillator and allows high frequency power to be efficiently supplied to an accelerating electrode, enabling those charged particles such as electrons or ions which pass trough a passage formed by an opening 2d to be efficiently accelerated.

80. 发明专利

JPH0543973B2 失效
公开(公告)号：JPH0543973B2
公开(公告)日：1993-07-05
申请号：JP22283687
申请日：1987-09-05
申请人： KOBE STEEL LTD
发明人： KAWADA YUTAKA , MANABE CHITAYOSHI , KOBAYASHI AKIRA
IPC分类号： G01F23/284 , G01F23/28 , G01S7/36 , G01S13/34

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