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1. 发明专利

JP2002204240A RADIO LAN SYSTEM AND WAVEGUIDE DEVICE FOR RADIO LAN SYSTEM 失效
公开(公告)号：JP2002204240A
公开(公告)日：2002-07-19
申请号：JP2001171265
申请日：2001-06-06
申请人： KOBE STEEL LTD
发明人： TAKAMATSU HIROYUKI , KUSAKA TAKUYA , NARASAKI HIROSHI , KAWADA YUTAKA
IPC分类号： G06F3/00 , H01Q13/08 , H01Q13/22 , H04L12/28
摘要： PROBLEM TO BE SOLVED: To provide a radio LAN system which is free of decrease in the effective speed of communication and a waveguide device for the radio LAN system. SOLUTION: This radio LAN system form a radio communication network and has waveguides 1a and 1b provided along above (a ceiling 11 of a building 10) in the area where the radio communication network is formed, radio LAN master devices 2a and 2b connected to the waveguides 1a and 1b, and slave devices 3a and 3b arranged in the area, and the waveguides 1a and 1b have end parts 4a and 4b which do not reflect electromagnetic waves and a plurality of branch circuits 5a to 5c and 5d to 5f, which are open to the inside of the area; and antennas 6a and 6b for eletromagnetic wave transmission and reception, which have directivity to the inside of the area are connected to the branch circuits 5a to 5d and 5d to 5f.

2. 发明专利

JPH08335618A METHOD AND APPARATUS FOR MEASURING LIFETIME OF CARRIERS IN SEMICONDUCTOR SAMPLE 失效
公开(公告)号：JPH08335618A
公开(公告)日：1996-12-17
申请号：JP13903695
申请日：1995-06-06
申请人： KOBE STEEL LTD , JIENESHISU TECHNOL KK
发明人： YOSHIDA NAOYUKI , TAKAMATSU HIROYUKI , SUMINOE SHINGO , KAWADA YUTAKA , HASHIZUME HIDEHISA , OSHIMA FUTOSHI , HIRAO YUJI
IPC分类号： G01N21/88 , G01N21/00 , G01N21/956 , G01R31/265 , G01R31/28 , H01L21/66
摘要： PURPOSE: To measure the lifetime of carriers in semiconductor sample, without giving the influence of the surface recombination on the measurement. CONSTITUTION: The surface of a semiconductor sample is previously passivated, using a soln. contg. an electrolyte (S1), an exciting light is irradiated on the passivated structure of the sample with irradiating of a microwave thereon (S2, S3), the transmitted light or reflected light from the sample is detected (S4), and the lifetime of carriers induced in the sample is machined on the basis of the variation of the transmitted or reflected wave of the microwave (S5) while a stationary bias light having specified light intensity, separated from the exciting light, is irradiated on the surface of the sample (S3') whereby the lifetime of the carriers in the sample can be machined at high accuracy.

3. 发明专利

JPH03238743A SECONDARY ELECTRON IMAGE DISPLAY DEVICE 失效
公开(公告)号：JPH03238743A
公开(公告)日：1991-10-24
申请号：JP3707690
申请日：1990-02-16
申请人： KOBE STEEL LTD
发明人： ARAI AKIO , FURUKAWA KOJIN , KAWADA YUTAKA , INOUE KENICHI , ISHIBASHI KIYOTAKA , KOBAYASHI AKIRA , INOUE KOJI
IPC分类号： H01J37/22 , H01J37/252 , H01J37/28
摘要： PURPOSE:To perform normal display by a method wherein a plurality of memories are provided, a secondary electron information is stored in one thereof while performing beam scanning and meanwhile the other one is made to perform read and display of the already written information. CONSTITUTION:A plurality of memories 10, 11, 13, for which a high energy ion beam 1 is focused and radiated on a sample 4, and in which information of a secondary electron signal excited from the sample 4 and information of a scanning position of the irradiation beam 1 are memorized, are provided for alternately memorizing a secondary electron image and display of its content. Thereby, even if scanning speed of a display device is faster as compared with a scanning speed on the sample surface, write and read can be separated and no competition is generated between both of them, accordingly a normal picture including no flickering can be displayed.

4. 发明专利

JPH03216943A HIGH-PRECISION QUADRUPLE-POLE MAGNETIC LENS 失效
公开(公告)号：JPH03216943A
公开(公告)日：1991-09-24
申请号：JP1328490
申请日：1990-01-22
申请人： KOBE STEEL LTD
发明人： INOUE KENICHI , ISHIBASHI KIYOTAKA , KAWADA YUTAKA , KOBAYASHI AKIRA , INOUE KOJI , FURUKAWA KOJIN
IPC分类号： H01J37/143 , H01J37/141 , H01J37/252
摘要： PURPOSE:To obtain the strong focusing force of an ion beam by forming four magnetic pole sections constituting a magnetic pole main body and a return yoke section surrounding their outer peripheries and closing a magnetic flux path by the bore machining from the same integrated magnetic material as an integral object. CONSTITUTION:A ferromagnetic metal raw material such as pure iron or cobalt alloy is machined and finished into a cylindrical magnetic material 1 with the thickness and outer periphery of the magnetic pole main body of a quadruple- pole magnetic lens. A coil winding space is bored on it by wire out machining with a finish machining margin left, and an intermediate work integrated with four magnetic pole sections 3 and a return yoke section 4 is formed. Heat treatment of the magnetic substance is applied to the intermediate work to remove the residual stress on the whole. The relative positional precision of four magnetic pole sections 3 is made high, the bore diameter can be made small, the magnetic characteristic of the magnetic substance is made uniform, the stable and precise hyperbolic magnetic field is generated, and the focusing force of an ion beam is improved.

5. 发明专利

JPH03173492A FREE-ELECTRON LASER DEVICE USING LINEAR TYPE ACCELERATOR 失效
公开(公告)号：JPH03173492A
公开(公告)日：1991-07-26
申请号：JP31407889
申请日：1989-12-01
申请人： KOBE STEEL LTD
发明人： INOUE KENICHI , KOBAYASHI AKIRA , KAWADA YUTAKA , ISHIBASHI KIYOTAKA , INOUE KOJI
IPC分类号： H01S3/30 , H05H13/04
摘要： PURPOSE:To improve the efficiency of energy recovery by arranging a fan- shaped electromagnet, simultaneously deflecting and distributing two electron beams and combining an accelerating tube and a decelerating tube while properly constituting the distance of transfer of beams. CONSTITUTION:Electron beams emitted from an injector 11 are accelerated by an accelerator 13, and projected to a wiggler system by a fan-shaped deflecting electromagnet 15 and a rectangular deflecting electromagnet 16. The direction of electron beams emitted from the wiggler system is bent at 180 deg. by two deflecting electromagnets 20, and the electron beams are projected to the electromagnet 15 from the reverse side again through a rectangular deflecting electromagnet 21, and placed on approximately the same orbit as outgoing. The electron beams are moved backward in decelerating phase to the accelerating tube 13 by properly organizing the distance of transfer of beams in the constitution, and RF resonance is intensified while losing kinetic energy through interaction with an RF electric field. The electron beams decelerated and emitted from the tube 13 are introduced to a beam collector 22 through an electromagnet 22, and terminated. Accordingly, energy can be recovered efficiently, thus acquiring a large output.

6. 发明专利

JPH0374037A FOCUSED ION BEAM DEVICE 失效
公开(公告)号：JPH0374037A
公开(公告)日：1991-03-28
申请号：JP30239289
申请日：1989-11-20
申请人： KOBE STEEL LTD
发明人： KAWADA YUTAKA , INOUE KENICHI , ISHIBASHI KIYOTAKA , KOBAYASHI AKIRA , INOUE KOJI
IPC分类号： H01J37/05 , H01J37/252 , H01J49/48
摘要： PURPOSE:To improve functions and structure by inserting an ion species and beam energy analysis component in a drift space in an interval between the surfaces of an objective collimator disposed right on the downstream of an accelerator and a quadruple electromagnetic lens. CONSTITUTION:An objective collimator 5 is disposed right on the downstream of an accelerator 3, and an ion species and beam energy analysis component is inserted in a drift space in an interval between the surfaces of the objective collimator 5 and a quadrupole electromagnetic lens 12. Beam passages in a line from the accelerator 3 through a polarization analysis electromagnet to the objective collimator 5 are eliminated by this, the size of a whole device is contracted by more than 40% to be compact, and because the device is miniaturized, frames can be integrated. The constitution of the focused ion beam device can be integral, and a precise alignment of the components is facilitated to improve the vibration-proof performance, and the beam spot diameter is reduced to improve the analysis function.

7. 发明专利

JPH02244547A HIGH PRECISION QUADRUPLE POLE MAGNETIC LENS OF ASSEMBLE TYPE 失效
公开(公告)号：JPH02244547A
公开(公告)日：1990-09-28
申请号：JP6565489
申请日：1989-03-16
申请人： KOBE STEEL LTD
发明人： INOUE KENICHI , KAWADA YUTAKA , ISHIBASHI KIYOTAKA , KOBAYASHI AKIRA , INOUE KOJI
IPC分类号： H01J37/141 , H01J37/317
摘要： PURPOSE:To facilitate fabrication and enhance the accuracy of magnetic pole location by dividing a magnetic pole into two pieces, circumscribing four pole tips with a spacer, performing the assembly while pressed from the end face, and coupling the divided two magnetic poles with the rear of magnetic pole to be inserted at the tapered joint surface. CONSTITUTION:From four sides, the tips are circumscribed with a cylindrical spacer 2 made of non-magnetic substance, and a ring-shaped fixing board member 3 made of non-magnetic material provided with four V-ridges 3a to fit in V-grooves 1a are pressed to the two end faces while in contact, and four mag. pole tips 1 are located in good angle accuracy through fitting in the grooves 1a followed by coupling and fixation to form an internal assembly A. Four bi-divided mag. pole rears 5 are angle-located inside of a return yoke member 6 followed by coupling and fixation to form an external assembly B. The peripheral surface of the mag. pole tip 1 and the inside surface of mag. pole rear 5 are upon assembly subjected to the finish process with a lathe for the tapered fit surface and coupled in combination upon insertion, and thus a quadruple polar magnetic lens is accomplished.

8. 发明专利

JPH02243980A MAGNETIC FIELD MEASURING INSTRUMENT 失效
公开(公告)号：JPH02243980A
公开(公告)日：1990-09-28
申请号：JP6565589
申请日：1989-03-16
申请人： KOBE STEEL LTD
发明人： INOUE KENICHI , KAWADA YUTAKA , ISHIBASHI KIYOTAKA , KOBAYASHI AKIRA , INOUE KOJI
IPC分类号： G01R33/02
摘要： PURPOSE:To reduce the influence of a noise and to take an accurate measurement by applying a specific tensile force in a magnetic field to be measured and tensing a conductor wire as a string, exciting the string and causing string vibration, and moving the conductor wire across the magnetic field. CONSTITUTION:An electromagnet 1 to be measured uses a quadrupole magnetic lens. The conductor wire (piano wire) 3 is run nearby the beam axis of the magnet 1 and extended between fixation parts 4 in parallel to the axis so that the specific tensile force is applied; and a constant current power source 8 is connected to both the ends of the conductor wire. An exciting coil 9 composed of a high frequency coil is arranged at a proper position in front of or behind the magnet 1 while surrounding the conductor wire 3 and fed with a high frequency current from an oscillator 10 to produce an AC magnetic field on the axis, the conductor wire 3 is excited by mutual operation with a current fed through the conductor wire 3, and the excitation mode is controlled. At this time, the conductor wire 3 crosses the magnetic flux of the magnetic field produced by the magnet 1, so an electromotive force proportional to the magnetic flux density is induced. This electromotive force signal is supplied to a signal processing circuit 13 through a filter 12 to measure a magnetic field distribution which is made uniform in the axial direction.

9. 发明专利

JPH02141494A VAPOR PHASE SYNTHETIC DEVICE OF DIAMOND 失效
公开(公告)号：JPH02141494A
公开(公告)日：1990-05-30
申请号：JP28964188
申请日：1988-11-15
申请人： KOBE STEEL LTD
发明人： KOBASHI KOJI , NISHIMURA KOZO , MIYATA KOICHI , KUMAGAI KAZUO , SUZUKI AKIO , KAWADA YUTAKA , ISHIBASHI KIYOTAKA
IPC分类号： C23C16/26 , C23C16/27 , C23C16/50 , C23C16/511 , C30B25/10 , C30B29/04 , H01J37/32
摘要： PURPOSE:To grow the diamond membrane of large area with stable quality in high speed without the need of special heating unit in the vapor phase synthetic device of diamond by changing the proceeding direction of microwave proceeding in a wave guide by 90 deg. with an antenna, and constituting a base plate supporting table to be vertically movable. CONSTITUTION:In this vapor phase synthetic device of diamond, the wave guide 5 having rectangular cross-section is connected to a microwave electric powder source 1 to introduce the microwave, and the antenna 8 is set in this wave guide 5, and the window 9 for microwave is formed in the side surface of the microwave guide 5 in the direction of right angles to antenna 8. A gas reaction chamber 10 is provided in the cylinder body 11 which contains the window 9 for microwave and is hermetically connected with the wave guide 5, and the base plate supporting table 13 is provided in the opposite side of the window 9 for microwave in the gas reaction chamber so as to be allowed to adjust the distance to the window 9 for microwave. A raw material gas introducing opening 28 and a gas discharge opening 30 are provided in the peripheral part of the gas reaction chamber 10.

10. 发明专利

JPH0268844A INSTRUMENT FOR MEASURING POSITION AND SHAPE OF CHARGED PARTICLE BEAM 失效
公开(公告)号：JPH0268844A
公开(公告)日：1990-03-08
申请号：JP22113088
申请日：1988-09-02
申请人： KOBE STEEL LTD
发明人： KAWADA YUTAKA , INOUE KENICHI , ISHIBASHI KIYOTAKA , KOBAYASHI AKIRA
IPC分类号： G01T1/28 , G01T1/29 , G21K5/04 , H01J37/04 , H01L21/265
摘要： PURPOSE:To make it excellent in space resolution by seeking the position and shape of charged particle beams based on the current flow in each position being amplified. CONSTITUTION:A semiconductor position detector 8, being arranged in the direction that it crosses the direction of irradiation of beam B at right angles, detects emission intensity on a fluorescent screen 7 corresponding to the position of a picture element with light receiving elements 8a as picture elements so as to take it out as an output signal related to the emission intensity at each position. The output signal of this semiconductor position detector 8 is sent to a signal treatment circuit 9, and in this signal treatment circuit 9 the position and shape of the beam B is calculated based on the output signal. Since the electron flux E is magnified by an electrostatic lens 5, the measurement of the position and the shape of the beam B with a fine diameter also becomes possible, and it becomes excellent in space resolution.

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