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71. 发明申请

US20070193628A1 Gas Supply Facility Of A Chamber And A Fethod For An Internal Pressure Control Of The Chamber For Which The Facility Is Employed 有权
标题翻译：商会气体供应设施及设施使用室内部压力控制的方法
公开(公告)号：US20070193628A1
公开(公告)日：2007-08-23
申请号：US10566495
申请日：2004-07-28
申请人： Hiroshi Kannan , Tomio Uno , Ryousuke Dohi , Kouji Nishino , Osamu Nakamura , Atsushi Matsumoto , Nobukazu Ikeda
发明人： Hiroshi Kannan , Tomio Uno , Ryousuke Dohi , Kouji Nishino , Osamu Nakamura , Atsushi Matsumoto , Nobukazu Ikeda
IPC分类号： G05D7/06
CPC分类号： G05D7/0652 , Y10T137/7761 , Y10T137/8741 , Y10T137/87507
摘要： The present invention makes it possible to prevent substantial reduction of flow rate control accuracy in a small flow quantity range, to achieve an accurate flow rate control over the entire range of a flow rate control, and also to allow control of a wide pressure range of a chamber with an accurate flow rate control. Namely, with a gas supply facility having a plurality of pressure type flow controllers connected in parallel and a controller to control operation of pressure type flow controllers to supply a desired gas exhausted by a vacuum pump to a chamber while controlling its flow rate, one pressure type flow controller is made to be a controller to control a gas flow rate range up to 10% of the maximum flow rate to be supplied to a chamber, while the remaining pressure type flow controllers are made to be ones to control the rest of the gas flow rate range.
摘要翻译：本发明使得可以防止在小流量范围内的流量控制精度的显着降低，从而在流量控制的整个范围内实现精确的流量控制，并且还可以控制宽的压力范围具有精确流量控制的室。也就是说，具有并联连接的多个压力式流量控制器的气体供给装置和控制器，用于控制压力式流量控制器的操作，以在控制其流量的同时将由真空泵排出的所需气体供应到腔室，一个压力型流量控制器被制成控制器，以控制最高流量的10％的气体流量范围供给到室，而剩余的压力式流量控制器被制成控制其余的气体流量范围。

72. 发明授权

US07080658B2 Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method 有权
标题翻译：关闭流体通道的方法，以及该方法中使用的无水锤阀装置和无水锤关闭装置
公开(公告)号：US07080658B2
公开(公告)日：2006-07-25
申请号：US11152638
申请日：2005-06-15
申请人： Tadahiro Ohmi , Nobukazu Ikeda , Kouji Nishino , Masaaki Nagase , Kyousuke Dohi , Ryutaro Nishimura
发明人： Tadahiro Ohmi , Nobukazu Ikeda , Kouji Nishino , Masaaki Nagase , Kyousuke Dohi , Ryutaro Nishimura
IPC分类号： G05D16/02 , F16K47/02 , F16L55/055
CPC分类号： F16K47/02 , F16K47/023 , F16L55/043 , Y10T137/0324 , Y10T137/0379 , Y10T137/0396 , Y10T137/7761 , Y10T137/86389 , Y10T137/86461
摘要： A fluid passage is emergently-closed in a short time without causing a water hammer by an extremely simple device and operation. A water hammerless closing device includes an actuator operated valve provided in a fluid passage, an electro-pneumatic conversion device for supplying a 2-step actuator operating pressure Pa to an actuator operated-type valve, a vibration sensor removably secured to the pipe passage on the upstream side of the actuator operated-type valve, and a tuning box receiving a vibration detection signal Pr from the vibration sensor and delivering a control signal Sc to the electro-pneumatic conversion device for controlling the step operating pressure Ps′ of the 2-step actuator operating pressure Pa so that, with the control signal Sc being regulated, the electro-pneumatic conversion device outputs the 2-step actuator operating pressure Pa with the step operating pressure Ps′ capable of bringing the vibration detection signal Pr substantially to zero.
摘要翻译：流体通道在短时间内紧密关闭，而不会通过非常简单的装置和操作造成水锤。无水锤关闭装置包括设置在流体通道中的致动器操作阀，用于向致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到管道上的振动传感器执行器操作型阀的上游侧和从振动传感器接收振动检测信号Pr的调谐箱，并将控制信号Sc传送到电动气动转换装置，以控制2- 步进致动器操作压力Pa，使得在控制信号Sc被调节的情况下，电动气动转换装置将能够使振动检测信号Pr基本上为零的步进操作压力Ps'输出2步致动器操作压力Pa。

73. 发明授权

US06302130B1 Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers 有权
标题翻译：用于检测压力型流量控制器孔堵塞的方法和装置
公开(公告)号：US06302130B1
公开(公告)日：2001-10-16
申请号：US09529985
申请日：2000-07-18
申请人： Tadahiro Ohmi , Seiichi Iida , Satoshi Kagatsume , Jun Hirose , Kouji Nishino , Nobukazu Ikeda , Michio Yamaji , Ryousuke Dohi , Kazuhiro Yoshikawa , Mutsunori Koyomogi , Tomio Uno , Eiji Ideta , Takashi Hirose
发明人： Tadahiro Ohmi , Seiichi Iida , Satoshi Kagatsume , Jun Hirose , Kouji Nishino , Nobukazu Ikeda , Michio Yamaji , Ryousuke Dohi , Kazuhiro Yoshikawa , Mutsunori Koyomogi , Tomio Uno , Eiji Ideta , Takashi Hirose
IPC分类号： F17D116
CPC分类号： G05D7/0635 , Y10T137/0396 , Y10T137/7759 , Y10T137/7761 , Y10T137/8326
摘要： A method and apparatus for detection of clogging of an orifice by measuring the upstream side pressure without breaking up the piping system in a flow rate control unit using an orifice, so as to extend the life of the flow rate control unit and enhance its safety. The apparatus of detecting clogging of an orifice in a pressure-type flow rate controller has a control valve (CV), an orifice (2), a pressure detector (14) for measuring the upstream pressure P1 therebetween, and a flow rate setting circuit (32) wherein, with the upstream pressure P1 maintained about two or more times higher than the downstream pressure P2, the downstream flow rate QC is calculated with the equation QC=KP1 (K=constant) and wherein the control valve (CV) is controlled by the difference signal QY between the calculated flow rate QC and the set flow rate QS. The apparatus comprises: a storage memory M memorizing standard pressure attenuation data Y(t) of the upstream pressure P1 measured with the flow rate switched from the high set flow rate QSH to the low set flow rate QSL with the orifice (2) not clogged, a pressure detector (14) for determination of the pressure attenuation data P(t) of the upstream pressure P1 with the flow rate switched from the high set flow rate QSH to the low set flow rate QSL with the orifice (2) in the actual conditions, a central processing unit CPU for checking the pressure attenuation data P(t) against standard pressure attenuation data Y(t), and an alarm circuit (46) that turns on a clogging alarm when the pressure attenuation data P(t) deviates from standard pressure attenuation data Y(t) to a specific degree or beyond that.
摘要翻译：一种用于通过测量上游侧压力而不破坏使用孔口的流量控制单元中的管道系统来检测孔口堵塞的方法和装置，以延长流量控制单元的寿命并提高其安全性。检测压力型流量控制器中的孔口堵塞的装置具有控制阀（CV），用于测量其上游压力P1的孔口（2），压力检测器（14）和流量设定电路（32）其中，在上游压力P1保持大于下游压力P2的两倍或更多倍的情况下，下游流量QC用等式QC = KP1（K =常数）计算，并且其中控制阀（CV）为由计算流量QC和设定流量QS之间的差分信号QY控制。该装置包括：存储存储器M，存储以从高设定流量QSH切换到低设定流量QSL的流量测量的上游压力P1的标准压力衰减数据Y（t），其中孔口（2）没有堵塞，用于确定上游压力P1的压力衰减数据P（t）的压力检测器（14），其中流量从高设定流量QSH切换到具有孔口（2）的低设定流量QSL 实际情况是用于根据标准压力衰减数据Y（t）检测压力衰减数据P（t）的中央处理单元CPU以及当压力衰减数据P（t）偏离时引起堵塞报警的报警电路（46）从标准压力衰减数据Y（t）到特定程度或以上。

74. 发明授权

US09163743B2 Piezoelectrically driven valve and piezoelectrically driven flow rate control device 有权
标题翻译：压电阀和压电驱动流量控制装置
公开(公告)号：US09163743B2
公开(公告)日：2015-10-20
申请号：US13505620
申请日：2010-11-04
申请人： Atsushi Hidaka , Kaoru Hirata , Masaaki Nagase , Nobukazu Ikeda , Ryousuke Dohi , Kouji Nishino
发明人： Atsushi Hidaka , Kaoru Hirata , Masaaki Nagase , Nobukazu Ikeda , Ryousuke Dohi , Kouji Nishino
IPC分类号： G05D7/06 , F16K31/00 , F16K7/14 , F16K25/00
CPC分类号： F16K31/007 , F16K7/14 , F16K25/005 , G05D7/0629 , Y10T137/6416 , Y10T137/7759 , Y10T137/776 , Y10T137/7761
摘要： A piezoelectrically driven valve and a piezoelectrically driven fluid control device are provided that may control a fluid even if the temperature of the fluid is higher than an operating temperature range of a piezoelectric actuator. The piezoelectrically driven valve includes a valve element for opening and closing a fluid passage, a piezoelectric actuator for driving the valve element by utilizing extension of a piezoelectric element, and a radiation spacer that lifts and supports the piezoelectric actuator away from the fluid passage, and radiates heat that is transferred from fluid flowing in the fluid passage to the piezoelectric actuator, and preferably further includes a support cylinder that houses and supports both of the piezoelectric actuator and the radiation spacer, wherein the support cylinder is made of a material with the same thermal expansion coefficient as that of the radiation spacer, at least at a portion for housing the radiation spacer.
摘要翻译：提供了一种压电驱动阀和压电驱动的流体控制装置，其可以控制流体，即使流体的温度高于压电致动器的工作温度范围。压电驱动阀包括用于打开和关闭流体通道的阀元件，通过利用压电元件的延伸来驱动阀元件的压电致动器，以及将压电致动器提升和支撑远离流体通道的辐射间隔件，以及辐射从在流体通道中流动的流体转移到压电致动器的热量，并且优选地还包括容纳和支撑压电致动器和辐射间隔物的支撑筒，其中支撑筒由具有相同材料的材料制成至少在用于容纳辐射间隔物的部分处，与辐射间隔物的热膨胀系数相同。

75. 发明申请

US20140299206A1 RAW MATERIAL VAPORIZING AND SUPPLYING APPARATUS EQUIPPED WITH RAW MATERIAL CONCENTRATION 有权
标题翻译：原料气化装置与原料浓缩装置
公开(公告)号：US20140299206A1
公开(公告)日：2014-10-09
申请号：US14343226
申请日：2012-07-17
申请人： Masaaki Nagase , Kaoru Hirata , Atushi Hidaka , Kouji Nishino , Nobukazu Ikeda , Takeshi Nakamura
发明人： Masaaki Nagase , Kaoru Hirata , Atushi Hidaka , Kouji Nishino , Nobukazu Ikeda , Takeshi Nakamura
IPC分类号： F17D3/00
CPC分类号： F17D3/00 , C23C16/4482 , C23C16/45561 , G05D11/135 , Y10T137/8158
摘要： An apparatus able to regulate a raw material concentration, in a mixed gas of carrier gas and raw material gas, accurately and stably to supply the mixed gas to a process chamber, with a flow rate controlled highly accurately, thereby detecting a vapor concentration of the raw material gas in the mixed gas easily and highly accurately and displaying the concentration in real time without using an expensive concentration meter, etc.
摘要翻译：能够精确稳定地调节载气和原料气体的混合气体中的原料浓度的装置，以高精度地控制流量，将混合气体供给到处理室，从而检测蒸发浓度混合气体中的原料气体容易且高精度地实时显示浓度，而不使用昂贵的浓度计等。

76. 发明授权

US08833730B2 Cam control valve 有权
标题翻译：凸轮控制阀
公开(公告)号：US08833730B2
公开(公告)日：2014-09-16
申请号：US13389671
申请日：2010-11-05
申请人： Yohei Sawada , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
发明人： Yohei Sawada , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
IPC分类号： F16K31/02 , F16K25/00 , F16K31/44 , F16K31/00 , H02K5/00 , F16K31/04 , F16K7/16 , F16K31/524
CPC分类号： F16K7/16 , F16K31/047 , F16K31/52408
摘要： A cam control valve includes a valve casing having a fluid passage and valve seat, a valve disc seated on the valve seat to open and close the fluid passage, a valve stem holding down the valve disc so it contacts the valve seat, a cam acting on the valve stem to hold it down, a motor rotating the cam, a motor holder holding the motor, a supporting frame fixed to the valve casing and supporting the motor holder so it moves vertically, an elastic member biasing the motor holder towards spacing from an upper side portion of the supporting frame, and height adjustable screws suspending the motor holder from the supporting frame, and adjusting a height of the motor holder with respect to the supporting frame, wherein the height adjustable screws are slidably inserted into the upper side portion of the supporting frame and screwed into the motor holder.
摘要翻译：凸轮控制阀包括具有流体通道和阀座的阀壳体，阀座位于阀座上以打开和关闭流体通道;阀杆，其压紧阀盘，使其接触阀座;凸轮作用在阀杆上保持下降，电动机旋转凸轮，保持电动机的电动机支架，固定在阀壳体上的支撑框架，并支撑电动机支架使其垂直移动;弹性构件，将电动机支架偏压支撑框架的上侧部分和高度可调节的螺钉，使马达夹持器从支撑框架上悬挂起来，并且相对于支撑框架调节马达夹持器的高度，其中高度可调节螺钉可滑动地插入到上侧部分的支撑框架并拧入电机支架。

77. 发明申请

US20140162094A1 ELECTROCHEMICAL ELEMENT 审中-公开
标题翻译：电化学元素
公开(公告)号：US20140162094A1
公开(公告)日：2014-06-12
申请号：US14126445
申请日：2012-06-13
申请人： Atsushi Nishino , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino , Seichin Kinuta , Yoshiaki Saita , Masashi Kobayashi
发明人： Atsushi Nishino , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino , Seichin Kinuta , Yoshiaki Saita , Masashi Kobayashi
IPC分类号： H01G11/04 , H01M2/36
CPC分类号： H01G11/04 , H01G11/14 , H01G11/58 , H01G11/84 , H01M2/361 , Y02E60/13
摘要： The purpose of the present invention is to provide an electrochemical element to which a high-concentration and high-viscosity electrolyte is supplied. The electrolyte is dispersed and supplied instantaneously to the electrochemical element in a small fixed quantity.
摘要翻译：本发明的目的是提供一种供应高浓度和高粘度电解质的电化学元件。电解液以小的固定量瞬时分散并供给电化学元件。

78. 发明授权

US08714188B2 Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used 有权
标题翻译：流体通道的无水锤打开方法，以及用于提供化学溶液的方法和使用该方法的无水锤打开装置
公开(公告)号：US08714188B2
公开(公告)日：2014-05-06
申请号：US13239715
申请日：2011-09-22
申请人： Tadahiro Ohmi , Kouji Nishino , Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Ryutaro Nishimura
发明人： Tadahiro Ohmi , Kouji Nishino , Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Ryutaro Nishimura
IPC分类号： G05D7/06
CPC分类号： F16K47/02 , Y10T137/0324 , Y10T137/0396 , Y10T137/7761 , Y10T137/7762 , Y10T137/7842 , Y10T137/86389 , Y10T137/86397 , Y10T137/86461
摘要： The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps′ of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa, of the step operating pressure Ps′ which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.
摘要翻译：无水锤打开装置包括安装在流体通道上的致动器操作型阀，向上述致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到在致动器操作型阀的上游侧的管道通道和输入了由振动传感器检测到的振动检测信号Pr的调谐箱，通过该调谐箱控制控制信号Sc以控制前述的操作压力Ps' 将上述的2步执行器工作压力Pa输出到电动气动变换装置，将使振动检测信号Pr接近零的阶梯操作压力Ps'的2级致动器工作压力Pa'从通过调节控制信号Sc进行电 - 气转换。

79. 发明申请

US20130084059A1 VAPORIZER 有权
标题翻译：蒸气器
公开(公告)号：US20130084059A1
公开(公告)日：2013-04-04
申请号：US13563983
申请日：2012-08-01
申请人： Tadahiro Ohmi , Yasuyuki Shirai , Masaaki Nagase , Satoru Yamashita , Atsushi Hidaka , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda , Keiji Hirao
发明人： Tadahiro Ohmi , Yasuyuki Shirai , Masaaki Nagase , Satoru Yamashita , Atsushi Hidaka , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda , Keiji Hirao
IPC分类号： C23C14/00 , F22B1/28
CPC分类号： C23C16/4483 , F22B1/284
摘要： A vaporizer, capable of stabilizing the behavior of pressure inside the vaporizer, includes a chamber having an inlet and an outlet, a heating device that heats the inside of the chamber, a partition wall structure 13 that is provided inside the vaporizer and partitions the liquid material inside the chamber into a plurality of sections, and liquid distribution portions 20 that are provided at the lower portion of the partition wall structure 13 and that allow liquid distribution among the sections partitioned by the partition wall structure 13, and the partition wall structure includes a grid-like, honeycomb-shaped, mesh-like, or pipe-shaped partition wall.
摘要翻译：能够稳定蒸发器内的压力行为的蒸发器包括具有入口和出口的室，加热室内的加热装置，设置在蒸发器内部并分隔液体的分隔壁结构13 室内的材料分成多个部分，分隔部分20设置在分隔壁结构13的下部并且允许在由分隔壁结构13分隔的部分之间进行液体分配，以及分隔壁结构包括网状，蜂窝状，网状或管状隔壁。

80. 发明申请

US20130025718A1 MIXED GAS SUPPLY APPARATUS 有权
标题翻译：混合气体供应装置
公开(公告)号：US20130025718A1
公开(公告)日：2013-01-31
申请号：US13520824
申请日：2010-10-22
申请人： Masaaki Nagase , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
发明人： Masaaki Nagase , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
IPC分类号： F17D1/00
CPC分类号： B01J4/02 , G05D11/132 , H01L21/67017 , Y10T137/87249
摘要： A mixed gas supply device includes a plurality of gas supply lines arranged in parallel that include flow rate control devices and outlet side switching valves, wherein gas outlets of respective outlet side switching valves communicate with a manifold, and another gas supply line at a position close to a mixed gas outlet of the manifold supplies a low flow rate gas, wherein an outlet side of the flow rate control device and an inlet side of the outlet side switching valve are hermetically connected via an outlet side connecting fitting of the flow rate control device and a mounting table having a gas passage, wherein a small hole portion is provided at a part of a flow passage at the outlet side connecting fitting and/or a flow passage, which makes the outlet side switching valve and a mixed gas flow passage in the manifold communicate with one another.
摘要翻译：混合气体供给装置包括并列布置的多个气体供给管线，包括流量控制装置和出口侧切换阀，其中各个出口侧切换阀的气体出口与歧管连通，另一个气体供给管线位于关闭位置到歧管的混合气体出口供给低流量气体，其中流量控制装置的出口侧和出口侧切换阀的入口侧经由流量控制装置的出口侧连接配件气密地连接以及具有气体通道的安装台，其中在出口侧连接配件和/或流路的流路的一部分处设置有小孔部，其使出口侧切换阀和混合气体流路成为歧管彼此通信。

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