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71. 发明授权

US08048687B2 Processing method for recovering a damaged low-k film of a substrate and storage medium 有权
标题翻译：用于回收基板和存储介质的损坏的低k膜的处理方法
公开(公告)号：US08048687B2
公开(公告)日：2011-11-01
申请号：US12791082
申请日：2010-06-01
申请人： Wataru Shimizu , Kazuhiro Kubota , Daisuke Hayashi
发明人： Wataru Shimizu , Kazuhiro Kubota , Daisuke Hayashi
IPC分类号： H01L21/00
CPC分类号： H01L21/76814 , H01L21/3105 , H01L21/76826 , Y10S438/935
摘要： There is provided a processing method for performing a recovery process on a damaged layer formed on a surface of a low-k film of a target substrate by introducing a processing gas containing a methyl group into a processing chamber. The method includes: increasing an internal pressure of the processing chamber up to a first pressure lower than a processing pressure for the recovery process by introducing a dilution gas into the processing chamber maintained in a depressurized state; then stopping the introduction of the dilution gas, and increasing the internal pressure of the processing chamber up to a second pressure as the processing pressure for the recovery process by introducing the processing gas into a region where the target substrate exists within the processing chamber; and performing the recovery process on the target substrate while the processing pressure is maintained.
摘要翻译：提供了一种处理方法，用于通过将含有甲基的处理气体引入处理室来对目标衬底的低k膜的表面上形成的损伤层进行恢复处理。该方法包括：通过将稀释气体引入维持在减压状态的处理室中，将处理室的内部压力提高到低于回收处理的处理压力的第一压力; 然后停止引入稀释气体，并且通过将处理气体引入到处理室内存在目标衬底的区域中，将处理室的内部压力提高到第二压力作为回收处理的处理压力; 并且在维持处理压力的同时对目标基板进行恢复处理。

72. 发明申请

US20110226421A1 PLASMA PROCESSING APPARATUS 有权
标题翻译：等离子体加工设备
公开(公告)号：US20110226421A1
公开(公告)日：2011-09-22
申请号：US13046925
申请日：2011-03-14
申请人： Daisuke Hayashi
发明人： Daisuke Hayashi
IPC分类号： H01L21/3065 , C23C16/50
CPC分类号： H01J37/32541 , H01J37/32091 , H01J37/3255 , H01J37/32568
摘要： An intensity distribution of an electric field of a high frequency power used for generating plasma is controlled by using an electrode made of a homogeneous material and a moving body. There is provided a plasma processing apparatus for introducing a processing gas into an evacuable processing chamber 100 and generating plasma by a high frequency power and performing a plasma process on a wafer W by the plasma. The plasma processing apparatus includes a dielectric base 105a having a multiple number of fine holes A; a varying member 200 as the moving body provided with a multiple number of rod-shaped members B capable of being inserted into and separated from the fine holes A; and a driving mechanism 215 configured to drive the varying member 200 to allow the rod-shaped members B to be inserted into and separated from the fine holes A.
摘要翻译：通过使用均质材料和移动体制成的电极来控制用于产生等离子体的高频功率电场的强度分布。提供了一种用于将处理气体引入可抽空处理室100中并通过高频功率产生等离子体并且通过等离子体对晶片W执行等离子体处理的等离子体处理装置。等离子体处理装置包括具有多个细孔A的电介质基底105a; 作为移动体的变化构件200设置有能够插入到细孔A中并与其分离的多个杆状构件B; 以及驱动机构215，其构造成驱动可变构件200以允许杆状构件B插入并从细孔A中分离。

73. 发明申请

US20110085145A1 PROJECTOR 有权
标题翻译：投影机
公开(公告)号：US20110085145A1
公开(公告)日：2011-04-14
申请号：US12900749
申请日：2010-10-08
申请人： Daisuke Hayashi
发明人： Daisuke Hayashi
IPC分类号： G03B21/14
CPC分类号： G03B33/12 , G03B9/14 , G03B9/48 , G03B21/2053
摘要： A projector includes: first and second light blocking members adapted to partially block a light beam from a light source, and a drive section adapted to make the first and second light blocking members perform an opening and closing operation. When the corresponding first and second light blocking members are located at a maximum blocking state, with respect to an opening and closing direction of the first and second light blocking members perpendicular to a system optical axis, a first and second support sections support the first and second light blocking members at predetermined positions on the system optical axis side from intermediate positions corresponding to midpoints of areas between edge portions of the first and second light blocking members on the system optical axis side and parts, to which outer edges of the light beam to be blocked are input.
摘要翻译：投影机包括：适于部分地阻挡来自光源的光束的第一和第二遮光构件，以及适于使第一和第二遮光构件进行打开和关闭操作的驱动部分。当对应的第一和第二遮光构件位于最大阻挡状态时，相对于垂直于系统光轴的第一和第二遮光构件的打开和关闭方向，第一和第二支撑部分支撑第一和第二遮光构件在系统光轴侧的预定位置处的第二遮光构件，其中间位置对应于系统光轴侧的第一和第二遮光构件的边缘部分之间的区域的中点，光束的外边缘被阻止输入。

74. 发明申请

US20100293992A1 CONDENSER AND COOLING DEVICE 有权
标题翻译：冷凝器和冷却装置
公开(公告)号：US20100293992A1
公开(公告)日：2010-11-25
申请号：US12734753
申请日：2008-11-20
申请人： Ryo Fujisawa , Kazuto Okada , Masatake Toshima , Yoshihiro Nakayama , Koichiro Iizuka , Satoshi Ide , Kunihiko Suto , Kazutaka Kurashige , Ichirou Sakuraba , Daisuke Hayashi , Shinji Shato , Masaki Ikeuchi , Hans Madsboll , Christian Svarregaard-Jensen
发明人： Ryo Fujisawa , Kazuto Okada , Masatake Toshima , Yoshihiro Nakayama , Koichiro Iizuka , Satoshi Ide , Kunihiko Suto , Kazutaka Kurashige , Ichirou Sakuraba , Daisuke Hayashi , Shinji Shato , Masaki Ikeuchi , Hans Madsboll , Christian Svarregaard-Jensen
IPC分类号： F25B39/04
CPC分类号： F28B3/00 , F25B39/04 , F25B2339/047 , F28B9/06 , F28B9/10
摘要： In the condenser provided with two of the degassing chambers separated by a cooling fluid, communication between the degassing chambers is prevented even if a pressure difference is increased between the degassing chambers. The condenser has the housing having the vapor inflow port connectable to the discharge portion of the compressor, the first degassing chamber, in the housing, communicating with the vapor inflow port, and the second degassing chamber, in the housing, arranged above the first degassing chamber across the partition portion, and the passing portion for permitting a cooling fluid to flow from the second degassing chamber to the first degassing chamber, wherein the first degassing chamber is separated from the second degassing chamber by the cooling fluid in the passing portion, and the passing portion has a pressure head space for containing a specified volume of cooling fluid so as to absorb a variation in a pressure difference between the first degassing chamber and the second degassing chamber.
摘要翻译：在冷凝器中设置有由冷却流体隔开的两个脱气室，即使脱气室之间的压力差增加也可防止脱气室之间的连通。冷凝器具有壳体，其具有可连接到压缩机的排放部分的蒸气流入端口，壳体中的第一脱气室，与蒸汽流入口连通，并且壳体中的第二脱气室布置在第一脱气之上并且通过部分用于允许冷却流体从第二脱气室流向第一脱气室，其中第一脱气室通过通过部分中的冷却流体与第二脱气室分离，以及通过部分具有用于容纳特定体积的冷却流体的压力头空间，以便吸收第一脱气室和第二脱气室之间的压力差的变化。

75. 发明授权

US07824269B2 Torque fluctuation absorbing apparatus 有权
标题翻译：扭矩波动吸收装置
公开(公告)号：US07824269B2
公开(公告)日：2010-11-02
申请号：US11979934
申请日：2007-11-09
申请人： Tomohiro Saeki , Masanori Suzuki , Daisuke Hayashi , Makoto Takeuchi
发明人： Tomohiro Saeki , Masanori Suzuki , Daisuke Hayashi , Makoto Takeuchi
IPC分类号： F16F15/129
CPC分类号： F16F15/129
摘要： A torque fluctuation absorbing apparatus includes a hub member with a flange portion, first and second side-plates provided at both axial sides of the flange portion, respectively, a damper mechanism absorbing a fluctuation of a relative torque generated between the flange portion of the hub member and the first and second side-plates, a thrust member provided between the first side-plate and the flange portion of the hub member, and a first disc spring provided between the first side-plate and the thrust member and biasing the thrust member towards the flange portion of the hub member. The first side plate includes a bent portion bent towards the flange portion of the hub member and a bore formed at the bent portion, and the thrust member is formed with an engagement portion extending through the bore of the first side-plate and engaged with the bore of the first side-plate.
摘要翻译：扭矩波动吸收装置包括具有凸缘部的轮毂部件，分别设置在凸缘部的两轴向侧的第一和第二侧板，吸收轮毂的凸缘部之间产生的相对转矩波动的阻尼机构构件和第一和第二侧板，设置在第一侧板和轮毂构件的凸缘部之间的推力构件，以及设置在第一侧板和推力构件之间的第一盘弹簧，并且将推力构件朝向轮毂构件的凸缘部分。第一侧板包括朝向轮毂构件的凸缘部弯曲的弯曲部分和形成在弯曲部分处的孔，并且推力构件形成有延伸穿过第一侧板的孔并与其接合的接合部分第一个侧板的孔。

76. 发明授权

US07746549B2 Optical communication apparatus 失效
标题翻译：光通信装置
公开(公告)号：US07746549B2
公开(公告)日：2010-06-29
申请号：US11589175
申请日：2006-10-30
申请人： Naoaki Machida , Shinji Iio , Morio Wada , Daisuke Hayashi , Shinji Kobayashi , Masayuki Suehiro , Katsuya Ikezawa , Akira Miura , Sadaharu Oka , Chie Sato , Mamoru Hihara , Tsuyoshi Yakihara , Shinichi Nakajima
发明人： Naoaki Machida , Shinji Iio , Morio Wada , Daisuke Hayashi , Shinji Kobayashi , Masayuki Suehiro , Katsuya Ikezawa , Akira Miura , Sadaharu Oka , Chie Sato , Mamoru Hihara , Tsuyoshi Yakihara , Shinichi Nakajima
IPC分类号： H04B10/17 , H04B10/12
CPC分类号： H04B10/294 , H04B10/296
摘要： An optical communication apparatus includes an erbium-doped optical fiber amplifier for amplifying a modulated optical signal, wherein a light which is not modulated is inputted to the erbium-doped optical fiber amplifier together with the optical signal.
摘要翻译：光通信装置包括掺铒光纤放大器，用于放大调制光信号，其中未调制的光与光信号一起被输入到掺铒光纤放大器。

77. 发明申请

US20100138596A1 INFORMATION PROCESSOR AND INFORMATION PROCESSING METHOD 审中-公开
标题翻译：信息处理器和信息处理方法
公开(公告)号：US20100138596A1
公开(公告)日：2010-06-03
申请号：US12616718
申请日：2009-11-11
申请人： Daisuke Hayashi
发明人： Daisuke Hayashi
IPC分类号： G06F12/08 , G06F12/02
CPC分类号： G06F12/0893 , G06F2212/2022
摘要： According to one embodiment, an information processor includes a connector, a determination module, a recognition module, and a cache control module. The connector connects a storage device to the information processor. The storage device is used as a cache by an operating system which controls the information processor. The determination module determines whether to use the storage device connected to the information processor as a data readable and writable storage area. The recognition module causes the operating system to recognize the storage device as a storage area when the determination module determines to use the storage device as a storage area. The cache controller controls the operating system to use the storage device as a cache when the determination module determines not to use the storage device as a storage area.
摘要翻译：根据一个实施例，信息处理器包括连接器，确定模块，识别模块和高速缓存控制模块。连接器将存储设备连接到信息处理器。存储设备由控制信息处理器的操作系统用作高速缓存。确定模块确定是否将连接到信息处理器的存储设备用作数据可读写的存储区域。当确定模块确定使用存储设备作为存储区域时，识别模块使得操作系统将存储设备识别为存储区域。当确定模块确定不使用存储设备作为存储区域时，高速缓存控制器控制操作系统将存储设备用作高速缓存。

78. 发明申请

US20080300728A1 Flow rate control system and shower plate used for partial pressure control system 有权
标题翻译：用于分压控制系统的流量控制系统和淋浴板
公开(公告)号：US20080300728A1
公开(公告)日：2008-12-04
申请号：US12219978
申请日：2008-07-31
申请人： Hideki Nagaoka , Hiroshi Koizumi , Jun Ooyabu , Tsuyoshi Shimazu , Hiroki Endo , Keiki Ito , Daisuke Hayashi
发明人： Hideki Nagaoka , Hiroshi Koizumi , Jun Ooyabu , Tsuyoshi Shimazu , Hiroki Endo , Keiki Ito , Daisuke Hayashi
IPC分类号： G05D7/00 , G05D16/00
CPC分类号： H01L21/67253 , H01L21/67017 , Y10T137/2499 , Y10T137/7722 , Y10T137/7759 , Y10T137/7761 , Y10T137/8733
摘要： A partial pressure control system 45 includes two valves 2 which are branched from an operation gas supply pipe 44 and which variably control operation gas, pressure sensors 3 which are respectively connected to the each valves 2 in series and which detect pressure of the operation gas, and a controller 25 which proportionally controls the operation of the valves 2 based on detection result of the pressure sensors 3, thereby relatively controlling pressures P1 and P2 of the two valves. With this configuration, it is possible to reduce wastefull consumption of the operation gas, and to enhance the responsivity with respect to change of setting and the like.
摘要翻译：分压控制系统45包括从操作气体供给管44分支并且可变地控制操作气体的压力传感器3和分别连接到每个阀2的压力传感器3并且检测操作气体的压力的两个阀2，以及控制器25，其基于压力传感器3的检测结果按比例地控制阀2的操作，从而相对控制两个阀的压力P1和P2。利用这种结构，可以减少操作气体的浪费，并且提高相对于设定变化等的响应性。

79. 发明授权

US07442912B2 Optical logic device responsive to pulsed signals 失效
标题翻译：响应于脉冲信号的光学逻辑器件
公开(公告)号：US07442912B2
公开(公告)日：2008-10-28
申请号：US11071498
申请日：2005-03-02
申请人： Morio Wada , Akira Miura , Tsuyoshi Yakihara , Masayuki Suehiro , Daisuke Hayashi , Shinji Iio , Toshimasa Umezawa , Takahiro Kudo , Takashi Mogi , Shoujirou Araki , Machio Dobashi , Katsuya Ikezawa
发明人： Morio Wada , Akira Miura , Tsuyoshi Yakihara , Masayuki Suehiro , Daisuke Hayashi , Shinji Iio , Toshimasa Umezawa , Takahiro Kudo , Takashi Mogi , Shoujirou Araki , Machio Dobashi , Katsuya Ikezawa
IPC分类号： H04J4/00 , H04J14/00
CPC分类号： H03K3/42 , H03K19/14
摘要： An optical logic device performs a logic operation on a plurality of input light signals. The optical logic device has a photoelectric conversion portion, in which photoreceivers for receiving input light signals are provided in parallel, that outputs an electric signal obtained by adding up outputs of the photoreceivers, and a comparator that compares a voltage level of the electric signal outputted from the photoelectric conversion portion with a predetermined voltage level.
摘要翻译：光逻辑器件对多个输入光信号执行逻辑运算。光逻辑器件具有光电转换部分，其中并联提供用于接收输入光信号的光接收器，其输出通过将光接收器的输出相加获得的电信号;以及比较器，其比较输出的电信号的电压电平具有预定电压电平的光电转换部分。

80. 发明申请

US20080182423A1 SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY METHOD 有权
标题翻译：基板加工设备和气体供应方法
公开(公告)号：US20080182423A1
公开(公告)日：2008-07-31
申请号：US12014537
申请日：2008-01-15
申请人： Daisuke Hayashi , Morihiro Takanashi
发明人： Daisuke Hayashi , Morihiro Takanashi
IPC分类号： H01L21/306
CPC分类号： H01L21/31116 , H01L21/02071
摘要： A substrate processing apparatus that can prevent formation of deposit in openings of a plurality of gas supply holes leading into a processing chamber. Each of the gas supply holes is configured to uniformly supply a processing gas, whose molecules are turned into clusters, into the processing chamber and to prevent liquefaction of processing gas when the processing gas is supplied into the processing chamber.
摘要翻译：一种能够防止在通向处理室的多个气体供给孔的开口部形成沉积物的基板处理装置。每个气体供给孔被构造成将处理气体均匀地供给到处理室中，并且当处理气体被供给到处理室中时，防止处理气体的液化。

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