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71. 发明专利

AU2002245334A1 High resolution etalon-grating monochromator spectrometer 未知
公开(公告)号：AU2002245334A1
公开(公告)日：2002-08-12
申请号：AU2002245334
申请日：2002-01-28
申请人： CYMER INC
发明人： ERSHOV ALEXANDER I , FOMENKOV IGOR V , SMITH SCOTT T , SANDSTROM RICHARD L , BROWN DANIEL J W
IPC分类号： G01J3/26 , G01J1/42 , G01J3/12 , G01J3/22 , G01J9/02 , G21K1/06 , H01S3/134 , H01S3/137 , G01B9/02 , G01J3/18

72. 发明专利

AU1449701A Virtual laser operator 未知
公开(公告)号：AU1449701A
公开(公告)日：2001-05-30
申请号：AU1449701
申请日：2000-10-31
申请人： CYMER INC
发明人： CARLESI JASON R , DUNLAP DAVID J , FOMENKOV IGOR V
IPC分类号： G03F7/20 , G06F3/023 , H01L21/027 , H01S3/00 , H03M11/04 , H04B10/155 , H04B10/00
摘要： A laser controller interconnected with an electric discharge laser communicates with a remote computer incorporating a display screen programmably emulating a conventional keyboard. The display screen has a plurality of imaged virtual keys each programmably emulating a physical key of a conventional keyboard. Some virtual keys programmably emulate a prescribed sequence of keystrokes, which control, monitor, and record the laser operation. A prescribed sequence can optionally be automated, conditional, or interrupted by operator prompts. The remote computer communicates serially with the laser controller through an electrically conductive cable, a fiberoptic link, or a wireless channel. A keystroke is typically applied by manually pressing the position of a corresponding virtual key on a touch sensitive screen, or alternatively by actuating a conventional pointing device. The electric discharge laser can be a KrF or ArF excimer laser, or a F2 molecular laser, which can be applied as a radiation exposure source for microlithography.

73. 发明专利

AU1441201A Plasma focus light source with improved pulse power system 未知
公开(公告)号：AU1441201A
公开(公告)日：2001-05-30
申请号：AU1441201
申请日：2000-10-26
申请人： BIRX DEBORAH , CYMER INC
发明人： PARTLO WILLIAM N , FOMENKOV IGOR V , OLIVER I ROGER , NESS RICHARD M , BIRX DANIEL L
IPC分类号： G21K5/00 , G03F7/20 , G21K5/02 , H01L21/027 , H05G2/00 , H05H1/06 , H01J35/20 , H01S3/00 , H01S3/22

74. 发明专利

AU7474900A Narrow band laser with fine wavelength control 未知
公开(公告)号：AU7474900A
公开(公告)日：2001-04-10
申请号：AU7474900
申请日：2000-08-31
申请人： CYMER INC
发明人： ALGOTS JOHN M , MARCHI CHRISTOPHER A , ERIE FREDRICK G , BUCK JESSE D , ERSHOV ALEXANDER I , DAS PALASH P , FOMENKOV IGOR V
IPC分类号： H01S3/225 , G02B5/18 , G03F7/20 , H01S3/03 , H01S3/08 , H01S3/081 , H01S3/086 , H01S3/10 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/134 , H01S3/136 , H01S3/139 , H01S3/22
摘要： A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage. Wavelength is controlled by very fine and rapid positioning of an RMAX mirror in a line narrowing module. Bandwidth is controller by adjusting the curvature of a grating in the line narrowing module. Preferred embodiments include automatic feedback control of horizontal and vertical beam profile by automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the RMAX tilt. Other preferred embodiments include automatic adjustment of the horizontal position of the laser chamber within the resonance cavity. In preferred embodiments, feedback signals from a wavelength monitor are used to position the RMAX mirror. In other preferred embodiments a separate laser beam reflected off the RMAX mirror on to a photodiode array is used to position the mirror.

75. 发明专利

DE60042354D1 未知
公开(公告)号：DE60042354D1
公开(公告)日：2009-07-23
申请号：DE60042354
申请日：2000-03-14
申请人： CYMER INC
发明人： PARTLO WILLIAM N , FOMENKOV IGOR V , BIRX DANIEL L
IPC分类号： H05G2/00

76. 发明专利

DE60135203D1 未知
公开(公告)号：DE60135203D1
公开(公告)日：2008-09-18
申请号：DE60135203
申请日：2001-01-16
申请人： CYMER INC
发明人： EVERAGE GEORGE J , FOMENKOV IGOR V , DAS PALASH P , SANDSTROM RICHARD L , ERIE FREDERICK G , ALGOTS JOHN M
IPC分类号： H01S3/139 , H01S3/22 , G03F7/20 , H01L21/027 , H01S3/036 , H01S3/038 , H01S3/04 , H01S3/041 , H01S3/097 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/134 , H01S3/136 , H01S3/225
摘要： Electric discharge laser with active chirp correction. This application discloses techniques for moderating and dispensing these pressure waves. In some lasers small predictable patterns remain which can be substantially corrected with active wavelength control using relatively slow wavelength control instruments of the prior art. In a preferred embodiment a simple learning algorithm is described to allow advance tuning mirror adjustment in anticipation of the learned chirp pattern. Embodiments include stepper motors having very fine adjustments so that size of tuning steps are substantially reduced for more precise tuning. However, complete elimination of wavelength chirp is normally not feasible with structural changes in the laser chamber and advance tuning; therefore, Applicants have developed equipment and techniques for very fast active chirp correction. Improved techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver. In another preferred embodiment chirp correction is made on a pulse-to-pulse basis where the wavelength of one pulse is measured and the wavelength of the next pulse is corrected based on the measurement. This correction technique is able to function at repetition rates as rapid as 2000 Hz and greater.

77. 发明专利

DE60133721D1 未知
公开(公告)号：DE60133721D1
公开(公告)日：2008-06-05
申请号：DE60133721
申请日：2001-01-18
申请人： CYMER INC
发明人： FOMENKOV IGOR V , KROYAN ARMEN , BUCK JESSE D , DAS PALASH P , SANDSTROM RICHARD L , ERIE FREDERICK G , ALGOTS JOHN M , PADMABANDU GAMARALALAGE G
IPC分类号： H01S3/08 , H01S3/139 , G03F7/20 , H01L21/027 , H01S3/036 , H01S3/038 , H01S3/04 , H01S3/041 , H01S3/097 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/134 , H01S3/136 , H01S3/22 , H01S3/225
摘要： Electric discharge laser with active chirp correction. This application discloses techniques for moderating and dispensing these pressure waves. In some lasers small predictable patterns remain which can be substantially corrected with active wavelength control using relatively slow wavelength control instruments of the prior art. In a preferred embodiment a simple learning algorithm is described to allow advance tuning mirror adjustment in anticipation of the learned chirp pattern. Embodiments include stepper motors having very fine adjustments so that size of tuning steps are substantially reduced for more precise tuning. However, complete elimination of wavelength chirp is normally not feasible with structural changes in the laser chamber and advance tuning; therefore, Applicants have developed equipment and techniques for very fast active chirp correction. Improved techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver. In another preferred embodiment chirp correction is made on a pulse-to-pulse basis where the wavelength of one pulse is measured and the wavelength of the next pulse is corrected based on the measurement. This correction technique is able to function at repetition rates as rapid as 2000 Hz and greater.

78. 发明专利

DE60025658T2 未知
公开(公告)号：DE60025658T2
公开(公告)日：2006-07-20
申请号：DE60025658
申请日：2000-02-10
申请人： CYMER INC
发明人： FOMENKOV IGOR V , ERIE FREDERICK G , ERSHOV ALEXANDER
IPC分类号： G02B5/18 , H01S3/08 , G03F7/20 , H01S3/1055 , H01S3/13 , H01S3/137 , H01S3/225
摘要： A bidirectional bandwidth controlled grating assembly. A spring housing is connected to one of two end plates extending away from the lined surface of the grating. An adjustment rod threaded through the other end plate extends into the spring housing. Inside the spring housing in a preferred embodiment are two compression springs mounted between pressure surfaces in the housing and a piston which is fixed on the adjustment rod. The lined surface of the grating can be made more concave (or less convex) by screwing the rod in a direction into the spring housing compressing one of the springs to push the end plates apart and the surface can be made more convex (or less concave) by screwing the rod in a direction out of the spring housing compressing the other spring to pull the end plates toward each other.

79. 发明专利

DE60012420T2 未知
公开(公告)号：DE60012420T2
公开(公告)日：2004-12-16
申请号：DE60012420
申请日：2000-05-05
申请人： CYMER INC
发明人： ERSHOV ALEXANDER I , FOMENKOV IGOR V
IPC分类号： H01S3/225 , G03F7/20 , H01S3/08 , H01S3/1055 , H01S3/106 , H01S3/22 , G02B5/20
摘要： A line narrowed laser system (42) having a spatial filter (44) to filter light at wavelengths greater and/or smaller than a desired range of wavelengths. The laser system is line narrowed with a line narrowing mechanism (8,10,12,14,16) having a dispersive element which disperses laser light into wavelength dependent directions. By spatially filtering the resulting beam the bandwidth of the beam can be reduced substantially. There is also a reduction of beam energy as a result of the spatial filtering but this reduction is substantially less than some other known techniques for reducing bandwidths. A preferred spatial filter (44), for reducing the bandwidth of a line narrowed gas discharge laser, includes two cylindrical focusing lenses (46 and 48) separated by a distance equal to their focal lengths with a slit aperture (50) positioned at the common focal line. The spatial filtering technique of the present invention is a low cost technique, relatively easy to implement and does not significantly complicate laser operation as compared to some more elaborate systems for reducing laser bandwidth.

80. 发明专利

DE60012420D1 未知
公开(公告)号：DE60012420D1
公开(公告)日：2004-09-02
申请号：DE60012420
申请日：2000-05-05
申请人： CYMER INC
发明人： ERSHOV ALEXANDER I , FOMENKOV IGOR V
IPC分类号： H01S3/225 , G03F7/20 , H01S3/08 , H01S3/1055 , H01S3/106 , H01S3/22 , G02B5/20
摘要： A line narrowed laser system (42) having a spatial filter (44) to filter light at wavelengths greater and/or smaller than a desired range of wavelengths. The laser system is line narrowed with a line narrowing mechanism (8,10,12,14,16) having a dispersive element which disperses laser light into wavelength dependent directions. By spatially filtering the resulting beam the bandwidth of the beam can be reduced substantially. There is also a reduction of beam energy as a result of the spatial filtering but this reduction is substantially less than some other known techniques for reducing bandwidths. A preferred spatial filter (44), for reducing the bandwidth of a line narrowed gas discharge laser, includes two cylindrical focusing lenses (46 and 48) separated by a distance equal to their focal lengths with a slit aperture (50) positioned at the common focal line. The spatial filtering technique of the present invention is a low cost technique, relatively easy to implement and does not significantly complicate laser operation as compared to some more elaborate systems for reducing laser bandwidth.

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