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    • 72. 发明申请
    • ACTUATOR, DRIVE DEVICE, LENS UNIT, IMAGE-CAPTURING DEVICE
    • 执行器,驱动装置,透镜单元,图像捕获装置
    • US20120026613A1
    • 2012-02-02
    • US13240268
    • 2011-09-22
    • Yoshihiko SUZUKIMasaaki TANABE
    • Yoshihiko SUZUKIMasaaki TANABE
    • G02B7/04H02N2/02H02N2/12
    • H02N2/0025G02B7/08G02B7/102H02N2/025H02N2/101
    • It is an objective of the present invention to provide an actuator that can efficiently enlarge a displacement amount of a moving element. Provided is an actuator that moves a moving element, comprising a drive element that contacts the moving element; a drive unit that moves the moving element in a movement direction by moving a contact portion of the drive element contacting the moving element in the movement direction and in an opposite direction that is opposite the movement direction, such that movement speed in the opposite direction is greater than movement speed in the movement direction; and a displacement enlarging section that joins the drive unit and the drive element to each other, and transmits enlarged displacement of the drive unit to the drive element.
    • 本发明的目的是提供一种可以有效地增加移动元件的位移量的致动器。 提供一种致动器,其移动移动元件,包括与所述移动元件接触的驱动元件; 驱动单元,其通过使与所述移动元件接触的所述驱动元件的移动方向的接触部和与所述移动方向相反的方向移动,使所述移动元件沿移动方向移动,使得相反方向的移动速度为 大于运动方向的移动速度; 以及将驱动单元和驱动元件相互连接的位移扩大部,将驱动单元的放大位移传递给驱动元件。
    • 73. 发明申请
    • Actuator and imaging device
    • 执行器和成像装置
    • US20100247087A1
    • 2010-09-30
    • US12659494
    • 2010-03-10
    • Yoshihiko SuzukiEiji MatsukawaKazuyasu OoneMasaaki Tanabe
    • Yoshihiko SuzukiEiji MatsukawaKazuyasu OoneMasaaki Tanabe
    • G03B3/10H02N2/12
    • H02N2/105G02B7/08
    • Provided is a vibration actuator comprising an elastic body; an electromechanical transducer that causes the elastic body to vibrate; and a rotating body that rotates in response to a drive force received from contact with the elastic body at a vibrational antinode thereof, wherein the rotating body contacts the elastic body at a prescribed position along a direction in which an axis of the rotation extends. In the vibration actuator, the elastic body includes an elastic body contact member that is arranged in a region that includes the vibrational antinode of the elastic body, the rotating body includes a rotating body contact member that receives a drive force by contacting the elastic body contact member, and one of the elastic body contact member and the rotating body contact member has a contact surface that is oriented diagonally to the axis of rotation and contacts the other of the elastic body contact member and the rotating body contact member.
    • 提供一种振动致动器,包括弹性体; 导致弹性体振动的机电换能器; 以及旋转体,其响应于在其振动波腹处与弹性体接触而产生的驱动力而旋转,其中旋转体沿着旋转轴线延伸的方向在规定位置处接触弹性体。 在振动促动器中,弹性体包括弹性体接触构件,该弹性体接触构件布置在包括弹性体的振动波腹的区域中,旋转体包括旋转体接触构件,该旋转体接触构件通过使弹性体接触 所述弹性体接触构件和所述旋转体接触构件中的一个具有与所述旋转轴线对角定向并且与所述弹性体接触构件和所述旋转体接触构件中的另一个接触的接触面。
    • 78. 发明授权
    • Reticles for charged-particle-beam microlithography that exhibit reduced warp at pattern-defining regions, and semiconductor-device-fabrication methods using same
    • 在图案限定区域显示减少的翘曲的带电粒子束微光刻的网状物和使用其的半导体器件制造方法
    • US06459090B1
    • 2002-10-01
    • US09620764
    • 2000-07-21
    • Yoshihiko Suzuki
    • Yoshihiko Suzuki
    • H01J3709
    • G03F1/20H01J2237/0453H01J2237/31794
    • Reticles and reticle blanks are disclosed for performing charged-particle-beam (CPB) microlithography. The reticles typically include a rigid peripheral frame attached to a reticle portion. Such attachment can cause warping, and thus deformation, of the reticle portion. To reduce such warp, the reticle portion comprises an inner supporting part (surrounding a pattern-defining region) surrounded by an outer supporting part. Situated between the inner and outer supporting parts are multiple connecting structures. The connecting structures can have spring characteristics that collectively absorb warp. Alternatively, the connecting structures can include respective driving mechanisms. The driving mechanisms are especially adapted to cause, when electrically activated, local electrostatic attraction between a respective first conductive region (located on the outer supporting part) and a respective second conductive region (located on the inner supporting part). Selective energization of the connecting structures causes micro movement of inner supporting part (and thus the pattern-defining region) relative to the outer supporting part, thereby canceling reticle warp.
    • 公开了用于进行带电粒子束(CPB)微光刻技术的网状物和掩模版坯料。 标线通常包括连接到标线片部分的刚性外围框架。 这种附着可能导致标线片部分翘曲并因此变形。 为了减少这种翘曲,标线片部分包括由外部支撑部分包围的内部支撑部分(围绕图案限定区域)。 位于内,外支撑部分之间的是多个连接结构。 连接结构可以具有共同吸收翘曲的弹簧特性。 或者,连接结构可以包括相应的驱动机构。 驱动机构特别适于在电激活时引起相应的第一导电区域(位于外部支撑部分)和相应的第二导电区域(位于内部支撑部分上)之间的局部静电吸引。 连接结构的选择性激励导致内部支撑部分(并且因此图案限定区域)相对于外部支撑部分的微小移动,由此抵消掩模版翘曲。