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61. 发明授权

US5394741A Atomic probe microscope 失效
标题翻译：原子探针显微镜
公开(公告)号：US5394741A
公开(公告)日：1995-03-07
申请号：US874528
申请日：1992-04-27
申请人： Hiroshi Kajimura , Takao Okada
发明人： Hiroshi Kajimura , Takao Okada
IPC分类号： G01Q10/00 , G01Q20/02 , G01Q20/04 , G01Q60/02 , G01Q60/24 , G01Q60/38 , G01B7/34 , G01B11/30
CPC分类号： G01Q20/04 , B82Y35/00 , G01Q20/02 , G01Q60/38 , Y10S977/87
摘要： A cantilever has a probe on one side of the end portion and a mirror on the opposite side. The cantilever is fixed to a support member via a piezoelectric element. A semiconductor laser situated above the mirror has a reflection cleavage plane and constitutes a Fabry-Perot resonator between the mirror and the reflection cleavage plane. The output from the resonator varies in accordance with the amount of displacement of the end portion of the cantilever, that is, the surface configuration of the sample. This variation is detected by a detector via a photodetector. A control circuit controls a driving voltage applied to an XYZ-scanner so as to cancel the variation of the output from the resonator, thereby keeping constant the distance between the tip of the probe and the surface of the sample. The driving voltage provides height data of the sample surface. The driving voltage, along with a position signal relating to the sample surface output from the XYZ-scanner, is supplied to an image forming unit. The image forming unit generates a three-dimensional image representing the surface configuration of the sample, on the basis of the input voltage and signal.
摘要翻译：悬臂在端部的一侧具有探针，在相对侧具有反射镜。悬臂通过压电元件固定到支撑构件上。位于反射镜上方的半导体激光器具有反射解理面，并且在反射镜和反射解理面之间构成了法布里 - 珀罗（Francry-Pérot）谐振器。谐振器的输出根据悬臂的端部的位移量，即样品的表面构型而变化。该变化由检测器通过光电检测器检测。控制电路控制施加到XYZ扫描仪的驱动电压，以抵消来自谐振器的输出的变化，从而保持探针的尖端与样品表面之间的距离恒定。驱动电压提供样品表面的高度数据。驱动电压以及与从XYZ扫描器输出的样品表面相关的位置信号被提供给图像形成单元。图像形成单元基于输入电压和信号生成表示样本的表面配置的三维图像。

62. 发明授权

US5382789A Near field scanning optical microscope 失效
标题翻译：近场扫描光学显微镜
公开(公告)号：US5382789A
公开(公告)日：1995-01-17
申请号：US864238
申请日：1992-04-06
申请人： Shinichiro Aoshima
发明人： Shinichiro Aoshima
IPC分类号： G02B21/00 , G01N37/00 , G01Q60/02 , G01Q60/06 , G01Q60/18 , H01J3/14
CPC分类号： G01Q60/22 , B82Y20/00 , B82Y35/00 , Y10S977/862
摘要： A light source generates probe light to be radiated on a sample. An optical probe has a pin hole at its distal end and selectively supplies the probe light to the sample through the pin hole. An optical detecting unit detects light emerging from the sample and converts it to an electrical signal. The light source generates the probe light whose intensity changes in the pulse-like manner. The optical detecting unit detects the light emerging from the sample in synchronism with an increase in probe light which changes in the pulse-like manner and converts it to the electric signal. Therefore, noise which is conventionally converted to an electrical signal can be decreased even when the probe light which changes in the pulse-like manner is decreased, and measurement can be performed at a high S/N ratio even if the pin hole diameter is small. As a result, the resolution of a near field scanning optical microscope can be improved.
摘要翻译：光源产生要照射在样品上的探测光。光学探针在其远端具有针孔，并通过针孔选择性地将探针光提供给样品。光学检测单元检测从样品发出的光并将其转换成电信号。光源产生其脉冲状强度变化的探测光。光检测单元与脉冲状方式变化的探测光的增加同步地检测从样本出射的光，并将其转换为电信号。因此，即使当脉冲状变化的探测光减少时，也可以降低传统上转换为电信号的噪声，即使针孔直径小，也可以以高S / N比进行测量。结果，可以提高近场扫描光学显微镜的分辨率。

63. 发明申请

US20150241470A1 METHODS, SYSTEMS, AND COMPUTER READABLE MEDIA FOR DUAL RESONANCE FREQUENCY ENHANCED ELECTROSTATIC FORCE MICROSCOPY 有权
标题翻译：双共振频率增强静电力显微镜的方法，系统和计算机可读介质
公开(公告)号：US20150241470A1
公开(公告)日：2015-08-27
申请号：US14428510
申请日：2013-09-16
申请人： THE UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL
发明人： Dong Wu , Dorothy Erie
IPC分类号： G01Q60/02 , G01Q60/32 , G01Q60/40 , G01Q60/36 , G01N27/60 , G01N19/00
CPC分类号： G01Q60/02 , G01N19/00 , G01N27/60 , G01Q60/30 , G01Q60/32 , G01Q60/36 , G01Q60/40
摘要： The subject matter described herein includes methods, systems, and computer readable media for dual resonance frequency enhanced electrostatic force microscopy. One method includes applying an alternating current (AC) bias and a direct current (DC) bias to an atomic force microscopy cantilever, wherein the AC bias has a frequency greater than a fundamental resonance frequency of the cantilever. The method further includes mechanically vibrating the cantilever at a frequency different from the frequency of the AC bias. The method further includes physically and electrostatically scanning a sample in the same pass using the cantilever while vibrating the cantilever and applying the AC and DC biases to the cantilever, and generating a topology image of the sample from the physical scanning and an electrostatic image of charged material under or on a surface of the sample from the electrostatic scanning.
摘要翻译：本文描述的主题包括用于双共振频率增强静电力显微镜的方法，系统和计算机可读介质。一种方法包括将交流（AC）偏压和直流（DC）偏压施加到原子力显微镜悬臂，其中AC偏压具有大于悬臂的基本共振频率的频率。该方法还包括以与AC偏压的频率不同的频率机械振动悬臂。该方法还包括在振动悬臂的同时使用悬臂物体和静电扫描样品，并将AC和DC偏压施加到悬臂，以及从物理扫描和静电图像产生样品的拓扑图像来自静电扫描的样品表面下或表面上的材料。

64. 发明授权

US08763160B2 Measurement of the surface potential of a material 有权
标题翻译：测量材料的表面电位
公开(公告)号：US08763160B2
公开(公告)日：2014-06-24
申请号：US13576381
申请日：2011-02-09
申请人： Thierry Melin , Didier Theron , Sophie Barbet , Dominique Deresmes , Heinrich Diesinger
发明人： Thierry Melin , Didier Theron , Sophie Barbet , Dominique Deresmes , Heinrich Diesinger
IPC分类号： G01Q10/06 , G01Q60/02 , G01Q60/24 , G01Q60/34
CPC分类号： G01Q10/06 , G01Q60/02 , G01Q60/24 , G01Q60/30 , G01Q60/34 , G01Q60/40
摘要： During a measurement in KFM mode of the surface potential of a material (P), a detection point (1) is arranged above a surface (S) of the material. Two piezoelectric actuators (2, 5) are used to monitor a mean distance of the detection point relative to the surface of the material and a mechanical oscillation of said point. During the measurement, a control voltage is applied between control electrodes (2a, 2b) of the piezoelectric actuator (2) which is dedicated to the mechanical oscillation of the detection point (1), said control voltage not having an alternative component to an angular frequency of electrical energization of said detection point. A result of the KFM measurement is therefore separate from operating parameters such as a projection angle used to perform closed-loop control and a value of the angular frequency of electrical energization. The invention thus provides absolute measurements of surface potentials.
摘要翻译：在用KFM模式测量材料（P）的表面电位时，检测点（1）设置在材料的表面（S）的上方。两个压电致动器（2,5）用于监测检测点相对于材料表面的平均距离和所述点的机械振荡。在测量期间，在专用于检测点（1）的机械振荡的压电致动器（2）的控制电极（2a，2b）之间施加控制电压，所述控制电压不具有与角度所述检测点的电通电频率。因此，KFM测量的结果与操作参数分离，例如用于执行闭环控制的投影角和电激励角频率的值。因此，本发明提供了表面电位的绝对测量。

65. 发明授权

US6057546A Kinematically mounted probe holder for scanning probe microscope 有权
标题翻译：用于扫描探针显微镜的运动学安装的探头支架
公开(公告)号：US6057546A
公开(公告)日：2000-05-02
申请号：US129066
申请日：1998-08-04
申请人： David Braunstein , Michael Kirk , Ouoc Ly , Thai Nguyen
发明人： David Braunstein , Michael Kirk , Ouoc Ly , Thai Nguyen
IPC分类号： G01Q30/02 , G01B7/34 , G01N21/01 , G01N27/00 , G01Q10/02 , G01Q10/04 , G01Q30/14 , G01Q30/20 , G01Q60/02 , G01Q70/02 , G02B21/18 , H01J37/20 , H01J37/26
CPC分类号： G01Q10/04 , B82Y35/00 , G01Q30/025 , Y10S977/849 , Y10S977/86 , Y10S977/868 , Y10S977/869 , Y10S977/87 , Y10S977/872 , Y10S977/873
摘要： Scanning probe microscopes and scanning probe heads are provided having improved optical visualization and sample manipulation capabilities. The SPMs and SPM heads include at least one flexure stage for scanning in the x, y and/or z directions. In a preferred embodiment, the SPMs or SPM heads include flexure stages for scanning in the x, y and z directions. The z scanning stage is preferably positioned outside the lateral footprint of the x-y flexure stage so that a probe extending from the z scanning stage is outside the lateral footprint of the instrument. The SPMs and SPM heads are configured to provide top down and bottom up optical views of the sample and/or the probe and enable simultaneous scanning probe microscopy and optical imaging of a sample to be performed. The SPMs and SPM heads are designed to be readily combinable with existing upright and inverted optical microscopes currently available from various major manufacturers.
摘要翻译：提供扫描探针显微镜和扫描探头，具有改进的光学可视化和样品操作能力。 SPM和SPM头包括用于在x，y和/或z方向扫描的至少一个弯曲台。在优选实施例中，SPM或SPM头包括用于在x，y和z方向扫描的挠曲台。 z扫描台优选地定位在x-y弯曲台的横向覆盖区的外侧，使得从z扫描台延伸的探针位于仪器的横向覆盖区之外。 SPM和SPM头被配置为提供样品和/或探针的自顶向下和从底部的光学视图，并且能够执行样品的同时扫描探针显微镜和光学成像。 SPM和SPM头设计为可以与现有的各种主要制造商现有的直立和倒置光学显微镜组合。

66. 发明授权

US2606292A Method and apparatus for combined electron microscope and diffraction 失效
$Method and apparatus for combined electron microscope and diffraction$
标题翻译：组合电子显微镜和衍射的方法和装置
公开(公告)号：US2606292A
公开(公告)日：1952-08-05
申请号：US16163150
申请日：1950-05-12
申请人： GEN ELECTRIC
发明人： COLUMBE MAYNARD J
IPC分类号： G01Q60/02 , H01J37/09 , H01J37/27 , H01J37/295
CPC分类号： H01J37/295 , H01J37/09 , H01J37/27

67. 发明申请

WO2012072507A1 AFM-SECM sensor 审中-公开
标题翻译： AFM-SECM传感器
公开(公告)号：WO2012072507A1
公开(公告)日：2012-06-07
申请号：PCT/EP2011/071018
申请日：2011-11-25
申请人： TECHNISCHE UNIVERSITÄT WIEN , TECHNISCHE UNIVERSITÄT GRAZ , CEST KOMPETENZZENTRUM FÜR ELEKTROCHEMISCHE OBERFLÄCHENTECHNOLOGIE GMBH , AVDIC, Amra , LUGSTEIN, Alois , GOLLAS, Bernhard
发明人： AVDIC, Amra , LUGSTEIN, Alois , GOLLAS, Bernhard
IPC分类号： G01Q60/02 , G01Q60/40 , G01Q60/60
CPC分类号： G01Q60/02 , G01Q60/40 , G01Q60/60
摘要： The invention discloses an atomic force microscopy-scanning electrochemical microscopy (AFM-SECM) sensor comprising an AFM tip on an AFM cantilever, with a conductive layer on the AFM tip which forms a conductive AFM tip and wherein said conductive tip is connected to a contact region on the cantilever, said contact region providing the contact site for delivering the measurement signal to the measurement system, wherein said conductive layer is covered by an insulating layer except for the immediate tip and the contact region, wherein said insulating layer is covered by a conductive protection layer, and wherein, due to a cavity between the conductive protection layer and the conductive AFM tip, said cavity being formed by the absence or by removal of a tip located portion of the insulating layer, a ring or cylinder electrode forms with the conductive protection layer around the conductive AFM tip, and methods for producing such sensors.
摘要翻译：本发明公开了一种在AFM悬臂上包括AFM尖端的原子力显微镜扫描电化学显微镜（AFM-SECM）传感器，在AFM尖端上具有导电层，其形成导电AFM尖端，并且其中所述导电尖端连接到触点所述接触区域提供用于将测量信号传送到测量系统的接触位置，其中所述导电层被除了直接尖端和接触区域之外的绝缘层覆盖，其中所述绝缘层被覆盖在导电保护层，并且其中，由于导电保护层和导电AFM尖端之间的空腔，所述空腔通过不存在或通过去除绝缘层的尖端定位部分而形成，环形或圆柱形电极形成有导电性AFM尖端周围的导电保护层，以及用于制造这种传感器的方法。

68. 发明申请

WO99039215A1 MULTI-PROBE TEST HEAD 审中-公开
标题翻译：许多特殊的测试头
公开(公告)号：WO99039215A1
公开(公告)日：1999-08-05
申请号：PCT/EP1999/000069
申请日：1999-01-08
IPC分类号： G01R1/06 , G01B7/34 , G01Q30/02 , G01Q60/02 , G01Q60/16 , G01Q60/22 , G01Q60/38 , G01Q60/40 , G01Q60/48 , G01Q60/54 , G01Q70/10 , G01R1/067 , G01R1/07 , G01R31/26 , G01R31/302 , H01L21/66
CPC分类号： G01Q30/02 , B33Y80/00 , G01Q60/02 , G01Q60/16 , G01Q60/22 , G01Q60/38 , G01Q60/48 , G01Q60/54 , G01Q70/10 , G01R1/06711 , Y10S977/849 , Y10S977/86 , Y10S977/866 , Y10S977/869 , Y10S977/874 , Y10S977/901
摘要： According to the invention, a group of probes in a test head for a scanning probe microscope for testing integrated electronic circuits without contact is placed on a support, said probes having been manufactured by three-dimensional additive lithography. The probes are directed at a central point above the probe group. The conductive probes and the foot end of the capacitive probe are connected to conductor structures on the base for connection to a measuring circuit.
摘要翻译：在一个测试头，用于扫描探针显微镜对所产生的一组集成的电子电路的非接触式测试通过三维添加剂光刻探针上的支撑件设置。探针被定向到在探针组位置的中心位置。所述导电探针，以及所述电容性探针的脚端被连接用于在载体上连接到测量电路与导体结构。

69. 发明专利

JP5957352B2 熱アシスト磁気ヘッド検査方法および熱アシスト磁気ヘッド検査装置有权
公开(公告)号：JP5957352B2
公开(公告)日：2016-07-27
申请号：JP2012216219
申请日：2012-09-28
申请人：株式会社日立ハイテクノロジーズ
发明人：村上真一郎 , 徳冨照明 , 齋藤尚也 , 廣瀬丈師 , 張開鋒 , 北野佳昇
IPC分类号： G01Q60/18 , G01Q60/54 , G01Q60/02 , G01Q80/00 , G11B5/455

70. 发明专利

JP2014071925A Method and apparatus for inspecting thermally assisted magnetic head 有权
标题翻译：用于检查热辅助磁头的方法和装置
公开(公告)号：JP2014071925A
公开(公告)日：2014-04-21
申请号：JP2012216219
申请日：2012-09-28
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： MURAKAMI SHINICHIRO , TOKUTOMI TERUAKI , SAITO NAOYA , HIROSE TAKESHI , CHANG KE-BONG , KITANO KEISHO
IPC分类号： G11B5/455 , G01Q60/02 , G01Q60/18 , G01Q60/54 , G01Q80/00
摘要： PROBLEM TO BE SOLVED: To provide an apparatus for inspecting a thermally assisted magnetic head that optimizes a positional relation between a near-field light emitting unit and scattered light detection means.SOLUTION: An apparatus for inspecting a thermally assisted magnetic head comprises: scanning type probe microscope means provided with a cantilever whose tip has a probe having its surface formed with a magnetic film; image taking means for taking an image of a thermally assisted magnetic head element in the visual field that is mounted on a XY table; scattered light detection means having a light detector for detecting scattered light generated from the probe when the probe is in a generation area of near-field light generated from a near-field light emitting unit formed on the thermally assisted magnetic head element; light detector switching means for mechanically switching between a layout of a CCD camera of the image taking means and a layout of the light detector of the scattered light detection means, except a lens system used in common for both the means, to enable application of either one of the means; and alignment means for recognizing and processing an image taken by the image taking means to adjust a relative position between the near-field light emitting unit and the scattered light detection means to an appropriate position for detecting the scattered light with the scattered light detection means.
摘要翻译：要解决的问题：提供一种用于检查热辅助磁头的装置，其优化近场发光单元和散射光检测装置之间的位置关系。解决方案：用于检查热辅助磁头的装置包括：扫描型具有悬臂的探针显微镜装置，其尖端具有其表面形成有磁性膜的探针; 用于在安装在XY工作台上的视场中拍摄热辅助磁头元件的图像的摄像装置; 散射光检测装置，具有光检测器，用于当探针处于形成在热辅助磁头元件上的近场发光单元产生的近场光的产生区域中时，用于检测由探头产生的散射光; 光检测器切换装置，用于在图像获取装置的CCD照相机的布局与散射光检测装置的光检测器的布局之间机械地切换，除了用于两个装置的共同使用的透镜系统之外，以使得能够应用其中一种手段; 以及对准装置，用于识别和处理由摄像装置拍摄的图像，以将近场发光单元和散射光检测装置之间的相对位置调整到用于利用散射光检测装置检测散射光的适当位置。

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