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61. 发明申请

US20150155133A1 Charged Particle Beam Apparatus 有权
公开(公告)号：US20150155133A1
公开(公告)日：2015-06-04
申请号：US14560845
申请日：2014-12-04
申请人： Hermes Microvision Inc.
发明人： Zhongwei Chen , Jack Jau , Weiming Ren
IPC分类号： H01J37/26 , H01J37/22 , H01J37/20 , H01J37/10 , H01J37/14
CPC分类号： H01J37/28 , H01J37/026 , H01J37/10 , H01J37/14 , H01J37/20 , H01J37/22 , H01J37/244 , H01J37/261 , H01J37/285 , H01J37/292 , H01J2237/04926 , H01J2237/1405 , H01J2237/24475 , H01J2237/24495 , H01J2237/24528 , H01J2237/2801 , H01J2237/2804 , H01J2237/2806 , H01J2237/2814
摘要： The present invention provides apparatuses to inspect small particles on the surface of a sample such as wafer and mask. The apparatuses provide both high detection efficiency and high throughput by forming Dark-field BSE images. The apparatuses can additionally inspect physical and electrical defects on the sample surface by form SE images and Bright-field BSE images simultaneously. The apparatuses can be designed to do single-beam or even multiple single-beam inspection for achieving a high throughput.

62. 发明申请

US20150083912A1 Charged Particle Beam Apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US20150083912A1
公开(公告)日：2015-03-26
申请号：US14560784
申请日：2014-12-04
申请人： Hermes Microvision Inc.
发明人： Zhongwei Chen , Jack Jau , Weiming Ren
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/28 , H01J37/026 , H01J37/10 , H01J37/14 , H01J37/20 , H01J37/22 , H01J37/244 , H01J37/261 , H01J37/285 , H01J37/292 , H01J2237/04926 , H01J2237/1405 , H01J2237/24475 , H01J2237/24495 , H01J2237/24528 , H01J2237/2801 , H01J2237/2804 , H01J2237/2806 , H01J2237/2814
摘要： The present invention provides apparatuses to inspect small particles on the surface of a sample such as wafer and mask. The apparatuses provide both high detection efficiency and high throughput by forming Dark-field BSE images. The apparatuses can additionally inspect physical and electrical defects on the sample surface by form SE images and Bright-field BSE images simultaneously. The apparatuses can be designed to do single-beam or even multiple single-beam inspection for achieving a high throughput.
摘要翻译：本发明提供了检查诸如晶片和掩模之类的样品表面上的小颗粒的装置。这些装置通过形成暗场BSE图像提供高检测效率和高吞吐量。这些装置可以通过同时形成SE图像和亮场BSE图像另外检查样品表面上的物理和电气缺陷。这些装置可被设计成进行单光束或甚至多个单光束检查以实现高吞吐量。

63. 发明申请

US20140252245A1 ELECTRON LENS AND THE ELECTRON BEAM DEVICE 审中-公开
标题翻译：电子镜头和电子束装置
公开(公告)号：US20140252245A1
公开(公告)日：2014-09-11
申请号：US14271940
申请日：2014-05-07
申请人： PARAM CORPORATION
发明人： Hiroshi Yasuda
IPC分类号： H01J37/143 , H01J37/30 , H01J37/317 , H01J3/24
CPC分类号： H01J3/24 , B82Y10/00 , B82Y40/00 , H01J3/20 , H01J37/143 , H01J37/3007 , H01J37/3174 , H01J37/3177 , H01J2237/002 , H01J2237/1405
摘要： There provided a device for effectively drawing a fine pattern using a permanent magnet. The device has an outer cylinder 201 composed of a cylindrical ferromagnet with a Z axis as a central axis, a cylindrical permanent magnet 202 located inside the outer cylinder and polarized along the Z axis direction, a correction coil 204 located inside the cylindrical permanent magnet with a gap from the cylindrical permanent magnet, for adjusting a magnetic field strength generated by the cylindrical permanent magnet along the Z axis direction, and a coolant passage 203 located in the gap between the cylindrical permanent magnet and the correction coil, for allowing a coolant to flow therethrough and controlling temperature changes in the cylindrical permanent magnet.
摘要翻译：提供了一种用于使用永磁体有效地绘制精细图案的装置。该装置具有由Z轴作为中心轴的圆柱形铁磁体构成的外筒201，位于外筒内部并沿着Z轴方向极化的圆柱形永磁体202，位于筒状永久磁铁内部的校正线圈204，用于调整由圆柱形永磁体沿Z轴方向产生的磁场强度的圆柱形永磁体的间隙和位于圆柱形永磁体和校正线圈之间的间隙中的冷却剂通道203，用于允许冷却剂流过其中并控制圆筒形永磁体的温度变化。

64. 发明授权

US08785880B2 Chromatic aberration corrector and electron microscope 有权
标题翻译：色差校正器和电子显微镜
公开(公告)号：US08785880B2
公开(公告)日：2014-07-22
申请号：US14102838
申请日：2013-12-11
申请人： JEOL Ltd.
发明人： Hidetaka Sawada , Fumio Hosokawa
IPC分类号： G21K1/08 , H01J3/14 , H01J3/26 , H01J49/42
CPC分类号： H01J37/153 , H01J37/26 , H01J2237/12 , H01J2237/1405 , H01J2237/1534
摘要： The chromatic aberration corrector (100) has a first multipole element (110) for producing a first electromagnetic field and a second multipole element (120) for producing a second electromagnetic field. The first multipole element (110) first, second, and third portions (110a, 110b, 110c) arranged along an optical axis (OA) having a thickness and producing a quadrupole field in which an electric quadrupole field and a magnetic quadrupole field are superimposed. In the first and third portions (110a, 110c), the electric quadrupole field is set stronger than the magnetic quadrupole field. In the second portion (110b), the magnetic quadrupole field is set stronger than the electric quadrupole field. The second portion (110b) produces a two-fold astigmatism component that is opposite in sign to two-fold astigmatism components produced by the first portion (110a) and third portion (110c).
摘要翻译：色差校正器（100）具有用于产生第一电磁场的第一多极元件（110）和用于产生第二电磁场的第二多极元件（120）。第一多极元件（110）沿着具有厚度并且产生四极场的光轴（OA）布置的第一，第二和第三部分（110a，110b，110c），其中电四极场和四极磁场被叠加。在第一和第三部分（110a，110c）中，电四极场被设置为比四极四极场强。在第二部分（110b）中，将四极四极场设置得比电四极场强。第二部分（110b）产生与由第一部分（110a）和第三部分（110c）产生的两折像散分量相反的双折射散光成分。

65. 发明授权

US08314401B2 Electron gun with magnetic immersion double condenser lenses 有权
标题翻译：电子枪与磁浸双重聚光镜
公开(公告)号：US08314401B2
公开(公告)日：2012-11-20
申请号：US12896110
申请日：2010-10-01
申请人： Xu Zhang , Zhong-Wei Chen
发明人： Xu Zhang , Zhong-Wei Chen
IPC分类号： H01J1/50
CPC分类号： H01J37/141 , H01J37/063 , H01J2237/065 , H01J2237/083 , H01J2237/1035 , H01J2237/1405
摘要： An electron gun comprises an electron emitter, an electrode surrounding the electron emitter, an extraction electrode, and a double condenser lens assembly, the double condenser lens assembly comprising a magnetic immersion pre-condenser lens and a condenser lens. In combination with a probe forming objective lens, the electron gun apparatus can provide an electron beam of independently adjustable probe size and probe current, as is desirable in electron beam applications. The electron emitter is immersed in the magnetic field generated by a magnetic type pre-condenser lens. When activated, the pre-condenser lens collimates the beam effectively to increase its angular intensity while at the same time enlarging the virtual source as compared with non-immersion case, due to geometric magnification and aberrations of its lens action. The pre-condenser lens is followed by a condenser lens. If the condenser lens is of the magnetic type, its peak magnetic field is far enough away and thus its action does not significantly affect the size of the virtual source. Independent adjustment of the lenses, combined with suitable selection of final probe forming objective aperture size, allows various combination of the final probe size and probe current to be obtained in a range sufficient for most electron beam applications.
摘要翻译：电子枪包括电子发射器，围绕电子发射体的电极，引出电极和双重聚光透镜组件，双重聚光透镜组件包括磁性浸入式预聚光透镜和聚光透镜。与形成物镜的探针组合，如在电子束应用中所希望的那样，电子枪装置可以提供独立可调的探针尺寸和探针电流的电子束。将电子发射器浸入由磁式预聚光透镜产生的磁场中。当激活时，由于几何放大和其透镜作用的像差，预聚焦透镜有效地准直光束以增加其角度强度，同时与非浸没情况相比放大虚拟光源。预聚光透镜之后是聚光透镜。如果聚光透镜是磁性的，则其峰值磁场足够远，因此其作用不会显着影响虚拟源的尺寸。透镜的独立调整结合适当选择最终探针形成物镜孔径的尺寸允许在足以满足大多数电子束应用的范围内获得最终探针尺寸和探针电流的各种组合。

66. 发明授权

US08309921B2 Compact scanning electron microscope 有权
标题翻译：紧凑型扫描电子显微镜
公开(公告)号：US08309921B2
公开(公告)日：2012-11-13
申请号：US13019216
申请日：2011-02-01
申请人： Martinus Petrus Maria Bierhoff , Bart Buijsse , Cornelis Sander Kooijman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stoks , Steven Berger , Ben Jacobus Marie Bormans , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus W. G. Persoon
发明人： Martinus Petrus Maria Bierhoff , Bart Buijsse , Cornelis Sander Kooijman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stoks , Steven Berger , Ben Jacobus Marie Bormans , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus W. G. Persoon
IPC分类号： H01J37/20 , H01J37/252 , H01J37/28
CPC分类号： H01J37/26 , H01J37/16 , H01J37/18 , H01J37/185 , H01J37/20 , H01J37/21 , H01J37/226 , H01J37/244 , H01J37/261 , H01J37/28 , H01J37/302 , H01J2237/1405 , H01J2237/162 , H01J2237/1825 , H01J2237/188 , H01J2237/2003 , H01J2237/2006
摘要： A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.
摘要翻译：紧凑型电子显微镜使用具有形成样品所在的真空区域的一部分的壁的可移除的样品保持器。通过使用可拆卸的样品架来容纳真空，在成像之前需要排空的空气的体积大大减少，并且显微镜可以被快速排空。在优选实施例中，滑动真空密封允许样品保持器位于电子柱下方，并且样品保持器首先在真空缓冲器下通过以除去样品保持器中的空气。

67. 发明授权

US08124946B2 Post-decel magnetic energy filter for ion implantation systems 有权
标题翻译：用于离子注入系统的减速磁能过滤器
公开(公告)号：US08124946B2
公开(公告)日：2012-02-28
申请号：US12477631
申请日：2009-06-03
申请人： Geoffrey Ryding , Theodore Smick , Marvin Farley , Takao Sakase , Bo Vanderberg
发明人： Geoffrey Ryding , Theodore Smick , Marvin Farley , Takao Sakase , Bo Vanderberg
IPC分类号： H01J37/317 , H01J49/30 , H01J49/42
CPC分类号： H01J37/3171 , H01J37/05 , H01J2237/0492 , H01J2237/103 , H01J2237/1405 , H01J2237/1501 , H01J2237/1523 , H01J2237/153 , H01J2237/21 , H01J2237/24528 , H01J2237/31705
摘要： A system and method for magnetically filtering an ion beam during an ion implantation into a workpiece is provided, wherein ions are emitted from an ion source and accelerated the ions away from the ion source to form an ion beam. The ion beam is mass analyzed by a mass analyzer, wherein ions are selected. The ion beam is then decelerated via a decelerator once the ion beam is mass-analyzed, and the ion beam is further magnetically filtered the ion beam downstream of the deceleration. The magnetic filtering is provided by a quadrapole magnetic energy filter, wherein a magnetic field is formed for intercepting the ions in the ion beam exiting the decelerator to selectively filter undesirable ions and fast neutrals.
摘要翻译：提供了一种用于在离子注入工件期间对离子束进行磁过滤的系统和方法，其中离子从离子源发射并且将离子加速离开离子源以形成离子束。离子束通过质量分析器进行质量分析，其中选择离子。一旦离子束被质量分析，离子束然后通过减速器减速，并且离子束进一步对减速度下游的离子束进行磁过滤。磁滤波由四极磁能滤波器提供，其中形成磁场以截取离开减速器的离子束中的离子，以选择性地过滤不需要的离子和快速中性粒子。

68. 发明申请

US20110133083A1 COMPACT SCANNING ELECTRON MICROSCOPE 有权
标题翻译：紧凑扫描电子显微镜
公开(公告)号：US20110133083A1
公开(公告)日：2011-06-09
申请号：US13019216
申请日：2011-02-01
申请人： MART PETRUS MARIA BIERHOFF , Bart Buijsse , Cornelis Sander Kooijman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stoks , Ben Jacobus Marie Bormans , Steven Berger , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus WILHELMUS Gerardus Persoon
发明人： MART PETRUS MARIA BIERHOFF , Bart Buijsse , Cornelis Sander Kooijman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stoks , Ben Jacobus Marie Bormans , Steven Berger , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus WILHELMUS Gerardus Persoon
IPC分类号： G01N23/225
CPC分类号： H01J37/26 , H01J37/16 , H01J37/18 , H01J37/185 , H01J37/20 , H01J37/21 , H01J37/226 , H01J37/244 , H01J37/261 , H01J37/28 , H01J37/302 , H01J2237/1405 , H01J2237/162 , H01J2237/1825 , H01J2237/188 , H01J2237/2003 , H01J2237/2006
摘要： A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.
摘要翻译：紧凑型电子显微镜使用具有形成样品所在的真空区域的一部分的壁的可移除的样品保持器。通过使用可拆卸的样品架来容纳真空，在成像之前需要排空的空气的体积大大减少，并且显微镜可以被快速排空。在优选实施例中，滑动真空密封允许样品保持器位于电子柱下方，并且样品保持器首先在真空缓冲器下通过以除去样品保持器中的空气。

69. 发明申请

US20100294932A1 Magnetic Domain Imaging System 有权
标题翻译：磁畴成像系统
公开(公告)号：US20100294932A1
公开(公告)日：2010-11-25
申请号：US12781121
申请日：2010-05-17
申请人： Takeshi Tomita
发明人： Takeshi Tomita
IPC分类号： H01J37/26 , H01J37/147
CPC分类号： H01J37/266 , H01J37/147 , H01J2237/1405 , H01J2237/2008 , H01J2237/2588
摘要： A magnetic domain imaging system is offered which permits application of a strong magnetic field to a specimen. The imaging system includes a transmission electron microscope having an objective lens. The specimen that is magnetic in nature is placed in the upper polepiece of the objective lens. An electron beam transmitted through the specimen is imaged and displayed on a display device. A field application coil assembly for applying a magnetic field to the specimen and two deflection coil assemblies for bringing the beam deflected by the field applied to the specimen back to the optical axis are mounted in the upper polepiece.
摘要翻译：提供了磁场成像系统，其允许对样本施加强磁场。成像系统包括具有物镜的透射电子显微镜。本质上是磁性的样品被放置在物镜的上极片中。通过试样透射的电子束被成像并显示在显示装置上。用于向样本施加磁场的场应用线圈组件和用于将由施加到样本的磁场偏转的光束引导到光轴的两个偏转线圈组件安装在上极靴中。

70. 发明申请

US20100194874A1 User Interface for an Electron Microscope 有权
标题翻译：电子显微镜的用户界面
公开(公告)号：US20100194874A1
公开(公告)日：2010-08-05
申请号：US12303717
申请日：2007-06-07
申请人： Mart Petrus Maria Bierhoff , Bart Buijsse , Cornelis Sander Kooljman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stocks , Steven Berger , Ben Jacobus Marie Bormans , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus W.G. Persoon
发明人： Mart Petrus Maria Bierhoff , Bart Buijsse , Cornelis Sander Kooljman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stocks , Steven Berger , Ben Jacobus Marie Bormans , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus W.G. Persoon
IPC分类号： H04N7/18
CPC分类号： H01J37/26 , H01J37/16 , H01J37/18 , H01J37/185 , H01J37/20 , H01J37/21 , H01J37/226 , H01J37/244 , H01J37/261 , H01J37/28 , H01J37/302 , H01J2237/1405 , H01J2237/162 , H01J2237/1825 , H01J2237/188 , H01J2237/2003 , H01J2237/2006
摘要： A user interface for operation of a scanning electron microscope device that combines lower magnification reference images and higher magnification images on the same screen to make it easier for a user who is not used to the high magnification of electron microscopes to readily determine where on the sample an image is being obtained and to understand the relationship between that image and the rest of the sample. Additionally, other screens, such as, for example, an archive screen and a settings screen allow the user to compare saved images and adjust the settings of the system, respectively.
摘要翻译：用于操作扫描电子显微镜装置的用户界面，其将较低倍率参考图像和较高放大倍率的图像组合在同一屏幕上，使得不被用于电子显微镜的高放大倍数的用户容易地确定样品在哪里更容易正在获取图像并了解该图像与其余样本之间的关系。此外，其他屏幕（例如存档屏幕和设置屏幕）允许用户比较保存的图像并分别调整系统的设置。

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