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1. 发明授权

US07906762B2 Compact scanning electron microscope 有权
标题翻译：紧凑型扫描电子显微镜
公开(公告)号：US07906762B2
公开(公告)日：2011-03-15
申请号：US12303611
申请日：2007-06-07
申请人： Mart Petrus Maria Bierhoff , Bart Buijsse , Cornelis Sander Kooijman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stoks , Ben Jacobus Marie Bormans , Steven Berger , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus Wilhelmus Gerardus Persoon
发明人： Mart Petrus Maria Bierhoff , Bart Buijsse , Cornelis Sander Kooijman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stoks , Ben Jacobus Marie Bormans , Steven Berger , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus Wilhelmus Gerardus Persoon
IPC分类号： H01J37/08 , H01J37/18 , H01J5/02
CPC分类号： H01J37/26 , H01J37/16 , H01J37/18 , H01J37/185 , H01J37/20 , H01J37/21 , H01J37/226 , H01J37/244 , H01J37/261 , H01J37/28 , H01J37/302 , H01J2237/1405 , H01J2237/162 , H01J2237/1825 , H01J2237/188 , H01J2237/2003 , H01J2237/2006
摘要： A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.
摘要翻译：紧凑型电子显微镜使用具有形成样品所在的真空区域的一部分的壁的可移除的样品保持器。通过使用可拆卸的样品架来容纳真空，在成像之前需要排空的空气的体积大大减少，并且显微镜可以被快速排空。在优选实施例中，滑动真空密封允许样品保持器位于电子柱下方，并且样品保持器首先在真空缓冲器下通过以除去样品保持器中的空气。

2. 发明申请

US20100276592A1 Compact Scanning Electron Microscope 有权
标题翻译：紧凑型扫描电子显微镜
公开(公告)号：US20100276592A1
公开(公告)日：2010-11-04
申请号：US12303715
申请日：2007-04-26
申请人： Johannes Antonius Hendricus Wilhelmus Gerardus Persoon , Andreas Theodorus Engelen , Siegfried Lichtenegger , Petrus Henricus Joannes Van Dooren
发明人： Johannes Antonius Hendricus Wilhelmus Gerardus Persoon , Andreas Theodorus Engelen , Siegfried Lichtenegger , Petrus Henricus Joannes Van Dooren
IPC分类号： F16C29/02 , H01J37/28 , H01J37/08 , H01J37/18 , H01J5/02 , H01J27/02
CPC分类号： H01J37/28 , H01J37/185 , H01J37/20 , H01J2237/166 , H01J2237/184 , H01J2237/2006 , H01J2237/204
摘要： A slider bearing for use with an apparatus comprising a vacuum chamber (11). The slider bearing comprises: a base plate (20) in contact with the vacuum chamber (11) at one side, said base plate showing a first through-hole (21) in contact with the vacuum chamber (11), a second plate (30), one side of the second plate in contact with the base plate (20), said second plate showing a second through-hole (31), the faces of the base plate and the second plate facing each other being sufficiently smooth to form a non-elastomeric vacuum seal, said base plate (20) and said second plate (30) slidable between a first relative position in which the first through-hole (21) and the second through-hole (31) do not overlap and a second relative position in which the first through-hole and the second through-hole overlap, characterised in that the second plate (30) is a flexible plate, the face of the flexible plate opposite to the base plate is equipped to seal against a cup (50), the cup equipped to hold a sample (1), the first through-hole (21) in the base plate shows a rim facing the flexible plate (30) with a controlled curvature, the curvature of the rim formed such that the vacuum seal between the base plate and the flexible plate forms on a pre-defined contour and that the Hertzian contact pressure is smaller than a pre-defined maximum contact pressure, the pre-determined maximum contact pressure chosen to minimise particle generation. By forming the second plate as a flexible plate the pressure with which the base plate and the second plate are pressed together is better reproducible than when both plates are rigid. By forming the rim with a controlled radius, the particle generation is minimized.
摘要翻译：一种用于与包括真空室（11）的设备一起使用的滑块轴承。滑动轴承包括：在一侧与真空室（11）接触的基板（20），所述基板显示与真空室（11）接触的第一通孔（21），第二板 30），与所述基板（20）接触的所述第二板的一侧，所述第二板表示第二通孔（31），所述基板和所述第二板的面彼此相对平滑以形成非弹性真空密封件，所述基板（20）和所述第二板（30）可在其中第一通孔（21）和第二通孔（31）不重叠的第一相对位置和第二通孔第二相对位置，其中第一通孔和第二通孔重叠，其特征在于，第二板（30）是柔性板，与基板相对的柔性板的表面被装备以密封杯（50），装备有样品（1）的杯子，底板中的第一通孔（21）面对具有受控曲率的柔性板（30），边缘的曲率形成为使得基板和柔性板之间的真空密封形成预定义的轮廓，并且赫兹接触压力小于预定值，定义的最大接触压力，所选择的预定最大接触压力以最小化颗粒产生。通过将第二板形成为柔性板，将基板和第二板压在一起的压力比两个板刚性时的压力更好。通过以受控的半径形成轮辋，使颗粒的产生最小化。

3. 发明授权

US08598524B2 Slider bearing for use with an apparatus comprising a vacuum chamber 有权
标题翻译：用于与包括真空室的设备一起使用的滑块轴承
公开(公告)号：US08598524B2
公开(公告)日：2013-12-03
申请号：US12303715
申请日：2007-04-26
申请人： Johannes Antonius Hendricus Wilhelmus Gerardus Persoon , Andreas Theodorus Engelen , Siegfried Lichtenegger , Petrus Henricus Joannes Van Dooren
发明人： Johannes Antonius Hendricus Wilhelmus Gerardus Persoon , Andreas Theodorus Engelen , Siegfried Lichtenegger , Petrus Henricus Joannes Van Dooren
IPC分类号： G01N23/00
CPC分类号： H01J37/28 , H01J37/185 , H01J37/20 , H01J2237/166 , H01J2237/184 , H01J2237/2006 , H01J2237/204
摘要： An apparatus for loading a sample into a particle-optical instrument that includes a slider bearing having a base plate in contact with the vacuum chamber at one side, said base plate showing a first through-hole in contact with the vacuum chamber, and a second plate, one side of the second plate in contact with the base plate, said second plate also showing a through-hole, where the faces of the base plate and the second plate facing each other are sufficiently smooth to form a non-elastomeric vacuum seal and where the second plate is a flexible plate and the face of the flexible plate opposite to the base plate is equipped to seal against a cup equipped to hold a sample. Preferably the through-hole in the base plate shows a rim facing the flexible plate with a controlled curvature, the curvature of the rim formed such that the vacuum seal between the base plate and the flexible plate forms on a pre-defined contour and that the Hertzian contact pressure is smaller than a pre-defined maximum contact pressure, the pre-determined maximum contact pressure chosen to minimize particle generation. By forming the second plate as a flexible plate the pressure with which the base plate and the second plate are pressed together is better reproducible than when both plates are rigid. By forming the rim with a controlled radius, particle generation is minimized.
摘要翻译：一种用于将样品装载到包括滑动轴承的颗粒光学仪器的装置，该滑动轴承具有与一侧的真空室接触的基板，所述基板显示与真空室接触的第一通孔，第二通孔板，与基板接触的第二板的一侧，所述第二板还显示通孔，其中基板和第二板的面彼此面对是足够光滑的，以形成非弹性真空密封件并且其中第二板是柔性板，并且与基板相对的柔性板的表面被装备以密封装备以保持样品的杯。优选地，基板中的通孔显示出具有受控曲率的面向柔性板的边缘，所述边缘的曲率形成为使得基板和柔性板之间的真空密封形成预定义的轮廓，并且赫兹接触压力小于预定义的最大接触压力，选择预定的最大接触压力以最小化颗粒产生。通过将第二板形成为柔性板，将基板和第二板压在一起的压力比两个板刚性时的压力更好。通过以受控的半径形成轮辋，使颗粒的产生最小化。

4. 发明申请

US20110133083A1 COMPACT SCANNING ELECTRON MICROSCOPE 有权
标题翻译：紧凑扫描电子显微镜
公开(公告)号：US20110133083A1
公开(公告)日：2011-06-09
申请号：US13019216
申请日：2011-02-01
申请人： MART PETRUS MARIA BIERHOFF , Bart Buijsse , Cornelis Sander Kooijman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stoks , Ben Jacobus Marie Bormans , Steven Berger , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus WILHELMUS Gerardus Persoon
发明人： MART PETRUS MARIA BIERHOFF , Bart Buijsse , Cornelis Sander Kooijman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stoks , Ben Jacobus Marie Bormans , Steven Berger , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus WILHELMUS Gerardus Persoon
IPC分类号： G01N23/225
CPC分类号： H01J37/26 , H01J37/16 , H01J37/18 , H01J37/185 , H01J37/20 , H01J37/21 , H01J37/226 , H01J37/244 , H01J37/261 , H01J37/28 , H01J37/302 , H01J2237/1405 , H01J2237/162 , H01J2237/1825 , H01J2237/188 , H01J2237/2003 , H01J2237/2006
摘要： A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.
摘要翻译：紧凑型电子显微镜使用具有形成样品所在的真空区域的一部分的壁的可移除的样品保持器。通过使用可拆卸的样品架来容纳真空，在成像之前需要排空的空气的体积大大减少，并且显微镜可以被快速排空。在优选实施例中，滑动真空密封允许样品保持器位于电子柱下方，并且样品保持器首先在真空缓冲器下通过以除去样品保持器中的空气。

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