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61. 发明公开

EP1807856A1 SPRING STRUCTURE FOR MEMS DEVICE 有权转让
标题翻译：弹簧结构对于MEMS器件
公开(公告)号：EP1807856A1
公开(公告)日：2007-07-18
申请号：EP05807167.1
申请日：2005-10-24
申请人： Koninklijke Philips Electronics N.V.
发明人： STEENEKEN, Peter G. , VAN BEEK, Jozef Thomas Martinus , RIJKS, Theo
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/18 , H01G5/40 , H01H1/24 , H01H2059/0063
摘要： A MEM device has a movable element (30), a pair of electrodes (e1, e2) to move the movable element, one electrode having an independently movable section (e3), resiliently coupled to the rest of the respective electrode to provide additional resistance to a pull in of the electrodes. This can enable a higher release voltage Vrel, and thus reduced risk of stiction. Also, a ratio of Vpi to Vrel can be reduced, and so a greater range of voltage is available for movement of the movable element. This enables faster switching. The area of the independently movable section is smaller than the rest of the electrode, and the spring constant of the resilient coupling is greater than that of the flexible support. Alternatively, the movable element can have a movable stamp section resiliently coupled and protruding towards the substrate to provide an additional resistance to pull in when it contacts the substrate.

62. 发明公开

EP1672662A1 MEMS switch and method of fabricating the same 有权
标题翻译： MEMS Schalter und Methode zu dessen Herstellung
公开(公告)号：EP1672662A1
公开(公告)日：2006-06-21
申请号：EP05025063.8
申请日：2005-11-16
申请人： Samsung Electronics Co., Ltd.
发明人： Kim, Che-heung , Shin, Hyung-jae , Kweon, Soon-cheol , Kim, Kyu-sik , Lee, Sang-hun
IPC分类号： H01H59/00
CPC分类号： H01H1/5822 , H01H59/0009 , H01H2059/0054 , H01H2059/0063
摘要： A micro electro mechanical system switch and a method of fabricating the same. The micro electro mechanical system switch includes a substrate a plurality of signal lines formed at sides an upper surface of the substrate and including switching contact points and a plurality of immovable electrodes on the upper surface of the substrate and between the plurality of signal lines. An inner actuating member performs a seesaw based on a center of the substrate and together with an outer actuating member. Pushing rods are formed at ends of an upper surface of the inner actuating member with ends protruding from and overlapping with an upper portion of the outer actuating member. Contacting members are formed on a lower surface of the outer actuating member so as to be pushed by the pushing rods and contacting the switching contact points of the signal lines.
摘要翻译：微机电系统开关及其制造方法。微电子机械系统开关包括基板，在基板的上表面的侧面形成多个信号线，并且在基板的上表面和多个信号线之间包括开关接触点和多个不可移动的电极。内部致动构件基于衬底的中心并与外部致动构件一起执行跷跷板。推动杆形成在内致动构件的上表面的端部处，其端部从外致动构件的上部突出并与其重叠。接触构件形成在外部致动构件的下表面上，以被推杆推动并接触信号线的开关接触点。

63. 发明公开

EP1246216A2 Electrostatic micro-relay, radio device and measuring device using the electrostatic micro-relay, and contact switching method 有权
标题翻译：静电微型继电器，无线电和仪器设置有微型继电器和切换方法
公开(公告)号：EP1246216A2
公开(公告)日：2002-10-02
申请号：EP02252164.5
申请日：2002-03-26
申请人： Omron Corporation
发明人： Seki, Tomonori, c/o Omron Corporation
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0063
摘要： Signal lines (5a, 5b) formed on a fixed substrate 1 are arranged on the same straight line. A movable substrate (2) is elastically supported on the fixed substrate (1) through beam portions (11) provided at two positions which are point-symmetrical with each other with a movable contact (16) centered thereon. At least portions opposing the signal lines (5a, 5b) are removed from the movable substrate (2). The movable contact (16) is elastically supported at two points that are orthogonal to the straight line on which the signal lines (5a, 5b) are arranged and do not face the signal lines (5a, 5b). A pair of protrusions 17 are formed at positions at which after closing the contacts, if a voltage were applied between the fixed electrode 4 and the movable electrode 12 without the protrusion, the fixed substrate 1 and the movable substrate 2 would contact each other following the contact between the fixed contact 7 and the movable contact 16, in a point-symmetrical manner with the movable contact 16 centered thereon. With this arrangement, it is possible to provide an electrostatic micro-relay which has a simple and small-size structure that is easily manufactured at low costs, and is superior in high-frequency characteristics with a suitable contact release force.
摘要翻译：信号线（5A，5B）上的固定形成的衬底1被布置在同一直线上。可移动的衬底（2）被弹性地支撑在固定的底物（1）通过在两个位置设置的梁部（11），它们是点对称的相互的可移动触点（16）为中心在其上。在相对的所述信号线的至少部分（5A，5B）是从可动基板（2）中除去。动触头（16）在两个点弹性支撑的确是正交的直线上的信号线（5A，5B）设置和不面对信号线（5A，5B）。一对突出17在在哪个位置闭合触头之后形成，如果电压被固定电极4和可动电极12，而不突出部之间时，所述固定基板1和可动基板2将接触海誓山盟继固定触点7和与该可动接点16可动接点16以点对称的方式之间的接触为中心在其上。利用这种布置，能够提供对静电微型继电器其具有简单和小型的结构并以低成本容易地制造，并且是在与合适的接触释放力的高频特性优越。

64. 发明授权

EP0698279B1 BI-STABLE MEMORY ELEMENT 失效
标题翻译：双稳态存储器元件
公开(公告)号：EP0698279B1
公开(公告)日：1997-11-26
申请号：EP94914474.5
申请日：1994-05-06
申请人： CAVENDISH KINETICS LIMITED
发明人： Smith,Charles Gordon
IPC分类号： H01H1/00 , H01H59/00 , G11C23/00
CPC分类号： H01H1/0036 , G11C11/50 , G11C23/00 , H01H1/20 , H01H1/66 , H01H59/0009 , H01H2001/0042 , H01H2059/0036 , H01H2059/0063
摘要： A bi-stable memory element (1) comprises a base contact (3), and a bridging contact (8), both made from an electrically conductive material. The bridging contact (8) is dimensioned so as to have two stable positions, in one of which the bridging contact (8) is in contact with the base contact (3), and in the other of which the bridging contact (8) is spaced apart from the base contact (3). Deflection means (4, 5) deflects the bridging contact (8) from one stable position to the other.

65. 发明公开

US20230360872A1 Electronic Module and Apparatus 审中-公开
公开(公告)号：US20230360872A1
公开(公告)日：2023-11-09
申请号：US18246830
申请日：2021-09-28
申请人： Siemens Aktiengesellschaft
发明人： Oliver Raab , Markus Schwarz , Hans Santos Wilke , Stefan Kiefl
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2059/0063
摘要： Various embodiments of the teachings herein include an electronic module. The module may include: an electrical circuit; a first MEMS switch having a first control contact with a first switching threshold voltage; and a second MEMS switch having a second control contact with a second switching threshold voltage different than the first. The first control contact and the second MEMS switch are linked to the electrical circuit.

66. 发明申请

US20190172671A1 SWITCH ARRANGEMENTS FOR MICROELECTROMECHANICAL SYSTEMS 审中-公开
公开(公告)号：US20190172671A1
公开(公告)日：2019-06-06
申请号：US16174416
申请日：2018-10-30
申请人： Qorvo US, Inc.
发明人： Nadim Khlat , Jonathan Hale Hammond
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H9/38 , H01H9/40 , H01H2059/0063
摘要： Microelectromechanical system (MEMS) switches that provide low contact resistance over a large number of open and close contact cycles are disclosed. A MEMS switch device may include a plurality of parallel MEMS switches with a first MEMS switch that is configured differently in such a manner to close first and/or open last during open and close cycles. In this regard, the first MEMS switch may experience increased contact resistance over a large number of open and close cycles while other MEMS switches maintain a low contact resistance. In certain embodiments, the first MEMS switch is controlled by a different control signal to open and close differently than the other MEMS switches. In certain embodiments, a common control signal controls a plurality of MEMS switches and the first MEMS switch is mechanically different such that it opens and closes differently than other MEMS switches.

67. 发明申请

US20100237738A1 MOVING A FREE-STANDING STRUCTURE BETWEEN HIGH AND LOW ADHESION STATES 有权
标题翻译：移动高粘度和低粘结状态之间的自由结构
公开(公告)号：US20100237738A1
公开(公告)日：2010-09-23
申请号：US12405758
申请日：2009-03-17
申请人： CHARLES GORDON SMITH , RICHARD L. KNIPE
发明人： CHARLES GORDON SMITH , RICHARD L. KNIPE
IPC分类号： H02N1/00
CPC分类号： H01H59/0009 , G11C23/00 , H01H1/0036 , H01H2001/0047 , H01H2059/0036 , H01H2059/0054 , H01H2059/0063
摘要： Embodiments disclosed herein generally solve a stiction problem in switching devices by using a series of pulses of force which take the switch from being strongly adhered to a landing electrode to the point where it is only weakly adhered. Once in the low adhesion state, the switch can then be pulled away from contact with a lower force provided by either the spring constant of the switch and/or the electrostatic forces resulting from low voltages applied to nearby electrodes.
摘要翻译：本文公开的实施例通过使用一系列将开关牢固地粘附到着陆电极到仅弱附着点的力的脉冲来解决开关器件中的静电问题。一旦处于低附着状态，则可以用由开关的弹簧常数提供的较小的力和/或施加到附近电极的低电压产生的静电力将开关拉离开接触。

68. 发明申请

US20080135385A1 Spring Structure For Mems Device 有权
标题翻译： Mems设备的弹簧结构
公开(公告)号：US20080135385A1
公开(公告)日：2008-06-12
申请号：US11718130
申请日：2005-10-24
申请人： Peter G. Steeneken , Jozef Thomas Martinus Van Beek , Theo Rijks
发明人： Peter G. Steeneken , Jozef Thomas Martinus Van Beek , Theo Rijks
IPC分类号： H01H57/00
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/18 , H01G5/40 , H01H1/24 , H01H2059/0063
摘要： A MEM device has a movable element (30), a pair of electrodes (e1, e2) to move the movable element, one electrode having an independently movable section (e3), resiliently coupled to the rest of the respective electrode to provide additional resistance to a pull in of the electrodes. This can enable a higher release voltage Vrel, and thus reduced risk of stiction. Also, a ratio of Vpi to Vrel can be reduced, and so a greater range of voltage is available for movement of the movable element. This enables faster switching. The area of the independently movable section is smaller than the rest of the electrode, and the spring constant of the resilient coupling is greater than that of the flexible support. Alternatively, the movable element can have a movable stamp section resiliently coupled and protruding towards the substrate to provide an additional resistance to pull in when it contacts the substrate.
摘要翻译： MEM器件具有可移动元件（30），一对电极（e 1，e 2），用于移动可移动元件，一个电极具有可独立移动的部分（e 3），弹性地联接到相应电极的其余部分提供对电极拉动的附加阻力。这可以实现更高的释放电压Vrel，从而降低静电的风险。此外，可以减小Vpi与Vrel的比率，因此更大的电压范围可用于可移动元件的移动。这样可以实现更快的切换。可独立移动部分的面积小于电极的其余部分，并且弹性联接件的弹簧常数大于柔性支撑件的弹簧常数。或者，可移动元件可以具有弹性耦合并朝向基板突出的可移动的印模部分，以在其接触基板时提供额外的拉入阻力。

69. 发明授权

US07283023B2 Electrostatic micro-switch for components with low operating voltages 失效
标题翻译：具有低工作电压的组件的静电微动开关
公开(公告)号：US07283023B2
公开(公告)日：2007-10-16
申请号：US10536632
申请日：2003-11-27
申请人： Philippe Robert
发明人： Philippe Robert
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01H2059/0063
摘要： The invention relates to an electrostatic micro-switch intended to connect two conductor paths (4, 5) placed on a support, the connection between the two conductor paths being created by means of a contact stud (6) fitted to the distortion means (3) made in insulating material and capable of distorting in relation to the support, under the influence of an electrostatic force generated by control electrodes, the contact stud connecting the ends (14, 15) of the two conductor paths (4, 5) when the distortion means are sufficiently distorted. The control electrodes are laid out on the distortion means and the support in two sets of electrodes, a first set of electrodes (101, 102, 33, 53) intended to generate a first electrostatic force to initiate the distorting of the distortion means, a second set of electrodes (101, 102, 7, 8) intended to generate a second electrostatic force to continue the distorting of the distortion means (3) so that the contact stud (6) connects the ends (14, 15) of the two conductor paths.
摘要翻译：本发明涉及一种旨在连接放置在支架上的两个导体路径（4,5）的静电微型开关，两个导体路径之间的连接是通过装配到失真装置（3）上的接触柱（6）产生的），其能够在由控制电极产生的静电力的影响下相对于所述支撑件变形，所述接触柱连接所述两个导体路径（4,5）的端部（14,15）失真手段充分扭曲。控制电极布置在失真装置和两组电极中的支撑件上，第一组电极（101,102,33,53）旨在产生第一静电力以启动失真装置的变形，第二组电极（101,102,7,8），用于产生第二静电力以继续变形装置（3）的变形，使得接触柱（6）连接两个端部（14,15）导体路径。

70. 发明申请

US20060226501A1 Collapsing zipper varactor with inter-digit actuation electrodes for tunable filters 有权
标题翻译：折叠拉链变容二极管与可调谐滤波器的数字间驱动电极
公开(公告)号：US20060226501A1
公开(公告)日：2006-10-12
申请号：US11092022
申请日：2005-03-29
申请人： Tsung-Kuan Allen Chou
发明人： Tsung-Kuan Allen Chou
IPC分类号： H01L29/84 , H01L21/00
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/18 , H01H2059/0063
摘要： According to one embodiment a microelectromechanical (MEMS) switch is disclosed. The MEMS switch includes a substrate, a plurality of actuation electrodes mounted on the substrate, a plurality of bottom electrodes mounted on the substrate, a capacitor having subcomponents mounted on the two or more bottom electrodes and a top bendable electrode mounted on the substrate. The top electrode collapses a first magnitude towards the actuation electrodes whenever a first voltage is applied to one or more of the actuation electrodes and collapses a second magnitude towards the actuation electrodes whenever a second voltage is applied to the actuation electrodes.
摘要翻译：根据一个实施例，公开了一种微机电（MEMS）开关。 MEMS开关包括基板，安装在基板上的多个致动电极，安装在基板上的多个底部电极，具有安装在两个或多个底部电极上的子部件的电容器和安装在基板上的顶部可弯曲电极。每当施加第一电压施加到一个或多个致动电极时，顶电极朝向致动电极塌缩第一大小，并且每当向致动电极施加第二电压时，向起动电极塌缩第二大小。

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