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    • 63. 发明授权
    • Foamed article of chlorinated vinyl chloride resin containing inorganic
material
    • 含有无机材料的氯化氯乙烯树脂发泡制品
    • US4980383A
    • 1990-12-25
    • US277721
    • 1988-11-30
    • Hisao ShimazuYoshihiro Kimura
    • Hisao ShimazuYoshihiro Kimura
    • C08J9/06C08K7/04C08J9/00
    • C08J9/06C08K7/04C08J2327/24
    • A foamed article of a chlorinated vinyl chloride resin containing an inorganic material, which contains an inorganic fibrous material in an amount of not less than 0.003 g per 1 cm.sup.3 of the article or inorganic particles in an amount of not less than 0.06 g per 1 cm.sup.3 of the article and which has dimensional retention of not less than 70% when the article is heated at 200.degree. C. for one hour and an expansion ratio of not less than 5 times, which is prepared by the process comprising the steps of (1) preparing a foamable composition by kneading a mixture comprising a chlorinated vinyl chloride resin, an inorganic material, a chemical blowing agent and a solvent, (2) filling a closable mold with the foamable composition, (3) heating the foamable composition under pressure in the mold to generate a gelled chlorinated vinyl chloride resin and to decompose said chemical blowing agent, (4) cooling the foamable composition in the mold to a temperature suitable for expansion, and (5) opening the mold to give a foamed article. The foamed article has excellent dimensional retention at high temperatures as well as excellent mechanical property and shows little calorie, smoke and poison gas.
    • 含有无机材料的氯化氯乙烯树脂的发泡制品,其含有不小于0.003g / 1cm 3的制品或无机颗粒的无机纤维材料,其量为不小于0.06g / 1cm 3 的物品,并且当制品在200℃下加热1小时,并且通过包括以下步骤(1)的方法制备的膨胀比不小于5倍时,尺寸保持不小于70% )通过捏合包含氯化氯乙烯树脂,无机材料,化学发泡剂和溶剂的混合物制备可发泡组合物,(2)用可发泡组合物填充可封闭的模具,(3)在压力下加热可发泡组合物 (4)将模具中的可发泡组合物冷却至适于膨胀的温度,以及(5)打开所述化学发泡剂, 模具以产生泡沫制品。 发泡制品在高温下具有优异的尺寸保持性以及优异的机械性能,并且显示出少量卡路里,烟雾和毒气。
    • 66. 发明授权
    • Pattern measuring method, pattern measuring apparatus, and program using same
    • 图案测量方法,图案测量装置和使用其的程序
    • US09104913B2
    • 2015-08-11
    • US13882147
    • 2011-10-14
    • Fumihiro SasajimaYoshihiro Kimura
    • Fumihiro SasajimaYoshihiro Kimura
    • G06K9/00H01J37/28G03F7/20H01L21/66
    • G06K9/00523G03F7/70625H01J37/28H01J2237/24578H01J2237/24592H01J2237/2817H01L22/12H01L2924/0002H01L2924/00
    • In measuring pattern with large process fluctuation, correct measurement cannot be carried out if noises, such as pattern that is not the subject to be measured, and dirt, are present in periphery of pattern to be measured in previously registered measurement region. Among the image data of sample, predetermined region aligned by pattern matching is set as region not to be measured that is excluded from subjects of pattern measurement. For example, in measuring pattern with large process fluctuation, only region including pattern with small process fluctuation is used in pattern matching, while in measuring the pattern, predetermined region, which was used in pattern matching and aligned, is set as region not to be measured. Stable pattern measurement can be easily carried out with respect to pattern with large process fluctuation, without being affected by region where measurement region and region not to be measured overlap with each other.
    • 在具有大的工艺波动的测量图形中,如果在先前记录的测量区域中的要测量的图案的周围存在噪声,例如不被测量的图案和污物,则不能进行正确的测量。 在样本的图像数据中,通过图案匹配对准的预定区域被设置为从图案测量对象排除的不被测量的区域。 例如,在具有大的工艺波动的测量图案中,在图案匹配中仅使用包括具有小的工艺波动的图案的区域,而在测量图案时,在图案匹配和对准中使用的预定区域被设置为不是 测量。 相对于具有大的工艺波动的图案,可以容易地进行稳定的图案测量,而不受测量区域和不被测量的区域彼此重叠的区域的影响。
    • 68. 发明授权
    • XY table actuator
    • XY工作台执行器
    • US08047095B2
    • 2011-11-01
    • US12095971
    • 2006-11-20
    • Toshiyuki AsoYoshihiro Kimura
    • Toshiyuki AsoYoshihiro Kimura
    • G05G11/00
    • F16C29/008F16C29/04H01L21/682Y10T74/20354
    • Provided is an XY table actuator that, while building-in a drive means for freely moving an object placed on a table within an XY-plane and positioning the object, can be significantly reduced in size and that helps to suppress an increase in table height. The actuator has: a stationary plate (2) having a receiving groove extending in an X-direction; a moving plate (5) having a receiving groove extending in a Y-direction; an intermediate plate (4) whose lower body is assembled to the receiving groove (20) of the stationary plate (2) through intermediation of rolling bodies (3), whose upper body is assembled to the receiving groove of the moving plate (5) through intermediation of rolling bodies (3), and which is movable in the X-direction with respect to the stationary plate, with the moving plate being movable in the Y-direction with respect to the intermediate plate; an X-drive means (6) for propelling the intermediate plate in the X-direction with respect to the stationary plate; and a Y-drive means (7) for propelling the moving plate in the Y-direction with respect to the intermediate plate, in which the intermediate plate is provided with receiving chambers (40, 41) for the X-drive means and the Y-drive means, respectively.
    • 提供了一种XY工作台致动器,其在建立在用于自由移动放置在XY平面内的工作台上的物体并且定位物体的驱动装置时,可以显着地减小尺寸,并且有助于抑制台面高度的增加 。 致动器具有:固定板(2),其具有沿X方向延伸的接收槽; 移动板(5),其具有在Y方向上延伸的接收槽; 中间板(4),其下体通过其上部组装到移动板(5)的接收槽的滚动体(3)组装到固定板(2)的接收槽(20) 通过滚动体(3)的相对于中间板在Y方向上可移动的相对于固定板可在X方向上移动的滚动体(3) 用于相对于固定板在X方向上推进中间板的X驱动装置(6); 以及用于相对于中间板在Y方向上推动移动板的Y驱动装置(7),其中中间板设置有用于X驱动装置的接收室(40,41)和Y -drive手段。