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    • 2. 发明申请
    • PATTERN MEASURING METHOD, PATTERN MEASURING APPARATUS, AND PROGRAM USING SAME
    • 图案测量方法,图案测量装置和使用其的程序
    • US20130216121A1
    • 2013-08-22
    • US13882147
    • 2011-10-14
    • Fumihiro SasajimaYoshihiro Kimura
    • Fumihiro SasajimaYoshihiro Kimura
    • G06K9/00
    • G06K9/00523G03F7/70625H01J37/28H01J2237/24578H01J2237/24592H01J2237/2817H01L22/12H01L2924/0002H01L2924/00
    • In measuring pattern with large process fluctuation, correct measurement cannot be carried out if noises, such as pattern that is not the subject to be measured, and dirt, are present in periphery of pattern to be measured in previously registered measurement region. Among the image data of sample, predetermined region aligned by pattern matching is set as region not to be measured that is excluded from subjects of pattern measurement. For example, in measuring pattern with large process fluctuation, only region including pattern with small process fluctuation is used in pattern matching, while in measuring the pattern, predetermined region, which was used in pattern matching and aligned, is set as region not to be measured. Stable pattern measurement can be easily carried out with respect to pattern with large process fluctuation, without being affected by region where measurement region and region not to be measured overlap with each other.
    • 在具有大的工艺波动的测量图形中,如果在先前记录的测量区域中的要测量的图案的周围存在噪声,例如不被测量的图案和污物,则不能进行正确的测量。 在样本的图像数据中,通过图案匹配对准的预定区域被设置为从图案测量对象排除的不被测量的区域。 例如,在具有大的工艺波动的测量图案中,在图案匹配中仅使用包括具有小的工艺波动的图案的区域,而在测量图案时,在图案匹配和对准中使用的预定区域被设置为不是 测量。 相对于具有大的工艺波动的图案,可以容易地进行稳定的图案测量,而不受测量区域和不被测量的区域彼此重叠的区域的影响。
    • 4. 发明授权
    • X-Y table actuator
    • X-Y工作台执行机构
    • US07880344B2
    • 2011-02-01
    • US12598885
    • 2008-05-27
    • Yoshihiro KimuraToshiyuki AsoMasashi Ishii
    • Yoshihiro KimuraToshiyuki AsoMasashi Ishii
    • H02K41/00
    • H02K41/03H02K2201/18
    • An X-Y table actuator is constituted by stacking a stationary plate, an intermediate plate, and a movable plate. Between the stationary plate and the intermediate plate, arranged is an X-direction drive means for driving the intermediate plate in an X-direction with respect to the stationary plate. Between the intermediate plate and the movable plate, on the other hand, there is provided a Y-direction drive means for moving the movable plate forward and backward in a Y-direction with respect to the intermediate plate. By stacking the stationary plate and the movable plate, which are formed into a substantially channel-shape, and the intermediate plate, which is formed into a substantially flat-shape on each other, a housing chamber for the X-direction drive means is formed between the stationary plate and the intermediate plate, and a housing chamber for the Y-direction drive means is formed between the intermediate plate and the movable plate.
    • X-Y工作台致动器由固定板,中间板和可动板的堆叠构成。 在固定板和中间板之间设置有用于相对于固定板沿X方向驱动中间板的X方向驱动装置。 另一方面,在中间板和可动板之间设置有用于相对于中间板在Y方向上前后移动可动板的Y方向驱动装置。 通过堆叠形成为大致通道形状的固定板和可动板以及彼此形成为大致平坦的形状的中间板,形成用于X方向驱动装置的容纳室 在中间板和可动板之间形成用于Y方向驱动装置的容纳室。
    • 10. 发明授权
    • Control method for hydrostatic type continuously variable transmission
    • 静压式无级变速器控制方法
    • US06343470B1
    • 2002-02-05
    • US09655425
    • 2000-09-05
    • Takehiko NanriYoshihiro KimuraNobuyuki YakigayaYoshihiro Yoshida
    • Takehiko NanriYoshihiro KimuraNobuyuki YakigayaYoshihiro Yoshida
    • F16D3102
    • F16D31/02F16D31/08F16H47/02F16H61/465F16H2059/366
    • An overtop position is to be established in a hydrostatic type continuously variable transmission, and an increase of the maximum speed and the maintenance of power performance are to be made compatible with each other. In a hydrostatic type continuously variable transmission, the angle of inclination of a movable swash plate is controlled in such a manner that a target Ne is calculated from both RC (riding condition) and throttle valve opening, then the target Ne thus calculated is compared with an actual Ne to determine a rotational direction and DUTY of a control motor. The operation of the control motor is controlled in accordance with the thus-determined data and angle information on the angle of the movable swash plate provided from an angle sensor. In constant speed vehicular traveling, the change gear ratio is set at TOP ratio and a shift is made to OVERTOP when predetermined overtop control conditions ((1) the current change gear ratio should be at TOP position, (2) the degree opening of a throttle valve should exceed a threshold value determined according to a vehicular speed, and (3) the engine speed should exceed a preset value) are satisfied, thereby increasing the maximum vehicle speed.
    • 要在静液压型无级变速器中建立顶板位置,并且使最大速度的提高和动力性能的维持彼此兼容。 在液压式无级变速器中,可动斜盘的倾斜角度以从RC(骑乘状态)和节气门开度两者计算出的目标Ne的方式进行控制,然后将如此计算的目标Ne与 确定控制电机的旋转方向和DUTY的实际Ne。 根据由角度传感器提供的可移动斜盘角度的这样确定的数据和角度信息来控制控制电动机的操作。 在恒速车辆行驶中,变速比设定为TOP比,并且当预定的顶部控制条件((1)当前变速比应在TOP位置时,转换为OVERTOP,(2)开度为 节流阀应超过根据车速决定的阈值,(3)发动机转速应超过预设值),从而提高车速。