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    • 69. 发明授权
    • Mask read-only memory having a fake select transistor
    • 具有假选择晶体管的掩模只读存储器
    • US08507997B2
    • 2013-08-13
    • US13050241
    • 2011-03-17
    • Seung-Jin YangYong-Tae KimHyuck-Soo YangJung-Ho Moon
    • Seung-Jin YangYong-Tae KimHyuck-Soo YangJung-Ho Moon
    • H01L21/70
    • H01L27/0203H01L27/112H01L27/11253
    • A mask read-only memory (ROM) includes parallel doping lines of a second conductivity type formed in a substrate of a first conductivity type, a first insulation film formed on the doping lines and the substrate, conductive pads fainted on the first insulation film, a second insulation film formed on the first insulation film and the conductive pads, parallel wires formed on the second insulation film extending perpendicular to the doping lines, contact plugs formed in the first insulation film that connect the doping lines to the conductive pads, and vias formed in the second insulation film that connect the conductive pads to the wires, wherein crossings of the doping lines and the wires define memory cells, contact plugs and vias are formed in memory cells of a first type, and at least one of the contact plug and via are missing from memory cells of a second type.
    • 掩模只读存储器(ROM)包括形成在第一导电类型的衬底中的第二导电类型的并行掺杂线,形成在掺杂线和衬底上的第一绝缘膜,位于第一绝缘膜上的导电焊盘, 形成在所述第一绝缘膜和所述导电焊盘上的第二绝缘膜,形成在垂直于所述掺杂线延伸的所述第二绝缘膜上的平行布线,形成在将所述掺杂线连接到所述导电焊盘的所述第一绝缘膜中的接触插塞,以及通孔 形成在所述第二绝缘膜中,所述第二绝缘膜将所述导电焊盘连接到所述导线,其中所述掺杂线和所述布线的交叉限定存储器单元,接触插塞和通孔形成在第一类型的存储器单元中,并且所述接触插塞 并且第二类型的存储器单元中缺少通孔。
    • 70. 发明授权
    • Unbalanced ion source
    • 不平衡离子源
    • US08072149B2
    • 2011-12-06
    • US12079978
    • 2008-03-31
    • Jeong-Ha ChoBon-Woong KooByung-Yeal YoonYong-Tae KimJeong-Ho Yoon
    • Jeong-Ha ChoBon-Woong KooByung-Yeal YoonYong-Tae KimJeong-Ho Yoon
    • H01J7/24
    • H01J37/08H01J27/08H01J37/04H01J37/3171H01J2237/03H01J2237/06308H01J2237/082
    • A dual unbalanced indirectly heated cathode (IHC) ion chamber is disclosed. The cathodes have different surface areas, thereby affecting the amount of heat radiated by each. In the preferred embodiment, one cathode is of the size and dimension typically used for IHC ionization, as traditionally used for hot mode operation. The second cathode, preferably located on the opposite wall of the chamber, is of a smaller size. This smaller cathode is still indirectly heated by a filament, but due to its smaller size, radiates less heat into the source chamber, allowing the ion source to operate in cold mode, thereby preserving the molecular structure of the target molecules. In both modes, the unused cathode is preferably biased so as to be at the same potential as the IHC, thus allowing it to act as a repeller.
    • 公开了一种双重不平衡间接加热阴极(IHC)离子室。 阴极具有不同的表面积,从而影响每个阴极的辐射量。 在优选实施例中,一个阴极具有通常用于IHC电离的尺寸和尺寸,如传统上用于热模式操作。 优选地,位于腔室的相对壁上的第二阴极具有较小的尺寸。 这种较小的阴极仍然被灯丝间接加热,但是由于其尺寸较小,辐射较少的热量进入源室,从而允许离子源以冷模式运行,从而保持目标分子的分子结构。 在两种模式中,未使用的阴极优选被偏压以与IHC处于相同的电位,从而允许其用作推斥器。