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    • 62. 发明申请
    • Salt suitable for an acid generator and a chemically amplified resist composition containing the same
    • 适用于酸产生剂的盐和含有它的化学放大抗蚀剂组合物
    • US20070100096A1
    • 2007-05-03
    • US11516644
    • 2006-09-07
    • Yukako HaradaIsao YoshidaYoshiyuki Takata
    • Yukako HaradaIsao YoshidaYoshiyuki Takata
    • C08F4/06C07C309/12
    • C07C309/17C07C381/12C07C2601/14
    • The present invention provides a salt of the formula (I): wherein X represents divalent or trivalent residue of acyclic hydrocarbon having 1 to 30 carbon atoms or divalent or trivalent residue of hydrocarbon having 3 to 30 carbon atoms which contains monocyclic or bicyclic ring, wherein —CH2— in the hydrocarbon may be substituted with —O— and one or more hydrogen atom in X is optionally substituted with alkoxy group having 1 to 6 carbon atoms, perfluoroalkyl group having 1 to 4 carbon atoms, hydroxyalkyl group having 1 to 6 carbon atoms, hydroxyl group or cyano group; Q1 and Q2each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; A+ represents organic counter ion; Y represents hydroxyl group, cyano group or methoxy group; and n shows 1 or 2. The present invention also provides a chemically amplified resist composition comprising the salt of the formula (I).
    • 本发明提供式(I)的盐:其中X表示碳原子数1〜30的无环烃的二价或三价残基或含有单环或双环的碳原子数3〜30的二价或三价残基,其中, 在烃中的-CH 2 - 2可以被-O-取代,X中的一个或多个氢原子任选被具有1至6个碳原子的烷氧基,具有1至4个碳原子的全氟烷基取代 ,具有1-6个碳原子的羟基烷基,羟基或氰基; Q 1和Q 2各自独立地表示氟原子或具有1至6个碳原子的全氟烷基; A + 代表有机抗衡离子; Y表示羟基,氰基或甲氧基; 并且n表示1或2.本发明还提供包含式(I)的盐的化学放大抗蚀剂组合物。
    • 63. 发明申请
    • Salt suitable for an acid generator and a chemically amplified resist composition containing the same
    • 适用于酸产生剂的盐和含有它的化学放大抗蚀剂组合物
    • US20070027336A1
    • 2007-02-01
    • US11390319
    • 2006-03-28
    • Isao YoshidaYukako HaradaSatoshi YamaguchiNobuo Ando
    • Isao YoshidaYukako HaradaSatoshi YamaguchiNobuo Ando
    • C07C309/51
    • C07C309/17C07C2603/74
    • The present invention provides a salt of the formula (L) A salt of the formula (L): wherein Q represents —CO— group or —C(OH)— group; ring X represents monocyclic or polycyclic hydrocarbon group having 3 to 30 carbon atoms in which a hydrogen atom is substituted with a hydroxyl group at Q position when Q is —C(OH)— group or in which two hydrogen atoms are substituted with ≡O group at Q position when Q is —CO— group, and at least one hydrogen atom in the monocylic or polycyclic hydrocarbon group may optionally be substituted with alkyl group having 1 to 6 carbon atom, alkoxy group having 1 to 6 carbon atom, perfluoroalkyl group having 1 to 4 carbon atoms, hydroxyalkyl group having 1 to 6 carbon atoms, hydroxyl group or cyano group; R10 and R20 each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; and A+ represents organic counter ion. The present invention also provides a chemically amplified resist composition comprising the salt of the formula (L).
    • 本发明提供式(L)的盐式(L)的盐:其中Q表示-CO-基或-C(OH) - 基; 环X表示当Q为-C(OH) - 基团或其中两个氢原子被≡O基团取代时,其中氢原子被Q位羟基取代的具有3-30个碳原子的单环或多环烃基 在Q为-CO-基的Q位置,单环或多环烃基中的至少一个氢原子可以任选被具有1至6个碳原子的烷基,具有1至6个碳原子的烷氧基,具有1至6个碳原子的烷氧基, 1至4个碳原子,具有1至6个碳原子的羟基烷基,羟基或氰基; R 10和R 20各自独立地表示氟原子或具有1至6个碳原子的全氟烷基; 而A +表示有机抗衡离子。 本发明还提供了包含式(L)的盐的化学放大抗蚀剂组合物。
    • 70. 发明授权
    • Insulated gate type semiconductor apparatus with a control circuit
    • 具有控制电路的绝缘栅型半导体装置
    • US06385025B2
    • 2002-05-07
    • US09797983
    • 2001-03-05
    • Kozo SakamotoIsao Yoshida
    • Kozo SakamotoIsao Yoshida
    • H02H300
    • H03K17/0828H03K17/0822H03K2017/0806
    • A semiconductor apparatus such as a power MOSFET, an IGBT, or the like is provided having therein a control circuit such as an over-heating protection circuit and an over-current protection circuit, which realizes both of high-speed operation and prevention of erroneous operation caused by a parasitic device. To prevent erroneous operation, the control circuit controls so that when the voltage of a gate terminal is positive relative to that of a source terminal, a first switch circuit is turned on, when the voltage of the gate terminal is negative relative to that of the source terminal, a second switch circuit is turned on, and when the gate terminal and the source terminal have an almost same potential and a drain terminal has a high potential, the second switch circuit is turned on, thereby reducing leakage current from the drain terminal to the gate terminal.
    • 提供诸如功率MOSFET,IGBT等的半导体装置,其中具有诸如过热保护电路和过电流保护电路的控制电路,其实现高速操作和防止错误 由寄生器件引起的操作。 为了防止错误操作,控制电路进行控制,使得当栅极端子的电压相对于源极端子的电压为正时,第一开关电路导通,当栅极端子的电压相对于栅极端子的电压为负时 源极端子,第二开关电路导通,并且当栅极端子和源极端子具有几乎相同的电位且漏极端子具有高电位时,第二开关电路导通,从而减少漏极端子的漏电流 到门终端。